Type: Rodless Cylinder, Cylinder Inner Diameter(Ø): 25, Stroke(mm): 450, Max. Load Mass (Horizontal Mounting)(kg): 1~4.9, Table Size Length L(mm): 70, Table Material: [Aluminum] Aluminum Alloy, Rodless Cylinder Joint Type: Magnetic, Guide: [Guideless] Direct mounted, Table Size Width W(mm): 44, Table Size Height H(mm): 44, Table Surface Treatment: [Anodize] Hard Anodize, Environment: General

Type: Rodless Cylinder, Cylinder Inner Diameter(Ø): 25, Stroke(mm): 450, Max. Load Mass (Horizontal Mounting)(kg): 1~4.9, Table Size Length L(mm): 70, Table Material: [Aluminum] Aluminum Alloy, Rodless Cylinder Joint Type: Magnetic, Guide: [Guideless] Direct mounted, Table Size Width W(mm): 44, Table Size Height H(mm): 44, Table Surface Treatment: [Anodize] Hard Anodize, Environment: General

Type: Rodless Cylinder, Cylinder Inner Diameter(Ø): 25, Stroke(mm): 500, Max. Load Mass (Horizontal Mounting)(kg): 1~4.9, Table Size Length L(mm): 70, Table Material: [Aluminum] Aluminum Alloy, Rodless Cylinder Joint Type: Magnetic, Guide: [Guideless] Direct mounted, Table Size Width W(mm): 44, Table Size Height H(mm): 44, Table Surface Treatment: [Anodize] Hard Anodize, Environment: General

Type: Rodless Cylinder, Cylinder Inner Diameter(Ø): 25, Stroke(mm): 500, Max. Load Mass (Horizontal Mounting)(kg): 1~4.9, Table Size Length L(mm): 70, Table Material: [Aluminum] Aluminum Alloy, Rodless Cylinder Joint Type: Magnetic, Guide: [Guideless] Direct mounted, Table Size Width W(mm): 44, Table Size Height H(mm): 44, Table Surface Treatment: [Anodize] Hard Anodize, Environment: General

Type: Rodless Cylinder, Cylinder Inner Diameter(Ø): 25, Stroke(mm): 500, Max. Load Mass (Horizontal Mounting)(kg): 1~4.9, Table Size Length L(mm): 70, Table Material: [Aluminum] Aluminum Alloy, Rodless Cylinder Joint Type: Magnetic, Guide: [Guideless] Direct mounted, Table Size Width W(mm): 44, Table Size Height H(mm): 44, Table Surface Treatment: [Anodize] Hard Anodize, Environment: General

Type: Rodless Cylinder, Cylinder Inner Diameter(Ø): 25, Stroke(mm): 530, Max. Load Mass (Horizontal Mounting)(kg): 1~4.9, Table Size Length L(mm): 70, Table Material: [Aluminum] Aluminum Alloy, Rodless Cylinder Joint Type: Magnetic, Guide: [Guideless] Direct mounted, Table Size Width W(mm): 44, Table Size Height H(mm): 44, Table Surface Treatment: [Anodize] Hard Anodize, Environment: General

Type: Rodless Cylinder, Cylinder Inner Diameter(Ø): 25, Stroke(mm): 600, Max. Load Mass (Horizontal Mounting)(kg): 1~4.9, Table Size Length L(mm): 70, Table Material: [Aluminum] Aluminum Alloy, Rodless Cylinder Joint Type: Magnetic, Guide: [Guideless] Direct mounted, Table Size Width W(mm): 44, Table Size Height H(mm): 44, Table Surface Treatment: [Anodize] Hard Anodize, Environment: General

Type: Rodless Cylinder, Cylinder Inner Diameter(Ø): 25, Stroke(mm): 600, Max. Load Mass (Horizontal Mounting)(kg): 1~4.9, Table Size Length L(mm): 70, Table Material: [Aluminum] Aluminum Alloy, Rodless Cylinder Joint Type: Magnetic, Guide: [Guideless] Direct mounted, Table Size Width W(mm): 44, Table Size Height H(mm): 44, Table Surface Treatment: [Anodize] Hard Anodize, Environment: General

Type: Rodless Cylinder, Cylinder Inner Diameter(Ø): 25, Stroke(mm): 600, Max. Load Mass (Horizontal Mounting)(kg): 1~4.9, Table Size Length L(mm): 70, Table Material: [Aluminum] Aluminum Alloy, Rodless Cylinder Joint Type: Magnetic, Guide: [Guideless] Direct mounted, Table Size Width W(mm): 44, Table Size Height H(mm): 44, Table Surface Treatment: [Anodize] Hard Anodize, Environment: General

Type: Rodless Cylinder, Cylinder Inner Diameter(Ø): 25, Stroke(mm): 700, Max. Load Mass (Horizontal Mounting)(kg): 1~4.9, Table Size Length L(mm): 70, Table Material: [Aluminum] Aluminum Alloy, Rodless Cylinder Joint Type: Magnetic, Guide: [Guideless] Direct mounted, Table Size Width W(mm): 44, Table Size Height H(mm): 44, Table Surface Treatment: [Anodize] Hard Anodize, Environment: General

