MU

, #4 (#1+#4+#11) Front flange MUF25SMU25, #3 (#1+#3+#11) MUF32SMU32, #3 (#1+#3+#11) MUF40SMU40, #3 (#1+#3+#11) MUF50SMU50, #3 (#1+#3+#11) MUF63SMU63, #3 (#1+#3+#11) Single clevis Double clevis Double clevis Single clevis Double clevis MUD25SMU25, #6 (#1+#6+#11) MUD32SMU32, #6 (#1+#6+#11) MUD40SMU40, #6 (#1+#6+#11) MUD50SMU50, #6 (#1+#6+#11) MUD63SMU63, #6 (#1+#6+#11) (mm) Rotation() 100 90

Direct Operated Precision Regulator Series ARP20/30/40  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

) 10% or less (With power supply polarity protection) 55 mA or less (at no load) NPN or PNP open collector output: 1 output 80 mA 30 V (With NPN output) 1 V or less (With load current of 80 mA) 1 s (0.25, 0.5, 2, 3) Yes 1% F.S.

Direct Operated Precision Regulator ARP20/30/40 Series  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

10% or less (With power supply polarity protection) 55 mA or less (at no load) NPN or PNP open collector output: 1 output 80 mA 30 V (With NPN output) 1 V or less (With load current of 80 mA) 1 s (0.25, 0.5, 2, 3) Yes 1% F.S.

PSxx-OMU0008CN

H_1] OUT1 0.050 MPa [H_2] OUT2 0.050 MPa ZSE20C [P_1] OUT1 -50.5 kPa [P_2] OUT2 -50.5 kPa [H_1] OUT1 5.1 kPa [H_2] OUT2 5.1 kPa ZSE20CF [P_1] OUT1 50.0 kPa [P_2] OUT2 50.0 kPa [H_1] OUT1 5.0 kPa [H_2] OUT2 5.0 kPa ISE20CH [P_1] OUT1 1.000 MPa [P_2] OUT2 1.000 MPa [H_1] OUT1 0.100 MPa [H_2] OUT2 0.100 MPa 1 -25No.PS-OMU0008CN-D 3 3 3 () <> 3() 3(P_1n_1P_2n_2)(H_1H_2) () 1 () 1 1 1[

Air Slide Table/Long Stroke Type Series MXY

21.5 4 2 M6 x 1 (Width across flats 3) M8 x 1 (Width across flats 4) MXY8 30 70 10 40 29 M4 x 0.7 25 20.9 3.5 25 4 14 5 2.5 MXY12 40 M5 x 0.8 8.5 86 15 52 31 18 36 30.9 32 5 6 3 PH R RH RL T TB P PL PR Q QW TH W WD WE WR Z Model MXY6 4 2.9 5.1 13 7 9 11 60 12 3(depth 3) 3(depth 3) 2.5 30 5 88 25.5 20 MXY8 4 3.4 6.1 19 7 10 13 70 15 3(depth 3) 3(depth 3) 3 38 6.5 98 32 25 MXY12 5 4.5 7.8

KR

(mm) A Weight (g) D Note) Model 2-applicable tubing L M P FR soft nylon FR double layer 12 1 8 KRU06-01S 41.5 45.5 17 14 13 6 1 4 KRU06-02S 12.8 49 43 17 10.4 4.2 12.8 22 3 8 KRU06-03S 51 44.5 35 1 8 1 4 KRU08-01S KRU08-02S 48.5 49.5 52.5 55.5 16 24 8 15.2 17 18.5 25.6 17.7 15.2 3 8 KRU08-03S 56.5 50 36 1 4 3 8 KRU10-02S KRU10-03S 55 55.5 61 62 30 19 10 18.5 18.5 40 21 40 28.4 1 2 KRU10-04S

Air cylinder (Series compatible with secondary batteries)

Maintenance 3-1.

Paddle Style Flow Switch Series IF3 For details about certified products conforming to international standards, visit us at www.smcworld.com.

