1.1

Return port 0.0 0.0 0 0 0 10 20 0 10 20 30 Lifting height [m] Pressure [MPa] Pressure [MPa] Lifting height [m] Circulating fluid flow (l/min) Circulating fluid flow (l/min) HRG005-A, HRG005-W Facility Water Required Flow Rate 0.5 50 0.4 40 50 Outlet port [60 Hz] 0.3 30 Outlet port [50 Hz] 0.2 20 Return port HRG015-W 0.1 10 40 0 0.0 0 10 20 40 30 HRG010-W Pressure [MPa] Lifting height [m]

OMR0031

0 0 0 0 0 Caution In relative positioning the deviation will remain.

Precision Regulator

9 @0 !1 @0 @0 !9 @5 @6 !9 !9 @6 ARJ @6Fixed throttle SUP side passage OUT side passage SUP side passage OUT side passage AR425 to 935 SUP side passage OUT side passage i i i ARX AMR !0 !0 !0 Setting knob ARM q Diaphragm (A) q w !1 q !1 ARP Steel ball w !1 Bleed !2 Nozzle IR-A @2 w !2 Bleed Diaphragm (B) r !3 @4 Bleed Exhaust u IR IR !7 @3 !2 !5 !

Ionizer

L/min (ANR) per nozzle) Air purge: Yes Supply pressure: 0.5 MPa (20 L/min (ANR) per nozzle) Air purge: Yes 20 15 Discharge time (s) Discharge time (s) 15 10 1 Hz/60 Hz Static Neutralization Equipment 10 1 Hz/60 Hz 5 5 Sensing DC Sensing DC 0 0 500 1000 1500 2000 0 0 500 1000 1500 2000 Distance (mm) Distance (mm) Alphabetical Index Length Measuring/ Counter Supply pressure: 0.7 MPa (30 L/

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

0 !1 !2 !3 !4 !5 !6 !7 !8 !9 @0 @1 @2 @3 @4 @5 @6 @7 Description No. Part no.

MG

9 i @0 @4 !0 y @3 !2 !0 r o @2 e !

Space Saving Vacuum Ejector/Vacuum Pump System Series ZQ

0 Combinations q to !

Air Slide Table Series MXS

0 !6 !2 !3 !

LEJ-OM002xx

Initial value Recommended value Regenerative option PA02 0 0(Non) / 0002(LEC-MR-RB-032) / 0003(LEC-MR-RB-12) (+Counter motors side) 0 (+Counter motors side) Rotation direction selection PA14 0 1 Adaptive tuning mode PB01 0 0 0002 0 Load to motor inertia moment ratio PB06 7 7 50 Machine resonance suppression filter 1 PB13 4500 4500 400 4500 Notch shape selection 1 PB14 0 0 0030 0 Parameter

Electric Actuator / Low profile slider type

Condition 1) 30mm position Step no.0 Step no.0 (Move Method: Relative) Condition 2) 30mm position Step no.1 Step no.1 (Move Method: Relative) mm/s mm mm/s2 mm/s2 % % mm/s % mm mm mm 0 Relative 100 10.00 3000 3000 0 0 0 100 10.00 20.00 1.00 1 100 3000 3000 0 0 0 100 Relative -10.00 10.00 20.00 1.00 Position 10(INC) c Attainment point: 50[mm] 0 10 20 30 40 50 Stroke [mm] Position -10(INC

Cylinder with Lock

0 4 2 0 0 3.5 1.5 5.5 3.5 3 1 40 9 9 5 5 5.5 5.5 10.5 10.5 0 0 3 3 0 0 2.5 2.5 4.5 4.5 2 2 50 10 9 6 5 6.5 5.5 11.5 10.5 0 0 4 3 0 0 3.5 2.5 5.5 4.5 3 2 63 10 9 6 5 6.5 5.5 11.5 10.5 0 0 4 3 0 0 3.5 2.5 5.5 4.5 3 2 80 14.5 11.5 10.5 7.5 11 8 16 13 4.5 1.5 8.5 5.5 4.5 1.5 8 5 10 7 7.5 4.5 100 14 12 10 8 10.5 8.5 15.5 13.5 4 2 8 6 4 2 7.5 5.5 9.5 7.5 7 5 * Models with rubber bumper have different

