New

Step 1 Item Selection item Symbol 20A (3/4) 25A (1) 40A (1 1/2) 50A (2) 65A (2 1/2) 80A (3) 90A (2 1/2) 100A (4) 1 2 3 4 5 6 7 8 q VXF2 1 A A A Port size q Step 2 Select the piping system. w Symbol Item Selection item VXF2 1 A A A Direct piping type Flange type Flange body I type Flange body II type A B C D Piping w e Step 3 Diaphragm/Main valve material, Select whether the silencer is mounted

Refrigerated Thermo-chiller

Note 2) FluorinertTM is a trademark of 3M and GALDEN is a registered trademark of Solvay Solexis, Inc. Dilute pure ethylene glycol with clear water. Additives such as antiseptics cannot be used.

HRX-OM-I051

Do not connect the cable with the factory side at this point. 2. Turn OFF the main breaker of this system. 3. Undo the screws (2 pcs.) to remove the front panel. Be sure to use a Phillips screwdriver. 4. Undo the screws (2 pcs.) to remove the breaker cover. Be sure to use a Phillips screwdriver.

7.4

S07B5 4(A) 2(B) 5(R1) 3(R2) 1(P) 5 (R1) 4 (A) 1 (P) 2 (B) 3 (R2) y t N.O. + N.O. Component Parts S07C5 2(B) No.

4/5 Port Solenoid Valve Series SYJ3000/5000/7000

For connector cable of M8 connector, refer to page 90. 3 Series SYJ3000 Construction (A) 4 (B) 2 (A) 4 (B) 2 2 position single 2 position double 5 (R) 3 (R) 1 (P) 5 (R) 3 (R) 1 (P) t e q t r w qr w (B) 2 (A) 4 (B) 2 (A) 4 u u 3 (R) 1 (P) 5 (R) 3 (R) 1 (P) 5 (R) y 3 position closed center/Exhaust center/Pressure center 3 position closed center (A) 4 (B) 2 q t r w 5 (R) 3 (R) 1 (P) (B) 2 (

4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

B A B 2 position single 2 position double PR R PR R 3 5 1 4 2 4 2 5 1 A B A B 7 7 R1 P R2 R1 P R2 6 3 position closed center/exhaust center/pressure center 3 position closed center A B 4 2 5 1 PR2 R A 3 position exhaust center A B B PR R 3 position pressure center A B 7 R1 P R2 PR R (This construction shows closed center type.)

SFA100/200/300 Series Clean Gas Filter: Cartridge Type/Disc Type

Note 2) Weight kg Connection Filtration area cm 2 AME SFA100-02 SFA101-02 SFA200-02 SFA201-02 SFA300-02 SFA301-02 SFA102-02 SFA202-02 SFA302-02 SFA103-02 SFA203-02 SFA303-02 Rc 1/4 (Female thread) 13.85 ED001S-X10V 0.34 26 NPT 1/4 (Female thread) AMF Rc 1/4 (Female thread) 33.18 ED101S-X10V 0.44 70 NPT 1/4 (Female thread) ZFC Rc 1/4 (Female thread) 56.75 ED201S-X10V 0.66 140 SF SF NPT 1/

HRX-OM-M091

OFF Contact input signal 2 type ALT Contact input signal 2 delay timer (time delay) of reading 0 Contact input signal 2 OFF detection timer 0 2.4 Contact output 1 function RUN Contact output 1 operation A Selected for contact output 1 AL.01 Contact output 2 function RMT Contact output 2 operation A Selected for contact output 2.

4/5 Port Solenoid Valve Rubber Seal Series SYJ3000 For details about certified products conforming to international standards, visit us at www.smcworld.com.

center (A) 4 (B) 2 SX q t r w 5 (R) 3 (R) 1 (P) (B) 2 (A) 4 3 position exhaust center (A) 4 (B) 2 5 (R) 3 (R) 1 (P) 3 position pressure center u (A) 4 (B) 2 3 (R) 1 (P) 5 (R) (This figure shows a closed center type.) 5 (R) 3 (R) 1 (P) Component Parts Replacement Parts Note Zinc die-casted Part no.

HRX-OM-Q033

Communication specification . 2-2 2.3 Terminal block explanation . 2-2 2.4 Setting and checking . 2-4 2.4.1 Setting and checking . 2-4 2.4.2 Setting and checking . 2-5 2.5 Contact input signal . 2-16 2.5.1 Run/stop signal inputRemote signal input . 2-16 2.5.2 External switch signal input . 2-18 2.6 Contact output signal . 2-19 Chapter 3 Serial communication . 3-1 3.1 Precautions wiring communication

HRX-OM-S010

. 2-1 2.2 Communication specification . 2-2 2.3 Terminal block explanation . 2-2 2.4 Setting and checking . 2-4 2.4.1 Setting and checking . 2-4 2.4.2 Setting and checking . 2-5 2.5 Contact input signal . 2-16 2.5.1 Run/stop signal inputRemote signal input . 2-16 2.5.2 External switch signal input . 2-18 2.6 Contact output signal . 2-19 Chapter 3 Serial communication . 3-1 3.1 Precautions

