PSxx-OMU0002CN

-100.0~100.0 kPa T 2 X NPN2 Y PNP2 R NPN2+1 T PNP2+1 A1 A S NPN2+1 V PNP2+1 1: A2 B M SI3 P psi2 2 3 kPaMpa B D + M5 M5 1 01 R1/8 N01 NPT1/8 C4H 4mm J (2m) C6H 6mm N7H 1/4 inch C4L 4mm C6L 6mm N7L 1/4 inch -8No.PS-OMU0002CN-D / A ZS-46-A1 38L(2 ) B ZS-46-A2 38L(2 ) ZS-46-B + ZS-46-D ZS-46-5L 5 2m ZS-27-01 R1/8 ZS-46-N1 NPT1/8 ZS-46-N2 4mm ZS-46-C4H 6mm ZS-46-C6H 1/4 inch

Clean Gas Filter Clean Gas Strainer

When using the bracket, use two M4 bolts. -6- 2. Specifications 2-1 How to Order Port size Model type Port size Symbol Symbol Type 02 RcNPTTSJUOJ 1/4 10 Cartridge M5 Female thread M5 20 Cartridge (Strainer) Note) "M5" can only be selected when SFB10* is ordered.

Clean Regulator

Relief Port size Rc 1/8, 1/4 URJF 1/4 Rc 1/4, 3/8, 1/2 URJF 3/8 Rc 1/8, 1/4 Rc 1/4, 3/8, 1/2 Port size Grade A Clean air, N2, Ar, CO2, Pure water Clean air, N2 IR-A Fluid Grade B Air, N2 Air, N2, Ar, CO2, Water Grade A Clean air, N2, Ar, CO2, Pure water Clean air, N2 Fluid Proof pressure 1.5 MPa Grade B IR Air, N2 Air, N2, Ar, CO2, Water Max. operating pressure 1.0 MPa Proof pressure 1.5

MGC

Rush speed into cushion is as follows: M + m 2 = 1.4a Ek = 2 Ek: Kinetic energy (J) M: Weight for the driven object (kg) m: Weight for movable part of cylinder (kg) : Maximum speed (m/s) a: Average speed (m/s) = 1.4 x 300 = 420 mm/s. Note) Set a so that rush speed into cushion should not exceed 0.75 m/s.

New New Process Gas Diaphragm Valve For wide variety of applications from semiconductor to general. Multiple port available in various configurations Compression, Rc, R, NPT Cleaned for O2 service Air Operated Type Series AK3542/4542  Compact and light

Dimensions inch (mm) AK3542 & 4542 M5 x 0.8 Actuation port 1.57 (40) 2.24 (57) 2 x Compression 2 x R, NPT male 2 x Rc, NPT female 0.44 (11.2) B B A A A Connections: N, BRN Connections: 4T, 6T Connections: 4, 6, BR 4 6 4 6 4 6 Ports A B Connections inch (mm) inch (mm) 4T 2.56 (65.0) 1.12 sq. (28.4) 1/4 inch compression 4BR 1.70 (43.2) Rc 1/4 4BRN 2.32 (58.9) 1.12 sq. (28.4) R 1/4 4 1.70

MGC

CGIA20-PS CGIA25-PS CGIA32-PS CGIA40-PS CGIA50-PS Contents Matt nickel plated Matt nickel plated Set of above $1, $2, $3, $4 and $5. Note 1) Common with cushion ring A: Except standard 20 and 25 Note 2) Common with cushion packing A: Except standard 20 and 25 Seal kit includes rod seal $1, piston seal $2, tube gasket $3, valve seal $4 and gasket for valve retainer $5.

