Specification for Option R 11 1 Safety instructions . 11 1 11 2 Specifications of GFCI . 11 2 11 3 How to connect the power supply . 11 2 11 4 Electric circuit . 11 2 Chapter 12 Specification for Option T 12 1 Safety instructions . 12 1 12 2 Specifications . 12 1 12 3 Remote operation . 12 2 12 4 How to connect the power supply and signal cable. 12 2 12 5 Electric circuit . 12 3 Chapter
M 11 M IDF4E/6E/8E/11E/15E1 11-1 ( ) 11-2 ADM200 IDF4E15E1-10-M IDF4E15E1-20-M IDF-S0087 IDF-S0090 1.0MPa 1 1 2 / AC100V(50/60Hz) AC200V(50/60Hz) 4W IDF Series 11-1 11 1 IDX-OM-W011 11 M 11-3 Rc1/2 32 25 1) 2830Nm 30 (5) (17)(30) 2 2 Rc1/2 11-4 1-1 IDF Series 11-3 11 2 IDX-OM-W011 12 R 12 R IDF4E/6E/8E/11E/15E1 12-1 12-2 1 AC100V AC200V INOUT IDF4E
-02-11(S)A 3/8" 15.9 17.4 23 41.2 26.1 62.5 15.6 46 (46) AS33l1FG-03-07(S)A 1/4" 3/8 19 11.2 12.9 16.6 20.2 36 21.4 50.1 42.3 40.7 37.1 35.5 13.3 32 (33) AS33l1FG-03-09(S)A 5/16" 13.2 37.1 23.5 52.2 14.2 33 (34) AS33l1FG-03-11(S)A 3/8" 15.9 17.4 23 41.2 26.1 54.8 15.6 37 (38) AS43l1FG-04-11(S)A 3/8" 1/2 24 (23.8) 15.9 17.4 18.8 25.6 46.4 (46.3) 26.1 61.2 50.8 49.2 43.7 42.1 15.6 58 (57) AS43l1FG
Metric size Inch size 100 200 205 300 400 M5 standard 3.2 1/8 standard 23 04 06 08 10 12 01 03 05 07 09 11 13 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 1/4 standard 4 6 8 10 12 3/8 standard 1/2 standard With One-touch fittings Use 1/8" tube.
Specification for Option M 11 1 Safety instructions . 11 1 11 2 Specifications . 11 2 11 3 Installation of motor type auto drain . 11 3 11 4 Electric circuit . 11 3 Chapter 12 Specification for Option R 12 1 Safety instructions . 12 1 12 2 Specifications . 12 1 12 3 Power supply connection procedure . 12 2 12 4 Cautions for handling the GFCI . 12 3 12 5 Electric circuit . 12 3 Chapter 13
Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 12, 13 10, 11 10, 11, 12 Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) 08, 09 06, 07 Number of needle rotations Number of needle rotations 543 Series AS-FG Construction: Elbow Type Meter-out type M5 type U10/32 type AS3201FG-02 Meter-in type M5 type U10/32 type AS3211FG-02 No.
Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 CH1 abnormal low tank fluid level 1 CH1 low tank fluid level 2 CH2 Abnormal low tank fluid level 3 CH2 low tank fluid level 4 Reservation 5 Fan failure *1 Alarm flag 1 6 Air exhaust fan failure *2 7 Reservation 8 CH1 abnormal rise of circulating fluid
SL5201 0.5 to 10 psig (0.0034 to 0.07 MPa) SL5202 0.5 to 30 psig (0.0034 to 0.2 MPa) SL5206 1 to 60 psig (0.007 to 0.4 MPa) SL5210 1 to 100 psig (0.007 to 0.7 MPa) 100 mm Hg absolute to 10 psig (-88kPa to 0.07 MPa) Select compatible materials of construction for the gas Vacuum to 150 psig (1.0 MPa) 500 psig (3.4 MPa) 1000 psig (6.9 MPa) 40 to 160C (40 to 71C) (No freezing) 1) 0.07 2 x 10-11
Inch size ARJ310F-N01 5/32" 1/4" 03 07 14-4-11 9 Series ARJ310 Flow Characteristics Inlet pressure: 0.7 MPa ARJ310-01 ARJ310F-01-04 ARJ310F-01-06 0.7 0.7 0.7 0.6 0.6 0.6 Outlet pressure (MPa) Outlet pressure (MPa) Outlet pressure (MPa) 0.5 0.5 0.5 0.4 0.4 0.4 0.3 0.3 0.3 0.2 0.2 0.2 0.1 0.1 0.1 0.0 0.0 0.0 0 100 200 300 400 500 600 0 100 200 300 400 500 600 0 100 200 300 400 500 600 Flow
VNA Single unit Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 7, 11, 15, 14, 20, 16, 25, 22, 32, 28, 40, 33, 50 Low vacuum to 1 Pilot pressure: 0.1 to 0.7 Single unit 1/8 to 2 (2B) 17-4-13 VNB N.C./N.O./C.O.
