High Vacuum L Type Valve

D E Fn Fd G H J XLC-16-2 40 108 38 20 30 17 44 19 XLC-25-2 50 121 48 27 12 40 26 44 21 XLC-40-2 65 171 66 39 11 55 41 67 29 12 XL-OMV0007 5-3.Dimensions Size 50, 63, 80 E C C E E (KF flange) (K flange) Fd Fn D K J H B A G A Unit: (mm) Model A B C D E Fn Fd G H J K XLC-50-2 70 185 79 46 11 75 52 72 29 9 XLC-63-2 88 212 100 55 11 87 95 70 76 33 9 XLC-80-2 90 257 117 65 11 114 110 83 104 39

High Vacuum L Type Valve

A B C D E Fn Fd G H J XLG-16-2 40 108 38 20 30 17 44 19 XLG-25-2 50 121 48 27 12 40 26 44 21 XLG-40-2 65 171 66 39 11 55 41 67 29 12 XL-OMV0003 5-3.Dimensions Size 50, 63, 80 E C C E E (KF flange) (K flange) Fd Fn D K J H B A G A Unit: (mm) Model A B C D E Fn Fd G H J K XLG-50-2 70 185 79 46 11 75 52 72 29 9 XLG-63-2 88 212 100 55 11 87 95 70 76 33 9 XLG-80-2 90 257 117 65 11 114 110 83

Environment

How to Order S 2 B P H S4 200 LEY 63 A2 w y !0 i o e r t q u !1 !2 !3 !

CEx-OMP0016

1 17 Scraper NBR 2 52 Round head Phillips screw Carbon steel 2 Chromated 18 Piston seal NBR 2 53 Brake guide Carbon steel 2 Gas soft treated 19 Cushion seal NBR 2 54 Connector cover A/B Carbon steel 1 Chromated 20 Tube gasket NBR 2 55 Sensor guide Sintered metal 1 21 Bearing Special resin 2 56 Scale plate Carbon steel 1 Nickel plated 22 Spacer Stainless steel 4 57 Hexagon socket head cap

Transfer

x G F E 2 x H A B C D Side support B MY-SB 2 x J A B C D A 61 70 87 B 75 84 105 C D E F G H J Part no.

Speed Controller with

Port size Body size 2 to 16 1 to 4 M5 to 1/2 1/8" to 1/2" Metric size Inch size 2 to 16 1 to 4 M5 to 1/2 1/8" to 1/2" Flow rate 0 5 10 Number of needle rotations Refer to the Web Catalog for details.

Low Profile Slide Table Series MXF

2 r w e !0 o !9 !8 i !5 u !7 q !

CXT

175, 200, 250, 300 44 11 11 3.8-8 Platform Cylinder Series CXT 32, 40 (N) S+Stroke X+Stroke H 4-M8 X 1.25 4-8.7 Through, Counter bore 14 Depth 8 HP Depth 12 HG 12 Back side 4-M10 X 1.5 Depth 15 (N) T PA T CL d d MLGC RW RW CNA M20 X 1.5 CB QW PW GP PB W E CV/MVG Y Z CXW 2-Rc(PT)1/8 CXS CXT G G 2-RB2015 (Option) 2 HT F MX A L HN (MAX.)

VXR21/22/23

# $ VXR215 VXR226 VXR227 VXR238 2 0 Material 2 0 2 0 . ' + . / . 01$ 2 0 VXR239 2 0 17-3-53 2 The VX series will be revised shortly. Series VXR21/22/23 Normally Closed (N.C.)

Suction Guard (Produced upon receipt of order) FHG Series

(Rc) L-type block Y P Z G Q N Y Y (mm) (mm) Port size Weight (kg) d N P Q Y (mm) Port size Weight (kg) d 25 25 25 28 28 28 28 28 Port size Weight (kg) E 47 47 52 58 58 63 G 9 9 9 9 9 9 9 9 Z 2.8 2.8 2.8 5.3 5.3 5.4 1/2B (04) 3/4B (06) 1B (08) 1 1/4B (10) 1 1/2B (12) 2B (16) 2 1/2B (20) 3B (24) 1/2B (04) 3/4B (06) 1B (08) 1 1/4B (10) 1 1/2B (12) 2B (16) 1/2 3/4 1 1 1/4 1 1/2 2 22.2 27.7 34.5

Air Suction Filter With One-touch Fittings Series ZFB 1

Note 2) Will be manufactured upon receipt of order. Note 3) Avoid use under pressurization.

