High Vacuum Angle Valve A XLFV: Air operated, With solenoid valve J N M Port 1(P) K L Port 3(R) Solenoid valve [mm] Model J K L M N XLFV-16-2 41 18.5 8.5 2.7 3 XLFV-25-2 45.5 22.5 8.5 2.7 3 XLFV-40-2 54.5 35 8.5 2.7 3 XLFV-50-2 71 35.5 12 4 2 XLFV-63-2 80.5 44 12 4 2 XLFV-80-2 90.5 60 12 4 2 13 Aluminum High Vacuum Angle Valve Double Acting, O-ring Seal RoHS XLG Series How to Order q w e r t y u XLG 2 M9N 16 A XLG
XLFV/With solenoid valve J M N Port P (pressure port) K L R P (mm) Port R (exhaust port) M 3 3 3 4 4 4 L 8.5 8.5 8.5 12 12 12 K 13 14 23 23 29 39 J 16.5 16.5 17.5 28 29 29 N Model XLFV-16 XLFV-25 XLFV-40 XLFV-50 XLFV-63 XLFV-80 3 3 3 2 2 2 Other dimensions are the same as XLF. 15 Series XLG, XLGV Double Acting/O-ring Seal Air Operated Type How to Order XLG 16 F9N High vacuum angle valve
XLA XLFV/With solenoid valve J XL XL XLQ XM XY M N Port P D(Pressure port) XSA K L P R XVD XGT Port R (Exhaust port) CYV (mm) (mm) J J K L M N K L M N Model XLFV-16 XLFV-25 XLFV-40 XLFV-50 Model XLFV-63 XLFV-80 XLFV-100 XLFV-160 35.5 12.3 10.2 3.6 3.6 78.5 28.7 12 4 2 40.5 13.8 10.2 3.6 3.6 87 38.7 12 4 2 50.5 21.6 10.2 3.6 3.6 105.5 49.7 12 4 2 67 21.7 12 4 2 128.5 58 12 4 2 Other dimensions
XLFV/With solenoid valve J M N Port P (pressure port) K L R P (mm) Port R (exhaust port) M 3 3 3 4 4 4 L 8.5 8.5 8.5 12 12 12 K 13 14 23 23 29 39 J 16.5 16.5 17.5 28 29 29 N Model XLFV-16 XLFV-25 XLFV-40 XLFV-50 XLFV-63 XLFV-80 3 3 3 2 2 2 Other dimensions are the same as XLF. 15 Series XLG, XLGV Double Acting/O-ring Seal Air Operated Type How to Order XLG 16 F9N High vacuum angle valve
-jil-|--.e*',**" @712 OTo set swikh posili,m, loGen tfie scre$/ and rno f|e sviitcfr to fie desircd po6itbn. f ighten tre soewtotre recommended brque (0.9" 1.1 lb indr). o Series NCDJP With Auto SwitchType Construction/Parts List T{CD'PBO ilcD,pBr5 hUsl Seals List Body Brass Electrdess nickel Cap cover Brass Eectroless nickel plding Piston rod Stainless steel Piston b6 (1h"1 Brass O1O (3h
XLA XLFV/With solenoid valve J XL XL XLQ XM XY M N Port P D(Pressure port) XSA K L P R XVD XGT Port R (Exhaust port) CYV (mm) (mm) J J K L M N K L M N Model XLFV-16 XLFV-25 XLFV-40 XLFV-50 Model XLFV-63 XLFV-80 XLFV-100 XLFV-160 35.5 12.3 10.2 3.6 3.6 78.5 28.7 12 4 2 40.5 13.8 10.2 3.6 3.6 87 38.7 12 4 2 50.5 21.6 10.2 3.6 3.6 105.5 49.7 12 4 2 67 21.7 12 4 2 128.5 58 12 4 2 Other dimensions
Travel km L[]Z[]5L 280 L[]Z[]3M 640 L[]Z[]5M 850 L[]Z[]3 200 1,700 L[]Z[]3H 1,200 Note. Refer to the shorter data shown above. Energizing tim e Reference of travel depending lead Horizontal direction Reference for energizing tim e Model no. Mount operating conditions. Horizontal Auto switch mount groove Model no. Mounting direction 8.
Travel km 1,700 L[]Z[]3H 1,200 No debris, dust or water adhered. L[]Z[]5L 280 L[]Z[]3M 640 L[]Z[]5M 850 L[]Z[]3 200 does not start or operation stops suddenly. Perform inspection before/after operation Note. Refer shorter data from above. Energizing tim e Inspection item What to inspect moving range. Reference of travel depending lead Mounting the body No loose part.
Includes 1 L/min [ANR] of purge air flow (at 0.7 MPa inlet air pressure) for the dew point indicator (except IDG3, 3H, 5, 5H). * Note 4.
Includes 1 L/min [ANR] of purge air flow (at 0.7 MPa inlet air pressure) for the dew point indicator (except IDG3, 3H, 5, 5H). * Note 4.
