AR20-B to AR60-B

) Note 10) Note 10) Note 10) Note 10) Note 10) use pressure within the specification range.

High Vacuum L Type Valve

Bellows assembly (7) XL1A16-2-101 XL1A25-2-101 XL1A40-2-101 XL1A50-2-101 Nut assembly (9) XL1A16-10-1 XL1A25-10-1 XL1A40-10-1 XL1A50-10-1 63 80 Valve size Description Part indication No. Bellows assembly (7) XL1A63-2-101 XL1A80-2-101 Nut assembly (9) XL1A50-10-1 XL1A80-10-1 Note 1) Bellows assembly contains the valve seal 1. It does not contain the valve seal 2.

Electric Actuator / Slider type 《 High performance Battery-less absolute encoder type 》

to 330 20 to 180 24 to 750 16 to 500 8 to 250 30 to 1140 20 to 760 10 to 350 range 801 to 900 24 to 610 16 to 410 8 to 200 30 to 930 20 to 620 10 to 280 Actuator specification 901 to 1000 24 to 500 16 to 340 8 to 170 30 to 780 20 to 520 10 to 250 1001 to 1100 30 to 660 20 to 440 10 to 220 1101 to 1200 30 to 570 20 to 380 10 to 190 10 Max acceleration/deceleration [mm/s2] 5000 Positioning

PSxx-OMU0005CN

DC12~24V10% DC12~24V10% DC(+) DC(-) 8 DC12~24V10% DC12~24V10% DC(+) DC(-) 9 ( ) 10 11 -72No.PS-OMU0005CN-C No. / / 5m 12 1015 10 SI (kPaMPa) ( ) SI kPa,MPa 13 14 15 16 FUNC 17 -73No.PS-OMU0005CN-C No. 4m 4m FUNC 18 (Er13) 10 10 () 19 ( ) / () -74No.PS-OMU0005CN-C 80mA 7F.S.(3.5F.S.) 1 1 F.S. 1 -75No.PS-OMU0005CN-C ZSE20B() ZSE20BF() ISE20B() 0.0-101.0 kPa -100.0100.0

End Lock Cylinder Series CBG1

x 1.5 23 100 1/2 21 130 40 204 4 End Lock Cylinder Series CBG1 With front lock: CBG1BN Bore size Stroke R GB (mm) Bore size (mm) DL1 GB S TB ZZ 20 19.5 10 (12) 80 (88) 11 117 (125) 25 19.5 10 (12) 80 (88) 11 122 (130) 32 20 10 (12) 81 (89) 10 (11) 123 (131) 40 19 10 (13) 87 (96) 10 (12) 139 (148) 50 23.5 12 (14) 102 (114) 12 (13) 162 (174) DL1 63 23.5 12 (14) 102 (114) 12 (13) 162 (174

Diaphragm Style Flow Switch Series IFW5 For details about certified products conforming to international standards, visit us at www.smcworld.com.

IFW5 10 03 N 1 1 PSE Z I SE3 Diaphragm style flow switch PS Light 0 None Z I SE1 2 1 With neon light (110 VAC, Red) 2 With neon light (110 VAC, Green) Flow range ZSP 3 With neon light (220 VAC, Red) Low flow setting possible (1 l/min) 10 1 to 10 l/min 4 With neon light (220 VAC, Green) 20 10 to 20 l/min Simple flow setting Without removing the cover, you can set with a screwdriver from

High Vacuum L Type Valve

Bellows assembly (7) XL1A16-2-101 XL1A25-2-101 XL1A40-2-101 XL1A50-2-101 Nut assembly (9) XL1A16-10-1 XL1A25-10-1 XL1A40-10-1 XL1A50-10-1 63 80 Valve size Description Part indication No. Bellows assembly (7) XL1A63-2-101 XL1A80-2-101 Nut assembly (9) XL1A50-10-1 XL1A80-10-1 Note 1) Bellows assembly contains the valve seal 1. It does not contain the valve seal 2.

XL-OMY0002

15 20 25 30 ( 30 10 XL-OMY0002 . 1 S 12 ( SUS304 M 3 M SUSU316L 8 11 SUS304 2 7 A6063 6 9 6 9 10 9 5 SUS304 4 5 10 4 10 S O S O XLD-25 XLD-40,XLD-50,XLD-160 XLD-63,XLD-80,XLD-100 S 1 SUS304+ 4 1) S S O 2) S O FKM 5 O 6 S O 2 FKM 9 S SUS304 10 11 XL-OMY0002 6. 6-1.

