VS7-6

B06 Bottom piping: 3 4 Ordering source area code Code Japan, Asia Australia areas E Europe N North America Dimensions Symbol Model VS7-2A03 A04 VS7-2B03 B04 VS7-2-A06 Port size Piping Side A B C D E F G H J K L M N O P Q R S T U V W X Y 62 4-M6 Depth 10 , 3 8 1 2 75 98 30 50 49 32 23 42 31 36 88 10 16 12 16 10 38 16 23 112 15.5 47.5 Bottom Side 4-M6 Depth 12 72 3 4 86 42 63 62 42 30 55 42

HAW

Refer to front matters 42 and 43 for Safety Instructions and pages 6 to 8 for Air Preparation Equipment Precautions.

Step Motor Controller

m or less NP 35 17 PULSE R + S/S NG 36 4 LA 18 PULSE R A phase pulse detector (Differential line driver) 9 PG0 LZ 8 5 LAR PG0 COM 10 LZR 9 6 LB B phase pulse detector (Differential line driver) LG 3 7 LBR Control common SD Plate 34 LG Control common 10 m or less Note 5) 33 OP Z phase pulse detector (Open collector) 1 P15R Plate SD 10 m or less 2 m or less Note 4) CN1 EMG Emergency stop 42

Rotary Actuator

E(g7) F(h9) &Q2 Q3 R S T V1 V2 W X Y CRB2B=10-=S CRB2B=10-=SE CRB2B=15-== CRB2B=15-==E CRB2B=20-== CRB2B=20-==E CRB2B=30-== CRB2B=30-==E CRB2B=40-== CRB2B=40-==E M3 0.004 0.016 0 29 15 8 14 3 1 5 9 0.5 9.5 9.5 24 6 M3 14 3.6 30 37 19.8 8.5 14.5 4 9 (6) 0.036 M3 M3 0.004 0.016 0 0.043 34 20 9 18 4 1.5 6 10 0.5 14 10 29 M3 19 7.6 39.5 47 21 11 17 6 5 12 (10) (5) M4 M4 0.004 0.016 0 0.043 42

ISO Cylinder ISO Standard (15552) C96 Series ø32, ø40, ø50, ø63, ø80, ø100, ø125 Lightweight 17% Up C85 An adjustable position trunnion has been added. to C85W Weight reduced C85-S/T C85K * Compared with the previous C96 series (ø40, 100 mm stroke) C

30 10.5 6.6 10 11 17 40 DS5040 55 16 40 4.3 12 38 4 5 5.5 25 10 35 11 6.6 12 13 20 50 DS5050 65 21 45 4.3 14 46.5 4 5 6.5 27 12 40 15 9 16 18 22 63 DS5063 75 21 51 4.3 14 56.5 4 5 6.5 32 12 45 15 9 16 18 25 80 DS5080 95 25 65 4.3 16 72 4 5 10 36 16 45 18 11 20 22 30 100 DS5100 115 25 75 6.3 16 89 4 5 10 41 16 55 18 11 20 22 32 125 DS5125 140 37 97 6.3 24 110 6 7 10 50 20 60 20 13.5 30 30 42

Modular Type Regulators Series AR

Refer to front matters 42 and 43 for Safety Instructions and pages 287 to 291 for F.R.L. Precautions. Selection Mounting and Adjustment Warning Warning 1. Residual pressure disposal (outlet pressure removal) is not possible for the AR20 to AR60 even though the inlet pressure is exhausted.

Modular Type Air Filters Series AF

Refer to front matters 42 and 43 for Safety Instructions and pages 287 to 291 for F.R.L. Precautions. Mounting and Adjustment 1. Replace the element every 2 years or when the pressure drop becomes 0.1 MPa, whichever comes first, to prevent damage to the element.

KA

KAR08-12 42 4.6 12 10 KAR10-12 44.5 33 32.8 32.8 12 20 21 18.5 15-3-24 Safety Instructions These safety instructions are intended to prevent a hazardous situation and/or equipment damage.

Direct Operated

VX31 VX31 VX32 VX33 1/8 1/4 1/4, 3/8 1/4, 3/8 50 42 61 1.5, 2.2, 3 36 41 42 42 18 93 22 76.5 30 19 19.5 27 19.5 40 42.5 58.5 46.5 92 42.5 17.5 50 75.5 40 1.5, 2.2, 3 2.2, 3, 4 2.2, 3, 4 20.5 24 24 90 35 40 22 22 22.5 32 36 22.5 60 43 46 52.5 61.5 52 49.5 95 98 52.5 64 21 57 57 89 21 106.5 47 47 98 25 25.5 68.5 61 64 60.5 52 61 66.5 21 97 21 114.5 21 Series VVX31/32/33 For Air, Oil / Manifold

Space Saving Vacuum Ejector/Vacuum Pump System Series ZQ

Note 6) When the release valve is not used, design the circuit for vacuum release separately in order to release a workpiece. 26 42 36 52 46 62 56 72 66 82 76 92 86 102 96 112 Note 1) The above dimensions are for ZZQ104-BSB. ZQ1 3M-K1 L-E G-00. ZQ1 3M-K2 L-E GK-00. ZQ1 3M-J1 L-F-00. ZQ1 3M-Q1 L-E -00. In case of ZQ1 3M-F -00, the overall length is 87.2.

