PFxx-OMS0001CN

No.PF-OMS0001CN-A // PFMC7501 PFMC7102 PFMC7202 2 10 11 12 14 15 17 18 [] 22 OU1OUT2 {3 ] 23 [] 25 26 F0 27 F1 OUT1 29 F2 OUT2 37 F3 42 F10 43 F20 47 F22 48 F30 49 F31 50 F80 OFF 51 F81 52 F82 53 F90 54 F98 56 F99 57 58 62 63 65 66 66 69 71 -1No.PF-OMS0001CN-A (ISO/IEC)(JIS) *1) *2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO

Digital Flow Switch ( compatible)

Bit offset Item Notes 0 OUT1 output 0: OFF 1: ON 1 OUT2 output 0: OFF 1: ON 8 Flow diagnosis 0: Within range 1: Out of range (HHH/LLL). 9 Fixed output 0: Normal output 1: Fixed output (for checking output) 15 Error diagnosis 0: Error is not generated 1: Error is generated 16 to 31 Flow measurement value With sign: 16 bit Bit offset 31 30 29 28 27 26 25 24 23 22 21 20 19 18 17 16 Item Flow

PFxx-OMX0002

text www.smcworld.com 0x0011 0x0012 (18) 0 R Product name Example: PF3A703H-xx-Lx-xxx 0x0013 (19) 0 R Product ID Example: PF3A703H-xx-Lx-xxx (20) 0 R Product text FloW sensor 0x0014 Initial value is indicated as 8-digit. 16 octets fixed character string 0x0015 (21) 0 R Serial number Example: "x" (22) 0 R Hardware version HW-Vx.y x: Large revision number y: Small revision number 0x0016 (23

PFxx-OMX0007

0 R Vendor text www.smcworld.com 0x0012 (18) 0 R Product name Example: PF3A701H-Lx-xx-x 0x0013 (19) 0 R Product ID Example: PF3A701H-Lx-xx-x 0x0014 (20) 0 R Product text FloW sensor Initial value is indicated as 8-digit. 16 octets fixed character string 0x0015 (21) 0 R Serial number Example: "x" (22) 0 R Hardware version HW-Vx.y x: Large revision number y: Small revision number 0x0016 (23

PFxx-OMY0005

In this case, there is a contradiction in the display of the sub screen. 19 oFF mode 20 Flow rate HYS mode set value 21 Flow rate HYS mode hysteresis 22 Flow rate Wind mode lower side set value 23 Flow rate Wind mode upper side set value 24 Flow rate Wind mode hysteresis 25 Temperature HYS mode set value 26 Temperature HYS mode hysteresis 27 Temperature Wind mode lower side set value OUT2

Digital Flow Switch (Integrated display type)

MODEL / Series / Product Number PF2A7##H Table of Contents Safety Instructions 2 Model Indication and How to Order 10 Summary of Product parts 11 Definition and terminology 12 Mounting and Installation 14 Installation 14 Piping 15 Wiring 16 Outline of setting 18 List of outputs 19 Function selection mode 20 F_0 Initialize mode 21 F_1 Selection of display mode 22 F_2 Unit selection function 23

Digital Flow Switch (Remote type monitor unit)

PF2D3 series Item Default settings Page Selection of the connected sensor [04d] 0.4 to 4 L/min type (PF2D504) Page 21 Selection of display mode [d_1] Display instantaneous flow Page 22 Unit selection function [U_1] L/min Selection of output mode (OUT1) [o10] Instantaneous output mode Selection of output mode (OUT2) [o20] Instantaneous output mode Page 23 Selection of switch operation (OUT1

4-channel Flow Monitor (Remote type monitor unit)

. -20No.PF-OMH0003-F Initialize mode Default settings PF2A20 series Item Default settings Page Selection of the connected sensor [10L] 1 to 10 L/min type (PF2A510) Page 22 Selection of display mode [d_1] Display instantaneous flow Page 23 Unit selection function [U_1] L/min Selection of output mode [o10] Instantaneous output mode Selection of switch operation [1_n] Reverse output Page 24

PF-OMM0004_C

4 0.1L 0.5L 1L NPN PNP 80 mA DC28 V NPN1 V (80 mA ) PNP1.5 V (80 mA ) 25 0.5 s/1 s/2 s -65No.PF-OMM0004-D PF3W704 PF3W720 PF3W740 PF3W711 PF3W721 6 0.5 s/1 s/2 s 15 V 1 k 420 mA DC12 V 300 DC24 V 600 0.4 V ()30 ms 2 4 7 /6 11 ) 5 / 12 DC1224 V10 50 mA IP65 050 () 3585R.H.() 7 AC1000V 1 50M (DC500V ) CE UL(CSA)RoHS PPSSUS304FKMSCS13 PPSSUS304 FKM 3/8 3/81/2 1/23