*-jil-|--.e*',**" @712 OTo set swikh posili,m, loGen tfie scre$/ and rno f|e sviitcfr to fie desircd po6itbn. f ighten tre soewtotre recommended brque (0.9" 1.1 lb indr). o Series NCDJP With Auto SwitchType Construction/Parts List T{CD'PBO ilcD,pBr5 hUsl Seals List Body Brass Electrdess nickel Cap cover Brass Eectroless nickel plding Piston rod Stainless steel Piston b6 (1h"1 Brass O1O (3h
T-nut mounting L: T-bracket mounting Adaptable actuators Compatible actuator models Symbol Motor capacity 50W 1H LJ1H101B LJ1H202A LJ1H202C LJ1H303D LJ1S101SC LJ1S202SC LJ1S303SE LJ1H101SC LJ1H202SC LJ1H303SC LJ1H102H-K LJ1H102B-K LJ1H202F-K LJ1H202A-K LJ1H303A-K Ball screw High rigidity direct acting guide Without brake 100W 2H 200W 50W 100W 200W 50W 100W 200W 100W 100W 100W 100W 200W 3H
Drivers P.89 73 2 Series LC1 Controller Single Axis Type Built-in AC Servo Driver Series LTF: Standard Motor Compatible How to Order 2V LC1 F 1 H 1 L 3 Number of axes Mounting bracket 1 3 5 1 axis M3 M5 Mounting Actuator classification N: T-nut mounting L: T-bracket mounting Series LTF (Incremental encoder) H Applicable actuators Compatible actuator models LTF6ELTF8FLTF6E-K LTF8F-K Symbol 2H 3H
Note IDG1 IDG5/5H IDG10/10H IDG20/20H IDG3/3H q w e r t y Aluminum alloy Copper alloy Body Platinum silver coated (IDG1 is electroless nickel plated.) Copper alloy Female connector Electroless nickel plated Copper alloy Strainer Case Resin Stainless steel Resin Orifice IDG3H is resin. Copper alloy Silencer Replacement Parts Part no. No.
Note IDG3, 3H 1 2 3 4 5 6 Aluminum alloy Platinum silver coating (IDG1 is electroless nickel plated) Body Copper alloy Electroless nickel plated Female connector Copper alloy Strainer Copper alloy Case Stainless steel Resin IDG3H is resin Orifice Resin Copper alloy Silencer Part number Replacement parts Description Note No.
Note IDG1 IDG5, 5H IDG10, 10H IDG20, 20H IDG3, 3H Body Brass Aluminum alloy 1 Platinum silver coated (IDG1 is electroless nickel plated.) Female connector Brass 2 Electroless nickel plated Strainer Brass 3 Case 4 Resin Orifice Resin Stainless steel 5 Silencer Brass 6 Replacement Parts Part no. No.
Back page 3 Related Products Dehumidification Dehumidification Refrigerated Air Dryer: Series IDF/IDU E Membrane Air Dryer: Series IDG Series Outlet air flow l/min (ANR) Standard dew point (C) IDG 1 to 100 IDG 3H to 100H IDG 30L to 100L IDG 60S to 100S 20 10 to 1000 15 25 to 1000 Series Applicable compressor Air flow capacity m3/min (ANR) 40 75 to 300 2.2 to 75 kW IDF 1E to 75E IDU 3E to
VAC 110 VAC 200 VAC 230 VAC DIN terminal (With surge voltage suppressor) 48 VAC 2G 2H 2V 2J 220 VAC 240 VAC 24 VAC 12 VDC 24 VDC 2K 2L 100 VAC 110 VAC 200 VAC 230 VAC 2M 2N 2P 2Q 2R 2S Conduit terminal (With surge voltage suppressor) 48 VAC 220 VAC 240 VAC 2W 24 VAC 12 VDC 24 VDC 2T 3A 3B 3C 3D 3E 3F 100 VAC 110 VAC 200 VAC 230 VAC DIN terminal (With surge voltage suppressor) 48 VAC 3G 3H
HRS-R Series 5.7 Run timer, stop timer function 5-15 HRX-OM-W058 Chapter 5 Display and setting of various functions Timer setting example Run timer Set to start after Now 1H 2H 3H 4H 5H 6H 7H 8H 3hours Stopped Operating Operating Stop timer Set to stop after 3 hours Now 1H 2H 3H 4H 5H 6H 7H 8H Operating Stopped Stopped Run timer Now 1H 2H 3H 4H 5H 6H 7H 8H Stop timer Set to start after
HRS-R Series 5.7 Run timer, stop timer function 5-15 HRX-OM-X027 Chapter 5 Display and setting of various functions Timer setting example Run timer Set to start after Now 1H 2H 3H 4H 5H 6H 7H 8H 3hours Stopped Operating Operating Stop timer Set to stop after 3 hours Now 1H 2H 3H 4H 5H 6H 7H 8H Operating Stopped Stopped Run timer Now 1H 2H 3H 4H 5H 6H 7H 8H Stop timer Set to start after