LG1H

Mitsubishi Electric Corporation Yaskawa Electric Corporation 02 03 04 05 05 5m Cable length 2m 3m 4m 5m Applicable cables Model Manufacturer part no.

Compact Vacuum Ejector Series ZA

2 12 For above parts of No. 7 and No. 11, the parts assembly ZA1-OP-1 (10 pcs each) is available. ZH ZU How to Order ZL ZY How to order connector assembly Solenoid valve connector assembly part no.

Magnetically Coupled

Specifications Bore size 20 to 63 (3/4" to 2-1/2") Piston speed (no load) 59.1 inch/s (1500 mm/s) Note 1) When operating this cylinder at high speed, a shock absorber must be provided. 11 Series NCY3B Made to Order 3 Please contact SMC for detailed specifications, lead times and prices.

Applicable Tubing: ø 2 Connection Thread: M3, M5 Made to Order (Refer to page 193 for details.) Miniature Fittings M Series

Model AU ALU ALHU F R Port size 3 5 32 04 M3, M5 M3 M5 Barb fitting M3 x 0.5 M5 x 0.8 3.2 4 Barb elbow Barb One-touch Plug-in reducer 3.2, 4 For details on applicable tubing O.D. and port size combinations for each model, refer to the charts on the Dimensions page. 191 B M Series Dimensions Barb Fitting: M-3AU-2, M-5AU-2 Applicable tubing O.D. / I.D.

70pvvna

Nitrogen gas (N2) Freon 11, 113, 114, Turbine oil , Hydraulic fluid Conduit Carbon dioxide (CO2) (0.7 MPa max.)

VCB

Nil N F Rc NPT G OUT 1 IN Port size Symbol 01 02 03 04 06 Class 3 Class 2 Port size 1/8 (6A) 1/4 (8A) 3/8 (10A) 1/2 (15A) 3/4 (20A) Class 4 Voltage 1 2 3 4 36 100VAC 200VAC 110VAC 220VAC 230VAC Orifice size Consult SMC regarding other voltages.

IIIIIII

AirlLiq' 3-5 6-8 9-11 11-12 NVFM 250 Mech. Actuated/ Pilot Operated Cv 1.0 13-17 NVZM 450 Mech. Actuated/ Pilot Operated Cv 0.55 13; 18-20 Materials Body Aluminum DieCast Spool, Stem, Spring Stainless Steel Seals & Poppets Buna N Weaqhtoz.

S Couplers Series KK130

/O.D. mm Symbol 01 02 03 04 N01 N02 N03 N04 Symbol 07 09 11 13 Applicable tube O.D. mm 6 8 10 12 1/4" 5/16" 3/8" 1/2" Symbol 50 60 65 80 85 110 5/8 6/9 6.5/10 8/12 8.5/12.5 11/16 Metric size The figures in ( ) indicate the internal diameter of the applicable hose. Inch size 1

Regulator for Chemical Liquids Series LVR

Applicable model LVR20 LVR40 LVR50 03 3 x 2 LVR20 LVR40 LVR50 03 1/8" x 0.086" 04 4 x 3 05 3/16" x 1/8" 06 6 x 4 07 1/4" x 5/32" 10 10 x 8 11 3/8" x 1/4" 12 12 x 10 13 1/2" x 3/8" 19 19 x 16 19 3/4" x 5/8" LQ3 Metric size Inch size Symbol Applicable tubing size Applicable model Symbol Applicable tubing O.D.

Pressure Switch/Reed Switch Type

2 q Magnet 9 Piston 10 POM Seal piston 11 NBR 1/8 15 23 Scale plate 12 PC Wiring Warning Mounting Warning Pressure Source Warning 1. 1. 1. Connect load before connecting with power source. The switch will break instantly if no load is connected. Make the wiring length as short as possible.

PEAPP Series

NF-36-03-C02-11

ATX-OM-F003E

Maintenance 11 8.

Precision Regulator

Precautions for handling 8~11 6. Warranty 12 7. Troubleshooting 13 8. Assembly drawing 14 -1- Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage. These instructions indicate the level of potential hazard with the labels of Caution, Warning or Danger.

3/5 Port Solenoid Valve

Refer to page 11 for details.

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

Nil C 0.4 to 4 l/min 1.8 to 20 l/min 4 to 40 l/min 04 20 40 The cable and connector are shipped unassembled.

Mechanical Valves Series NVM, NVFM, NVZNI

AirlLiq' 3-5 6-8 9-11 11-12 NVFM 250 Mech. Actuated/ Pilot Operated Cv 1.0 13-17 NVZM 450 Mech. Actuated/ Pilot Operated Cv 0.55 13; 18-20 Materials Body Aluminum DieCast Spool, Stem, Spring Stainless Steel Seals & Poppets Buna N Weaqhtoz.

Digital Flow Switch for Deionized Water and Chemicals Series PF2D

1 q t i Series PF2D For Deionized Water and Chemicals Digital Flow Switch Dimensions: Separate Type Sensor Unit PF2D504-11/520-13 Internal circuits and wiring examples 60 70 176 z to , are terminal numbers.

AR20-B to AR60-B

13 90 3.2 AR60(K)-B 70 66 65.8 11 13 90 3.2 Note 1) The dimension of B is the length when the filter regulator knob is unlocked.

HAA

HAA7 Accessory (Option) Auto drain Applicable model HAA7 HAA15 HAA22 HAA37 HAA7-F HAA7-S HAA15-F AD402-03 HAA15-S HAA22-F HAA22-S HAA37-F AD402-04 Working Principle Dust-protecting filter Mounting bench HAA37-S The accessories should be mounted by user.

AMD

precautions on every series. 14-20-22 2 Micro Mist Separator Series AMD How to Order AMD150 to AMD850 AMD 250 03 J B Body size Option 1 4 150 Standard 1 8 250 Standard 1 4 350 Standard 3 8 450 Standard 1 2 550 Standard Standard Standard J Drain guide B female thread R IN-OUT reversal direction Accessory (Option) Symbol Description Bracket T Element service indicator Nil B 3 4 650 1 850 11