Common Supply Regulator

Product (14) Plug assembly -21- 11. Disassembly Drawing 11-1. AR20M-D AR30M-D AR40M-D Cross recessed round head screws (4 pcs.) (10) Valve assembly Bonnet Valve spring Pressure regulating screw assembly (12) Valve guide assembly Pressure regulating spring Cover (11) Diaphragm assembly Cap Body -22- 11-2.

LEKF-OMZ0035

Slider type LEKFS series . 7 2.1 Specification . 7 2.2 How to Order . 9 2.3 Construction . 11 3.

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8 1

Refer to pages 15-18-3 to 15-18-4 for Safety Instructions and Common Precautions on the products mentioned in this catalog, and refer to pages 15-8-6 to 15-8-8 for Precautions on every series.

Process Pump

Air consumption (L/min [ANR]) SUP = 0.7 MPa 40 35 30 SUP = 0.5 MPa 25 20 SUP = 0.35 MPa Caution 15 SUP = 0.2 MPa 10 1.

Air Slide Table/Long Stroke Type Series MXY

MXY MTS Theoretical Output (N) Operating pressure (MPa) Cylinder bore (mm) 6 8 12 Piston area (mm2) 0.2 6 10 23 0.3 8 15 34 0.55 15 28 62 Magnetic Holding Force (N) 0.4 11 20 45 0.5 14 25 57 28 50 113 Made to Order Specifications (Refer to pages 1955 to 2021 for details.)

Rubber Seal 5 Port Solenoid Valve Series SX3000/5000

16 11 235.5 225 202.5 16.5 12 248 237.5 213 17.5 260.5 250 234 13 285.5 275 255 15 273 262.5 244.5 14 248 237.5 223.5 12 38 Series SX3000/5000 SX5000: Flat Cable Type/Plug-in Stations SS5X5-45GUDC4 C6 C8 Note) L1 to L4 dimensions of SS5X545GUStations Uare the same as SS5X5-45GUStations D-. 3 4 5 6 7 8 9 10 2 Stations L1 L2 L3 L4 148 198 248 135.5 125 105 15 160.5 150 137 185.5 175 153 16

MLGC

35 32 50 6.8 11 depth 8 28 16.5 M6 X 1depth12 135 73.5 26.5 118 16 75 15 40 37 50 8.6 14 depth 10 29 160 86.5 31.5 140 104 19 M8 X 1.25 depth 16 75, 100, 125, 150, 200, 250, 300 MXP 16 75 15 40 37 50 8.6 14 depth 10 30 160 86.5 31.5 140 104 19 M8 X 1.25 depth 16 19 18 45 42 80 17 depth 12 35 142 22 M10 X 1.5 depth20 194 170 110 95 37 10.5 MG Bore size (mm) H GR GQ GL O GK J N S GD I K L

3 Port Air Operated Valve

12 13 14 15 16 17 18 19 20 stations Station n L1 L2 1573

Digital Flow Switch ( compatible)

measurement value (PD) Bit offset 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 OUT2 OUT1 Item Error output Reservation Flow Fixed Diagnosis Reservation Diagnosis Switch output The process data of this product is Big-Endian type.

Rotary Table

Description Qty. 4 Seal 1 4 Seal 1 4 Seal 1 4 Seal 1 Parts included 11 Gasket 1 11 Gasket 1 11 Gasket 1 11 Gasket 1 12 Gasket 1 12 Gasket 1 12 Gasket 1 12 Gasket 1 in seal kit 16 Wear ring 4 16 Wear ring 4 16 Wear ring 4 16 Wear ring 4 17 Piston seal 4 17 Piston seal 4 17 Piston seal 4 17 Piston seal 4 Please refer to P19 to 21 for the product construction.

