CE2

148 263 11.5 101 352 49 110 15 86 105 59 130 106 40 16 23 + 0.070 0 + 0.3 + 0.1 0.032 0.059 -X 31.5 20 25 140 192 297 18 102 130 76 160 13.5 119 112.5 48 20 28 403 61 + 0.084 0 + 0.3 + 0.1 0.040 0.073 35.5 25 25 309 150 180 13.5 133 36 430 64 162 214 18 116 92 139.5 + 0.084 0 + 0.3 + 0.1 58 25 0.040 0.073 20Mounting Bracket Part No.

VK300

(-Q) (S) 42 (-Q) VV3K3-20 (-Q) 21 (-Q) VV5K3-20 (-Q) 21 (-Q) Manifold base Manifold base Caution Mounting Screw Tightening Torques M3: 0.6 Nm Body ported VK300-41-1A Base mounted VK300-41-2A Manifold gasket and screw assembly Note1) Mounting direction is fixed, do not mount on opposite side.

MVGQ

For details, refer to page 10-20-41. 10-16-20

Compact Manifold Regulator Series ARM5

(Full Span) Display accuracy 230 Calibration angle Limit indicator With limit indicator 17.5 L side end block R side end block 6 28 OPEN 56 SMC 56 1.5 SMC 28 20 7 7 20 R E V 18 O 26 26 18 C 22 32.5 32.5 14.5 Port Plug Bushing VVQ0 58A Part no.

VQ4000

Maximum stations are 18. 16 4 17 5 18 6 19 7 20 8 21 1.

ARM10/11

(for L and R sides) AXT100-DR-9 123 AXT100-DR-11 148 AXT100-DR-13 173 AXT100-DR-16 210.5 AXT100-DR-18 235.5 AXT100-DR-20 260.5 AXT100-DR-22 285.5 53 AXT100-DR-25 323 33.5 AXT100-DR-27 348 18 14 OUT IN IN OUT IN AXT100-DR-29 373 ARM11AA1-12-A Handle position: Top/Common supply block with pressure switch L2 L2-10.5 L1=(28 x n)+56 18 20 28 28 5.3 56 5.5 84 0.1 0.3 0.2 0.4 0.5 0.6 SMC MPa SMC

ARM10/11

(for L and R sides) AXT100-DR-9 123 AXT100-DR-11 148 AXT100-DR-13 173 AXT100-DR-16 210.5 AXT100-DR-18 235.5 AXT100-DR-20 260.5 AXT100-DR-22 285.5 53 AXT100-DR-25 323 33.5 AXT100-DR-27 348 18 14 OUT IN IN OUT IN AXT100-DR-29 373 ARM11AA1-12-A Handle position: Top/Common supply block with pressure switch L2 L2-10.5 L1=(28 x n)+56 18 20 28 28 5.3 56 5.5 84 0.1 0.3 0.2 0.4 0.5 0.6 SMC MPa SMC

Proposals for Energy Saving

4 Parts list No. 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 No.

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Single Rod Series CHA ø 40, ø 50, ø 63, ø 80, ø 100, ø 125, ø 160

x 1.75 27 50 34 M27 x 2 35 32 1/2 66 24 137 125 6.5 38 140 112 22 41 34 35.5 80 35 27 19 16 M14 x 2 27 55 34 M27 x 2 35 32 1/2 77 26 137 160 9 42 174 140 25 54 43 45 100 38 36 22 18 M16 x 2 28 65 38 M33 x 2 40 36 3/4 94 30 155 (mm) Without rod boot With rod boot Bore size (mm) T l U V W H Z ZZ e f h Z ZZ 40 11 18 7.5 8 66 204 219 55 25 92 230 245 50 11 21 10 9 73 220 238 60 28 99 246 264

LJ1H

1 Single Axis Electric Actuator High Rigidity Direct Acting Guide Series LJ1H Series LJ1H LJ1 LG1 LC1 LX LC6D/LC6C Switches Lead screw lead mm Mounting orientation Series Page Model Motor type Guide type Ground ball screw Rolled ball screw Slide screw 12 10 20 12 10 20 20 20 40 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 2 Horizontal 8 25 25 18 Standard

