Applicable model HRS-BP008 HRS100HRS150q To circulating fluid outlet To circulating fluid return port r t w y r u r t r e Parts List No.
Digital Flow Switch Series PF2A/PF2W For Air/Water Description Integrated Display Type PF2A710, 750, 711, 721, 751 PF2W704(T), 720(T), 740(T), 11 Remote Type/Display Unit PF2A300, 301, 310, 311 PF2W300, 301, 330, 331 q q w t r SMC FLOW SWITCH w U P e SET e UNIT y RESET OUT2 OUT1 SET u DOWN t y u r RESET button ( + button) If the UP and DOWN buttons are pressed simultaneously, the RESET
low particulate generating vacuum grease. p r Non-contact construction a w t i o o n L There is no particulate generation due to friction, since the construction does not allow contact between the cylinder tube's exterior surface and the slide table's internal surface. a t e l u g c Reduced initial particulate generation 3 e i t n r a e p r a w t i o o n L No contact Cleaned, assembled,
FHG Number of solenoids 1 (P) 5 (R1) 3 (R2) Sealing type (A) 4 (B) 2 S D Single Nil R Metal seal Double FJG Rubber seal 1 (P) 5 (R1) 3 (R2) Rated coil voltage (A) 4 (B) 2 Option 3 4 24 VDC FIG 12 VDC Nil Z None 1 (P) 5 (R1) 3 (R2) Voltage other than above (50 VDC or less) Light/Surge voltage suppressor 9 A02 VS1 01 Sub-plate Thread type Size Rc Nil F T 01 02 Size 01 G Size 02 NPTF Port size
Material Replacement Parts Material Note Component Parts VQZ No. q w e r t y No. !0 !
SY1 4, SY1 4A only 1 2 1 2 4-3-6 Series SY100 Construction SY114, SY114A (A) 2 3 (R) i q y e r w V100 SY SYJ VK VZ VT VP A R P !1 o u t !0 VG VP S070 VQ VKF Part no. Material Replacement Parts Material Note Component Parts VQZ No. q w e r t y No. !0 !
. t Drain valve Open Close 1 w Air supply valve: Close t Drain valve: Close r OUT side valve: Open e IN side valve: Open Stops pressure feed. 2 Back-flushing switch OFF ON 3 4 The M/C stop signal and a signal for element clogging (differential signal switch) are used to start back-flushing.
DPP1 address Access Parameter name Initial value (dec) Contents 0x07 R Vendor ID 0x0083 (131) SMC Corporation 0x08 0x09 0x0130 (304) ISE20B-T-*-X101 0x0A R Device ID 0x0131 (305) ZSE20B-T-*-X101 0x0B 0x0132 (306) ZSE20BF-T-*-X101 ISDU parameters Index Sub index Access Parameters Initial value Remarks (dec) 0x0002 (2) 0 W System command See P.3 System Command 0x000C (12) 0 R/W Device access
M N 4-O T Q 2-P AH AG S K W U L B AL I 4-AK hole R AA AP J X AB A Y + Stroke V AI Z + Stroke AJ For 4-AO AG AN AI Cutout window 100 piston rod end connection AM Mounting dimensions For standard strokes (mm) Bore size (mm) Stroke range (mm) O N M L K J I B AP AO AN AM AL AK AJ AI AH AG AB AA P A 75, 100 125, 150 200, 250 300 63 80 100 M12 x 1.75 depth 23 100 66 180 135 117 65 228 60 M12 234
across flats 24 35 AV4000-04-1 to 6D/Y(Z)-A 1/2 1/2 1/2 98 107 56 39.5 26 26 49 Width across flats 30 33 AV5000-06,10-1 to 6D/Y(Z)-A 3/4,1 3/4,1 3/4 128 109 59 53 37 37 53 Width across flats 36 52 Optional specifications Model With bracket With built-in silence K L M N P Q R S T U V W X Y AV2000-02-1 to 6D/Y(Z)-A 30 50 51.5 44 5.5 10 66 2.3 33.5 54 M4 x 0.7 Depth 6 3 Width across flats
Output reversal command O-NOT General purpose input no., State AND input wait command I-AND General purpose input no., State Input wait 90 OR input wait command I-OR General purpose input no., State AND input time out jump command T-AND Mounting with T-brackets (P-no.) label General purpose input no., State OR input time out jump command Input wait with time out function T-OR (P-no.) label
low particulate generating vacuum grease. p r a Non-contact construction w t i o o n L There is no particulate generation due to friction, since the construction does not allow contact between the cylinder tubes exterior surface and the slide tables internal surface. a t e l u g c Reduced initial particulate generation e i t 3 n r a e p r a w t i o o n L No contact Cleaned, assembled, inspected
three phase 200 VAC CNP1 NFB MC CNP1 NFB MC L1 L1 Single phase 200 to 230 VAC Three phase 200 to 230 VAC CNP3 CNP3 L2 L2 U U U Motor U Motor L3 L3 V V V V M M N N() W W W W P1 P1 PE PE P2 P2 CNP2 CNP2 P P(+) Regeneration option Regeneration option C C D D Detector Detector CN2 CN2 L11 L11 L21 L21 Note) For single phase 200 to 230 VAC, power supply should be connected to L1 and L2 terminals
Dimensions are the same as the standard model. 2.35J 11.8 40 Construction: Refer to p.1.4-9 Dimensions: Refer to p.1.4-10 to 1.4-18 Construction: Refer to p.1.4-9 Dimensions: Refer to p.1.4-10 to 1.4-18 Refer to p.1.4-4 for other specifications.
.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Leakage test result a t e l u g c Stainless steel linear guide & low particulate generation vacuum grease e i 2 t n r a e CX p r a 0.0 10 0 20 10 w 10-10 0 5 10 t i o o n L DTime [min] Operation cycles -X e e a a l l k k a t e l u w w g a a c 2 e i o
Applicable model Minimum operating flow rate [L/min] (50/60 Hz) HRS-BP007 HRS100-28/42 HRS150-q To circulating fluid return port y To circulating fluid outlet r t w u r t r e r Parts List No.
rate measurement range l/min Integrated type Display unit Display unit (4ch) Sensor unit PF2W504(T) PF2W520(T) PF2W540(T) PF2W511 PF2W704(T) PF2W720(T) PF2W740(T) PF2W711 0.5 to 4 2 to 16 5 to 40 10 to 100 PF2W30 PF2W20 PF2W33 For Deionized Water and Chemicals For Deionized Water and Chemicals P. 44 Remote type Flow rate measurement range l/min Display unit Display unit (4ch) Sensor unit
011 14 T 14 T I D F4E/6E/8E/11E/15E1 141 I EC 142 AC200V / 2A D C24V / 2A ( 20V / 5m A) 143 O N 3 ( ) 5 /1 ( ) I D F Seri es 141 14 1 I D XO M W 011 14 T 144 PE 1 2 3 LN PE PE: L N: LN PE M 3 6. 5m m 1. 25m m 2 ( ) ( ) I D F Seri es 144 14 2 I D XO M W 011 14 T 145 I D F4E8E10T I D F4E8E20T I D F11E20T AC100/100,110V (50/60Hz) PE N L 1 2 AC200/200,220V (50/60Hz) PE