Compact Vacuum Ejector Series ZQ

XT53440 05 Number of stations 05 06 12 1 station 2 station 8 station 10

VX2　VXD　VXZ

AS-FG

ASS AS121FG AS131FG AS221FG-01 AS231FG-01 AS221FG-02 AS231FG-02 ASR ASQ Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 07, 08, 09, 10, 11 05, 06, 07, 08, 09, 10 Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) 01, 03, 04 05, 06 03, 04 Number of needle rotations Number of needle rotations Number of needle rotations AS321FG AS331FG AS421FG AS431FG

AS-FG

Metric size Inch size Meter-out Meter-in 0 1 3.2 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 01 03 05 07 09 11 13 23 04 06 08 10 12 4 6 8 10 12 With One-touch fitting Stainless steel specifications (SUS303) Thread type Nil Metric thread (M5) Unified thread (10-32 UNF) R NPT Use 1/8" tube.

Air Suction Filter With One-touch Fittings Series ZFB 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 3 16 1 4 ZFB101-05 ZFB101-07 ZFB201-07 ZFB301-11 ZFB401-13 " " " " " 20 22 20 22 30 30 75 40 100 62 1 4 Metric size(2) 3 8 1 2 Note 1) Flow rate is less than 0.003 MPa of the initial pressure drop.

ZQ

XT53440 05 Number of stations 05 06 12 1 station 2 station 8 station 13-9-10

Solenoid Direction: Type 40: A Port Bottom Ported; Type 42: Opposite Side of A Port, Piping: A Port Bottom Ported, Stations: 5 Stations, Port Size: 1/8 NPTF, Bracket: Bracket

SMC has improved product performance and reliability with the redesigned SY series valve. The SY3000 and SY5000 have the same valve width as their predecessors, but the flow has been increased by up to 80%, allowing the valve size to be reduced. A built-in strainer in the pilot valve prevents trouble caused by foreign matter. By using H-NBR seal material for the main valve and seals, Ozone

Made to Order

series GB Stroke B Stroke A (mm) Bore size GB Q S ZZ 40 29 53 168 230 50 33 59 180 249 63 33 61 196 268 80 41 73 232 320 100 41 79 252 341 Q S + Stroke (A + B) ZZ + Stroke (A + B) CNA2 series Stroke A Stroke B GE (mm) Bore size GE S ZZ 40 29 237 299 50 33 258 327 63 33 280 352 80 41 334 422 100 41 372 461 ZZ + Stroke (A + B) S + Stroke (A + B) -X -X 1789 Made to Order Common Specifications

1

43.5 [17.5] 29.5 (41.5) 26.5 (38.5) 33.5 (45.5) 41 [15] 48 [22] 29 (41) 42 48 44.5 47.5 43.5 44 [18] Data R 63 48 43.5 [17.5] 29.5 (41.5) 26.5 (38.5) 33.5 (45.5) 41 [15] 48 [22] 29 (41) 49 55 51.5 54.5 50.5 44 [18] Y + Stroke [ ]: Denotes the locations for CDG1R. ( ): Denotes the value of long strokes.

CM2

8 75 60 4 7 18 13 37 34 8 62 15.5 13 26 30 5 8 28 5 M8 x 1.25 15 24 M20 x 1.5 1/8 116 20 0 0.033 25 45 8 75 60 4 7 22 13 41 40 10 62 19.5 17 32 37 6 8 33.5 5.5 M10 x 1.25 15 30 M26 x 1.5 120 1/8 26 0 0.033 32 45 8 75 60 4 7 22 13 41 40 12 64 19.5 17 32 37 6 8 37.5 5.5 M10 x 1.25 15 34.5 M26 x 1.5 122 1/8 26 0 0.039 40 50 11 82 36 66 5 7 24 16 45 52 14 88 21 22 41 47.3 8 10 46.5 7 M14

