Square Tube Type Air Cylinder Series MB1

/ (L) Bore size (mm) Cushion valve Port LS ZZ 32 40 50 63 80 100 134 138 156 156 184 188 168 176 198 201 240 244 LH LY 4-LD LT (mm) Foot type ZZ + Stroke LS + Stroke X Y X Y LX Bore size (mm) Stroke range X Y LD LH LS LT LX LY LZ ZZ LZ 32 40 50 63 80 100 700 800 1000 1000 1000 1000 9 11 11 14 14 16 22 24 27 27 30 32 7 9 9 12 12 14 30 33 40 45 55 65 128 3.2 3.2 3.2 3.6 4.5 4.5 32 38 46 56

High Vacuum Angle Valve, XL Series

18 High Vacuum Angle Valve Series XLG, XLGV Dimensions Dimensions (mm) 1in=25.4mm (b) XLG/Air operated type C D E C E E Fn (KF flange) Fd (K flange) (a) (c) G H J B Heater (optional) A A (mm) (mm) H 40 G 17 26 41 52 70 83 Fd Fn 30 40 55 75 87 114 D 1 1 2 2 3 3 C 38 48 66 79 100 117 B 110 120 171 183 209 250 A 40 50 65 70 88 90 A B C D Fn Fd G H 40 Note 1) E J E Note 1) J 26 28 36 38 45 56

Series VC, Series VCS, Direct Operated 2 Port Solenoid Valve for Steam

Valve model Port size VCS21 VCS20-12-01 1/8, 1/4 34 40 25 30 12.8 12.8 5 4.5 6 13 VCS30-12-02 1/4, 3/8 42 52 30 40 19 19 6 5.5 7 19 VCS31 VCS30-12-04 1/2 48 56 36 44 23 23 6 5.5 7 23 VCS40-12-02 1/4, 3/8 42 52 30 40 23 23 6 5.5 7 19 VCS30-12-04 VCS41 1/2 48 56 36 44 23 23 6 5.5 7 23 VCS40-12-06 3/4 56 65 44 53 28.2 28.2 6 5.5 7 26 Bracket material: Stainless steel 3 Series VCS Direct Operated

Shuttle Valve/AND Valve, with One-Touch Fittings, SeriesVR12

F

L4 L5 M1 M2 1/8" 11.4 8.4 52 6.2 25.7 36.1 17.5 12.7 12.9 26.4 VR1211F-01 14.8 5/32" 12.8 10.4 56 26.6 38.5 21.9 15.7 15.8 30.4 6.8 VR1211F-03 1/4" 13.2 13.2 54.4 7.1 28.8 42.5 25.6 16.8 16.8 27.0 VR1211F-07 4 Related Products Holder Series TMH Specifications This holder is used to secure the AND valve and shuttle valve with One-touch fittings.

17

(mm) (mm) F Applicable cylinder E EA EB EC EY FB FC MY1B25 MY1B32 MY1B40 FH 12 FW F Applicable cylinder E EA EB EC EY FB FC MY1B25 MY1B32 MY1B40 FH 16 FW 56 10 49 6.5 53.5 6 33 13 10 57 8.5 57.5 6 43 17 20 46 20 12 61 8.5 67 6 43 17 12 74 11.5 73 8 57 22 25 16 56 25 22 74 15 76 9.5 81.5 6 43 17 15 82 12 87 8 57 22 31 16 56 31 22 74 h S T TT W Shock absorber model MY1B25 MY1B32 MY1B40 a 4.5

3 Port Solenoid Valve/

1/8" (Without check valve) Applicable tube O.D.: 8, 5/16" (With check valve) (External pilot port) Channel 1 Channel 2 64.5 Safety limit switch (made by OMRON) Part number: D4N-9B31 M12 x 1 A 34 Applicable cable O.D. 4.5 to 7 Pg9 16.6 175.9 (190.9: For external pilot) (76.2) (75) Vent port Should be normally open. 214.1 3 x 8.5 (Mounting hole) (27.7) (Max. 3) 3 3 (106.6) 41.5 (69.5) 2 1 56

Thermo-chiller

) 23 to 113F (5 to 45C) Circulating uid Note 2) Tap water, 15% Ethylene glycol aqueous solution, Deionized water Set temperature range Note 1) 41 to 95F (5 to 35C) Cooling capacity 50/60 Hz Note 3) kW 9.0/9.5 13.0/14.5 Heating capacity 50/60 Hz Note 4) kW 1.7/2.2 2.5/3.0 Temperature stability Note 5) 1.8 (1.0) Circulating uid system Rated ow 50/60 Hz (Outlet) Note 6) 11/14.8 gal/min (42/56

VDW30/40-XF

Caution One-touch fitting Dimensions VDW30-G--P7 / P7 Quick Fastener VDW40-G--P10 / P10 Quick Fastener 30 36 Approx. 300 21 23 32 18 20 27 Approx. 300 56 48 10 9 P7 1 (IN) port P7 2 (OUT) port 50 21 P10 1 (IN) port P10 2 (OUT) port 56 VDW40-5G--P10--N VDW30-5G--P7--N 16 12 2 x M3 x 0.5 thread depth 4 2 x M3 x 0.5 thread depth 5 Male Quick Fastener Dimensions Quick Fastener Clip Dimensions

PA3000/5000/PAX1000

Series PA3000/5000 Dimensions/Automatically Operated Type PA3000 68 85 105 4-7 7.5 (185) Reset button FLUID OUT Rc 3/8 5.5 AIR SUP (pilot air supply port) Rc 1/4 FLUID OUT PROCESS PUMP AIR SUP 2 115 90 74.5 FLUID I N AIR EXH AIR EXH (pilot air exhaust port) 44.5 3 32 Rc 1/4 100 130 FLUID IN Rc 3/8 PA5000 179 4-9 90 90 FLUID OUT Rc 1/2, 3/4 AIR SUP (pilot air supply port) Rc 1/4 (257) 112 56

PFA/PFW

(4.5) 44 UNIT RESET SET 5 6 7 8 29 38 15.2 7 Series PFA Digital Flow Switch for Air Dimensions (mm)/ Separate Type For Air 1in=25.4mm Scale: 70 % PFA5 0-m m (N) 1 5 Sensor Unit 98 56 82 60 42 6 17 1.6 48.2 34 54 44 24 2-Piping port size 4-4.5 40 50 (43.5) 42 2 1 4 3 4 Connector pin numbers 43 2-3.4 Pin name Pin No.