PF-OMN0011_C

No.PF-OMN0011CN-C / / PF3W3## SMC 2 9 12 13 15 15 16 21 23 23 F0 25 F1 OUT1 26 F2 OUT2 34 F3 40 F10 41 F20 45 F22 46 F30 48 F80 49 F81 50 F82 51 F90 52 F96 53 F97 54 F98 57 F99 58 59 62 63 66 66 69 71 -1No.PF-OMN0011CN-C (ISO/IEC)(JIS) 1) 2) 1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules

Valve for Water and Chemical Base Fluids (2/3 Port Air Operated Valve)

VCC13-02(F) 45.9 Rc1/8 pilot (12) port G1/4, Rc1/4 IN(1) port 16.5 15 2 x 6 (for M5 mounting) G1/4, Rc1/4 OUT(2) port 6 22 22 58 6 25 25 50 15 15 G1/4, Rc1/4 RETURN(3) port M5 leakage detection port 30 19 11 23 Part number for sub-base VCC13-S02 02F [Rc1/4] [G1/4] 38.4 Sub-base material is aluminum + hard anodized containing PTFE. 70 0.5 to 2 12 Valve for Water and Chemical Base Fluids

HRX-OM-T004

Setting of response delay time Set range is 0 to 250m sec. to Communication range (simple communication protocol) Setting and checking 23. Press the [SEL] key once. The set screen of communication range (simple communication protocol) is displayed on the digital display. PV SV 24.

HRX-OM-R028

Table 2.4-12 List of set values Set values Explanation Initial value (Default setting) N.O type N.C type Contact output 1 selected alarm Setting and checking 23. Press the [SEL] key once. The set screen of digital output 1 selected alarm is displayed on the digital display. PV SV 24.

A_HEC-OM-J017

22 21 20 High temp. cut off alarm ERR12 Low temp. cut off alarm ERR13 Unused Output failure alarm ERR15 D2 23 22 21 20 Upper temperature limit alarm WRN Lower temperature limit alarm WRN Thermostat alarm ERR14 DC power supply failure alarm ERR11 D3 23 22 21 20 External sensor failure alarm ERR18 Internal sensor failure alarm ERR17 During Auto tuning or auto tuning warning ERR19 Flow switch

A_HEC-OM-K001

22 21 2 0 High temp. cut off alarm ERR12 Low temp. cut off alarm ERR13 Fan alarm ERR21 Output failure alarm ERR15 D2 23 22 21 2 0 Upper/Lower temp. limit alarm WRN Remote OFF alarm WRN Thermostat alarm ERR14 DC power supply failure alarm ERR11 D3 23 22 21 2 0 External sensor failure alarm ERR18 Internal sensor failure alarm ERR17 During Auto tuning or auto tuning alarm ERR19 Leak alarm ERR22

FGX-OM-L011

4 1 V 2 6 [] 23 6/8 FGX-OM-L011 5 1 INLETOUTLET O (1)(2) (2) AL-25S(:NBR) AL-22S(:FKM) (1) 2 3 23 7/8 FGX-OM-L011 4 O O 1 2 (1) (2) 5 (a)(b) V [(c)] [(c)] O 1 V V V V O (a) V (b) V (c) 6 8/8 FGX-OM-L011 URL http://www.smcworld.com Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021,JAPAN Phone: +81 3 5207 8249 Fax: +81 3 5298 5362 Specifications are subject

K35-OMW0030

Construction Back portion of 125 to 250 head covers (1) (4) (5) (6) (7) (8) (9) (10) (11) (2) (33) (12) Air supply port Air exhaust port Top portion of 320 head cover (13) (14) (15) (16) (17) (27) (28) (29) (30) (33) Cross-section portion of 320 rod end (3) (18) (19) (20) (21) (22) (23) (24) (25) (26) (31) (34) (35) (32) No. Name Material / Surface treatment No.

PFxx-OMA1007

No.PF-OMA1007-B PRODUCT NAME Air Management System MODEL/ Series/ Product Number AMS20 AMS30 AMS40 AMS60 Table of Contents Safety Instructions 3 Model Indication and How to Order 12 Names and Functions of Individual Parts 15 Definition and terminology 19 Mounting and Installation 23 Piping 23 Wiring 24 LED indicator 28 System overview 35 Initial Configuration 42 AMS Operation Setting 46 OPC

Cylinder with lock

Construction Fig. 23 Construction No. Description Qty Note No.

CEx-OML0058

This may twist or damage the pin. 23 8-4 Holding force of locking (1) Holding force of lock using both spring and air pressure.