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

3 12 53 2-6.5 Mounting hole 35 2-6.5 Mounting hole 35 53 Manual override 18 31.5 37 41 50 98 PE X PE X P R1 R2 R2 R1 P 27.5 27.5 41 41 1/8 Port PE Rc1/8 External pilot port 27.5 27.5 41 41 1/8 Port PE 1/8 External pilot port 5-1/2 Ports P, A, B, R1, R2 5-1/2 Ports P, A, B, R1, R2 Numbers inside ( ) are for metal seal 3 position type 7 Series VQ5000 Base Mounted Type How to Order Manifolds

VQ5000

3 12 53 2-6.5 Mounting hole 35 2-6.5 Mounting hole 35 53 Manual override 18 31.5 37 41 50 98 PE X PE X P R1 R2 R2 R1 P 27.5 27.5 41 41 1/8 Port PE Rc1/8 External pilot port 27.5 27.5 41 41 1/8 Port PE 1/8 External pilot port 5-1/2 Ports P, A, B, R1, R2 5-1/2 Ports P, A, B, R1, R2 Numbers inside ( ) are for metal seal 3 position type 7 Series VQ5000 Base Mounted Type How to Order Manifolds

High Vacuum Angle Valve, XL Series

O After a few seconds at 10-6Torr 41

42

port 1/8" External pilot port 27.5 27.5 41 41 41 41 1/2" 1(P), 4(A), 2(B), 5(R1), 3(R2) port 1/2" 1(P), 4(A), 2(B), 5(R1), 3(R2) port Numbers inside ( ) are for metal seal 3-position type. 495 Base Mounted Plug-in Unit VQ5000 Series [Option] Note) CE-compliant: For DC only.

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

45 45 50 37 41 41 45 13 17 17 22 26 32 32 41 26 26 26 31 5 6 6 8 8 8 8 10 134 138 140 174 M8 x 1.25 M20 x 1.5 M10 x 1.25 M26 x 1.5 M10 x 1.25 M26 x 1.5 M32 x 2 M14 x 1.5 The bracket is shipped together.

SMC Pneumatic Clean Series

32 32 26 6 6 5 8 8 8 50 45 45 41 24 22 22 18 31 26 26 26 75 75 75 66 60 60 60 M26 x 1.5 M26 x 1.5 M20 x 1.5 174 140 138 134 17.5 17.5 19.5 15.5 35.5 26-0.033 0 7 7 7 5 4 4 1/4 1/8 1/8 14 12 10 16 13 13 45 41 41 35.5 26-0.033 0 17.5 19.5 35.5 32-0.039 0 21 82 36 10 8 M32 x 2 21.5 41.5 19 Air cylinder CM2 2122CM2/ 101110112122Head side flange style (G) / CM2G, CM2G With rubber bumper Standard

CM2

20 33.5 5.5 M10 X 1.25 1to450 19.5 17 32 37 6 8 M26 X 1.5 120 40 10 15 30 62 22 13 41 7 4 60 25 75 8 45 26 34.5 37.5 5.5 M10 X 1.25 1to450 19.5 17 32 37 6 8 M26 X 1.5 122 40 12 15 64 22 13 41 7 4 60 32 75 8 45 26 21 47.3 7 M14 X 1.5 21.5 M32 X 2 42.5 46.5 1to500 22 41 8 10 154 52 14 88 24 16 45 7 5 66 40 36 82 11 50 32 With rod boot (mm) ZZ Symbol h l Stroke f e Bore 1 to 50 1 to 50 1

Floating Joint

41 50 59.5 59.5 66 96 36 48 38 44 44 57.5 57.5 57.5 71.5 71.5 86 107 107 102 144 13 17 17 22 22 22 27 27 32 41 41 41 55 0.09 0.18 0.18 0.36 0.36 0.36 0.61 0.61 1.09 2.03 2.03 4.1 10 7 8 8 11 11 11 13.5 13.5 16 20 20 20 24 6.6 9 9 11 11 11 11 11 14 16 16 14 22 24.5 28.5 28.5 35.5 35.5 35.5 44.5 44.5 53 65 65 56 78 1148 JA Series Made to Order: Individual Specifications Please contact SMC

Table of Contents

MHT 41 mm x 20 mm x 10 mm 19 g Port MHY With 4 hose nipple MHW MRHQ Misc. Port MHCM2-7S Smallest size and lightest weight in MHC series.