Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

ARP20(K)/30(K)/40(K) ARP20K/30K/40K (With backflow function) r q 1 I N e C SM 2 OUT A A IN OUT t A-A BLEED w y Note Component Parts Material No.

PF3A7xxH-L.eng

Installation Direct mounting Install the product with 4 screws suitable for the product number according to the required tightening torque. [ 600] 600 L/min (PF3A712H) Reset the accumulated flow.

Fan Type Ionizer

900 1200 Installation distance [mm] mm At maximum air flow (air flow scale: 4) 300 mm 300 0 4s 6s 8s 0 2s -300 mm -300 0 300 600 900 1200 Installation distance [mm] mm At minimum air flow (air flow scale: 1) 300 mm 300 6s 0 4s 8s 0 2s -300 mm -300 0 300 600 900 1200 Installation distance [mm] mm 18 - Doc. no.

ARJ310

0 100 200 300 400 500 600 0 100 200 300 400 500 600 Flow rate l/min (ANR) Flow rate l/min (ANR) Flow rate l/min (ANR) Pressure Characteristics Conditions: Upstream pressure 0.7MPa Downstream pressure 0.2MPa Flow rate Q = 20l/min (ANR) 0.30 Downstream pressure MPa 0.25 Starting point 0.20 0.15 0.10 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 Upstream pressure MPa Construction ARJ310-01 ARJF310F-01 y

ARJ1020F

Inch size ARJ310F-N01 5/32" 1/4" 03 07 14-4-11 9 Series ARJ310 Flow Characteristics Inlet pressure: 0.7 MPa ARJ310-01 ARJ310F-01-04 ARJ310F-01-06 0.7 0.7 0.7 0.6 0.6 0.6 Outlet pressure (MPa) Outlet pressure (MPa) Outlet pressure (MPa) 0.5 0.5 0.5 0.4 0.4 0.4 0.3 0.3 0.3 0.2 0.2 0.2 0.1 0.1 0.1 0.0 0.0 0.0 0 100 200 300 400 500 600 0 100 200 300 400 500 600 0 100 200 300 400 500 600 Flow

Speed Controller: Standard Type Series AS In-line Type

2 U seal Retaining ring for hole type C HNBR Tool steel y !

Miniature Regulator Series ARJ310

0 100 200 300 400 500 600 0 100 200 300 400 500 600 Flow rate l/min (ANR) Flow rate l/min (ANR) Flow rate l/min (ANR) Pressure Characteristics Conditions: Upstream pressure 0.7MPa Downstream pressure 0.2MPa Flow rate Q = 20l/min (ANR) 0.30 Downstream pressure MPa 0.25 Starting point 0.20 0.15 0.10 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 Upstream pressure MPa Construction ARJ310-01 ARJF310F-01 y

Speed Controller: Standard Type Elbow Type (Metal Body) Series AS

AS500/600 AS420 AS800/900 Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) Number of needle rotations Number of needle rotations Number of needle rotations 530 Series AS Speed Controller: Standard Type Large Flow In-line Type Construction: AS420/500/600 Construction: AS800/900 AS TMH ASD AS AS AS-FE

LFE-OMZ0012

The proof pressure is double the operating pressure range. -28No.LFE*-OMZ0012 Analogue output Flow/Analogue output Output A B C Voltage output 1 V 1.1 V 5 V C Current output 4 mA 4.4 mA 20 mA Rated flow [L/min] Model B Minimum Maximum A LFE1 0.5 20 LFE2 2.5 100 Flow rate 0 Minimum Maximum rated flow LFE3 5 200 rated flow Out of range -29No.LFE*-OMZ0012 Dimensions 2XPort size Note) The electrical

ITV

Count Pressure characteristics Flow characteristics Supply pressure: 0.2MPa Set pressure: 0.05MPa Relief flow characteristics Supply pressure: 0.2MPa 0.15 1.0 0.25 Output deviation factor (%F.S.) 0.20 0.5 Set pressure (MPa) Set pressure (MPa) 0.10 Set point 0.15 0.0 0.10 0.05 0.5 0.05 1.0 0 200 400 600 0.00 0.0 0.1 0.2 0.3 0 200 400 800 600 Flow rate (l/min (ANR)) Flow rate (l/min (ANR))

