Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

Bore size (mm) 10, 20, 30, 40, 50 10, 20, 30, 40, 50 10, 20, 30, 40, 50, 75, 100 Standard stroke 6 10, 15 20, 25, 32 Applicable Auto Switch/Refer to page 8-30-1 for further information on auto switches.

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

60 9 12 80 42 100 85 15 26 54 10 50 Up to 600 20 to 600 35 32 70 27 81 108 1/4 1/4 52 20 40 10 70 9 12 90 50 110 95 17 27 59 13 63 Up to 600 20 to 600 35 32 86 27 101 115 1/4 1/4 64 20 40 10 86 11.5 15 105 59 130 102 17 26 67 18 80 Up to 750 20 to 750 40 37 102 32 119 129 1/4 1/4 78 25 52 14 102 13.5 18 130 76 160 113 21 30 72 23 100 Up to 750 20 to 750 40 37 116 41 133 140 1/4 1/4 92 30

Cylinder with Lock

12 10 51 Up to 600 35 32 70 27 81 108 1/4 1/8 52 20 40 10 9 12 70 90 50 110 95 17 56 20 13 15 12 58 Up to 600 35 32 86 27 101 115 1/4 1/4 64 20 40 10 11.5 15 86 105 59 130 102 17 65 20 18 12 15 58 Up to 750 40 37 102 32 119 139 1/4 1/4 78 25 52 14 13.5 18 102 130 76 160 123 21 79.5 20 23 18 17 71 Up to 750 40 37 116 41 133 160 1/4 1/4 92 30 52 14 13.5 18 116 150 92 180 144 21 93.5 22 25

Free Mount Cylinder for Vacuum Series ZCUK

Proper Tightening Torque Hexagon socket head bolt diameter (mm) M3 M4 M5 M6 Bore size (mm) Proper tightening torque (Nm) 10 16 20, 25 32 1.08 10% 2.45 10% 5.10 10% 8.04 10% 1251 Series ZCUK Standard Stroke Mounting Stroke (mm) Double acting style/Single rod type/Non-rotating rod Applicable cylinder Stroke (mm) Vertical mounting (Body through-hole) Bore size (mm) 10 16 20 25 32 5 10 15

Electric Rotary Table

sides (mm) Max. gripping force (N) Stroke/both sides (mm) Size Stroke/both sides (mm) Size Size Size Basic Compact 4 6 10 14 22 30 Basic Compact 4 6 10 14 Basic Compact 4 6 8 12 10 16 20 25 32 40 10 16 20 25 10 20 32 40 10 20 32 40 5.5 22 90 130 6 8 6 8 7 28 120 180 16 (32) 24 (48) 32 (64) 40 (80) 3.5 17 14 14 28 28 40 40 130 210 Note) ( ): Long stroke Features 11 Controller/Driver Controller

CNA

DL DD DA DU DC DX DE DO DR DT DS DH DF B W1 Z A B A + B + 90 CA1-B04 CA1-B05 CA1-B06 CA1-B08 CA1-B10 +0.058 0 11 57 35 65 15 85 10 9 17 8 40 52 60 10 234 10 +0.070 0 11 12 57 35 65 18 85 10 9 17 8 40 52 70 10 261 +0.070 0 13.5 12 60 162 67 40 80 25 105 12.5 11 22 10 50 66 85 10 280 16 +0.084 0 16.5 93 60 100 31.5 130 15 13.5 24 12 65 90 102 12 337 20 +0.084 0 16.5 93 60 100 35.5 130 15 13.5

CNA

DL DD DA DU DC DX DE DO DR DT DS DH DF B W1 Z A B A + B + 90 CA1-B04 CA1-B05 CA1-B06 CA1-B08 CA1-B10 +0.058 0 11 57 35 65 15 85 10 9 17 8 40 52 60 10 234 10 +0.070 0 11 57 35 65 18 85 10 9 17 8 40 52 70 10 261 12 +0.070 0 13.5 12 60 162 67 40 80 25 105 12.5 11 22 10 50 66 85 10 280 16 +0.084 0 16.5 20 93 60 100 31.5 130 15 13.5 24 12 65 90 102 12 337 +0.084 0 16.5 93 60 100 35.5 130 15 13.5

CV/MVGQ

15-10 RS Q G RS H A RZQ Series CVM5/CVM5K 20 25 32 40 Standard MI W S 10-15-16 10-15-26 Double acting Nonrotating rod CEP1 CE1 Series CVM3/CVM3K Single acting (Spring return) (Spring extend) CE2 20 25 32 40 Standard 10-15-31 10-15-44 ML2B Nonrotating rod C J G5-S CV Series CV3/CV3K 40, 50 63, 80 100 Standard 10-15-50 MVGQ Double acting Nonrotating rod 40, 50 63 CC 10-15-63 RB Series CVS1/

CNA

DL DD DA DU DC DX DE DO DR DT DS DH DF B W1 Z +0.058 0 +0.070 0 +0.070 0 +0.084 0 +0.084 0 CA1-B04 CA1-B05 CA1-B06 CA1-B08 CA1-B10 57 35 11 65 15 85 10 9 17 8 40 52 60 10 234 10 12 57 35 11 65 18 85 10 9 17 8 40 52 70 10 261 12 60 162 16 67 40 13.5 80 25 105 12.5 11 22 10 50 66 85 10 280 80 100 93 60 16.5 100 31.5 130 15 13.5 24 12 65 90 102 12 337 20 93 60 16.5 100 35.5 130 15 13.5 24 12