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

Sectional view Standard size Minimum position Seal End face Insert bushing Body Tubing Reducer type 17-5-56 15 Series LVD High Purity Chemical Valve (Compact Type) Fitting Assembly Procedure Assemble fittings following the procedure shown below.

VCL

Valve model VCL2 VCW20-12-01A 1/8, 1/4 34 40 25 30 12.8 12.8 5 4.5 6 13 VCW30-12-02A 1/4, 3/8 42 52 30 40 19 19 6 5.5 7 19 VCL3 VCW30-12-04A Note 1) 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-02A 1/4, 3/8 42 52 30 40 23 23 6 5.5 7 19 VCL4 VCW30-12-04A Note 1) 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-06A 3/4 56 65 44 53 28.2 28.2 6 5.5 7 26 2 Mounting screws (for mounting bracket) are included

VCS

Valve model Port size VCS21 VCW20-12-01A 1/8, 1/4 34 40 25 30 12.8 12.8 5 4.5 6 13 VCW30-12-02A 1/4, 3/8 42 52 30 40 19 19 6 5.5 7 19 VCS31 VCW30-12-04A Note 1) 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-02A 1/4, 3/8 42 52 30 40 23 23 6 5.5 7 19 VCW30-12-04A Note 1) 1/2 VCS41 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-06A 3/4 56 65 44 53 28.2 28.2 6 5.5 7 26 2 mounting screws (for mounting bracket

Series VCS

Valve model Port size VCS21 VCS20-12-01 1/8, 1/4 34 40 25 30 12.8 12.8 5 4.5 6 13 VCS30-12-02 1/4, 3/8 42 52 30 40 19 19 6 5.5 7 19 VCS31 VCS30-12-04 1/2 48 56 36 44 23 23 6 5.5 7 23 VCS40-12-02 1/4, 3/8 42 52 30 40 23 23 6 5.5 7 19 VCS30-12-04 VCS41 1/2 48 56 36 44 23 23 6 5.5 7 23 VCS40-12-06 3/4 56 65 44 53 28.2 28.2 6 5.5 7 26 Bracket material: Stainless steel 3 Series VCS Direct Operated

2/3 Port Valve

N.O. 10.2 10.4 50 VNC0 VNC02 1 4 VNC814-65F VNC811-65F 65 45 65 70 49 1260 880 15.7 P1 P2 VNC914-80F VNC911-80F 80 56 80 100 73 1800 1400 21.2 Air operated Note)The flange should be JIS B 2210 10K (ordinary type) or equivalent.

Shuttle Valve/AND Valve with One-Touch Fittings

Output 3 B Output 1 Output 2 A B C A B A Dimensions (mm) 1in = 25.4mm 1g = 0.0353 oz D3 Metric sizes: Light gray Inch sizes: Orange D2 L5 M2 IN Blue L3 L2 L4 OUT IN D1 M1 Applicable tubing O.D. d M1 L1 Metric sizes: Light gray Inch sizes: Orange Metric sizes Weight g Model d D1 D2 L3 L2 D3 L1 L4 L5 M1 M2 VR1210F-23 3.2 11.4 8.4 52 6.2 19.4 29.8 17.5 12.7 12.9 21.4 VR1210F-04 4 12.8 10.4 56

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

Refer to front matter 56 for Safety Instructions and pages 468 to 471 for Flow Control Equipment Precautions. 544 Series AS-FG Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Construction: Universal Type Meter-out type M5 type U10/32 type AS3301FG-02 AS TMH ASD AS AS-FE KE AS-FG AS-FG AS-FP AS-FM Meter-in type M5 type U10/32 type AS-D AS-T AS3311FG

Speed Controller with One-touch Fitting

Tubing O.D. 18 g 56 g 6 6 AS221F-02-06 AS221F-02-06A 1/4 1/4 KE 12 12 AS421F-04-12 AS421F-04-12A 1/2 1/2 AS-FG AS-FP AS-FM Face seal adopted for threading AS-D Improved installability (Reduced tool-tightening after hand-tightening) AS-T Face seal Face seal Sealant ASP At hand-tightening After tool-tightening At hand-tightening After tool-tightening ASN AQ ASV AK VCHC ASR ASQ Number of rotations

Solid State Auto Switches

Weight (g) D-F79F Auto switch model 0.5 m (Nil) 13 3 m (L) Lead wire length 56 5 m (Z) 90 Diagnostic Output Operation The diagnostic output signal is output within the red display area (where indicator light is Red), and it is not output within the proper operating range (where indicator light is Green).

CE

HOLD BANK1 BANK2 t (DIN rail mounting) MULTI COUNTER: CEU5 UP Counting input pulse duration COUNT PRESET FUNC. 68 0.2 LEFT RIGHT 35.5 A: B: C: D: t : 10 sec or more required 80 4 56 DOWN 2.5 sec or more required SEL.