Suction Flow Rate: 600 L/min (ANR, Supply Pressure: 0.35 MPa, Vacuum (2/V) Port Size/Supply (1/P) Port Tubing O.D: 04 [Vacuum: 2 x Rc1/2 (Branch Spec.); Supply: 8 (Metric)], Exhaust Method: Silencer Exhaust, Supply Valve/Release Valve Combination: B1 [Supply Valve (N.O.), Release Valve (N.C.)], Rated Voltage: 24 VDC, Electrical Entry: L Plug Vertical Connector w/Lead Wire 300mm, Light/Surge

Suction Flow Rate: 300 L/min (ANR, Supply Pressure: 0.50 MPa, Vacuum (2/V) Port Size/Supply (1/P) Port Tubing O.D: 06 [Vacuum: Rc3/4; Supply: 8 (Metric)], Exhaust Method: Silencer Exhaust, Supply Valve/Release Valve Combination: B1 [Supply Valve (N.O.), Release Valve (N.C.)], Rated Voltage: 24 VDC, Electrical Entry: M Plug Horizontal Connector w/Lead Wire 300mm, Light/Surge Voltage Supprressor

Suction Flow Rate: 300 L/min (ANR, Supply Pressure: 0.35 MPa, Vacuum (2/V) Port Size/Supply (1/P) Port Tubing O.D: 06 [Vacuum: Rc3/4; Supply: 8 (Metric)], Exhaust Method: Port Exhaust, Rc1, G1, NPT1, Supply Valve/Release Valve Combination: B1 [Supply Valve (N.O.), Release Valve (N.C.)], Rated Voltage: 24 VDC, Electrical Entry: M Plug Horizontal Connector w/Lead Wire 300mm, Light/Surge Voltage

Suction Flow Rate: 600 L/min (ANR, Supply Pressure: 0.50 MPa, Vacuum (2/V) Port Size/Supply (1/P) Port Tubing O.D: 04 [Vacuum: 2 x Rc1/2 (Branch Spec.); Supply: 8 (Metric)], Exhaust Method: Port Exhaust, Rc1, G1, NPT1, Supply Valve/Release Valve Combination: B1 [Supply Valve (N.O.), Release Valve (N.C.)], Rated Voltage: 24 VDC, Electrical Entry: M Plug Horizontal Connector w/Lead Wire 300mm

Suction Flow Rate: 600 L/min (ANR, Supply Pressure: 0.50 MPa, Vacuum (2/V) Port Size/Supply (1/P) Port Tubing O.D: 06 [Vacuum: Rc3/4; Supply: 8 (Metric)], Exhaust Method: Silencer Exhaust, Supply Valve/Release Valve Combination: B1 [Supply Valve (N.O.), Release Valve (N.C.)], Rated Voltage: 24 VDC, Electrical Entry: L Plug Vertical Connector w/o Connector, Light/Surge Voltage Supprressor:

60

Note 2) 1 Body VHS20PW-180AS VHS30PW-180AS VHS40PW-180AS VHS20PW-190AS VHS30PW-190AS VHS40PW-190AS White VHS20 VHS30 VHS40 VHS40-06 VHS50 ADC12 Flame resistant PBT 2 Bonnet ADC12 White (UL-94 Standard V-0 equivalent) VHS40PW-180-06AS VHS50PW-180AS VHS40PW-190-06AS VHS50PW-190AS Flame resistant PBT 3 Handle ADC12 Red (UL-94 Standard V-0 equivalent) 4 5 6 7 8 Cam ring Spool Spool O-ring Spool

PFA/PFW

Panel adapter B ZS-22-02 Thread type Piping port size Rc NPT G Nil N F 01 02 1/8 1/4 Specifications PFA301-m PFA300-m Model Specifications Note 1) 1 to 10, 5 to 50l/min (0.04 to 0.35, 0.18 to 1.77SCFM) Flow rate range measurement & setting Minimum setting unit 1% of maximum flow rate range Model PFA510-m PFA550-m Real-time flow rate l/min, CFM x 10-2 Display units Measured fluids Dry air,

Title not found

E 03 05 07 09 't't 5132" 1l4', 5/16' 3t8" 1/2" 6mm 8mm H , T , U , X , N 1 3 06 08 t0 1 2 1 6 32 i10-32 UNF Thread 3 5 I l t N P r H ' L . W , r .

LG1H

Driver Non-standard motor electric actuator Standard motor electric actuator Controller How to Order How to Order B LG1 02 1 Compatible model 1 G LG1 05 Cable length G R Y Matsushita Electric Industrial Co., Ltd. Mitsubishi Electric Corporation Yaskawa Electric Corporation 02 03 04 05 05 5m Cable length 2m 3m 4m 5m Applicable cables Model Manufacturer part no.

