Flow Sensor Series PFMV

P2: Nozzle internal pressure P1: Atmospheric pressure Nozzle Diameter Flow Characteristics (Vacuum) Nozzle Diameter Flow Characteristics (Positive pressure) 5.0 5.0 0.6 0.5 4.5 4.5 4.0 4.0 0.4 3.5 3.5 0.6 Flow rate [l/min] Flow rate [l/min] 3.0 3.0 0.3 2.5 2.5 0.5 2.0 2.0 1.5 1.5 0.4 0.2 1.0 1.0 0.3 0.5 0.5 0.1 0.2 0.1 0.0 0.0 80 60 40 20 0 0 50 100 150 200 250 300 P2 [kPa] P2 [kPa] Example

New

supply Current consumption 0.12 A or less Current type Note 4) 4 to 20 mA DC, 0 to 20 mA DC (Sink type) Input signal Voltage type Current type Voltage type 0 to 5 VDC, 0 to 10 VDC 500 7 or less Input impedance 6 to 6.5 k7 (at ordinary temperature) 1 to 5 VDC (Output impedance: Approx. 1 k7) Output accuracy: p6% or less (Full span) Analog output 4 to 20 mA DC (Sink type) Load impedance: 250

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

(Green) Indicator light Load Enclosure IP40 Environment resistance Blue DC () 3.4 3-wire 25AWG 2 m Lead wire with connector 11

60

/2 66.4 80.3 104.9 110.4 134.3 22.3 29.4 38.5 42 53 40 53 70 75 90 37.5 49 63 63 76 14 19 22 22 26 46.6 52 58 58 76 33.6 38 44 44 61 28 30 36 44 53 37.5 49 63 63 81 24 30 38 43 50 4.5 4.5 5.5 5.5 6.5 14.8 19 24 26 31 9 9 10 10 12 VHS20 VHS30 VHS40 VHS40-06 VHS50 1/4, 3/8, 1/2 3/4 3/4, 1 Options specifications Model Built-in silencer With bracket N Q R S T U V W X Y AA BB 5.4 6.5 8.5 8.5 11

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VXS VXS 2) Shut off the power supply. 11. To control the fluid in the tank, connect the piping a little higher than the bottom of the tank. 3) Dismount the product. VXB 2. Low frequency operation Switch valves at least once every 30 days to prevent a malfunction. Also, in order to use it under the optimum state, conduct a regular inspection once a half year.

Series: LEFS (Ball Screw Drive), Accuracy: H (High Precision), Size: 32, Motor Mounting Position: In-line, Motor Type: T7 (200W Output, Absolute Encoder), Lead: A (LEFS25, 12mm; LEFS32, 16mm; LEFS40, 20mm), Stroke: 150mm, Motor Option: B (w/Lock)

Series: LEFS (Ball Screw Drive), Accuracy: H (High Precision), Size: 32, Motor Mounting Position: In-line, Motor Type: T7 (200W Output, Absolute Encoder), Lead: A (LEFS25, 12mm; LEFS32, 16mm; LEFS40, 20mm), Stroke: 50mm, Motor Option: B (w/Lock)

Series: LEFS (Ball Screw Drive), Accuracy: H (High Precision), Size: 32, Motor Mounting Position: In-line, Motor Type: T7 (200W Output, Absolute Encoder), Lead: A (LEFS25, 12mm; LEFS32, 16mm; LEFS40, 20mm), Stroke: 350mm

Series: LEFS (Ball Screw Drive), Accuracy: H (High Precision), Size: 32, Motor Mounting Position: In-line, Motor Type: T7 (200W Output, Absolute Encoder), Lead: A (LEFS25, 12mm; LEFS32, 16mm; LEFS40, 20mm), Stroke: 850mm

Series: LEFS (Ball Screw Drive), Accuracy: H (High Precision), Size: 32, Motor Mounting Position: In-line, Motor Type: T7 (200W Output, Absolute Encoder), Lead: A (LEFS25, 12mm; LEFS32, 16mm; LEFS40, 20mm), Stroke: 850mm, Motor Option: B (w/Lock)

