Rated Flow Range: 20 (2 to 16 L/min), Flow Adjustment Valve: w/o Flow Adjustment Valve, Thread: F (G), Port Size: 04 (1/2), Output Specification/Temperature Sensor: L2T (Out 1: IO-Link/Switch Output, N/P; Out 2: Switch Output, N/P; Temperature Sensor: Yes), Lead Wire: Q (w/M12 -M8 Conversion Lead Wire, 0.1 m), Unit Specification: Instantaneous Flow: gal/min; Accumulated Flow: gal; Temperature

Rated Flow Range: 04 (0.5 to 4 L/min), Flow Adjustment Valve: w/o Flow Adjustment Valve, Thread: N (NPT), Port Size: 03 (3/8), Output Specification/Temperature Sensor: L (Out 1: IO-Link/Switch Output, N/P; Out 2: None; Temperature Sensor: None), Lead Wire: Q (w/M12 -M8 Conversion Lead Wire, 0.1 m), Unit Specification: Instantaneous Flow: gal/min; Accumulated Flow: gal; Temperature: °C, Bracket

Rated Flow Range: 40 (5 to 40 L/min), Flow Adjustment Valve: w/o Flow Adjustment Valve, Thread: N (NPT), Port Size: 04 (1/2), Output Specification/Temperature Sensor: L2T (Out 1: IO-Link/Switch Output, N/P; Out 2: Switch Output, N/P; Temperature Sensor: Yes), Lead Wire: Q (w/M12 -M8 Conversion Lead Wire, 0.1 m), Unit Specification: M (Instantaneous Flow: L/min; Accumulated Flow: L; Temperature

Rated Flow Range: 04 (0.5 to 4 L/min), Flow Adjustment Valve: S (w/Flow Adjustment Valve), Thread: N (NPT), Port Size: 03 (3/8), Output Specification/Temperature Sensor: L2T (Out 1: IO-Link/Switch Output, N/P; Out 2: Switch Output, N/P; Temperature Sensor: Yes), Lead Wire: Q (w/M12 -M8 Conversion Lead Wire, 0.1 m), Unit Specification: M (Instantaneous Flow: L/min; Accumulated Flow: L; Temperature

Rated Flow Range: 20 (2 to 16 L/min), Flow Adjustment Valve: S (w/Flow Adjustment Valve), Thread: N (NPT), Port Size: 04 (1/2), Output Specification/Temperature Sensor: L2T (Out 1: IO-Link/Switch Output, N/P; Out 2: Switch Output, N/P; Temperature Sensor: Yes), Lead Wire: Q (w/M12 -M8 Conversion Lead Wire, 0.1 m), Unit Specification: M (Instantaneous Flow: L/min; Accumulated Flow: L; Temperature

Rated Flow Range: 20 (2 to 16 L/min), Flow Adjustment Valve: S (w/Flow Adjustment Valve), Thread: N (NPT), Port Size: 04 (1/2), Output Specification/Temperature Sensor: L2T (Out 1: IO-Link/Switch Output, N/P; Out 2: Switch Output, N/P; Temperature Sensor: Yes), Lead Wire: Q (w/M12 -M8 Conversion Lead Wire, 0.1 m), Unit Specification: Instantaneous Flow: gal/min; Accumulated Flow: gal; Temperature

IDX-OM-W026

IDF22E-**-L IDF37E-**-L IDF55E-**-L IDF75E-**-L 0.151.6 ) N.O. () ) 50L/min(ANR) (ADH4000-04) ( 10) IDF Series 10-1 10 1 IDX-OM-W026 10 L 10-3 IDF Series 10-3 10 2 IDX-OM-W026 11 M 11 M 11-1 ( ) IDF Series 11-1 11 1 IDX-OM-W026 11 M 11-2 ADM200 IDF22E-**-M IDF37E-**-M IDF55E-**-M IDF75E-**-M IDF-S0090 1.0MPa 1 1 2 / AC200V(50/60Hz) 4W (10, 0.95m) (10, 0.95m) 11-

IDX-OM-W017

(Ex.) 10-2 1.6MPaADH4 000-04 IDFA4E 15E1-23-L N.O() 1.6MPa 0.051.6MPa (Rc1/2IDFA3E to 11E) 25mm (Rc3/4IDFA15E1) 32mm (R1/2IDFA3E11E) (R3/4 X R1/2IDFA15E1) (R1/2) (L) IDFA Series 10-1 10 1 IDX-OM-W017 10 L 10-3 1. Rc1/2 1) R3/4: 28 30Nm R1/2 ,R3/4 2. 3. (27mm)(22mm) () () () 10-4 1. 2. 3.