Thermo-con

Circulating FluidTypical Physical PropertyValues Fluorinated Fluids Density [kg/m 3] Physical property value Temperature 10C 20C 50C 80C Specific heat C [J/(kg K)] 1.87 x 10 3 0.87 x 10 3 1.80 x 10 3 0.96 x 10 3 1.74 x 10 3 1.05 x 10 3 1.67 x 10 3 1.14 x 10 3 Water Density : 1 x 10 3 [kg/m 3] Specific heat C: 4.2 x 10 3 [J/(kg K)] 133 Peltier-Type Chiller Thermo-con (Air-cooled) Series HEC-A

21

Rc1/8 62 9 10 40 40 60 101 111 M32 x 2 Rc1/8 67 10 11 53 53 77 114.5 125 Use a thin wrench when tightening the piston rod.

15

Selection Graph [Graph 2] Allowable load mass by stroke 10 [Graph 1] Allowable load mass by stroke 6 10 10 Load mass [kg] Load mass [kg] y, z + A 200 y, z + A 300 y, z + A 100 1 1 0 100 200 300 400 500 600 0 100 200 300 400 Stroke [mm] Stroke [mm] [Graph 4] Allowable load mass by stroke 20 [Graph 3] Allowable load mass by stroke 15 100 10 y, z + A = 0 Load mass [kg] Load mass [kg] y, z

HRX-OM-R039

-(T) . 8-7 8.4.2 HRSE018-A-10-(T) . 8-7 8.4.3 HRSE012-A-20/23-(T) . 8-7 8.4.4 HRSE018-A-20/23-(T) . 8-8 8.4.5 HRSE024-A-20/23-(T) . 8-8 8.5 Pump capacity . 8-9 8.5.1 HRSE012/018-A-10 . 8-9 8.5.2 HRSE012/018/024-A-20/23 . 8-9 8.5.3 OPTION-T (HRSE012/018-A-10-T). 8-10 8.5.4 OPTION-T (HRSE012/018/024-A-20/23-T) . 8-10 8.6 Sample DoC.

Stainless Steel 316

Connection thread NPT 10 Effective area Note 2) (mm2) Note 1) M Weight (g) A D L (inch) D Applicable tubing 19.3 7.4 4 22.3 KQGH03-32 10-32UNF 18 5/32 10 19.9 10 5.6 12 24 KQGH03-N01S NPT1/8 M A L 21.1 12 4 24.1 KQGH07-32 10-32UNF H 13 20.2 18.8 12 1/4 24.3 12 KQGH07-N01S NPT1/8 10.4 Connection thread 20 18 25.8 KQGH07-N02S NPT1/4 26.4 18 30.5 14 KQGH09-N01S NPT1/8 (In case of R) 22.7 20.9

Compact Guide Cylinder Series MGQ

D-A9V D-M9V 5 2 pcs. 10 1 pc. 15 10 5 D-M9 2 pcs. 15 10 1 pc. 15 10 D-M9W 2 pcs. 15 10 1 pc. 10 D-M9WV 2 pcs. 10 1 pc. D-Z7 D-Z80 10 5 2 pcs. 15 10 1 pc. D-Y59 D-Y7P 10 5 2 pcs. 15 10 1 pc. D-Y69 D-Y7PV 5 2 pcs. 5 1 pc.

SMC Pneumatic Clean Series

Series 10-/11-/21-/22-CDG1 Series 10-/11-REC Series 10-/11-CDM2X Series Perpendicular entry is unavailable.

Model Selection 1

) 0.6 0.7 Critical pressure 0.65 [658] (158) 0.5 0.6 0.55 Sonic [656] (151) 0.5 0.4 0.45 [654] (143) 0.4 0.3 0.35 0.3 [650] (133) 0.2 0.25 0.2 [646] (120) 0.15 0.1 0.1 0.05 2 2 2 2 3 2 3 2 3 2 03 04 VX211 VX22 VX23 VX2 4 VX2 50 VX2 60-02 VX2 602 10 15 5 3 5 10 15 20 25 30 4.5 10 15 20 30 40 50 60 3 2 6 30 60 8 25 35 10 20 40 10 35 Flow rate Q kg/h Figures inside [ ] indicate the saturated

HRS100/150

Cooling Capacity HRS100-A-20/40(50 Hz) HRS100-A-20/40(60 Hz) 14 14 12 12 Ambient temperature 32C Cooling capacity [kW] Cooling capacity [kW] 10 10 Ambient temperature 40C Ambient temperature 32C Ambient temperature 40C 8 8 6 6 4 4 Ambient temperature 45C Ambient temperature 45C 2 2 0 0 5 10 15 20 25 30 35 5 10 15 20 25 30 35 Circulating fluid temperature [C] Circulating fluid temperature

ITV

(Maximum 10 stations) Example) IITV00-05-07 02 03 2 stations 3 stations Indicate part numbers in order starting from the first station on the D side. 10 10 stations Note) Combination with having different pressure ranges is not available due to common supply/exhaust features. Note) A DIN rail with the length specified by the number of stations is attached to the manifold.

ZCUK

(mm) 02 04 06 08 10 13 16 20 25 32 40 50 2 4 6 8 10 13 16 20 25 32 40 50 Pad type 02 04 06 08 10 13 16 20 25 32 40 50 2 4 6 8 10 13 16 20 25 32 40 50 Pressure gauge position Thread dia.