Rotary Actuator/Vane Style Series CRB1

n ti n ti a g g n o a r ti a t e a e o n t t o g o r 1 Key 1 e r r y 0 9 y y e 2 0 + 4 0 0 e e K 8 + 4 0 K K 0 + 4 0 + 4 0 0 0 Key Key 1 (40) e Key g n a r n o ti a t o r y e K (85) (40) (40) A port B port A port B port A port B port A port B port Direct Mounting of Body L 4 screws L Screw Model CRB1BW 50 CRB1BW 63 CRB1BW 80 CRB1BW100 M 6 48 M 8 52 M 8 60 M10 80 118 Series CRB1 Rotary

Hydraulic Filters

x 2 4 x M16 x 2 20 (3/4B) 145 56 100 2 x M10 x 1.5 18 9.7 108 182 330 73 255 0 25 (1B) 32 (1 1/4B) 150 180 120 108 126 98 4 x M12 x 1.75 56 70 51 100 120 90 260 361 152 435 545 285 87 94 62 347 455 214 50 60 0 0 22 12.8 40 (1 1/2B) 50 (2B) 0 4 x M12 x 1.75 2 x M10 x 1.5 22 18 20.4 6.9 0 1 0 1 0 1 0 1 0 1 15 (1/2B) 4 x M10 x 1.5 4 x M10 x 1.5 4 x M12 x 1.75 4 x M12 x 1.75 4 x M16 x 2

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

0 !1 !2 !3 !4 !5 !6 !7 !8 !9 @0 @1 @2 @3 Kit no.

HRX-OM-X084

0 to 300 INP1DELAY SEC screen No.21 "AL25Contact input signal detection 1" OFF detection timer 0 0 to 10 INP1OVER SEC screen No.22 screen Changing of "AL26Contact input signal detection 2" FLT OFF/WRN/FLT INP2ALARM No.23 "AL26Contact input signal detection 2" reading delay timer 0 0 to 300 INP2DELAY SEC screen No.24 "AL26Contact input signal detection 2" OFF detection timer 0 0 to 10 INP2OVER

Actuator Position Sensor

(12) 0 R/W Device Access Lock Y Refer to device access lock (P.19) 0x000C 0x0010 (16) 0 R Vendor Name N SMC Corporation 0x0011 (17) 0 R Vendor Text N www.smcworld.com 0x0012 (18) 0 R Product Name N Example: D-MP025A 0x0013 (19) 0 R Product ID N Example: D-MP025A 0x0014 (20) 0 R Product Text N Actuator Position Sensor (21) 0 R Serial Number N 8 octets fixed character string 0x0015 (22) 0

Stopper Cylinder

8 @0 u i !8 !9 !6 @0 o 20 32, 40, 50 w @2 @1 !5 !4 t i i u !8 !9 w @2 u !5 !4 y q !9 @0 @1 t e @0 !6 !6 !8 o y q e o Double acting with spring loaded (B) !0 20, 32, 40, 50 12, 16 !0 Single acting / spring extend (T) !1 !2 !0 12, 16 20, 32, 40, 50 !0 !3 Component Parts No.

MXS Series Air Slide Table

Stroke length tolerance mm 1 MPa=10.1972 kgf /cm2 Option Adjustable stroke range 0 to 5mm (0 to 15mm and 0 to 25mm optional) Adjuster at extension end (AS) With stroke adjuster Adjuster at retraction end (AT) Adjuster at both ends (A) Stroke adjuster (Option) Adjuster at extension end (BS) Shock absorber is not available for MXS6.

5 Port Solenoid Valve

COM Terminal block marking Model A COM B T VQC 4 5 10 0 1 A side COM VQC 4 5 20 0 1 A side COM B side VQC 4 5 3 4 5 6 0 0 1 A side COM B side Note 1) There is no polarity. It can also be used as COM. Note 2) The sub-plate is double wired even for the VQC4 5100 1.

I/O Configurator (NFC version)

Setting range: 0 to 128 points (0 to 16 bytes). Increase or decrease by 16 points. Set the number of outputs which can be controlled by the wireless master unit. Occupied points for the module output Setting range: 0 to 128 points (0 to 16 bytes). Increase or decrease by 16 points. The module output point includes the number of points of the valve manifold output.