Thermo-con/Rack Mount Type

Circulating device Users equipment L 0.8 x 3 x 1 x 103 x 4.2 x 103 = T = T2 T1 60 x 1000 = 167 W T1: Outlet temperature 200 W Cooling capacity = Considering a safety factor of 20%, 167 W x 1.2 = Example 3 When cooling the object below a certain temperature in certain period of time.

High Vacuum Angle Valve, XL Series

10 -6 Port A pressure Pa 1.3 x 10 -9 {1 x 10 -8} at ordinary temperatures, excluding gas permeation Internal External 1.3 x 10 -11 {1 x 10 -10} at ordinary temperatures, excluding gas permeation Leakage Pa m 3/s {Torr l/s} VCR 1.3 x 10 -11 {1 x 10 -10} Fitting Swagelok 1.3 x 10 -10 {1 x 10 -9} VCR/SWJ (Swagelok) Piping connection system 3/8B Connection size 1/4B 5 to 40C (41 to 104F) Operating

2-Color Display Digital Flow Switch Series PFM

Power supply / Output connector (2 m) ZS-28-A D Bracket With M3 x 5 l (2 pcs.) ZS-28-B Mounting screw (M3 x 8 l) Sensor connector 1 pc. ZS-28-C-1 Panel mount adapter With M3 x 8 l (2 pcs.) ZS-27-C Panel mount adapter Panel mount adapter + Front protective cover With M3 x 8 l (2 pcs.)

C92

40 22 24 32 32 33 44 52 64 12 16 20 20 46 60 70 85 G1/8 G1/4 G1/4 G3/8 M10 X 1.25 M12 X 1.25 M16 X 1.5 M16 X 1.5 13,5 15,5 17 17 58 64,5 77 80,5 M6 M6 M8 M8 10 14 18 18 5 7 8 8 23 27 30 31 11 11 14 14 74 84 90 98 17 19 24 24 10 10 10 10 32 40 50 63 C95 C92 CA1 C92KB-Stroke W CS1 Bore size (mm) AM D EE G H KK J K KW M N S SW VD WH ZZ B 22 24 32 32 30 32 40 40 12 16 20 20 G1/8 G1/4 G1/4 G3

HRX-OM-R026

mm2 30 M5 (Power supply) 50/60Hz (3 x AWG10) (Power supply) 3phase HRSH090-A-4020 AC460-480V HRSH090-W-401 x 14 mm2 (1 x AWG6) R14-5 60Hz (Grounding (Grounding cable) 3phase cable) 1: A specified earth leakage breaker is installed for option B [Earth leakage breaker] or option S [CE/UL] of each model.

SJ3A6

Component Parts Note Filter guide Plug 11 PS port with plug M-5P 1 m White 12 Filter assembly SJ3000-110-1A After tightening the plug (M-5P) with a tightening torque of 1 Nm, or manually tightening, use the tightening tool and tighten it by 1/4 turn. 1 m White , 5 pcs. included 13 Filter SJ3000-107-1A !3!5 Filter (5 pcs. included) !2!

Modular Type Filter Regulator Series AW

w w t t t q q q e IN OUT IN OUT IN OUT y y y e e r r r u u u Drain Drain Drain Parts list Material No.

VCW

1 3 stns. x 1 2 stns. x 2 2 stns. + 3 stns. 3 stns. x 2 2 stns. x 2 + 3 stns. 2 stns. + 3 stns. x 2 3 stns. x 3 2 stns. x 2 + 3 stns. x 2 Note) Manifold base is consisted of the junction of 2 and 3 station bases.

Compact Low Friction Cylinder Series MQQ ø10, ø16, ø20, ø25, ø30, ø40

H MM NN MQ10-M MQ16-M MQ20-M MQ25-M MQ28-M 10 M5 x 0.8 M3 x 0.5 10.5 16 M6 x 1.0 M4 x 0.7 11.5 20 M8 x 1.25 M5 x 0.8 13.5 25 M10 x 1.25 M6 x 1.0 16.5 30, 40 M14 x 1.5 M8 x 1.25 22.5 Clevis pin d Dd9 m m l t L t Applicable bore size (mm) Applicable snap ring Part no.

Rated Pressure Range: H (-0.1 to 2 MPa), Output Specification: IO-Link/Switch: 1 Output (PNP or NPN), Switching Type for Switch Output, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: C01 (Rc1/8), Piping Direction: L (Bottom Ported), Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof)

Rated Vacuum Range: F (-100 to 100 kPa), Output Specification: Y (PNP Open Collector 2 Outputs + Copy Function), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: C01 (Rc1/8), Piping Direction: L (Bottom Ported), Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof)

Rated Vacuum Range: F (-100 to 100 kPa), Output Specification: R (NPN Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: C01 (Rc1/8), Piping Direction: L (Bottom Ported), Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof)

Rated Pressure Range: -0.1 to 1 MPa, Output Specification: Y (PNP Open Collector 2 Outputs + Copy Function), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: C01 (Rc1/8), Piping Direction: L (Bottom Ported), Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof)

Rated Pressure Range: -0.1 to 1 MPa, Output Specification: R (NPN Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: C01 (Rc1/8), Piping Direction: L (Bottom Ported), Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof)

Rated Pressure Range: H (-0.1 to 2 MPa), Output Specification: T (PNP Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: C01 (Rc1/8), Piping Direction: L (Bottom Ported), Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof)

Rated Pressure Range: -0.1 to 1 MPa, Output Specification: S (NPN Open Collector 2 Outputs + Analog Current Output), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: C01 (Rc1/8), Piping Direction: L (Bottom Ported), Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof)

Rated Pressure Range: -0.1 to 2 MPa, Output Specification: IO-Link/Switch: 1 Output (PNP or NPN), Switching Type for Switch Output, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: Rc1/8, Piping Direction: Bottom Ported, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof, Bracket: -, Operation Manual

Rated Pressure Range: -0.1 to 1 MPa, Output Specification: PNP Open Collector 2 Outputs + Copy Function, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: Rc1/8, Piping Direction: Bottom Ported, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof, Bracket: -, Operation Manual: -

Rated Pressure Range: -0.1 to 1 MPa, Output Specification: NPN Open Collector 2 Outputs + Analog Voltage Output, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: Rc1/8, Piping Direction: Bottom Ported, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof, Bracket: -, Operation Manual: -

Rated Pressure Range: -0.1 to 2 MPa, Output Specification: PNP Open Collector 2 Outputs + Analog Voltage Output, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: Rc1/8, Piping Direction: Bottom Ported, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof, Bracket: -, Operation Manual: -