VQ1000V-OMV0001

VQ1000/2000 VQ1000/2000 VQ1000/2000 VQ1000/2000 5 5 5 5 / / / / / / / / & & & & 1 2 2 3 ( ( ( ( ) ) ) ) 1 1 1 1 M5 M5 M5 M5 1/6~1/4 1~1.5Nm 5 No.VQ1000V-OMV0001 VQ1000/2000 VQ1000/2000 VQ1000/2000 VQ1000/2000 5 5 5 5 / / / / DC ( ( ( ( ) ) ) ) 1) 1) 1) 1) [ [ [ [ ] ] ] ] 1 ISO VG32 IP65 IP67IEC60529 IP65 IP67 (MSDS) [ [ [ [ ] ] ] ] 1 ISO VG32 11 ISO VG32 2 ISO VG32 2 6 No.VQ1000V-OMV0001

PSxx-OMT0001CN

[mm] 3 m 3 m 3 m [sec] [sec] [sec] [mm] [mm] [mm] [mm] 5 m 5 m 5 m [sec] [sec] [sec] [mm] [mm] [mm] [mm] [mm] [mm] -19No.PS-OMT0001CN-E 2 () [()][] 1.5 F42.51 m3 m5 m GH641 m3 m5 m 200 kPa ISA3-F ISA3-G 1 m3 m5 m 1 m3 m5 m [mm] [mm] 9 0 10010 ISA3-H 1 m3 m5 m [mm] 29 0 30030 -20No.PS-OMT0001CN-E 2 ISA3-() ISO1179-1 1 2 3 4 5 6 L1 38 76 114 152 190 228 C(4 ) C(6 ) F(G ) H 13

Quick Exhaust Valve Series AQ

Quick Exhaust Valve Series AQ Model Excellent exhaust characteristics Large flow capacity Compact and lightweight A wide selection of models Port size Effective area (mm2) Mass (g) Model IN OUT OUT EXH AQ1500-M5 AQ1510-01 AQ2000-01 AQ2000-02 AQ3000-02 AQ3000-03 AQ5000-04 AQ5000-06 M5 x 0.8 2 2.8 25 1 8 4 5.8 45 1 8 25 25 110 1 4 35 40 105 1 4 40 42 215 8 3 60 70 205 1 2 105 115 690 3 4

ZPT/ZPX

A B d H Model H A SN-015A M14 x 1 19 21.9 5 ZPNA-M16 M16 x 1.5 22 25.4 6 ZPNA-M18 M18 x 1.5 27 31.2 9 ZPNA-M22 M22 x 1.5 30 34.6 8 Bolts (Hexagonal Socket Head Cap Screw) Dimensions d B (mm) A B d L 8 11 5.5 M3 x 0.5 L 8 12 7 M4 x 0.7 A 10 15 8.5 M5 x 0.8 13-11-96

Speed Controller with One-touch Fitting Series AS Elbow Type (Metal Body) 1

1 Thread size M5 01 02 03 04 M5 x 0.8 R R R R 1 8 1 4 3 8 1 2 M5 port only Note 1) AS221: Electroless nickel plated Note 2) AS221: Steel Note 3) Meter-in type: Black zinc chromated 15-9-8 2 Speed Controller with One-touch Fitting Elbow Type (Metal Body) Series AS Flow Rate and Effective Area AS321-03 AS421-04 AS221-01 AS221-02 AS121-M5 Model Tubing O.D. 12 10 10 8 6 8 4, 6 6, 8 Controlled

Series 10-VQD1000 [Option] 4 Port Direct Operated Poppet Solenoid Valve

(B) 2 (A) 4 Symbol 1 (P) 3 (R) Flow Rate Characteristics C [dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv 14/2(PA/B) 4/25/3(A/BEA/EB) Flow rate characteristics Port size Valve model Body ported 10-VQD1121(V)-L M-M5 10-VQD1121 -L M-M5 10-VQD1151(V)-L M-M5 10-VQD1151W-L M-M5 0.05 0.07 0.06 0.07 Base mounted (With sub-plate) 0.19 0.28 0.22 0.27 0.31 0.28 0.31 0.28 0.22 0.27 0.22 0.27 0.16 0.24 0.10 0.25

Compact Pressure Switch Series ZSE1 (For Vacuum)/ISE1 (For Positive Pressure)

H H 15 Indicator light (Red, Green) 23 Indicator light (Red, Green) 23 600 (3000) 56.5 600 (3000) 49 8.5 47 47 3.5 3.5 8.5 M5 x 0.8 depth 5 Piping port 2 x 3.5 Mounting hole T1: NPTF 1/8 01: R 1/8 M5 x 0.8 depth 5 Piping port 2 x 3.5 Mounting hole T1: NPTF 1/8 01: R 1/8 13 13 777