33 3/4 Long 0.66 to 1.79 7 14 IF30-06 50 44 3/4 Middle 0.85 to 2.36 9 18 IS 60 53 3/4 Short 1.04 to 2.83 11 22 60 55 1 Short 0.56 to 1.67 10 20 ZSM 100 90 1 1/4 Short 0.57 to 1.67 17 34 PF2 160 140 1 1/2 Short 0.63 to 1.95 26 52 140 125 2 Middle 0.34 to 1.06 23 45 IF IF31-10 280 250 2 1/2 Middle 0.41 to 1.29 45 90 Data 250 220 3 Middle 0.26 to 0.81 40 80 550 480 4 Long 0.33 to 1.05 85 170

3

Digital display allows visualization. 3-color/2-screen display, Improved visibility Remote control is possible with accumulated pulse. 1 Flow Switch Flow Rate Variations Applicable flow range [L/min] Series Minimum setting unit Detection method Applicable fluid 1 2 3 3 2 1 0.5 0 0.5 PFMV 0 0.5 0 1 0 3 Thermal type (MEMS) Air N2 0.5 0.5 1 1 3 3 Applicable flow range [L/min] Minimum setting

High Vacuum L Type Valve

Heater specifications Item XLA-25-2 XLA-40-2 XLA-50-2 XLA-63-2 XLA-80-2 Rated voltage of the heater 90 to 240 ACV Heater assembly number XL1A25-60S-1 XL1A25-60S-1 XL1A25-60S-2 XL1A25-60S-3 No. of heater assemblies 1 pc. 1 pc. 1 pc. 1 pc.

PSxx-OMU0002CN

MPa [H_2] OUT2 0.050 MPa ZSE20A [P_1] OUT1 -50.5 kPa [P_2] OUT2 -50.5 kPa [H_1] OUT1 5.1 kPa [H_2] OUT2 5.1 kPa ZSE20AF [P_1] OUT1 50.0 kPa [P_2] OUT2 50.0 kPa [H_1] OUT1 5.0 kPa [H_2] OUT2 5.0 kPa 1 -23No.PS-OMU0002CN-D 3 3 3 () <> 3() 3(P_1n_1P_2n_2)(H_1H_2) () 1 () 1 1 1[-](( 61)) -24No.PS-OMU0002CN-D (P1LP1H) 24P1L()P1H()WH1() (n1Ln1H) 33 OUT2 [F 1]OUT1[F 2]OUT2// -25No.PS-OMU0002CN-D

Series LQ3 High Purity Fluororesin Fitting

Combination 1 2 2 3 3 3 4 4 4 5 5 5 6 6 6 Tubing Size (Inch) 1/8 x 0.086 1/4 x 5/32 1/4 x 5/32 3/8 x 1/4 3/8 x 1/4 3/8 x 1/4 1/2 x 3/8 1/2 x 3/8 1/2 x 3/8 3/4 x 5/8 3/4 x 5/8 3/4 x 5/8 1 x 7/8 1 x 7/8 1 x 7/8 Thread Size A A B A B C A B C A B C A B C 1/8" 1/8" 1/4" 1/8" 1/4" 3/8" 1/4" 3/8" 1/2" 3/8" 1/2" 3/4" 1/2" 3/4" 1" Tubing Connection E 1A LQ3 Size Combination Class Fitting Style Symbol

Air Slide Table Long Stroke Type Series MXY ø6, ø8, ø12 1

Mey = 1/3 x 3.36 x 9.8 x (50+19)/1000 = 0.76 We = 3.36 A3 = 19 Obtain Meay = 4.2 from Va = 420 in Graph (2). 2' = 0.76/4.2 = 0.18 pitch, yaw moment: Graph (2) 2 = Me/Mea Meay Nm 4.2 420 V mm/s 3-3 Sum of the Load Factors 1 + 2 + 2' = Applicable because 0.008 + 0.15 + 0.18 = 0.34 < 1 Use is possible if the sum of the load factors does not exceed 1. 1 + 2 < 1 8-9-6 6 Model Selection Series