Type: Rodless Cylinder, Cylinder Inner Diameter(Ø): 25, Stroke(mm): 700, Max. Load Mass (Horizontal Mounting)(kg): 1~4.9, Table Size Length L(mm): 70, Table Material: [Aluminum] Aluminum Alloy, Rodless Cylinder Joint Type: Magnetic, Guide: [Guideless] Direct mounted, Table Size Width W(mm): 44, Table Size Height H(mm): 44, Table Surface Treatment: [Anodize] Hard Anodize, Environment: General

Type: Rodless Cylinder, Cylinder Inner Diameter(Ø): 25, Stroke(mm): 700, Max. Load Mass (Horizontal Mounting)(kg): 1~4.9, Table Size Length L(mm): 70, Table Material: [Aluminum] Aluminum Alloy, Rodless Cylinder Joint Type: Magnetic, Guide: [Guideless] Direct mounted, Table Size Width W(mm): 44, Table Size Height H(mm): 44, Table Surface Treatment: [Anodize] Hard Anodize, Environment: General

Type: Rodless Cylinder, Cylinder Inner Diameter(Ø): 25, Stroke(mm): 700, Max. Load Mass (Horizontal Mounting)(kg): 1~4.9, Table Size Length L(mm): 70, Table Material: [Aluminum] Aluminum Alloy, Rodless Cylinder Joint Type: Magnetic, Guide: [Guideless] Direct mounted, Table Size Width W(mm): 44, Table Size Height H(mm): 44, Table Surface Treatment: [Anodize] Hard Anodize, Environment: General

Type: Rodless Cylinder, Cylinder Inner Diameter(Ø): 25, Stroke(mm): 850, Max. Load Mass (Horizontal Mounting)(kg): 1~4.9, Table Size Length L(mm): 70, Table Material: [Aluminum] Aluminum Alloy, Rodless Cylinder Joint Type: Magnetic, Guide: [Guideless] Direct mounted, Table Size Width W(mm): 44, Table Size Height H(mm): 44, Table Surface Treatment: [Anodize] Hard Anodize, Environment: General

Type: Rodless Cylinder, Cylinder Inner Diameter(Ø): 25, Stroke(mm): 900, Max. Load Mass (Horizontal Mounting)(kg): 1~4.9, Table Size Length L(mm): 70, Table Material: [Aluminum] Aluminum Alloy, Rodless Cylinder Joint Type: Magnetic, Guide: [Guideless] Direct mounted, Table Size Width W(mm): 44, Table Size Height H(mm): 44, Table Surface Treatment: [Anodize] Hard Anodize, Environment: General

HRX-OM-Z002

Ensure there is enough space for maintenance. 500 mm or more 300 mm or more 300 mm or 800 mm or more 800 mm or more more Fig. 3-5 Installation space HRLE Series 3.2Installation 3-7 HRX-OM-Z002 Chapter 3 Transport and Set Up 3.3 Installation Procedure 3.3.1 Installation procedure Install the product on a level, vibration-free floor.

High Vacuum L Type Valve

H4 S y m b o l Initial power / Power 100 VAC 200/40 200/50 200 VAC 800/40 800/50 consumption (W) Heater assembly number XLA25-60S-1 XLA25-60S-2 XLA25-60S-2 No. of heater assemblies 1 pc. 1 pc. 1 pc. H5 Initial power / Power 100 VAC 200/40 400/70 400/80 200 VAC 800/40 1600/80 1600/80 consumption (W) Note 1) Initial power and power consumption are nominal values.

XL-OMY0003

XLH-25 XLH-40 XLH-50 AC90240V XLA25-60S-1 XLA25-60S-1 1 1 H4 AC100V 200/40 200/50 / AC200V 800/40 800/50 XLA25-60S-1 XLA25-60S-2 XLA25-60S-2 1 1 1 H5 AC100V 200/40 400/70 400/80 / AC200V 800/40 1600/80 1600/80 1 216 PTC 200V PTC 200 150 100V PTC 0 5 10 15 20 25 30 30 ( 7 XL-OMY0003 . <> 1 Ass 'y () ( ) < SUS304> 7 (SUS304) () () 3 < SUS316L> 6 (SUS316L) <

JXCx-OMT0023

Do not change this value by any means. 000h PC31 200 PC32 300 PC33 500 PC34 800 13 78 13. POSITIONING MODE No.

A_HEC-OM-I009

degC Fig. 6-1 Cooling capacity 2) Heating capacity Fluid: water Fluid: water 1000 2000 900 Ambient 35C 1800 Ambient 30C 800 1600 Ambient 25C Heating capacity W Heating capacity W 700 1400 600 Ambient 20C 1200 500 Ambient 15C 1000 400 800 300 Ambient 15C 600 200 400 100 0 200 10 15 20 25 30 35 40 45 50 10 15 20 25 30 35 40 45 50 Circulating fluid temperature degC Fluid temperature degC Fig