51

Symbol Foot (mm) A AL D I B B1 C H1 H W GA GB H2 J KA LC LD LH LS LT LX LZ M MM NA P S X Y Z ZZ Bore size (mm) 20 25 32 40 50 63 80 100 12 20 5 12 14 4 33 10 14.5 34 13 8 6 4 26 M4 x 0.7 6 20 (3) 32 44 3 M8 x 1.25 24 M5 x 0.8 57 15 7 32 83 Width across flats 6 length 3.5 12.5 23 6 15 16.5 4 36 10 17.5 38.5 17 10 7 4 31 M5 x 0.8 6 22 (3) 36 49 3.5 M10 x 1.25 29 M5 x 0.8 60 15 7 35 89.5 Width

Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

(mm) Applicable cylinder bore size (mm) 4 6 8 10 12 AS-FPG AS-FPQ Clean performance Resin: PP Metal: Brass (electroless nickel plated) Resin: PP Metal: Stainless steel (SUS304) M5 x 0.8 6, 10, 16, 20 AS121FP-M5 R 1/8 20, 25, 32 AS221FP-01 R 1/4 20, 25, 32, 40 AS221FP-02 R 3/8 40, 50, 63 AS321FP-03 10-AS-F 10-AS-FG R 1/2 63, 80, 100 AS421FP-04 Resin: PBT, POM Metal: Brass (electroless nickel

ASD

Metric Inch Model Port size 6 8 10 12 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 4 ASD230F-M5 ASD330F-01 ASD430F-02 ASD530F-02 ASD530F-03 ASD630F-04 M5 X 0.8 R(PT)1/8 R(PT)1/4 R(PT)1/4 R(PT)3/8 R(PT)1/2 ASD230F-U10/32 ASD330F-N01 ASD430F-N02 ASD530F-N02 ASD530F-N03 ASD630F-N04 10-32 UNF NPT1/8 NPT1/4 NPT1/4 NPT3/8 NPT1/2 Specifications Proof pressure 1.5MPa Max. operating pressure 1MPa JIS symbol

Air Catch Sensor Series ISA

-6 Part no. 105 140 175 210 245 280 315 Description ISA-2-1 ISA-2-2 ISA-2-3 ISA-2-4 ISA-2-5 ISA-2-6 ISA-2-7 L R L R L R L R L R L R No.

M-E05-1-LQ1

Union Tee Reducing LQ1T-T-R p. 5-18 Union Tee LQ1T p. 5-6 Space Saving Type Union Elbow LQ1E-SN p. 5-19 Panel Mount Union LQ1P p. 5-7 Space Saving Type Union Tee LQ1T-SN p. 5-20 Union LQ1U p. 5-7 Space Saving Type Panel Mount Union LQ1P-SN p. 5-21 Union Flange LQ1F p. 5-8 Union Elbow Reducing LQ1E-R p. 5-8 Space Saving Type Union LQ1U-SN p. 5-22 Union Tee Reducing LQ1T-R p. 5-9 5-1 A Male

Sine Cylinder Series REC

Dimensions Basic style: RECB 2 x P (Rc, NPT, G) 2 x NN Width across flats B2 G H2 G Width across flats B1 H1 Plugged (M5 x 0.8) I 2 x Eh8 NA D MM AL K A 1.5 1.5 Effective thread length 2 x FL Width across flats KA NA F N N ZZ + Stroke S + Stroke F H (mm) A AL B1 B2 D E F FL G H H1 H2 I K KA N NA NN P S ZZ MM Bore (mm) 0 -0.033 0 -0.033 0 -0.033 0 -0.039 20 M8 x 1.25 M20 x 1.5 18 15.5 13 26

Sine Cylinder Series REC

Dimensions Basic style: RECB 2 x P (Rc, NPT, G) 2 x NN Width across flats B2 G H2 G Width across flats B1 H1 Plugged (M5 x 0.8) I 2 x Eh8 NA D MM AL K A 1.5 1.5 Effective thread length 2 x FL Width across flats KA NA F N N ZZ + Stroke S + Stroke F H (mm) A AL B1 B2 D E F FL G H H1 H2 I K KA N NA NN P S ZZ MM Bore (mm) 0 -0.033 0 -0.033 0 -0.033 0 -0.039 20 M8 x 1.25 M20 x 1.5 18 15.5 13 26

Sine Cylinder Series REC

Dimensions Basic style: RECB 2 x P (Rc, NPT, G) 2 x NN Width across flats B2 G H2 G Width across flats B1 H1 Plugged (M5 x 0.8) I 2 x Eh8 NA D MM AL K A 1.5 1.5 Effective thread length 2 x FL Width across flats KA NA F N N ZZ + Stroke S + Stroke F H (mm) A AL B1 B2 D E F FL G H H1 H2 I K KA N NA NN P S ZZ MM Bore (mm) 0 -0.033 0 -0.033 0 -0.033 0 -0.039 20 M8 x 1.25 M20 x 1.5 18 15.5 13 26

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL Locking of door Prevention of dropping at the rising end MLG With front lock With rear lock CNA CNG MNB CNS Maintains the cylinder’s CLS original position even if t

Manual release N L Non-locking style Locking style Cylinder stroke (mm) (Refer to the standard stroke table on p.3.8-5.) Lock position H R W Applicable auto switches/Refer to p.5.3-2 for further information on auto switch.

