Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

Body size 1 2 3 4 M5 standard 1/8, 1/4 standard 3/8 standard 1/2 standard Applicable tubing O.D.

Manifold Regulator ARM1000/2000 Series

Backflow function available on the standard model Space-saving IR (80 x n) + 23 (79 x n) + 25 (188 x n) + 43 (187 x n) + 45 Common IN Individual IN Common IN Individual IN 1 8 1 8 ARM1000 57 1 8 1 8 IRV 1 4 1 8 ARM2000 136 1 8 1 8 VEX How to Order SRH ARM 1000 A1 5 01 G SRP Semi-standard Regulator for manifold Nil 1 0.7 MPa setting (Standard) 0.2 MPa setting SRF Number of stations Note 1

Air Suction Filter Series ZFA 1

ZF ZFA100 Port size Symbol Model A B 18 20 28 ZFA200 1 8 1 4 ZP Manifold ZCU AMJ Misc.

99

Specifications FGH200 FGH300 Model FGH100 Number of built-in elements (element length) (mm) 1(125) 1(250) 1(500) Operating pressure MAX. 1 MPa MAX. 80C (Not above the boiling point) Operating temperature Each kind of fluid (See the table of applicable fluids on pages 63 and 64) Applicable fluid Port size (Rc) 3/8, 1/2, 3/4, 1 Housing Stainless steel 316 (Electrolytic polishing) Material Seals

Large blow and

4 x Sa Thread depth Sb 2 x L O H I N G A M Vacuum flow Dust bag When dust bag is mounted T F E D Suction air Discharge air Suction air U C C B Hose band V (mm) A 73 B 34 C 19 D 10 E 13.2 F 16.2 G 69.8 H 31 I J 35 K 27 L 4.5 M 35 N 18 O P 13 Q Rc1/8 R 28 Sa M3 x 0.5 Sb 5 T 300 U 150 V 190 Model ZH10--X185 ZH20--X185 4 1 M4 x 0.7 8 400 200 250 119.5 55 32 15 19.5 23.5 111 48 56 48 4.5 56.5

Oil Filter FH150 Series

4 80 168.5 197.5 259.5 50 15 25 7 6.5 0.7 3/8 1/2 524

Exhaust Cleaner for Clean Rooms AMP Series

40 50 55 66 80 88 84 100 110 28 34 50 5 5 9 26 32 37 37 37 37 108 155 221 13 16 19 20 22 25 1/4, 3/8 3/8, 1/2 1/2, 3/4 1in = 25.4mm 5

Thermo-chiller

capacity3 [kW] 1.5 1 4.5 1 6.5 1 Temperature stability4 [C] CH1: 0.1/CH2: 0.5 Rated ow (Outlet) [L/min] 45 (0.43 MPa) 10 (0.45 MPa) 45 (0.45 MPa) 10 (0.45 MPa) 125 (0.45 MPa) 10 (0.45 MPa) Maximum ow rate [L/min] 120 16 130 16 180 16 Maximum pump head [m] 50 49 55 49 68 49 Settable pressure range5 [MPa] 0.10 to 0.50 0.10 to 0.49 0.10 to 0.55 0.10 to 0.49 0.10 to 0.68 0.10 to 0.49 Minimum

Electric Actuators

Model IX IY W H Sectional secondary moment Top entry Linear guide LJ1H10 LJ1H20 LJ1H30 LJ1S10 LJ1S20 LJ1S30 Slider guide 24.7 44.8 55 36 56.3 73.3 7 40 84 15 60 177 48 374 836 52 402 1000 70 122 151 70 122 151 Left entry Brake Right entry Axial entry Bottom entry Table traveling accuracy T-slots enable highly flexible mounting.

P-E00-1A Models to accommodate a wide variety of applications Electric Actuators CAT. E101 A

specification Ground ball screw 0.02 5 400 Series LJ1 Rolled ball screw 0.05 Ground ball screw 0.02 8 250 Rolled ball screw 0.05 Ground ball screw 0.02 With brake High rigidity direct acting guide 1 0 600 Rolled ball screw 0.05 Ground ball screw 0.02 1 5 500 Rolled ball screw 0.05 Ground ball screw 0.02 20 500 Rolled ball screw 0.05 Low Profile Single Axis Electric Actuator

Single Axis Electric Actuator Series LJ1

specification Ground ball screw 0.02 5 400 Series LJ1 Rolled ball screw 0.05 Ground ball screw 0.02 8 250 Rolled ball screw 0.05 Ground ball screw 0.02 With High rigidity direct acting 1 0 600 brake Rolled ball screw 0.05 guide Ground ball screw 0.02 1 5 500 Rolled ball screw 0.05 Ground ball screw 0.02 20 500 Rolled ball screw 0.05 Low Profile Single Axis Electric Actuator

Series TPH Clean Tubing Polyolefin Tubing

(20C) Note 2) Note 2) 1.0 MPa 0.7 MPa 15 25 35 45 55 Min. bending radius (mm) Refer to the burst pressure characteristics curve.

V or lessSwitching between N.O. and N.C. modes is possible.5 to 640 msPower indication: 3 1/2-digit LED indicator (red)Output power supply voltage and current signal indication: 1-digit LED indicator (red)LED lights for RUN, CH, SW (red and green)?

V or lessSwitching between N.O. and N.C. modes is possible.5 to 640 msPower indication: 3 1/2-digit LED indicator (red)Output power supply voltage and current signal indication: 1-digit LED indicator (red)LED lights for RUN, CH, SW (red and green)?

and N.C. modes is possible.5 to 640 msPower indication: 3 1/2-digit LED indicator (red)Output power supply voltage and current signal indication: 1-digit LED indicator (red)LED lights for RUN, CH, SW (red and green)?

power supply voltage and current signal indication: 1-digit LED indicator (red)LED lights for RUN, CH, SW (red and green)?

power supply voltage and current signal indication: 1-digit LED indicator (red)LED lights for RUN, CH, SW (red and green)?

power supply voltage and current signal indication: 1-digit LED indicator (red)LED lights for RUN, CH, SW (red and green)?

power supply voltage and current signal indication: 1-digit LED indicator (red)LED lights for RUN, CH, SW (red and green)?

power supply voltage and current signal indication: 1-digit LED indicator (red)LED lights for RUN, CH, SW (red and green)?