Multistage Ejector (N)ZL Series

P V RESETSET Approx. 500 Section A (L: approx. 2900) 2-4.4 Mounting hole MULTISTAGE EJECTOR 76 52 8 27 178.5 5 4.5 Section A with digital vacuum pressure switch (40) (N)ZL212-E (ZSE4) (N)ZL212-EB (ZSE4B) (N)ZL212-EE (ZSE4E) (2) (1.6) 4-M5 x 0.8 Thread depth 6 (mounting hole) 73 87 12

Hydraulic Cylinders

IC circuit IC circuit 5V 12V 5V, 12V 100V 100V or less Grommet Yes Reed switch Relay PLC 2-wire 24V No 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP) IC circuit 5V, 12V Solid state switch 12V Relay PLC 24V Yes Grommet IC circuit 5V, 12V Diagnostic indication (2-color display) 2-wire 12V Water resistant (2-color display) Note) Solid state switches marked "" are produced

VQ5000

Coil voltage 2 position single 2 position double 3 position closed center 3 position exhaust center 3 position pressure center 3 position double check 1 2 3 4 5 6 1 2 3 4 5 6 100VAC (50/60Hz) 200VAC (50/60Hz) 110VAC (50/60Hz) 220VAC (50/60Hz) 24VDC 12VDC 5. Light/Surge voltage supressor 2. Seal type Nil E With Without 0 1 Metal seal Rubber seal 6. Manual override 3.

HRX-OM-W002

2 2 1 1 1 3 2 3 2 1 1 4 1 2 3 1 4 Model /A /B A E E B 3 2 1 1 BK BL BR BR BR BR BR BR BL BL BL BL BL BL BL BL BL RS232C DIO RS485 FG 13 15 16 12 10 11 14 6 8 9 3 5 7 2 4 1 13 15 16 12 10 11 14 1 1 11 6 8 9 3 8 3 9 6 9 3 6 7 2 5 2 5 7 5 7 2 10 12 13 15 1 4 4 4 14 Thermister T3 t BR BR BR BR BR BR BL BL BL BL BL BL BL BL BL BL BR BR BR BR BR BL BL BL BL BL BL BL BL BL BL BL BL BL BL BL BL BL

LEF-OM002xx

mm mm 200 200 mm/s mm/s 100 500 100 500 1 1 To CN4 200 1000 200 1000 2 2 50 200 50 200 3 3 To CN3 or (4) Actuator cable (6) Teaching box PC To CN2 (7) Controller setting kit (3) Power supply plug (2)Controller To CN1 Table 2.

Compact Cylinder

A-type mounting bracket YA-03 YA-05 B-type mounting bracket YB-03 YB-05 32, 40 50, 63 YU-03 YU-05 RS M W T2 V K (Width across flats ) H (With locking) Material: Carbon steel (Nickel plated) (mm) 2 x D through 2 x O counterbore T1 B E J d1 d2 Bore size (mm) B D E J M O Part no.

Digital Flow Switch (Integrated display type)

-N PF3W721 Basic type Symbol Piping port size A AA B D E F G H J K L N P Model 11/4, 11/2 104 74 31 52 39.5 PF3W721 25 27.5 3.5 depth 14 G 11/4 108 76 33 54 41.5 56 91 71.6 28.5 54 G 11/2 112 78 35 56 43.5 -85No.PF-OMM0005-N PF3W704/720/740/711/721 (With temperature sensor) Temperature sensor Symbol A AA Model PF3W704--T 81 50 PF3W720--T 89 54 PF3W740--T 109 71 PF3W711--T 135 92 PF3W704--

CU

2 Carbon steel 9 Steel ball 1 Magnetic material 10 Magnet A F D9 type (2) 11 Auto switch 1 NBR 12 Piston gasket 2 NBR 13 Piston seal 1 NBR 14 Rod seal 1 NBR 15 Gasket 3 Free-Mounting Cylinder with Air Cushion Series CU Dimensions 2-cushion needle 2-port 2-P through Q R E GB GA 4-NN MM D CB CA C K J JA E H A' A 2-P through KA B 4-T counterbore Width across flats L S + Stroke Z + Stroke (mm

S070

VP r VG e !