XL

G C Electrical options G XSA122-8-4 XSA1 S S L, Z XSA2 1(100V) AC XSA232-8-4 XSA3 5(24V) DC 6(12V) 32 High Vacuum Angle Valve Series XSA Specifications XSA2-32 XSA3-32 XSA3-43 Model XSA1-12 XSA1-22 XSA2-22 Normally closed direct acting 2 port solenoid valve Action Non corrosive gas for stainless steel (SUS405 equivalent) Fluid 2 3 4.5 6 Orifice diameter mm 0.17 0.33 0.6 1.05 Cv factor 0.8

M Series

X83 M3 Note 1) M-3G2 M5 Note 2) M-5G2 X226 Gasket material: Stainless steel 304, FKM Applicable thread Gasket part No. M3 M3G-DPH00489 X112 Gasket material: Stainless steel 316, special FKM Applicable thread Gasket part No. M5 M-5G3 Note 1) Compatible with models using M3 excluding M-3-2.

pneuaire

G C Electrical options G XSA122-8-4 XSA1 S S L, Z XSA2 1(100V) AC XSA232-8-4 XSA3 5(24V) DC 6(12V) 32 pneuaire High Vacuum Angle Valve Series XSA Specifications XSA2-32 XSA3-32 XSA3-43 Model XSA1-12 XSA1-22 XSA2-22 Normally closed direct acting 2 port solenoid valve Action Non corrosive gas for stainless steel (SUS405 equivalent) Fluid 2 3 4.5 6 Orifice diameter mm 0.17 0.33 0.6 1.05 Cv

Vacuum Pad with Ejector

.: M-5G2 Button head screw Part No.: CC00131 5 Button head screw (5) Remove the button head screw with a hexagon bar wrench (with across flat 2.5mm).

EXxx-OMS0026CN

Bit6() Bit7(/) 01h0Ah 64h83h 2 Get Ch031 BYTE 1 101h0Ah 09 264h83h 031 -73No.EX-OMS0026CN (Class:78h) Instance Attribute Access Name Type Value () BOOL 0 1 64h / // () BOOL 0 1 65h SI / 66h / BOOL 0 1 67h / BOOL 0 1 68h / BOOL 0 1 BOOL 0 1 69h SI / 00.1 ms 11 ms 210 ms 320 ms 01h0Ah Get/Set 6Ah 1 / USINT 01 ms 115 ms 2100 ms 3200 ms 6Bh / USINT 0Offset binary 1Sign and Magnitude 22s

Series VQ4000 Base Mounted Plug-in/Plug Lead Single Unit For details about certified products conforming to international standards, visit us at www.smcworld.com.

VQ 4 5 G 1 5 0 Enclosure Series Connector kit Nil Dusttight 4 VQ4000 VV5Q45-05C12C1 set VQ4150-5G2 sets VQ4250-5G2 sets VQ4350-5G1 set Manifold base part no. Valve part no. (Stations 1 and 2) Valve part no. (Stations 3 and 4) Valve part no.

Air Preparation Equipment

.: AL-22S) FGGL 1 O-ring Refer to pages 256 and 257 for the replacement element type. AL-25S AL-22S Case fastening parts V-band coupling (Part no.: CY-27S) CY-27S Note) The quantity used for 1 filter is 1 each of the above O-ring etc.

air-filter-e

.: AL-22S) FGGL 1 O-ring Refer to pages 256 and 257 for the replacement element type. AL-25S AL-22S Case fastening parts V-band coupling (Part no.: CY-27S) CY-27S Note) The quantity used for 1 filter is 1 each of the above O-ring etc.

Speed Controller: Standard Type Elbow Type (Metal Body) Series AS

Description Material Part no. 5 6 7 8 Note Valve seat U seal O-ring Gasket Brass HNBR NBR NBR/Stainless steel 1429138 142964-3 KA00327 M-5G2 9 x 7 x 1 Note) Construction drawing: AS1000-M5-N In case of AS1000-M5, nipples and gaskets are not attached. 527 Series AS Construction: AS2000/3000 Component Parts No. Description Parts no.

Manifold Specifications

(Manifold base) VZ5140-5G2 pcs. (Valve) DXT199-22-1A 1 pc. (Blanking plate assembly) The asterisk denotes the symbol for assembly. Prefix it to the part nos. of the solenoid valve, etc.

45

SX3140-5G2 sets (Single solenoid part no.) SX3240-5G2 sets (Double solenoid part no.) One-touch fitting for 6 C6 SX3000 Mixed M One-touch fitting for 4 C4 One-touch fitting for 6 C6 One-touch fitting for 8 C8 Mixed M SX5000 The asterisk denotes the symbol for assembly. Prefix it to the part nos. of the solenoid valve, etc.

VZ100/300/500

(Valve) VZ314R-5G2 pcs. (Valve) DXT200-8-6A1 pc. (Blanking plate assembly) DXT200-8-3A1 pc. (Blanking plate assembly) The asterisk denotes the symbol for assembly.

Industrial Filters Replacement Procedure

.: AL-22S (FKM) Warning Remove V-band/cover after confirming the pressure in the filter is zero. 2. Removal of the Element Wing nut/washer 2-1. Remove the wing nut and the washer. Caution Please remove two wing nuts at the same time. The element retainer might not be able to incline from one side when it is outside and to remove well. Element retainer 2-2.

rep-filter-e

.: AL-22S (FKM) Warning Remove V-band/cover after confirming the pressure in the filter is zero. 2. Removal of the Element Wing nut/washer 2-1. Remove the wing nut and the washer. Caution Please remove two wing nuts at the same time. The element retainer might not be able to incline from one side when it is outside and to remove well. Element retainer 2-2.

One-touch Fittings

Gasket for M5 thread: M-5G2 E Bulkhead union v v Bulkhead connector v v A KQ2 H 06 00 1 4, 6 (Oval type release button) Oval type release button KQ2 H 08 00 A 8 to 16 (Round type release button) Port size/Applicable tubing O.D.

One-touch Fittings

Applicable thread Gasket M-5G2 10-32UNF Brass Brass + Electroless nickel plating Description Part no. Applicable model Description Part no.

45

SX3140-5G2 sets (Single solenoid part no.) SX3240-5G2 sets (Double solenoid part no.) One-touch fitting for 6 C6 SX3000 Mixed M One-touch fitting for 4 C4 One-touch fitting for 6 C6 One-touch fitting for 8 C8 Mixed M SX5000 The asterisk denotes the symbol for assembly. Prefix it to the part nos. of the solenoid valve, etc.

VZ5000

(Manifold base) VZ5140-5G2 pcs. (Valve) DXT199-22-1A 1 pc. (Blanking plate assembly) The asterisk denotes the symbol for assembly. Prefix it to the part nos. of the solenoid valve, etc.

KQ2

Gasket for M5 thread: M-5G2 Gasket for M6 thread: M-6G 38 One-touch Fitting Series KQ2 Series KQ2: White body Series KQ : Black body Release button Series KQ2: Light gray Series KQ : Blue Light force for removal When the fitting is removed from the tube, the chuck and collet are released, thus preventing them from biting into the tube excessively.

VQ4000

VQ 4 5 G 1 5 0 Enclosure Series Connector kit Nil Dusttight 4 VQ4000 VV5Q45-05C12C1 set VQ4150-5G2 sets VQ4250-5G2 sets VQ4350-5G1 set Manifold base part no. Valve part no. (Stations 1 and 2) Valve part no. (Stations 3 and 4) Valve part no.