ZSE1/ISE1

-16C/-17C Pressure setting trimmer 2 Pressure setting trimmer 1 Pressure setting trimmer 2 Pressure setting trimmer 1 SET1 SET2 L L H H 15 SET1 SET2 L L H H 15 Indicator light (Red, Green) 23 Indicator light (Red, Green) 23 600 (3000) 56.5 600 (3000) 49 8.5 47 47 3.5 3.5 8.5 2-3.5 Mounting hole T1: NPTF 1/8 01: R 1/8 M5 x 0.8 depth 5 Piping port M5 x 0.8 depth 5 Piping port 2-3.5 Mounting

Large Type Vacuum Unit Series ZR

PD (vacuum breaking pressure port) Breaking flow adjustment needle M5 port PS (pilot valve supply pressure port) 1 Spacer A PE 2.5 Valve unit Attachment D 1 85 80 PD Rc(PT) 1/8 port PV (vacuum pump connection port) SMC 2-4.2 (mounting hole) PS 51.5 41.5 2 20 32.5 27.5 Filter block D 16.5 16 PV 2 8 13 3 1.5 Adapter G 1 4 Bracket A Bracket A 128.7 100.8 (9.8) 4.5 Rc(PT) 1/8 port V (vacuum

Series CDU 10-/11- 21-/22- ø6, ø10, ø16, ø20, ø25 Free Mount Cylinder

80 85 90 95 100 105 60 65 70 75 80 85 73 78 83 88 93 98 16 to 25 Relief port 2 x M5 x 0.8 2 x P through M5 x 0.8 R QA Q GC GB E MM GA D J C 2.8 A Width across flats L 2 x P through A1 H E 4 x T counterbore 0.5 B S Z (mm) S Z A A1 GB P Q QA R T B C D E GA GC H J L MM Bore size 5 30 40 50 5 10 15 20 25 30 40 50 10 15 20 25 20 16 12 11 5.5 4.5 9 4 4.5 2 16 12 26 20 40 32 8 6 30 27 M6 x 1.0

Smooth Vent Valve

2, and the poppet valve piston !2 moves upward and stops when it is in contact with the main air supply adjustment nut t. The movement of the poppet valve piston !2 causes the connected poppet valve i to move further from the initial air supply adjustment position, and a greater volume of gas flows to the OUT (2) port.

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ Type ）

Cable model Cable length Protective structure Flex life Application 2m 5m 10m LE-CSE-SA 2 5 A IP65 Standard For LE-servo motor Axis side lead LE-CSE-RA 2 5 A IP65 Robot cable LE-CSE-SB 2 5 A IP65 Standard For LE-servo motor Counter axis side lead LE-CSE-RB 2 5 A IP65 Robot cable (a) Connection of driver and servo motor Driver Servo amplifier LE-CSE-SA LE-CSE-RA MR-J3ENCBL M-A1-L MR-J3ENCBL

EXxx-OMY0004

L/A indicator Table 10-22 L/A indicator L/A 1/2 Meaning Green ON Connection via Ethernet to the SI Unit via Port 1/2 (XF1/2) Green OFF No connection established via Port 1/2 (XF1/2) Yellow ON Transmission or reception of Ethernet telegrams on Port 1/2 (XF1/2) Yellow OFF No transmission or reception of Ethernet telegrams on Port 1/2 (XF1/2) Orange Flash Received Node flash request : When

Shock Absorbers and Rate Controls

9.030.5 128.0a a N/A nlt 30.0 16.0 Pt[225titf t, -2, -3 207.0 2t2.0 N/A {Mr) M36 x r.5 9.5 29.0 30.5 128.0 ).J r.r/a N/A 33.0 r6.0 Pfit525flt -1, -2, -3 t44.0 t62.0 45 ( rfl r,r4J x l.J t2.l 38.0 44.5 92.0N/A 3t0 38 il/a t/A Ptt 550iltt -1, -2, -3 t95.0 ?