VVXA21/22

Port R Operating Fluid and Ambient Temperature Operating fluid temperature (C) (3) Vacuum Ambient temperature (C) Temperature conditions Air (Standard) Oil (Standard) (V) Port P Port A Maximum Minimum 60 5 (1) 40 5 40 40 5 5 (2) Note 1) Dew point: 5C or less Note 2) 500 cSt or less Note 3) V in parentheses is option symbol. Option Material No.

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

(R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ5201 (A) 4 (B) 2 (A) 4 (B) 2 VQ5200 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ5301 VQ5300 (A) 4 (B) 2 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ5401 VQ5400 (A) 4 (B) 2 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ5501 VQ5500 (A) 4 (B) 2 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) Parts list Parts list Description Material Note

Swivels

Compact design to fit into tight areas. 5 0 40 35 30 0 5 20 10 15 25 45 Flow in USGPM Quick Coupling Division 8145 Lewis Road Minneapolis, MN 55427 www.parker.com/quickcouplings D-27 How To Order S Series Swivels Port 1 Port 2 Shaft O-Ring O-Ring Back-Up Ring Flow Holes Housing O-Ring Back-Up Ring O-Ring Retaining Ring Retainer D Swivels S Part Number: S 21 02 V 8 8 NI Material and Finish

Compact Electric Actuator Series LG1

hole 5 5 5 5 120 130 5 5 Summary of input/output signals (connector CN-1/F) Pin No. 1 2 3 4 5 7 8 9 10 Pin No. 11 12 13 14 15 16 17 19 20 Signal name Digital output power supply Failure Positioning completion Z phase pulse Symbol V+ ALM PF OP SG NP NG PP PG Signal name Shield Driver model MR-C10A MR-C10A1 Symbol SD SG CR LSN LSP V5 SON OPC V24 Interface power supply common Clear Reverse stroke

Series 12-REA ø25, ø32, ø40, ø50, ø63 Sine Rodless Cylinder

Recommended speed controller Model Elbow type 10-AS2201F-01-06-X214 10-AS2201F-02-06-X214 10-AS2201F-02-06-X214 10-AS3201F-02-08-X214 10-AS3201F-02-08-X214 Model Straight type 10-AS2301F-01-06-X214 10-AS2301F-02-06-X214 10-AS2301F-02-06-X214 10-AS3301F-02-08-X214 10-AS3301F-02-08-X214 In-line type 10-AS2001F-06-X214 10-AS2001F-06-X214 10-AS2001F-06-X214 10-AS3001F-08-X214 10-AS3001F-08-X214

3 Port Direct Operated Solenoid Valve Metal Seal, Body Ported 1

How to Order VS31 3 02 1 5 Thread type Caution Nil Rc N NPT Standard 3 Body size For Safety Instructions and Solenoid Valve Precautions, refer to pages 4-18-2 to 4-18-6.

HRX-OM-W032

Display and Setting of Various Functions . 5-1 5.1 List of Functions . 5-1 5.2 Function. 5-2 5.2.1 Key operations . 5-2 5.2.2 List of parameters . 5-4 5.3 Main Display . 5-7 5.3.1 Main display . 5-7 5.3.2 Items on the main display . 5-7 5.4 Alarm Menu . 5-8 5.4.1 Alarm menu . 5-8 5.4.2 Items shown on the alarm menu display . 5-8 5.5 Check Monitor Menu . 5-9 5.5.1 Check monitor menu . 5-9

LEC-T1_C

-3-5) (6-3-5-1) Input pinSET AX IS.

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

1 Rolled steel Rod end nut #5 e.

Series CXS 10-/11-/12- Dual rod cylinder 21-/22- ø6, ø10, ø15, ø20, ø25, ø32

Load voltage 24 VDC,100 VAC 24 VDC (10 to 28V) 28 VDC or less Load current range Indicator light 5 to 40mA, 5 to 20mA 5 to 40mA 40mA or less D-Z73 D-Y59B D-Y59A Air cylinder Rotary actuator Air gripper Directional control valve Fittings & Tubing Pressure switch Clean gas filter Flow control equipment Filter, Pressure control equipment Air preparation equipment 2-wire type 3-wire type Solid

VQ5000

SOL.B VQZ100-47-B Note) It can be used with all voltages. 2-6-3 4 Series VQ5000 Base mounted Base Mounted Plug-in/Plug Lead: Single Unit Model Response time (ms) Flow Characteristics Series Number of solenoids Weight (kg) Model Port size 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) Standard 1 W AC Low wattage 0.5 W b Cv b C[dm3/(s.bar)] C[dm3/(s.bar)] Cv 0 5 0 5 0 5 0 5 0 5 0 5 0 5 0 5 0 5 0 5 0