Air cylinder (Series compatible with secondary batteries)

1 D-A9-900 75 40 (n 4 85 40 (n 4 80 40 (n 4 90 40 (n 4 15 40 (n n n=(4,8,12,16) n=(4,8,12,16) n=(4,8,12,16) n=(4,8,12,16) n=(2,4,6,8) (Different surfaces and same surfaces) 15 80 85 90 95 D-M9-900 1 D-M9W-900 80 40 (n 4 90 40 (n 4 85 40 (n 4 95 40 (n 4 15 40 (n n n=(4,8,12,16) n=(4,8,12,16) n=(4,8,12,16) n=(4,8,12,16) n=(2,4,6,8) (Different surfaces and same surfaces) 65 70 10 55 60 D-M9V

High Vacuum L Type Valve

AS568-030-XN1 Note2) Refer to Chapter 4, Construction and Dimensions" (P. 10) for the part indication numbers.

VXA21/22

Refer to p.4.1-74, 4.1-75 for specifications and models.

VZ5000

Compact size (Width: 18 mm) Low power consumption: 1.8 W DC Fluid Air 0.15 to 0.7 0.1 to 0.7 0.15 to 0.7 10 to 50C (No freezing. Refer to page 3-13-4.) 20 or less 50 or less 10 3 Refer to the table below.

2/3 Port Valve

C.O. 4 220V AC 50/60Hz 1 6A 8A 10A 10A 15A 20A 25A 32A 40A 50A 1 8 1 4 3 8 3 8 1 2 3 4 10 5 24V DC 6 12V DC 7 240V AC 50/60Hz 15 2 9 Other 20 3 Option 25 4 1 1 1 2 Valve size 5 to 7 32 5 1 4 1 2 40 6 50 7 Note) Only air operated type.

Low Friction Cylinders Metal Seal Type

(MQQL/MQML) Series Variations Series MQQ Compact low friction cylinders designed for low pressure, low speed, uniform speed or low friction applications Series Bore size (mm) Stroke (mm) Operating pressure range (MPa) Actuation speed (mm/s) 10 20 30 40 50 60 75 100 10 16 20 25 30 40 MQQT Standard type 0.005 to 0.5 0.3 to 300 MQQL Lateral load resisting type (Built-in ball bushing) 0.005 to

Air Cylinder: Standard Type Double Acting, Single Rod Series CJ2 ø6, ø10, ø16 How to Order Bore size 6 6 mm Built-in Magnet Cylinder Model 10 10 mm Suffix the symbol “-A” (Rail mounting style) or 16 16 mm “-B” (Band mounting style) to the end of part Mo

15, 30, 45, 60, 75, 100, 125, 150 16 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 Manufacture of intermediate strokes at 1 mm intervals is possible.

Series KV2 Fittings

Hydrogen Peroxide Kerosene Linseed Oil Lubricating Oil Machine Oil Methyl Ethyl Ketone Mineral Oil Motor Oil Naphtha Nitrate 10% Olive Oil Ozone Ozone Low Conventration Petroleum Petroleum Oils Salt Water Soapy Water Sodium Chloride Sodium Nitrate Sodium Sulfide Sulfuric Acid (H2SO4) 10% Toluene Turpentine Urea Water Zinc Chloride Zinc Sulfate m m m m p p p p m m m m m m m p p p p p p p

XL-OMY0001

-1 XL1A25-10-1 XL1A40-10-1 XL1A50-10-1 63 80 XL1A63-2-101 XL1A80-2-101 XL1A50-10-1 XL1A80-10-1 112 2 1 FKM:No.1349-80 [] XL1A16-2-101-XN1 EPDM Barrel Perfluoro Kalrez Chemraz VMQ FKM for R R R PLASMA No. 2101-80 70W 4079 SS592 SS630 SSE38 1232-70 3310-75 -XN1 -XP1 -XQ1 -XR1 -XR2 -XR3 -XS1 -XT1 R 1Barrel Perfluoro R Kalrez Chemraz Greene, Tweed Technologies, Inc.

High Vacuum L Type Valve

Heater specifications Model XLH-16 XLH-25 XLH-40 XLH-50 Flange (valve) size 16 25 40 50 Valve type Manual type Fluid Vacuum of inert gas Operating temperature oC 5 to 150 Operating pressure Pa Atmospheric pressure to 1 x 10-6 Conductance l/s Note 1) 5 14 45 80 Internal 1.3 x 10-10 for the standard material (FKM) Leakage at ambient temperatures , excluding gas permeation Pam3/s External 1.3

Electrostatic Sensor Monitor

Do not use a cable longer than 10 m. Consult with SMC for the use with a cable longer than 10 m.

XLF Series

Specifications Model XLF-16 XLF-25 XLF-40 XLF-50 XLF-63 XLF-80 XLF-100 XLF-160 Flange (valve) size 16 25 40 50 63 80 100 160 Actuating type Normally closed Fluid Vacuum of inert gas Operating temperature oC 5 to 60 (5 to 150 for high temperature type) Operating pressure Pa (abs) Atmospheric pressure to 1 x 10-5 Conductance l/s Note 1 5 14 45 80 160 200 300 800 Internal 1.3 x 10-10 for the