High Vacuum Slit Valve

one for C open and close) F D-sub connector (CDE-9PF05 : Hirose Electric Co.

Digital Pressure Switch

D ZS-24-D ZS-35-C Panel mount adapter E ZS-35-D ZS-35-F Panel mount adapter + Front protective cover F ZS-35-G Accessories 1 / Part numbers Part number Option 1 ZS-24-A Bracket A with 2 mounting screws each of M3 x 5 L, M4 x 5 L ZS-24-B Bracket B with 2 mounting screws M4 x 5 L ZS-24-D Bracket D with 2 mounting screws each of M3 x 5 L, M4 x 5 L ZS-35-C Panel mount adapter (piping specification

7.4

O-ring Port plug Body Ported Base Mounted Blanking plug (For One-touch fittings) KJP-02 A L Dimensions [mm] Applicable fitting size d Model A L D Weight [g] 2 KJP-02 8.2 17 3 0.1 3.2 KQ2P-23 16 31.5 5 1 4 KQ2P-04 16 32 6 1 23 KQ2P-04 D Silencer (For manifold EXH port) Body Ported Base Mounted Silencer is installed in the EXH port.

Fieldbus system Digital unit

If turned too far, it will become hard to remove the connector. (1) (2) (3) D-sub socket connection method is explained below. (1)Align the D-sub socket connector of the unit and the plug connector of the cable. (2)Insert the plug connector of the cable into the D-sub socket connector of the unit vertically.

Table of Contents - Tubing

Tube Reel Tube Stand: TB-2 TB-3VS Vertical Stand Applicable tube size mm Model 4, 6 8 10 12 TBR-1 TBR-2 TBR-3 TBR-4 TB-3VS Vertical Stand Dimension: 37 1/4" W x 27 9/16" D x 68 11/16" H Designed for high capacity and reel size flexibility. This stand comes with two cross bars.

POWER CLAMP CYLINDER

to 26.) 18 - Refer to pages 23 to 26 for the weight of clamp arms.

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

side traveling parallelism to B side C side w LEKFS25 0.04 0.02 LEKFS32 0.04 0.02 LEKFS40 0.04 0.02 D side * Traveling parallelism does not include the mounting surface accuracy.

Electric Slide Table / High Precision Type 《 AC servo motor 》

Specification 1.1 LECS series driver 1.1.1 How to order L E S Y H 16 D S2 A 50 S 2 A1 (1) (2) (3) (4) (5) (6) (7) (8) (9) (10) (3)Motor type (2)Motor mouting position (1) Size Symbol type Output D In-line 16 25 Size Compatible driver [W] R Right side parallel AC servo motor LECSA-S1 LECSA-S3 S2 100 16 L Left side parallel S3 200 25 (Incremental encoder) LECSB2-T5 LECSC2-T5 LECSS2-T5 T6 100

3 Port Solenoid Valve Series VQ100 1

Enter in order starting from the first station on the D side.

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

ZS-33-F D NPN Analog 4 to 20 mA E PNP Analog 1 to 5 V Analog 0 to 10 V*3 + ZS-33-D F PNP Analog 4 to 20 mA *3 1 to 5 V or 0 to 10 V can be selected by pressing the button.

3 Port Solenoid Valve Series VQ100

Enter in order starting from the first station on the D side.

3 Port Solenoid Valve Series VQ100 1

Enter in order starting from the first station on the D side.

Digital Flow Switch (Integrated display type)

(example: If the flow switch with output impedance of 1 k is connected to the A/D converter to detect the analogue output of 5 V, the detected voltage by the A/D converter becomes 5(V) x1(M)/(1(k) + 1(M)) 4.995(V), and there is an error of approximate 0.005 V).

Series MHZ2 11- ø10, ø16, ø20, ø25 22- Air Gripper

D-F8 has no protrusion from the body's end surface.

PFxx-OMY0005

Digital flow switch Air combination Spacer Spacer with bracket Pipe adapter PF3A801H AC30#-D Y300-D Y300T-D E300-#03-D PF3A802H AC40#-D Y400-D Y400T-D E400-#04-D : For more information about the options, refer to our website (URL https://www.smcworld.com). -20No.PF-OMY0005-A Do not apply torsion or bending moment other than the weight of the product itself.

Series MSQ 11- Rack & Pinion Type Rotary Table 22- Size: 1, 2, 3, 7, 10, 20, 30, 50

D-M9B, D-F8B D-M9N, D-F8N 2-wire 3-wire 24 VDC relay, PLC 24 VDC relay, PLC Solid state auto switch Yes 24 VDC (10 to 28 VDC) 24 VDC (4.5 to 28 VDC) Yes 2.5 to 40 mA 40 mA or less Refer to page 920 for the applicable auto switch list. 909 Rotary Table MSQ 1122Specifications Suction Flow Rate of Vacuum Suction Type (Reference values) Size 1 2 3 7 10 20 30 50 Fluid Air (Non-lube) Size Suction

PFxx-OMX0007

Digital flow switch Air combination Spacer Spacer with bracket Pipe adapter PF3A701H AC30#-D Y300-D Y300T-D E300-#03-D PF3A702H AC40#-D Y400-D Y400T-D E400-#04-D : For more information about the options, refer to our website (URL https://www.smcworld.com). -17No.PF-OMX0007-A Do not apply torsion or bending moment other than the weight of the product itself.

Cylinder with lock

(P.20) < Applicable Auto switches > Solid state switch D-M9N(V)M9P(V)M9B(V) D-M9NW(V)M9PW(V)M9BW(V) D-M9NA(V)M9PA(V)M9BA(V) Reed switch D-A90(V)A93(V)A96(V) How to mount and move the auto switch Fig. 8 Note 1) For the tightening of the mounting screws (M2.5), use a precision screwdriver with a handle diameter of approximately 5 to 6 mm.

Electric Slide Table / High Precision Type 《 Battery-less absolute 》

Size Order No. 15 Return plate Aluminum die-cast Painting 8 LE-D-2-1 16 Magnet 21 16 LE-D-2-2 17 Wear ring holder Stainless Size 25,150st only 25 LE-D-2-3 18 Wear ring Resin Size 25,150st only 19 Screw shaft pulley Aluminum alloy Maintenance parts/Grease 20 Motor pulley Aluminum alloy Apply for Grease pack 21 Belt order No. 22 Scraper NBR Piston rod and Guide GR-S-010(10) GR-S-020(20) 23

Digital Flow Switch (Integrated display type)

2.7 depth 12 PF3W711 3/4, 1 124 92 46 77 57.6 23 41 42 63 48 28 18 3.5 depth 14 Symbol Bracket dimensions Model S T U V W WX Y Z PF3W704 24 22 32 40 50 4.5 5 1.5 PF3W720 28 22 32 40 50 4.5 5 1.5 PF3W740 34 30 42 48 58 4.5 5 1.5 PF3W711 44 36 48 58 70 5.5 7 2 -84No.PF-OMM0005-N PF3W721 Basic type Symbol Piping port size A AA B D E F G H J K L N P Model 11/4, 11/2 104 74 31 52 39.5 PF3W721