Table of Contents

For details, refer to page 2-4-68. Note 2) See page 2-4-69 for details.

0.55

Dimensions VP3145-DZA1-X81 Max.10 134 35 87.4 21 EXH.1 51 EXH.2 71 80 (Non-locking) Manual override Applicable cable O.D.

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

21 21 Light/Surge voltage suppressor Light/Surge voltage suppressor Light/Surge voltage suppressor SOL.B SOL.B SOL.B Station 2 Station 2 Station 2 4 4 4 SOL.A SOL.A SOL.A 3 3 3 Light/Surge voltage suppressor Light/Surge voltage suppressor Light/Surge voltage suppressor SOL.B SOL.B SOL.B Station 1 Station 1 Station 1 2 2 2 SOL.A SOL.A SOL.A Triangle mark 1 1 1 Triangle mark Triangle mark

HRX-OM-W058

and Fig. 5.2-2 Key operation (2/2) show the operation of keys of the thermo-chiller.

HRX-OM-X027

and Fig. 5.2-2 Key operation (2/2) show the operation of keys of the thermo-chiller.

HRX-OM-Y098

1-5 1.7 Waste Disposal . 1-5 1.7.1 Disposal of refrigerant and compressor oil . 1-5 1.7.2 Disposal of product . 1-5 1.7.3 Battery . 1-6 1.8 Safety Data SheetSDS . 1-6 Chapter 2 Name and Function of Parts . 2-1 2.1 Model Number of Product . 2-1 2.2 Name and Function of Parts . 2-2 2.2.1 HRL-A-20 (Air cooled type) . 2-2 2.3 Function of Parts . 2-4 Chapter 3 Transport and Setting Up . 3-1 3.1

Brake mechanism added

(n 4) 2 (n = 4, 8, 12, 16 ) Note 2) 60 + 30 (n 4) 2 (n = 4, 8, 12, 16 ) Note 2) 65 + 30 (n 4) 2 70 + 30 (n 4) 2 (n = 4, 8, 12, 16 ) Note 2) 10 + 30 n (n = 2, 4, 6, 8 ) Note 1) (n = 4, 8, 12, 16 ) Note 2) 2 (Different surfaces, Same surface) 1 95 100 D-M9A 85 15 80 (n 2) 2 80 + 40 (n 4) 2 (n = 4, 8, 12, 16 ) Note 2) 85 + 40 (n 4) 2 (n = 4, 8, 12, 16 ) Note 2) 95 + 40 (n 4) 2 100 +

15

Note 2) Refer to Best Pneumatics No. 2-1 for lead wire lengths.

OMU0023

Note 1) 12 0 (Number of words) 13 2 14 Number of written 0 Data data Number of written data = 4 bytes 15 4 (bytes) 16 0 Data to be written to first register 17 0 Data to be written 1 Target position of Step Data No.1 18 0 upper 2 bytes = "0h" 19 0 20 2 21 7 Data to be written to fourth register Data to be written 2 22 1 Target position of Step Data No.1 23 0 lower 2 bytes = "2710h" Calculated

Parallel Style Air Gripper Series MHZ

1/4 1 1/4 to 1 1/2 1 3/4 to 2 2 to 2 1/4 MHS MHC MHT MHY Impact load Clearance MHW -X 3.

HRX-OM-Q033

Communication specification . 2-2 2.3 Terminal block explanation . 2-2 2.4 Setting and checking . 2-4 2.4.1 Setting and checking . 2-4 2.4.2 Setting and checking . 2-5 2.5 Contact input signal . 2-16 2.5.1 Run/stop signal inputRemote signal input . 2-16 2.5.2 External switch signal input . 2-18 2.6 Contact output signal . 2-19 Chapter 3 Serial communication . 3-1 3.1 Precautions wiring communication

HRX-OM-S010

. 2-1 2.2 Communication specification . 2-2 2.3 Terminal block explanation . 2-2 2.4 Setting and checking . 2-4 2.4.1 Setting and checking . 2-4 2.4.2 Setting and checking . 2-5 2.5 Contact input signal . 2-16 2.5.1 Run/stop signal inputRemote signal input . 2-16 2.5.2 External switch signal input . 2-18 2.6 Contact output signal . 2-19 Chapter 3 Serial communication . 3-1 3.1 Precautions

HRX-OM-T004

Communication specification . 2-2 2.3 Terminal block explanation . 2-2 2.4 Setting and checking . 2-4 2.4.1 Setting and checking . 2-4 2.4.2 Setting and checking . 2-5 2.5 Contact input signal . 2-16 2.5.1 Run/stop signal inputRemote signal input . 2-16 2.5.2 External switch signal input . 2-18 2.6 Contact output signal . 2-19 Chapter 3 Serial communication . 3-1 3.1 Precautions wiring communication

HRX-OM-R028

specification.2-2 2.3 Terminal block explanation.2-2 2.4 Setting and checking.2-4 2.4.1 Setting and checking . 2-4 2.4.2 Setting and checking . 2-5 2.5 Contact input signal.2-16 2.5.1 Run/stop signal inputRemote signal input . 2-16 2.5.2 External switch signal input . 2-18 2.6 Contact output signal .2-19 Chapter 3 Serial communication. 3-1 3.1 Precautions wiring communication .3-1 3.2 Communication

A_HEC-OM-K001

Air is sucked in from the controller side and discharged through the back via this fan. (9) Fan (Outlet of air) 2.1 Temperature Controller 2-1 A_HEC-OM-K001-1.7 Chapter 2 Description and Function of Each Part 2.2 Heat Exchanger (5) (6) (8) (2) (7) (4) (1) (3) Fig.2-2 Heat Exchanger Table 2-2 Heat Exchanger No. Name Description Inlet port of chemicals.

JXCx-OMY0004

Movement mode 1: ABS (Absolute) 2: INC (Relative) (7, 10) 2-7.

5 Port Air Operated Valve

Base mounted Common EXH 2 to 20 stations 5 (R) , 3 (R) port 1/4 VPA P.1512 VFA330 VPA3 1 (P) port 1/4 VFA5000 VV5FA5-20 4 (A), 2 (B) port Common EXH 2 to 10 stations 5 (R) , 3 (R) port 3/8 1 (P) port 3/8 VFA520 VV5FA5-21 4 (A), 2 (B) port 5 (R) , 3 (R) port 1/2 Common EXH 2 to 15 stations 1 (P) port 1/2 VFA3000 VV5FA3-40 5 (R) , 3 (R) port 1/4 Common EXH 2 to 20 stations VFA340 1 (P) port

Electric Rotary Table

2 2 2 Note 2) Home position (Stroke end) 90 90 L 0 E 1 R 3 1 / 0 180 L 0 E T 2 R 3 3 / a 0 0 5 , bl 1) e e ot o N p er e g at n in ra g The figures show the origin position for each actuator.

VDW Series

SOL. 2 () 2 ( ) 21 Compact Direct Operated Series VDW 2/3 Port Solenoid Valve for Fluid Control Specific Product Precautions 1 Be sure to read before handling. Refer to pages 18 through 21 for safety instructions and precautions for 2/3 port solenoid valve for fluid control.

rep-modular-e

Spanner for AW10 is a compact spanner. 21 12 14 AW10 AW20(K) AW30(K) AW40(K) AW60(K) Assembly 2) Wrap the pressure gauge thread with the seal tape leaving 1.5 to 2 threads from the end. Wrap seal tape leaving 1.5 to 2 threads Spanner Nominal: AW10 AW20(K) AW30(K) AW40(K) AW60(K) 3) Mount the pressure gauge.