Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

Example) 10-ARP30K-03BG-1RY Clean room compliant, copperfree, fluorine-free, silicone-free Clean room compliant Symbol Description 20 30 40 Body size 20 30 40 Body size Nil K Without backflow function With backflow function With backflow function + Nil N F Thread type Rc NPT G + 01 02 03 04 1/8 1/4 3/8 1/2 Port size + Nil B Note 2) H a Without mounting option With bracket With set nut (For

HEC-OM-Y008

These instructions indicate the level of potential hazard by label of Month y Z A B C D . 0 0 0 10 20 30 40 50 60 70 Do not use devices that generate electromagnetic radiation such as Jan o yo Zo Ao Bo Co Do . 0 10 20 30 40 50 60 70 Caution, Warning or Danger, followed by important safety information which must be carefully followed.

VH Series, 4 Way Hand Valve

44 2A +0.3 0 1 (P) 3 (R) C +0.5 0 B0.1 4-1/4,3/8NPT 4 (B) Max. panel thickness D (mm) A 3.2 3.2 3.2 B 40 51 64 C 35 41 51 D 3.5 6 8 VH200 type VH300 type VH400 type 8 Panel Mount/Dimensions Series VH (mm) / Panel mount type Dimensions VH41 -N02/N03/N04 VH41 -N06 Scale: 35% 2 (A) 4 (B) 4 (B) 2 (A) 25 25 3 (R) 1 (P) 3 (R) 1 (P) 88 102 89 107.5 19 102 46.6 46.6 88 81 94 148 144 97 97 67 1.5

Drain Separator for Vacuum Series AMJ 1

ZCU OUT IN AMJ Misc. 2port size Q B Maintenance space 20 Rc 1/8 Drain (mm) A B Note) C D With drain guide R Note) Bracket mounting dimensions Model Port size Q E F G H J K L M 158 (160) 2.3 53 8 6.5 23 40 41 16 53 14 169 (171) 53 1/4, 3/8 AMJ3000 194 (195) 2.3 70 10.5 8.5 26 54 50 17 70 18 205 (206) 70 3/8, 1/2 AMJ4000 273 (274) 3.2 90 13 11 35 66 70 23 90 24 284 (285) 90 3/4, 1 AMJ5000 Note

Drain Separator for Vacuum Series AMJ

Discharge Q B ZM Drain guide (-J) ZH ZU Maintenance space 40 R ZL P Rc 1/8 Drain 1/4 female thread without valve function ZY Hexagon width across flats 24 ZQ AMJ5000 L A F ZF Bracket (Option) G K M ZP D J C E ZCU OUT IN AMJ Misc. 2port size Q B Maintenance space 20 Rc 1/8 Drain (mm) A B Note) C D With drain guide R Note) Bracket mounting dimensions Model Port size Q E F G H J K L M 169 (

IDX-OM-X011

Connected A B C D E F G H I J IDF190D JIS10KFF 80A(3B) flange 750 1510 1320 375 480 600 700 800 355 427 IDF240D JIS10KFF 100A(4B) flange 770 1550 1640 385 703 730 700 800 355 467 Auto drain is included in the package.

AME

size 01 B 1 8 B 1 4 B 3 8 04 B 1 2 06 B AFF 1 Standard 11 2 Standard Nil Rc Thread type 02 03 JIS Symbol AME AM F G N NPT P . 14-20-57 3 4 1B Misc. 10 14 1 B 1 2 20 2B Caution Note) Refer to How to Order Bowl Assembly on page 14-20-59.

3-Screen Display Multi-channel Digital Sensor Monitor Up to 4 pressure sensors can be connected!

A B PF3W504 0 4 PF3W520 0 16 PF3W540 0 40 PF3W511 0 100 Display A Set A and B to the values shown in the table on the left.

Fluoropolymer Piping Equipment

Body Needle V seal Lock nut Adjustment handle Insert bushing Nut Collar A 1 2 3 4 5 6 7 8 PFA PCTFE PTFE PVDF PVDF PFA PFA PFA Body class 2 y u y u B Dimensions A (B) (max.S) D H Port A 2 x G SMC (J) SMC C E F K Port B E A B C D E F G H J K S Model 48 60 72 LVN20 LVN30 LVN40 24 30 36 12 18 22 88 110 124 34.5 43 52 6 9 11 4 5 6 14 25 25 20 26 33 18 24 30 2.4 7.5 8.0 940 LQ1/LQ3/LVN/LQHB Series

Precision Regulator

(full span) Accuracy guarantee temperature range : 235 Suffix R: Bracket, Name plate, Mounting on the opposite side Note1) Accessories Port size 02 : 1/4 03 : 3/8 04 : 1/2 NIL: None B: Bracket (P36203018) G: Pressure gauge Note2) Note3) Thread type when Rc and G. Thread type when NPT.