VEX-OMY0001

-2No.VEX-OMY0001 / 1 1.5 *3) *3)1 1 () No.VEX-OMY0001 -3- VEX3 3 / / 1 VEX3 DC () () , () ,ON OFF () C-R ( )C-R ( ) DC VEX3121, VEX3122, VEX3221, VEX3222, VEX3 2% VEX3321, VEX3322, VEX3421, VEX3422 VEX3 , VEX3501, VEX3502, VEX3701, VEX3702, 3% VEX3901, VEX3902 AC 15% (SSRTRIAC )AC 1) (C-R ) OFF 2) () 4 No.VEX-OMY0001 VEX3 / / 1) 1 2) 1V 1) M5 0 1/6 1/4

Non-rotating Double Power Cylinder Series MGZ ø40, ø50, ø63

Standard strokes Bore size (mm) Standard stroke (mm) Long stroke (mm) 75, 100, 125, 150, 175 350, 400, 450, 500, 600 40, 50, 63 200, 250, 300 700, 800, 900, 1000 Intermediate strokes and strokes of 75mm or less can also be manufactured.

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

mm 1000 mm 1500 mm 2000 mm 3000 mm 10 mm (Semi-standard) 52-SY9000 Manual override Non-locking push type Push-turn locking slotted type Push-turn locking lever type Nil D E L type has 300 mm and 600 mm only. 3 C ATEX Compliant 5 Port Solenoid Valve Series 52-SY Safety Instructions Specifications 1) This product is not suitable for Zone 0.

Direct Operated Precision Regulator Series ARP20/30/40  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

VCHR 12 2 1 2 1 2 1 1 ITV 2 1 2 1 2 1 2 1 2 1 L 2 2 1 L L L IC AFM AF ARP AFM AF ARP 10 ITVX c Control a clamping force by precise pressure control. d Release residual pressure with the backflow function. Residual pressure circuit Also exhausts residual pressure completely. Sensitivity within 0.2% F.S. allows more precise pressure adjustment. Repeatability within 1% F.S.

Direct Operated Precision Regulator ARP20/30/40 Series  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

SRF 12 2 1 2 1 2 1 1 ITV 2 1 2 1 2 1 2 1 2 1 L 2 2 1 L L L IC AFM AF ARP AFM AF ARP 10 ITVH c Control a clamping force by precise pressure control. d Release residual pressure with the backflow function. Residual pressure circuit Also exhausts residual pressure completely. Sensitivity within 0.2% F.S. allows more precise pressure adjustment. Repeatability within 1% F.S.

Speed Controller with One-touch Fitting

Note 2) Inch size 1/8" 5/32" 1/4" 5/16" 1/8" 5/32" 1/4" 5/16" 3/8" 1/4" 5/16" 3/8" 3/8" 1/2" Free flow 0.4 0.6 0.6 0.7 1.0 1.3 1.5 1.6 1.7 2.5 4.4 4.8 C values: Sonic conductance dm3/(sbar) Controlled flow 0.4 0.7 0.8 0.6 0.9 1.3 2.1 2.4 3.3 4.4 4.9 Free flow 0.2 0.3 0.3 0.4 0.4 0.3 0.3 b values: Critical pressure ratio Controlled flow 0.2 0.3 0.3 0.3 0.3 Note 1) C and b values are for controlled

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100

350, 400, 450, 500, 600, 700, 800, 900, 1000 63 350, 400, 450, 500, 600, 700, 800, 900, 1000, 1100 80 350, 400, 450, 500, 600, 700, 800, 900, 1000, 1100, 1200 100 350, 400, 450, 500, 600, 700, 800, 900, 1000, 1100, 1200, 1300 Intermediate strokes and short strokes other than the above are produced upon receipt of order.

Magnet: D (Built-in), Mounting: F (Front Flange), Style: A (Non-lube Air Cushion), Bore Size: 50mm, Stroke: 100mm, Rod Boot: w/o Rod Boot, Lock Position: H (Rear Lock), Release of Manual: N (Non-locking Type)

Magnet: D (Built-in), Mounting: F (Front Flange), Style: A (Non-lube Air Cushion), Bore Size: 50mm, Stroke: 125mm, Rod Boot: w/o Rod Boot, Lock Position: H (Rear Lock), Release of Manual: N (Non-locking Type)

Magnet: D (Built-in), Mounting: F (Front Flange), Style: A (Non-lube Air Cushion), Bore Size: 50mm, Stroke: 200mm, Rod Boot: w/o Rod Boot, Lock Position: H (Rear Lock), Release of Manual: N (Non-locking Type)