Series: Ball Screw Drive, Accuracy: High Precision, Size: 32, Motor Mounting Position: In-line, Motor Type: 200W Output, Absolute Encoder, Lead: LEFS25, 12mm; LEFS32, 16mm; LEFS40, 20mm, Stroke: 150mm, Motor Option: w/Lock, Auto Switch Mounting Bracket: -, Grease Application: -, Positioning Pin Hole: -, Cable Type: -, Cable Length: -, Driver Type: -, I/O Cable Length: -

Series: Ball Screw Drive, Accuracy: High Precision, Size: 32, Motor Mounting Position: In-line, Motor Type: 200W Output, Absolute Encoder, Lead: LEFS25, 12mm; LEFS32, 16mm; LEFS40, 20mm, Stroke: 50mm, Motor Option: w/Lock, Auto Switch Mounting Bracket: -, Grease Application: -, Positioning Pin Hole: -, Cable Type: -, Cable Length: -, Driver Type: -, I/O Cable Length: -

Series: Ball Screw Drive, Accuracy: High Precision, Size: 32, Motor Mounting Position: In-line, Motor Type: 200W Output, Absolute Encoder, Lead: LEFS25, 12mm; LEFS32, 16mm; LEFS40, 20mm, Stroke: 350mm, Motor Option: -, Auto Switch Mounting Bracket: -, Grease Application: -, Positioning Pin Hole: -, Cable Type: -, Cable Length: -, Driver Type: -, I/O Cable Length: -

Series: Ball Screw Drive, Accuracy: High Precision, Size: 32, Motor Mounting Position: In-line, Motor Type: 200W Output, Absolute Encoder, Lead: LEFS25, 12mm; LEFS32, 16mm; LEFS40, 20mm, Stroke: 850mm, Motor Option: -, Auto Switch Mounting Bracket: -, Grease Application: -, Positioning Pin Hole: -, Cable Type: -, Cable Length: -, Driver Type: -, I/O Cable Length: -

Series: Ball Screw Drive, Accuracy: High Precision, Size: 32, Motor Mounting Position: In-line, Motor Type: 200W Output, Absolute Encoder, Lead: LEFS25, 12mm; LEFS32, 16mm; LEFS40, 20mm, Stroke: 850mm, Motor Option: w/Lock, Auto Switch Mounting Bracket: -, Grease Application: -, Positioning Pin Hole: -, Cable Type: -, Cable Length: -, Driver Type: -, I/O Cable Length: -

Digital Flow Switch (Remote type monitor unit)

Voltage input (PFM30) Voltage input: 1 to 5 VDC Input impedance: 1 M Sensor input Current input (PFM31) Current input: 4 to 20 mA Input impedance: 250 -53No.PF-OMJ0018-F Model PFM3 External input Voltage free input (reed switch or solid state), 30 msec or more Display accuracy 0.5%F.S. 1digit max.

DOC1003077

Do not disassemble the product, unless required by installation 11 Ambient temperature is too high. (out of 10-35oC) Correct the ambient temperature within the specification range. I L Filter clogged Clean the filter. instructions. C The fan breaks Check the fan operation. If the fan breaks, need to be replaced.

FGX-OMZ0008

After the air is released, close the air exhaust port (hexagon bolt) and start operation. 11/12 FGX-OMZ0008 7. Maintenance parts 1Replacement Element part number They are printed on the name plate of the filter body.

Pressure Sensor for General Fluids

No.PS-OMG0006-D PRODUCT NAME Pressure Sensor for General Fluids MODEL / Series / Product Number PSE56# Table of Contents Safety Instructions 2 Model Identification and How to Order 8 Definition and terminology 8 Mounting and Installation 9 Wiring 9 Troubleshooting 11 Specification 12 Specifications 12 Dimensions 14 -1No.PS-OMG0006-D Safety Instructions These safety instructions are intended

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100 Pressure 0.6 MPa Pressure 0.6 MPa 30 0.5 0.5 80 25 Gripping force (N) External grip Gripping force (N) 0.4 0.4 60 20 0.3 0.3 15 40 0.2 0.2 10 20 0.1 0.1 5 L L 0 20 30 50 60 Gripping point L (mm) 40 70 0 30 40 60 70 Gripping point L (mm) 50 80 90 700 180 Angular Type Air Gripper MHY2/MHW2 Series MHW2-32D MHW2-50D MHW2-20D 300 25 100 Pressure 0.7 MPa Pressure 0.7 MPa Pressure 0.7 MPa 250