Precision Regulator

We guarantee that the product complies with the outline dimensions provided. d.

AFF

Combinations such as C-FV, D-FHV, J-ST are not possible.) : Not available F H R S U T V Symbol Auto drain specifications Nil Auto drain 3 Symbol Nil Description C D J Drain cock (Without auto-drain) N.C. auto drain N.O. auto drain C D 3 Refer to Auto Drain Specifications/Option Combinations.

Body Size: 40 (Applicable AC Size: AC40), Handle Operation: Single Action, Thread Type: F (G), Port Size: 04 (1/2), Mounting: B (w/Bracket), Silencer: without Silencer, Handle Color: Red, Handle Material: Resin, Flow Direction: Flow Direction: Left to Right), Unit: Unit of Product Label: MPa

Body Size: 40 (Applicable AC Size: AC40), Handle Operation: Single Action, Thread Type: Rc, Port Size: 03 (3/8), Mounting: B (w/Bracket), Silencer: without Silencer, Handle Color: Red, Handle Material: Resin, Flow Direction: Flow Direction: Left to Right), Unit: Unit of Product Label: MPa

Body Size: Applicable AC Size: AC40, Handle Operation: Single Action, Thread Type: G, Port Size: 1/2, Mounting: w/Bracket, Silencer: without Silencer, Handle Color: Red, Handle Material: Resin, Flow Direction: Flow Direction: Left to Right), Unit: Unit of Product Label: MPa

Body Size: Applicable AC Size: AC40, Handle Operation: Single Action, Thread Type: Rc, Port Size: 3/8, Mounting: w/Bracket, Silencer: without Silencer, Handle Color: Red, Handle Material: Resin, Flow Direction: Flow Direction: Left to Right), Unit: Unit of Product Label: MPa

High Purity Fluoropolymer Needle Valve Series LVN 1

S) D H VX Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VX3 VXA VN A port LVC 2-G LVA LVH SMC LVD SMC (J) C LVQ LQ E LVN TI/ TIL PA F K B port E PAX PB A B C D E F G H J K S LVN20 LVN30 LVN40 Model 48 60 72 2.4 7.5 8.0 18 24 30 20 26 33 14 25 25 4 5 6 6 9 11 34.5

How to Order 90-SV Series Single Valve/Sub-plate Type IP67 Compliant

1 5 (EA) 1 (P) 3 (EB) 2 position double Manual override (A) 4 (B) 2 2 Nil D Non-locking push type Push-turn locking slotted type 5 (EA) 1 (P) 3 (EB) 3 position closed center (A) 4 (B) 2 Light/Surge voltage suppressor 3 U R With light/surge voltage suppressor(Non-polar type) With surge voltage suppressor(Non-polar type) 5 (EA) 1 (P) 3 (EB) 3 position exhaust center (A) 4 (B) 2 M12 waterproof

Series 10-SZ3000 5 Port Solenoid Valve Plug-in Type [Option]

LOCK FREE LOCK FREE U D B M U side (2 to 10 stations) D side (2 to 10 stations) Power supply terminal Both sides (2 to 20 stations) Special specifications Specifications Symbol For special specifications, indicate separately with the manifold specification sheet. Note) A total of up to 3 SUP/EXH blocks can be mounted. Please contact SMC if 4 or more will be mounted.

5 Port Solenoid Valve Series SZ3000 Plug-in Type For details about certified products conforming to international standards, visit us at www.smcworld.com.

Connector type F: D-sub connector (25 pins) P: Flat ribbon cable (26 pins) SUP/EXH block mounting position Power supply terminals LOCK FREE LOCK FREE U side (2 to 10 stations) U D B M Specifications Symbol P P12 N N12 D side (2 to 10 stations) 24 VDC, Positive common Both sides (2 to 20 stations) 12 VDC, Positive common Special specifications 24 VDC, Negative common For special specifications