Digital Flow Switch (Integrated display type) ( compatible)

Indicator light Output 1 and 2: Orange Power supply Used as switch output device 12 to 24 VDC, including ripple (p-p) 10% voltage Used as IO-Link device 18 to 30 VDC, including ripple (p-p) 10% Current consumption 50 mA max.

Digital Flow Switch (Integrated display type) ( compatible)

Indicator light Output 1 and 2: Orange Power supply Used as switch output device 12 to 24 VDC, including ripple (p-p) 10% voltage Used as IO-Link device 18 to 30 VDC, including ripple (p-p) 10% Current consumption 50 mA max.

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

Manual release N L Non-locking style Locking style Cylinder stroke (mm) (Refer to the standard stroke table on p.3.4-5.) Lock position H R W Applicable auto switches/Refer to p.5.3-2 for further information on auto switch.

Floating Joint/Stainless Steel Type Series JS

Information Floating Joint/Stainless Steel Type Series JS Stainless steel used to increase corrosion resistance Operating range Stainless steel (SUS304) Center of sphere e 5 g n a r U U g Center axis n ti a r 5 e p O Cylinder connection threads Water, etc., cannot enter the interior from the thread area.

SMC Pneumatic Clean Series

C D E GA GB H H1 J K KA MM N P M S ZZ A Up to 1000 30 27 60 22 44 16 32 33 15 51 8 M8 x 1.25 M14 x 1.5 6 14 11 1/4 27 102 164 40 Up to 1000 35 32 70 27 52 20 40 35 17 58 11 M8 x 1.25 M18 x 1.5 7 18 11 3/8 30 108 177 50 Up to 1000 35 32 85 27 64 20 40 35 17 58 11 M10 x 1.25 M18 x 1.5 7 18 14 3/8 31 116 188 63 Axial Foot Style (L) / CA2L, CA2L 10112122Relief port M5 x 0.8 2-cushion valve H

IDX-OM-W023

TB N L 3 2 1 PE 3 2 1 PE L N TB ILS ILS MC TDR TDR MC MC TDR TDR MC PTC MC OLR OLR MC PTC MC CM CM MC TDR MC MC TDR C11 PRS FM1 PRS FM1 P P C12 FM2 FM2 MOV MOV M For Option M M For Option M M For Option M M For Option M IDU11E-10-T IDU8E/11E-23-T GFCI R For Option R GFCI GFCI GFCI R For Option R R For Option R GFCI R For Option R R For Option R For Option R R For Option R TB N L 3 2

Pilot Operated

2-P Port size D 2 x 8.5 a b e Conduit terminal: T d K J (Q) L A (Q) L DIN terminal: D 32 (44) N N G 1/2 G1/2 Cable 6 to 12 E R (R) (mm) Grommet Conduit DIN terminal Conduit terminal Electrical entry (DC, AC) Port size P Model N A B C D E F H J K L M Q 19.5 19.5 22.5 N 64 70.5 84.5 Q 40 40 43 N 63.5 70 84 Q 58.5 58.5 61.5 R 46.5 46.5 49.5 N 64 70.5 84.5 Q 92 92 95 R 61 61 64 Normally open

Wedge Cam Operation Gripper Series MHK2

Refer to "Auto Switch Hysteresis" on P.24. Note 2) Refer to P.22 and 23 for auto switch specifications.

Series CJ5-S ø10, ø16 Stainless Steel Cylinder

HY C M A BA BB CA CB D F GA GB H LB LC LH LT LX LY LZ MM NN NA NB S X Y Z 10 16 D-X Individual -X Technical data Series CJ5-S Dimensions Rod side flange style (F): CJ5FS R V 0 0.3 0 0.3 CA BA BB Rod cover side GB Piping port 2 x M5 x 0.8 GA NN MM Piping port M5 x 0.8 Cover surface 0 0.3 BA CB D FY FB With head cover port in axial location (R) 2 x FC Mounting hole FX FZ NA F FT 0 0.3 BB

Micro Mist Separator Series AFD20/30/40

OUT IN q r w e Air Supply Caution 1. Install a mist separator (Series AFM) as a preliminary filter on the inlet side of the micro mist separator to prevent premature clogging. 2. Do not install on the inlet side of the dryer as this can cause premature clogging of the element. Drain M5 x 0.8 AFD30/40 Maintenance Float type auto-drain Warning 1.

Mist Separator Series AFM20/30/40

IC VBA Drain M5 x 0.8 AFM30/40 VE OUT IN VY1 Float type auto-drain Maintenance N.C. N.O. q Warning 1. Replace the element every 2 years or when the pressure drop becomes 0.1 MPa, whichever comes first, to prevent damage to the element. G e PPA w r AL Design Caution 1. Design the system so that the mist separator is installed in a pulsation-free location.