Series SV1000 sv1000 Spacer type { Pori sze lor Series SV2000/3000/4000 sv2ooo I ile sv4000 1/4 sY5000-11-15 sY7000-11-11 n. ,* 5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported lvlodel [,landold Pilch (mm) Appllcable cyrnoef I/etalseal voz1000 t o 0 1 3 15 0.35 ta 0 56 0 . 1 9 Up to o50 Upto o80 vQz2000 voz3{mo UD 10 olO0 Optonil atching coil valve operates the same as a 2 position
Air and oil are adjusted with varying quantities by the air for mist from the mixing valve (9) and oil adjustment needles (10) and (11).
400 500 600 0 100 200 300 400 500 600 0 100 200 300 400 500 600 Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) ARP Pressure Characteristics (Representative Values) IR-A IR Conditions: Inlet pressure 0.7 MPa Outlet pressure 0.2 MPa Flow rate Q = 20 L/min (ANR) 0.30 IRV Outlet pressure (MPa) 0.25 Set point VEX 0.20 SRH SRP 0.15 SRF 0.10 0.2 0.3 0.4 0.5 0.6 0.7 0.8
400 500 600 700 800 900 1000 0 0 100 200 300 400 500 600 700 800 900 1000 AU Flow rate (/min (ANR)) Flow rate (/min (ANR)) AF AR ARX21-01 ARX21-02 0.35 0.35 IR 0.30 0.30 Outlet pressure (MPa) Outlet pressure (MPa) VEX 0.25 0.25 0.20 0.20 AMR 0.15 0.15 ITV 0.10 0.10 IC 0.05 0.05 0 0 50 100 150 200 250 300 350 400 450 500 0 0 50 100 150 200 250 300 350 400 450 500 VBA Flow rate (/min (ANR)
17500 15 1000 20 2000 20 48 No.JXC-OMU0030-A 11.
Refer to front matters 42 and 43 for Safety Instructions and pages 3 to 11 for Actuator and Auto Switch Precautions. Selection Mounting Warning Mounting 1.
RQ MU DSpecifications Dimensions -X 11 3.5 The specifications are the same as those for the standard double acting type.
Refer to pages 11 to 13 for cylinders with auto switches.
ANR)] 06, 07, 08, 09, 10 06, 07, 08, 09, 10 01, 23, 03, 04, 06, 07 01, 23, 03, 04, 06, 07 08, 09, 10, 11 08, 09, 10, 11 03, 04 400 200 06, 07 TMH 02 01, 23 300 50 03, 04 ASD 200 100 01, 23 AS 100 AS-FE 0 0 0 5 0 10 5 0 10 5 0 10 KE Number of needle rotations Number of needle rotations Number of needle rotations Note) -U10/32 has the same specification as M5.
)] Flow rate [L/min (ANR)] 06, 07, 08, 09, 10 06, 07, 08, 09, 10 01, 23, 03, 04, 06, 07 01, 23, 03, 04, 06, 07 08, 09, 10, 11 08, 09, 10, 11 03, 04 200 400 06, 07 TMH 02 01, 23 300 50 03, 04 ASD 100 200 01, 23 AS 100 AS-FE 0 0 0 5 0 10 5 0 10 5 0 10 KE Number of needle rotations Number of needle rotations Number of needle rotations Note) -U10/32 has the same specification as M5.