MU

18 22 26 32 32 LB 27 31 36 46 46 LB 27 31 36 46 46 LA 35.5 41 47 62 62 LA 35 41 46 62 62 L 52.5 59 67 81 84 L 52.5 59 67 81 84 ZZ 115.5 127 137 171 175 Model MU25 MU32 MU40 MU50 MU63 Model MU25 MU32 MU40 MU50 MU63 Applicable pin 8 10 10 14 14 9 11 13 16 16 8 10 10 14 14 9 11 13 16 16 +0.058 0 +0.058 0 +0.058 0 +0.070 0 +0.070 0 0.2 0.4 0.2 0.4 0.2 0.4 0.2 0.4 0.2 0.4 +0.058 0 +0.058 0 +0.058

MU

ZZ 116 127 138 171 175 Z 107.5 117 127 155 159 Z 107.5 117 127 155 159 LX RR 8.5 10 11 16 16 LX RR 8 10 10 16 16 LD LU 11 14 15 20 20 LD LU 13 14 17 23 23 LC 16 18 20 28 28 LC 18 22 26 32 32 LB 27 31 36 46 46 LB 27 31 36 46 46 LA 35.5 41 47 62 62 LA 35 41 46 62 62 L 52.5 59 67 81 84 L 52.5 59 67 81 84 ZZ 115.5 127 137 171 175 Model MU25 MU32 MU40 MU50 MU63 Model MU25 MU32 MU40 MU50 MU63

V

U40 40 43 7 18 13.7 18.5 6.5 ZP16B B16 16 18 4 13 15.7 20 9.9 21 8.5 ZP50U U50 50 53 7 18 14.7 19.5 7.5 ZP20B B20 20 22 4 15 19 23.5 121.4 25 10.5 ZP25B B25 25 27 4 15 19.5 24 15.6 28 10.5 ZP32B B32 32 34 4 15 24.5 29 18.9 37 14 ZP40B B40 40 43 7 18 29.2 34 24.4 48 16 D I M E N S I O N S ZP VA C U U M PA D S ZP50B B50 50 53 7 18 33.2 38 32.4 57 19 H O W T O O R D E R ZP V A C U U M P A D

Base Mounted Metal Seal/Rubber Seal Series VQ

TERMINANAL 2n-C3, C4, C6, C8 P = 16 41 23 <137.5> C3: One-touch fitting for 3.2 128 C8: One-touch fitting for 8 C6: One-touch fitting for 6 C4: One-touch fitting for 4 126 P (SUP) port 2-C10 80 6.5 < >: AC Dimensions Formula L1 = 16n + 118.5, L2 = 16n + 131 n: Station (Maximum 10 stations) 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 L n L1 L2 (L3) (L4) 150.5 163 187.5 198 166.5 179 200

MU

E1 NDH10 Size A1 E1 MM Size L1 L1 MM A1 +0.058 0 +0.058 0 +0.058 0 +0.070 0 8 10 10 14 10.5 12 14 18 16 18 20 28 27 31 36 46 M10 X 1.25 M12 X 1.25 M14 X 1.5 M18 X 1.5 10.5 12 14 18 14 18 20 28 27 31 36 46 M10 X 1.25 25 32 40 50, 63 25 32 40 50, 63 I-MU02 I-MU03 I-MU04 I-MU05 Y-MU02 Y-MU03 Y-MU04 Y-MU05 M12 X 1.25 M14 X 1.5 M18 X 1.5 Applicable pin NDH10 NL U1 U1 Part No. NO Part No.

Electric Actuator with Integrated Guide

BIT 2 5 Program designation BIT 3 Pro-no. bit2 5 18 STP-NO BIT 1 Pro-no. bit3 18 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 6 BIT 2 Stp-no. bit1 6 19 BIT 3 Stp-no. bit2 19 7 BIT 4 20 Stp-no. bit3 7 The terminal that designates the step to be executed.

Vacuum System Peripherals:

Section code 13-14-18 Date issued: 18 Photo copying this page is recommended.

LJ1H

section detail (Switch groove) T-nut 11.5 40 (T-slot pitch) 36 45 4.5 10 9.4 3 x 5H10 depth 5 18 Stroke + 145 80 80 30 T-slot dimensions The body mounting reference plane and work piece mounting reference plane should be used as standards when mounting onto equipment.

Compact Vacuum Unit Ejector/ Vacuum Pump System

Note 2) Refer to the General Specifications on P.41 for the specifications not shown in this table. 44 - Doc. no.

Mist Separator Regulator

Dimensions 40-41 -1- Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage. These instructions indicate the level of potential hazard with the labels of Caution, Warning or Danger.