SMC Corporation of America
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Norte Parque Industrial Valle Grande, Lampa Santiago, Chile TEL: 02-270-8600 FAX: 02-270-8601 SWEDEN SMC Pneumatics Sweden AB Ekhagsvgen 29-31, S-141 05 Huddinge, Sweden TEL: 08-603-07-00 FAX: 08-603-07-10 ARGENTINA SMC Argentina S.A.

Recommended flow rate Note) (l/min (ANR)) Mass (g) Internal capacity (cm3) 1.7 ZA Model IN side, OUT side 2 3.2 4 4 6 6 8 1/8" 5/32" 5/32" 1/4" 1/4" 5/16" ZFC050-02 ZFC050-23 ZFC050-04 ZFC100-04 ZFC100-06 ZFC200-06 ZFC200-08 ZFC051-01 ZFC051-03 ZFC101-03 ZFC101-07 ZFC201-07 ZFC201-09 2 7 10 10 20 30 50 7 10 10 20 30 50 4.9 ZX 1.7 4.3 IN/OUT straight piping Metric size ZR Easy installation

Norte Parque Industrial Valle Grande, Lampa Santiago, Chile TEL: 02-270-8600 FAX: 02-270-8601 SWEDEN SMC Pneumatics Sweden AB Ekhagsvgen 29-31, S-141 05 Huddinge, Sweden TEL: 08-603-07-00 FAX: 08-603-07-10 ARGENTINA SMC Argentina S.A.

Norte Parque Industrial Valle Grande, Lampa Santiago, Chile TEL: 02-270-8600 FAX: 02-270-8601 SWEDEN SMC Pneumatics Sweden AB Ekhagsvgen 29-31, S-141 05 Huddinge, Sweden TEL: 08-603-07-00 FAX: 08-603-07-10 ARGENTINA SMC Argentina S.A.

Norte Parque Industrial Valle Grande, Lampa Santiago, Chile TEL: 02-270-8600 FAX: 02-270-8601 SWEDEN SMC Pneumatics Sweden AB Ekhagsvgen 29-31, S-141 05 Huddinge, Sweden TEL: 08-603-07-00 FAX: 08-603-07-10 ARGENTINA SMC Argentina S.A.

Norte Parque Industrial Valle Grande, Lampa Santiago, Chile TEL: 02-270-8600 FAX: 02-270-8601 SWEDEN SMC Pneumatics Sweden AB Ekhagsvgen 29-31, S-141 05 Huddinge, Sweden TEL: 08-603-07-00 FAX: 08-603-07-10 ARGENTINA SMC Argentina S.A.

Norte Parque Industrial Valle Grande, Lampa Santiago, Chile TEL: 02-270-8600 FAX: 02-270-8601 SWEDEN SMC Pneumatics Sweden AB Ekhagsvgen 29-31, S-141 05 Huddinge, Sweden TEL: 08-603-07-00 FAX: 08-603-07-10 ARGENTINA SMC Argentina S.A.

This SI unit has IP65 protection rating. 29 Supported Protocols DeviceNetTM 11 to 25 VDC (without sensors) Supply Voltage 20 to 25 VDC (with sensors) Current Requirement 0.5A maximum Serial Unit Inputs 32 points Click here for more information Outputs 16 points Dimensions 167W x 57H x 71D Input voltage 10 to 26.4 VDC Solenoid Outputs Power handling 2.8W maximum Input voltage 20 to 25 VDC

Filter case Pin Slot Housing Filter element (ZX1-FE) Filter gasket Gasket groove Connector Socket Lead wire Hook 16-7-3 4 Series ZSP1 Dimensions Grommet type: ZSP10X Adjusting needle Pressure sensor Vacuum supply port ADJ 20 Adsorption nozzle port 08 7 48.3 Lead wire length 600 (3000) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650)

Exploded View of Manifold/Replacement Parts 20 7.1. Exploded View of Manifold 20 7.2. Component Parts for Manifold 20 7.3. Replacement Parts 21 7.4. Manifold Option 22 7.5. How to Increase Manifold Stations 23 8. Maintenance 24 8.1. Maintenance 24 8.2. Replacement Procedure 25 9. Specifications 27 10. Pneumatic Circuit 29 11. Exhaust/Flow Rate Characteristics 30 11.1.

MS Burst pressure (MPa) 20 to +60C (No freezing) Polyurethane Burst pressure Black T 15 10 10 20 VMG Maximum operating pressure How to Order Operating temperature (C) Precautions 2 TFU0425 B Be sure to read before handling.

(Rated voltage 125 V, Plug JIS C 8303, Inlet IEC 60320-C13) *1 Measured with a high pressure probe of 1000 M and 5 pF *2 Measurement value based on a charged plate (Dimensions: 150 mm x 150 mm, Capacitance: 20 pF) as defined in the U.S.

10.2 8 10 17.8 11 5.5 2-3.3 Mounting hole Connector type: ZSP10X C Adjusting needle ADJ Pressure sensor Vacuum supply port 20 08 Adsorption nozzle port 7 48.3 Lead wire length 600 (3000) Adsorption nozzle port 0X: M5 x 0.8 0XY: M6 x 1 Vacuum supply port 0X: M5 x 0.8 0XY: M6 x 1 59.5 50 PV 6.5 10.2 8 5.5 17.8 11 10 2-3.3 Mounting hole 16-7-4

25 30 0 5 10 15 20 25 30 Time of water flow (min) Measuring time (min) Test method and conditions The liquid contact portions were filled with sulphuric acid and left untouched for half an hour.

Norte Parque Industrial Valle Grande, Lampa Santiago, Chile TEL: 02-270-8600 FAX: 02-270-8601 SWEDEN SMC Pneumatics Sweden AB Ekhagsvgen 29-31, S-141 05 Huddinge, Sweden TEL: 08-603-07-00 FAX: 08-603-07-10 ARGENTINA SMC Argentina S.A.

Piping: 42 (Base Mounted Common SUP Individual EXH), Stations: 20 Stations, A B Port Size: N7 (1/4" One-touch Fitting)

Piping: 42 (Base Mounted Common SUP Individual EXH), Stations: 20 Stations, A B Port Size: N9T (5/16" One-touch Fitting NPTF)