LEC-OM02904

24 2.3 25 2.4 SSCNET 25 2.5 27 2.6 28 3 313-39 3.1 33 3.2 37 3.3 39 3.3.1 39 3.3.2 3-10 3.3.3 CNP1CNP2CNP3 3-12 3.4 3-19 3.5 () 3-20 3.6 3-23 3.7 3-24 3.7.1 3-24 3.7.2 3-25 3.7.3 3-27 3.8 3-28 3.9 SSCNET 3-29 3.10 3-31 3.10.1 3-31 3.10.2 3-32 3.11 3-33 3.11.1 3-33 3.11.2 3-34 3.11.3 (LE--) 3-37 3.12 3-38 3.13 3-39 1 - 4 41 4-12 4.1 42

AC Servo Motor Driver (MECHATROLINK-II type)

It is necessary to set it on the PLC side according to the kind of PLC. 6.2 The recommended value of the parameter [LEJ] LEJS40 LEJS63 LEJB40 LEJB63 Lead symbol H A B H A B T Series Lead 24 16 8 30 20 10 27 42 Parameter *1,*2 Para.

OMS0020

65 41 A 97 61 a 2 2 STX 34 22 " 66 42 B 98 62 b 3 3 ETX 35 23 # 67 43 C 99 63 c 4 4 EOT 36 24 $ 68 44 D 100 64 d 5 5 ENQ 37 25 % 69 45 E 101 65 e 6 6 ACK 38 26 & 70 46 F 102 66 f 7 7 BEL 39 27 ' 71 47 G 103 67 g 8 8 BS 40 28 ( 72 48 H 104 68 h 9 9 HT 41 29 ) 73 49 I 105 69 i 10 0A LF 42 2A * 74 4A J 106 6A j 11 0B VT 43 2B + 75 4B K 107 6B k 12 0C FF 44 2C , 76 4C L 108 6C l 13 0D CR 45 2D

Digital Gap Checker

(Refer to Page 42) Output does not turn ON Air leakage Connect piping correctly and eliminate any air leakage. Setting is not correct Perform setting correctly. (Refer to Page 42) Output stays ON (Does not turn OFF) Clogged piping Apply pressure lower than the withstand pressure to eliminate the cause of clogging of piping. Incorrect wiring Connect wires correctly.

PSxx-OMT0001CN

No.PS-OMT0001CN-E // ISA3-A/B2 OUT1 OUT2 or 2 7 8 14 15 (ISA3) 15 () 17 (2 ) 17 18 21 27 27 30 35 39 42 43 45 OUT1 OUT2 45 OUT1 45 OUT2 46 47 47 48 48 48 () 62 63 64 65 66 67 -1No.PS-OMT0001CN-E 1 (ISO/IEC)(JIS) 1) 2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules relating

3/5 Port Solenoid Valve

Caution Combinations of Solenoid Valve, Manifold Gasket and Manifold Base Combinations of Blanking Plate Assembly and Manifold Base Body ported Base mounted Manifold gasket and screw assembly VK300-41-1A VK300-41-2A Common SUP/ Common EXH Common SUP/ Individual EXH Type 40(VV3K3-40): Base mounted (A port bottom ported) Type 20(VV3K3-20): Body ported (A port top ported) Type 42(VV3K3-42):

4 Port Solenoid Valve Series VQD1000

51 3(R) 16 9 32 1(P) 17 1(P) 10 10 P = 11 4 36.5 L1 L2 4 41.5 45 C4: 4 One-touch fitting M plug connector (M) Stations D side U side 1 2 3 4 5 n Direct manual override (Non-locking) 2n x C4, M5 4(A), 2(B) port C4: One-touch fitting for 4 M5: M5 thread 2(B) 2(B) 27.5 20 15 4(A) 4(A) 5 P = 11 12.5 (46) L plug connector (L) n: Stations Dimensions n L 11 138 130 10 127 119 L1 L2 2 39 31 3 50 42

C95

62 M12 x 1.25 C85 GKM16-32 64 16 32 32 + 0.50 + 0.15 50, 63 16 83 M16 x 1.5 + 0.60 + 0.15 M20 x 1.5 GKM20-40 80, 100 20 80 20 105 40 40 C95 CP95 NCM NCA D-X 20Piston Rod Ball Joint KJ (ISO 8139) Steel Data d3 Part no. d1H9 h d6 max. b1h12 l min. a l3 Bore size (mm) 32 KJ10D 10 43 14 13 14 M10 x 1.25 20 28 40 KJ12D 12 50 16 13 16 M12 x 1.25 22 32 50, 63 KJ16D 16 64 21 15 26 M16 x 1.5 28 42

Compact Hydraulic Cylinder Double Acting/Single Rod Series CH
QB ø 20, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100

U B D-F9BAL A Auto switch mounting heights (mm) D-A7H D-A80H D-J79 D-J79W D-F7 D-F7F D-F7NTL D-F7BAL D-F7W D-A73C D-A80C D-F7WV D-A7 D-A80 D-F9V D-F9WV D-F9BAL D-J79C D-A79W D-A9V D-F7V D-F7BAVL Bore size (mm) U U U U U U U U U 20 31 24.5 25.5 31.5 28 27 32 38 29 31.5 32.5 38.5 35 34 26.5 27 40 41.5 32.5 35 36 42 38.5 37.5 30 30.5 50 47.5 38.5 41 42 48 44.5 43.5 36 36.5 63 54 42 47.5 48.5

Clamp Cylinder with Lock Series CLK1

position due to weight of clamp arm Holding a clamped state Prevents work piece slippage and dropping due to work piece weight LOCK LOCK B A B A LOCK LOCK Clamped locking Unclamped locking Compact lock mechanism minimizes extension of length dimension Series CLK1 clamp cylinder with lock Extended dimension mm E CLK1 Bore size (mm) Series CK1 clamp cylinder (without lock) 40 34 50 38.5 LOCK 63 42