MRQB-OM0002

No.MRQB-OM02 / / / / / / / / MRQ MRQ MRQ MRQ 1 1. 1. 1. 1. 11 1-1. 11 1-2. 11 1-3. 11 2. 2. 2. 2. 12 3. 3. 3. 3. 14 3-1. 14 3-2. 14 4. 4. 4. 4. 15 4-1. 15 4-2. 16 4-3. 17 4-4. 17 4-5. 18 4-6. 18 5. 5. 5. 5. 19 5-1. 19 5-2. 21 5-3. 22 6. 6. 6. 6. 24 6-1. 24 6-2. 24 6-3. 25 7. 7. 7. 7. 26 8. 8. 8. 8. 27 9. 9. 9. 9. 28 (ISO/IEC)(JIS) *1) *2) *1) ISO 4414: Pneumatic fluid power

Air cylinder

P.11 3.

ZL3-OM00601

Vaccum release flow adjusting needle 15 7. Structural Drawing and Replacement of Parts 16 8. Maintenaunce 20 9. Specifications 21 10. Pneumatic Circuit 24 11. Exhaust Characteristics,Flow Characteristics, And Time required to reach the specified vacuum 25 11.1. Exhaust Characteristics 25 11.2. Flow Characteristics 26 11.3. Time required to reach the specified vacuum 26 12.

Compact Cylinder with Air Cushion and Lock Series RLQ

Unlocks when pressurized 17 7 77 60 4 x 9 Flat washer 4 pcs. 4 x 14 Depth of counterbore 10.5 depth 4 x 15.6 Depth of counterbore 15 depth 84.5 104 + Stroke 8 55 + Stroke 41 Retraction locking LOCK 30.5 Pc PL Port thread type Rc NPT G 1/8 1/4 M5 x 0.8 Dust cover (Manual unlocking unit) PL Unlocking port Unlocks when pressurized Rod end male thread M18 x 1.5 11 26 28.5 33.5 Rod end nut Refer

Cylinder with lock

4 4.5 D-A9/ A9V 7 7.5 8.5 9.5 9.5 10.5 D-Z7/ Z80 7.5 8.5 7.5 9.5 9.5 10.5 D-A5/ A6 9 9 10 11 11 11 D-A59W 13 13 13 14 14 15 D-A3/ A44 9 9 10 11 11 11 * Values which include hysteresis are for guideline purposes only, they are not a 27 - 28 - Auto switch proper mounting position (detection at stroke end) and its mounting height Models with rubber bumper have different dimensions for auto

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Elbow Type/Universal Type AS  1F-D Series

Description Material Note 13 14 15 16 17 18 19 No.

A-HEC-OM-J004

For details of the event output, refer to page 5-15, 5.4.11 Details of EV Output Setting Mode.

Series SYJ700 Rubber seal 3 Port Pilot Solenoid Valve

48 L plug connector (L): SYJ74-LM plug connector (M): SYJ74-M01 02 01 02 DIN terminal (D): SYJ74-D01 02 M8 connector (W0): SYJ74-W001 02 Approx. 300 (Lead wire length) Applicable cable O.D. 3.5 to 7 89.6 Max. 10 58 [65] 91.5 84 42.6 62.5 72.7 M8 x 1 45 69.1 [76.1] Approx. 300 (Lead wire length) Pg7 80.6 [82.8] 90.6 70.8 [73] 79.7 72.3 65.8 23 15 23 15 23 15 23 15 48 48 48 48 12 12 12 12

IN20267

Terminology . 11 4. Product Summary . 12 5. How to Order . 13 6. Accessories . 13 6.1. Seal cap . 14 6.2. Summary of Product Elements . 15 7. Quick Start . 16 8. Pneumatics . 16 8.1. Supply Pressure . 16 8.2. Power . 17 8.3. Network Cable . 17 8.4. Ethernet/IP (From PLC Perspective) . 18 8.5. IP Address . 18 8.6. MPC Default Parameters . 19 9. Ethernet/IP Network Parameters . 19 10.

Aluminum High Vacuum Angle Valve

55 41 20 15 63 70 183 79 2 11 75 52 20 17.5 68 88 217 100 3 11 87 95 70 20 20 72 90 256 117 3 11 114 110 83 20 26.5 98 108 321 154 3 11 134 130 102 20 38 133 138 335 200 3 11 190 180 153 30 40 114 Note 1) Dimension E applies when heater option is included.