Series PF2D Digital Flow Switch For Deionized Water and Chemicals 1 q t i PF2D540 o !0 u !0 !2ywr e !
G N T NPT NPTF Bracket is mounted. External pilot type is not available.
Key Position and Rotation Range Single vane type Double vane type 90 180 270 90 n o r a a ti r n n g n a o e g n o t ti r a ti o n a a 2 e g t r t o 7 e o 1 r y 0 r 9 8 y e 0 y +4 0 e 0 Key K e K +4 0 +4 0 K +4 0 Key Key 0 (45) 9 Key e Standard Optional g n a r n o ti a t o r (90) y e K (45) (45) A port B port A port A port A port B port B port B port 100 190 280 100 a r n n n r o a g
5 t !5 t r !9 !8 @2 w !4 !2 !0 !0 !6 !6 i u !7 o i u !7 o !3 y !1 e q !3 y !1 q @7 CXSJM20 to 32 CXSJL20 to 32 @5 i u !7 o !5 t !6 r !9 !8 @2 r !9 !8 @2 !6 o i u !7 !5 t #0 Rod cover Head cover Rod cover Head cover Parts List: Standard Piping No. Description Material No.
dimensions XAH7 depth XL 4-YY depth YL XB XAH7 a b X0.02 c d e XAH7 XC XL X Section XX detail Bore size (mm) a b c d e 40 6.5 4 11 5.5 10.5 WB Z WA Section XX 8.5 50 4.5 13.5 7.5 13.5 11 7 18.5 63 10 17.8 Bottom view L 4-OA through 4-OB counter bore depth OL Section XX WA Z Section XX IA 4-NN through IC 4-MM depth ML R X0.02 HA T-slot for hexagon bolt X0.02 DA DB mIB ID X U VB VA H T PW
Thread type Rc NPT NPTF G Symbol Nil N T F VCL23-5G-2 ... 5 sets Valve part no. (Stations 1 to 5) Series "" is the symbol for mounting. Add a "" in front of the part numbers for solenoid valves, etc. to be mounted. 2 3 4 Class 2 Class 3 Class 4 Enter together in order, counting from station 1 on the D side.
Cycle time: T can be found from the following equation. Calculation example) T1 to T4 can be calculated as follows. L Speed: V [mm/s] a1 a2 T1 = V/a1 = 300/3000 = 0.1 [s], T3 = V/a2 = 300/3000 = 0.1 [s] Time T = T1 + T2 + T3 + T4 [s] [s] L 0.5 V (T1 + T3) V T1: Acceleration time and T3: Deceleration time can be found by the following equation.
for each symbol only and cannot be used for actual model selection. 2 0 147 2 Series LG1H20 Standard Motor High Rigidity Direct Acting Guide Motor Output Ground Ball Screw 100W 15mm /10mm lead Horizontal Mount Without Coupling How to Order 1 F 2 PA Stroke LG1 H202 Power voltage Cable length 1 2 100/110VAC (50/60Hz) 200/220VAC (50/60Hz) 2 3 4 5 2m 3m 4m 5m Frame material Nil Aluminum alloy T
Note 7) Digital pressure switch is shipped together, but not assembled. 819 IR1000/2000/3000 Series For High/Low Temperature Environments 4 Clean Series 1 10 IR 0 IR 0 T Clean series For high/low temperature environments T L For high temperature For low temperature Specifications Specifications ISO Class 3 With M5 fitting (Applicable tubing O.D. 6) Cleanliness Bleed hole L For low temp. environments
R 2 x P (Plug) 2 x P D 2 x P (Plug) GB GA S Q JC J K PD C + Stroke FB FA G A + Stroke [mm] Bore size Standard stroke A C D FA FB G GA GB H J JC K L MM ML NN 12 (10 x 2) 10, 20, 30, 50, 100 33 24.5 6 6.5 2 17 11 5.5 58 8.5 1.5 8.5 11 M3 x 0.5 7.5 M2.5 x 0.45 16 (12 x 2) 33 24.5 6 6.5 2 18 11 5.5 64 9 3 9 11 M4 x 0.7 10 M3 x 0.5 Bore size OA OB OL P PD PE PW Q R S T U VA WA X YY YL Z 12 (10
T T 26 13 H L1 L1 H L3 (mm) (mm) H Width across flats 18 28 38 73 18 28 38 73 H Width across flats 90 92 91 117 90 92 91 117 When connected T Connection male thread T Connection male thread Min. hole size Min. hole size Weight g Model Weight g Model L1 L2 L1 Full length L3 KK130S(L)-01F -02F -03F -04F KK130P-01F -02F -03F -04F 53.0 62.5 66.5 76.0 53.0 62.5 66.5 76.0 Rc1/8 Rc1/4 Rc3/8 Rc1/
Dimensions A B 70 53 Element Dimensions A B Model EJ701S-T EJ801S-T EJ901S-T Applicable container 157 117 FGH100 286 246 FGH200 538 498 FGH300 71 Membrane Element for FGH Series ED Series RoHS Specifications Model EDS-X20 EDS-X40 Filtration accuracy (Filtration efficiency 99.9%) Note 1) 0.2 0.4 Length 247 mm 4,000 6,200 Filtration area (cm2) 495 mm 8,000 12,400 Heat resistant temperature
AS-FG AS-FP AS-FP AS-FM AS-D AS-T ASP ASN AQ ASV AK VCHC ASR ASQ 715
AS-FG AS-FP AS-FP AS-FM AS-D AS-T ASP ASN AQ ASV AK VCHC ASR ASQ 715
Actuator driving system Inside of clean room w t e q r t q Cylinder relief port piping w Solenoid valve exhaust piping e Breathing piping of regulator r Drain piping t Exhaust Cleaner for Clean room/AMP series Cylinder relief port piping Series 10-/12-/21(atmospheric release type) Connect the relief port piping with the dedicated duct piping installed outside the clean room or with the exhaust
Options ( The number of sets provided when selected in t differs by the size.) q 3 m exhaust duct hose Model: ZVB-D3A r Emitter Model: IZN10-NT-X325 Model: ZVB-AC1 e AC adapter Model: ZVB-P1A w Dust collecting bag ZVB201 set ZVB402 sets ZVB201 set ZVB402 sets y Suction slope (For ZVB20) Model: ZVB-V20A Model: ZVB-V40A u Suction slope (For ZVB40) Model: ZVB-N10A t Additional air blow nozzle
S and T (Because S function is also included in T.) Note 2) Voltage symbol 20 (200 VAC) is the terminal block connection as standard. Option S cannot be chosen. Voltage symbol 10 (100 VAC) is the power cable with plug as standard.
9 u #0 #6 t #8 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com q y $0 $1 20 r !1 e @2 !2 #7 #3 #1 32 w 50, 63, 80 Double acting (DL, DM) @3 !3 !5 #6 o @5 @4 i @1 @6 !0 @7 @9 !6 t u !7 !