HRX-OM-T004

Communication specification . 2-2 2.3 Terminal block explanation . 2-2 2.4 Setting and checking . 2-4 2.4.1 Setting and checking . 2-4 2.4.2 Setting and checking . 2-5 2.5 Contact input signal . 2-16 2.5.1 Run/stop signal inputRemote signal input . 2-16 2.5.2 External switch signal input . 2-18 2.6 Contact output signal . 2-19 Chapter 3 Serial communication . 3-1 3.1 Precautions wiring communication

HRX-OM-R028

specification.2-2 2.3 Terminal block explanation.2-2 2.4 Setting and checking.2-4 2.4.1 Setting and checking . 2-4 2.4.2 Setting and checking . 2-5 2.5 Contact input signal.2-16 2.5.1 Run/stop signal inputRemote signal input . 2-16 2.5.2 External switch signal input . 2-18 2.6 Contact output signal .2-19 Chapter 3 Serial communication. 3-1 3.1 Precautions wiring communication .3-1 3.2 Communication

4/5 Port Air Operated Valve Series SYJA3000 1

) With fiflter (80 mesh) 1/8,1/4 (P, A, B port) 3 position closed center/exhaust center/pressure center SYJA7 20-01 3 position closed center/exhaust center/pressure center SYJA7 403 4 5 2-4.3 (For mounting) 3 4 5 01 02 2-3.2 35 34 8.5 (For manifold mounting) 2-M5 x 0.8 (Pilot port) 17 B A 1 34 27 13 1 B A A B 3 1 1 R1 P R2 32.5 45.5 2-M5 x 0.8 31.5 38 (Pilot port) 64 2-3.2 Manual override

Rubber seal 5 Port Solenoid Valve Series SYJ5000

(P) (B) 2 (A) 4 3 position exhaust center (A) 4 (B) 2 5 (R1) 3 (R2) 1 (P) 3 position pressure center (A) 4 (B) 2 i 5 (R1) 1 (P) 3 (R2) 5 (R1) 3 (R2) 1 (P) (This figure shows a closed center type.)

4/5 Port Air Operated Valve SYJA3000 Series

P R2 R1 18 18 22 22 11.5 1/4 (R1, R2 port) 31.5 27.2 2 x 1.8 (Bleed port) 63 3 position closed center/exhaust center/pressure center SYJA7 20-01 3 position closed center/exhaust center/pressure center SYJA7 403 4 5 3 4 5 01 02 2 x 4.3 (For mounting) 34 8.5 32.6 45.6 2 x M5 x 0.8 (Pilot port) B A 1 1 27 34 B A 13 3 B A 1 1 R1 R2 P 1/8 (A, B port) 2 x 3.2 (For manifold mounting) 17 2 x M5

Fieldbus system (PROFIBUS DP compliant)

Memory map of input data Data (2 byte) Input area Branch connector (INPUT) MSB LSB MSB LSB 15 8 7 0 byte (b+1) byte (b) Word (a) COM A byte (b+3) byte (b+2) Word (a+1) COM B byte (b+5) byte (b+4) Word (a+2) COM C byte (b+7) byte (b+6) Word (a+3) COM D byte (b+9) byte (b+8) Word (a+4) GW unit status information byte (b+10) byte (b+11) Word (a+5) (a, b=0 to) : Only when the GW unit status

Auto Feed Lube, Auto Feed Tank ALF400 to 900, ALT-5/-9

B * s e i r e S F L A N r o t a c i r b u L d e e F o t u A l e d o M 0 0 4 F L A N 6 0 N 0 0 4 F L A N 0 0 5 F L A N 0 0 6 F L A N 0 0 8 F L A N 0 0 9 F L A N e z i s e p i P 8 / 1 8 / 3 2 / 1 4 / 3 4 / 3 1 1 4 / 1 1 2 / 1 1 2 m f c s p i r d l i o r o f w o l f . n i M 2 . 2 5 . 3 2 . 4 2 . 4 6 . 6 7 . 7 1 . 6 1 3 2 3 6 ) f g k ( s b l t h g i e W ) 5 8 . 0 ( 7 8 . 1 ) 8 8 . 0 ( 4 9 .

Soft Start-up Valve

Flow Rate Characteristics Series AV2000-A AV3000-A AV4000-A AV5000-A Port size 1(P), 2(A) 1/4 3/8 1/2 3/4 1 3(R) 1/4 3/8 1/2 3/4 1(P) R 2(A) C[dm3/(sbar)] 9.2 13.1 19.2 34.8 41.3 b 0.36 0.27 0.32 0.66 0.34 Cv 2.4 3.1 5.1 12.6 13.7 Flow rate characteristics 2(A) R 3(R) C[dm3/(sbar)] 8.8 9.2 10.1 23.7 b 0.46 0.48 0.55 0.67 Cv 2.5 2.6 3.2 9.2 Pressure for switching from low speed air supply

Soft Start-up Valve

Flow Rate Characteristics Series AV2000-A AV3000-A AV4000-A AV5000-A Port size 1(P), 2(A) 1/4 3/8 1/2 3/4 1 3(R) 1/4 3/8 1/2 3/4 1(P) R 2(A) C[dm3/(sbar)] 9.2 13.1 19.2 34.8 41.3 b 0.36 0.27 0.32 0.66 0.34 Cv 2.4 3.1 5.1 12.6 13.7 Flow rate characteristics 2(A) R 3(R) C[dm3/(sbar)] 8.8 9.2 10.1 23.7 b 0.46 0.48 0.55 0.67 Cv 2.5 2.6 3.2 9.2 Pressure for switching from low speed air supply