Digital Flow Switch (Integrated display type)

CFM x 10-2 1 CFM x 10-2 Accumulated Setting/Display flow range 0.0 to 9.0 0.0 to 9.9 0 to 9 0 to 9 ft3 x 10-1 ft3 x 10-1 ft3 x 10-1 ft3 x 10-1 flow Min. setting/display unit 0.1 ft3 x 10-1 0.1 ft3 x 10-1 1 ft3 x 10-1 1 ft3 x 10-1 Conversion of accumulated pulse 0.1 1 1 1 ft3 x 10-1/pulse ft3 x 10-1/pulse ft3 x 10-1/pulse ft3 x 10-1/pulse : Flow rate in the specification is the value at standard

AR Series Modular Type Regulator

16 25 47.4 11 12.5 M18 x 1 12.5 26 26 25 28 30 4.5 6.5 40 2 18 18.5 AR20-A 1/8, 1/4 1/8 40 67.4 23.5 22 M36 x 1.5 22 37.5 58.5 37.5 59.5 30 34 43.9 5.4 15.4 55 2.3 27.3 36.5 17.5 6 AR25-A 1/4, 3/8 1/8 53 70.4 23.5 22 M36 x 1.5 22 37.5 58.5 37.5 59.5 30 34 44.3 5.4 15.4 55 2.3 30.3 36.5 17.5 6 AR30-A 1/4, 3/8 1/8 53 83.5 27 28.5 M45 x 1.5 28.5 37.5 65 37.5 66 41 36 46 6.5 24 65 2.3 32.5

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

ZH07B ZH10B ZH13B ZH05D ZH07D ZH10D ZH13D ZH15D ZH18D ZH20D 12/Rc 3 8 Body ported type (Without silencer) 8/Rc 1 8 10/Rc 1 4 6/Rc 1 8 6/Rc 1 8 6/Rc 1 8 6/Rc 1 8 6/Rc 1 8 8/Rc 1 8 8/Rc 1 8 10/Rc 1 4 10/Rc 1 4 3 8 12/Rc 10/Rc 1 4 12/Rc 3 8 12/Rc 3 8 16/Rc 1 2 16/Rc 1 2 13-5-2 3 Series ZH Vacuum Ejector: Box Type (Built-in Silencer)/Body Ported Type Ejector JIS Symbol Body ported type (Without

Heavy Duty Stopper Cylinder Series RSH/RS1H

3 !4 !7 o !6 i @7 @1 #2 @9 @6 @4 #9 !0 !9 u #0 #6 t #8 q y $0 $1 20 r !1 e @2 !2 #7 #3 #1 32 w 50, 63, 80 @3 Double acting (DL, DM) !3 !5 #6 o @5 @4 i @1 @6 !0 @7 @9 !6 t u !7 !8 q #8 $1 y Single acting spring extended (TL, TM) Double acting spring type (BL, BM) r $0 !1 !

Digital Flow Switch (Remote type monitor unit)

range -10 to 110 oC Min. setting unit 1 oC Display unit oC Analogue output accuracy 3%F.S.

F

Y S I Z E 1 M5 2 1/8, 1/4 Standard 3 3/8 Standard 4 1/2 Standard T H R E A D P O R T S I Z E M5 ...M5 U01 ..1/8 U02 ..1/4 U03 ..3/8 U04 ..1/2 U32 ..10-32UNF 01 ... 1/8 02 ... 1/4 03 ... 3/8 04 ... 1/2 W I T H O N E-T O U C H F I T T I N G S T Y P E 2 Elbow 3 Universal C O N T R O L M E T H O D 0 Meter Out 1 Meter In Courtesy of Steven Engineering, Inc. !

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

Select Nil, 1, 3, or 5 for parallel input. *1 Please contact SMC for non-standard strokes as they are produced as special orders. *2 Order auto switches separately. (For details, refer to the Web Catalog.) *3 The DIN rail is not included. It must be ordered separately.