Rated Flow Range: 04 (0.5 to 4 L/min), Flow Adjustment Valve: S (w/Flow Adjustment Valve), Thread: N (NPT), Port Size: 03 (3/8), Output Specification/Temperature Sensor: LT (Out 1: IO-Link/Switch Output, N/P; Out 2: None; Temperature Sensor: Yes), Lead Wire: Q (w/M12 -M8 Conversion Lead Wire, 0.1 m), Unit Specification: M (Instantaneous Flow: L/min; Accumulated Flow: L; Temperature: °C),

Valve; w/Stop Valve), Supply/Return Port Size: 04 (1/2), Return Unit Flow Switch Output Specifications: DT (Out 1: NPN; Out 2: Flow Rate: Analog 4 to 20 mA ⇔ Analog 4 to 20 mA; Temperature Sensor: Yes), Lead Wire: Q (w/M12 -M8 Conversion Lead Wire, 0.1 m), Return Unit Flow Switch Unit Specifications: F (Integrated Display: gal/min; Accumulated Flow: gal; Temp.: °F)

Valve; w/Stop Valve), Supply/Return Port Size: 04 (1/2), Return Unit Flow Switch Output Specifications: FT (Out 1: PNP; Out 2: Flow Rate: Analog 4 to 20 mA ⇔ Analog 4 to 20 mA; Temperature Sensor: Yes), Lead Wire: Q (w/M12 -M8 Conversion Lead Wire, 0.1 m), Return Unit Flow Switch Unit Specifications: F (Integrated Display: gal/min; Accumulated Flow: gal; Temp.: °F)

Valve; w/Stop Valve), Supply/Return Port Size: 04 (1/2), Return Unit Flow Switch Output Specifications: 2T (Out 1: Analog 4 to 20 mA; Out 2: Flow Rate: None; Temp.: Analog 4 to 20 mA; Temperature Sensor: Yes), Lead Wire: Q (w/M12 -M8 Conversion Lead Wire, 0.1 m)

Valve; w/Stop Valve), Supply/Return Port Size: 04 (1/2), Return Unit Flow Switch Output Specifications: L2T [Out 1: IO-Link/Switch Output (N/P); Out 2: Flow Rate/Temp.: Switch Output (N/P); Temperature Sensor: Yes], Lead Wire: Q (w/M12 -M8 Conversion Lead Wire, 0.1 m)

Rated Flow Range: 04 (0.5 to 4 L/min), Flow Adjustment Valve: S (w/Flow Adjustment Valve), Thread: N (NPT), Port Size: 03 (3/8), Output Specification/Temperature Sensor: L2T (Out 1: IO-Link/Switch Output, N/P; Out 2: Switch Output, N/P; Temperature Sensor: Yes), Lead Wire: Q (w/M12 -M8 Conversion Lead Wire, 0.1 m), Unit Specification: M (Instantaneous Flow: L/min; Accumulated Flow: L; Temperature

Rated Flow Range: 20 (2 to 16 L/min), Flow Adjustment Valve: w/o Flow Adjustment Valve, Thread: Rc, Port Size: 04 (1/2), Output Specification/Temperature Sensor: L2T (Out 1: IO-Link/Switch Output, N/P; Out 2: Switch Output, N/P; Temperature Sensor: Yes), Lead Wire: Q (w/M12 -M8 Conversion Lead Wire, 0.1 m), Unit Specification: M (Instantaneous Flow: L/min; Accumulated Flow: L; Temperature

76

. t Operation factor LED The set dew point is displayed on the multi-display while this LED is ON. y Set dew point LED The condensation pressure of the refrigerant is displayed on the multi-display while this LED is ON. u Condensation pressure LED Increase the set dew point.

Series MHZ2 11- ø10, ø16, ø20, ø25 22- Air Gripper

(Mounting thread) Note) If the fitting attached to the port interferes with the auto switch, please use the extension fitting assembly supplied with the air gripper. 4 x AA thread depth AB (Mounting thread) Prepared hole diameter AC through (Mounting hole) Note) AD depth AE AF depth AG S H When open AS When closed AR When closed AT M T D P B R N G Q F E C A 2 x AH thread depth AJ (Mounting

CJ1

plated Electroless nickel plated CA2 Fittings t CS1 Rod seal Piston seal Tube gasket Mounting nut Rod end nut y u i o !

MXF

7 q !1 y Note Component Parts Description Body Table End plate Rail Guide Rod Piston assembly Seal support Head cap Floating bushing Orifice Roller stopper Cylindrical roller Roller spacer Rod bumper Description Adjust bumper Piston seal Rod seal O-ring Material Hard anodized Hard anodized Hard anodized Heat treated Heat treated Material Note No. q w e r t y No. !6 !7 !8 !

Programless Controller (With Stroke Study) ® Specialized for Series LEM Series LECP2

Power supply ON/Servo OFF: Green flashes. q q PWR Power supply LED y w With alarm : Red turns on. Parameter setting : Red flashes. w ALM Alarm LED Change and protection of the mode switch (Close the cover after changing switch.) u i e Cover o !0 Frame ground (Tighten the bolt with the nut when mounting the controller. Connect the ground wire.) r FG !1 !2 t y u i o !0 !1 !2 !3 !4 !5 !