0.55

Response Time Pilot exhaust port with piping thread (M3) specification X500 Response time ms (at 0.5 MPa) Pressure specifications Model Without light/surge voltage suppressor With light/surge voltage suppressor S, Z type 38 or less 42 or less 39 or less 43 or less 44 or less 47 or less AC 38 or less 42 or less 39 or less 43 or less 44 or less 47 or less R, U type 16 or less 20 or less 17

LEC-OM07605CN

PF_ _ ]). 5-43 5.2.7 4([Pr.

Fluoropolymer Fittings Hyper Fitting / Flare Type Series LQ3

T P M L2 L2 L1 L1 H E E R 14 S 10 Q 43 W 42 Model LQ3F2B LQ3F4B LQ3F4C LQ3F5A LQ3F5B LQ3F5C LQ3F6B LQ3F6C LQ3F6D 17 16 16 32.1 30.9 56.1 54.9 20 58 58 69 53 58 69 58 69 84 14 24.5 14 10 22.5 24 49 46.8 73 70.8 29 22 43 42 12 80 77.3 10 26.5 24 32 58 55.3 37 30 43 42 14 82 79.3 48 47 92.5 88.2 10 16 30 26 41 68.5 64.2 49 36 56 55 94.5 90.2 348 Union Flange Series LQ3 Options Blanking plug

Air Cylinder

Applicable bore size (mm) TB Td TE TF TH TN TR TT CG-020-24A 20 36 8 10 5.5 25 (29.3) 13 3.2 CG-025-24A 25 43 10 10 5.5 30 (33.1) 15 3.2 CG-032-24A 32 50 12 10 6.6 35 (40.4) 17 4.5 CG-040-24A 40 58 14 10 6.6 40 (49.2) 21 4.5 CG-050-24A 50 70 16 20 9 50 (60.4) 24 6 CG-063-24A 63 82 18 20 11 60 (74.6) 26 8 CG-080-24A 80 73 18 11 55 28 0.1 0.3 36 11 CG-100-24A 100 90 22 13.5 65 32 0.1 0.3

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

1 (Short shaft side) 11-3-8 43 Series CRBU2 Rotary Actuator: Free Mount Type Vane Style Dimensions: 10, 15, 20, 30 Single vane type Following illustrations show actuators for 90 and 180 when B port is pressurized.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

40 20 35 142 3 M12 x 1.75 depth 14 245 (311) 8 0 0.036 38.5 CVRA1BS 100 12.5 85 28 25 85 5 18 60 112 43 45 40 25 172 4 ( ) are the dimensions for rotation of 180 and 190.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

1 (Short shaft side) 11-3-8 43 Series CRBU2 Rotary Actuator: Free Mount Type Vane Style Dimensions: 10, 15, 20, 30 Single vane type Following illustrations show actuators for 90 and 180 when B port is pressurized.

JXCx-OMT0023

Control box Servo Driver Servo motor amplifier PE terminal 3 43 3.

Digital Pressure Switch

. -8No.PS-OMH0003-F Model Indication and How to Order For Air : I S E For Fluid : I S E Option Indications Pressure specification 70 0 to 1 MPa 02 43 M S 70 02 43 A 75H L M Pressure specification Option 2 75 0 to 10 MPa Nil No option 75H 0 to 15 MPa A Bracket : Mounting screws are not included.

AC

N F Rc(PT) NPT G(PF) 1.1-43 Attachments Pressure Switch: (S) Compact pressure switch can be mounted easily. Makes it easier to detect pressure in lines.

VQZ1000/2000/3000

Dimensions Note) A B 29 33 41 D 67 81 93 C 40 52 63 VQZ1000 VQZ2000 VQZ3000 35 43 52 A Note) For grommet Individual EXH spacer VVQZ1000-R-5-M5 (VQZ1000) VVQZ2000-R-5-01 (VQZ2000) VVQZ3000-R-5-02 (VQZ3000) M5: VQZ1000 Rc 1/8: VQZ2000 Rc 1/4: VQZ3000 Exhaust port can be installed individually by mounting an individual exhaust spacer on to the manifold block.

Free Mount Cylinder for Vacuum Series ZCUK

32 57 53 33 58 28 35 60 43 22 27 39 64 34 44 69 43 53 23 29 54 28 29 54 35 ZPT-B8 ZC(D)UKC25 ZC(D)UKQ25 29. 5 42. 5 38. 5 47. 5 51. 5 ZH 76. 5 54. 5 67. 5 63. 5 72. 5 DQ HQ HP 43 35 67 27 42 74 53 53 36 68 34 47 79 43 28 38 70 43 22 23 32 64 28 32 64 35 ZPT-B10 ZC(D)UKC32 ZC(D)UKQ32 ZU 32. 5 45. 5 41. 5 50. 5 54. 5 64. 5 77. 5 73. 5 82. 5 86. 5 ZL Rod end shape: Pad direct mounting ZY Tubing

Rotary Table/Rack & Pinion Style Series MSQ

Rotation Adjustment 20 30 70 100 200 50 10 Size Caution Minimum rotation without energy absorption capacity decrease 52 43 40 60 71 62 82 1. As a standard feature, the rotary table is equipped with a rotation adjustment screw (adjustment bolt or shock absorber) that can be used to adjust the rotation.

Air Slide Table Series MXJ

Symmetric type Standard type (mm) Model Width Height Total length MXJ4 MXJ6 MXJ8 20 22 26 10 11 13 43 43 45 Note) Values of stroke 10 mm.

XL

Refer to Replacement parts on page 43 for further details. 1. Use within the limits of the operating pressure range. There will be a marked decrease in durability at pressures above specification. Mounting Caution 1. In high humidity environments, keep valves packaged until the time of installation. 2.

Vacuum

High vacuum pressure type 26 (660) r-:--l:i:_: , i 55 3la 95 L,. , . 1 s : : High suction flow type 1 6 (400) High tlowBody poded Type -ta 3la 43 ZHl8DL 1 . 8 3la "/e 55 rl 95 Specif ications Ejector Symbol __-IR + I Max.

Valve Single Unit

SX5000-38-16 A SX7000-39-16 A SX7000-38-16 A Dimensions Applicable fittings size d 4 Model A L D KQ2P-04 16 32 6 6 KQ2P-06 18 35 8 8 KQ2P-08 20.5 39 10 10 5/32" 1/4" 5/16" 3/8" Thread type Nil Rc G F KQ2P-10 KQ2P-03 KQ2P-07 KQ2P-09 KQ2P-11 12 6 8.5 10 11.5 43 32 35 39 43 22 16 18 20.5 22 N NPT NPTF T Bolt and gasket part no.

Vacuum

High vacuum pressure type 26 (660) r-:--l:i:_: , i 55 3la 95 L,. , . 1 s : : High suction flow type 1 6 (400) High tlowBody poded Type -ta 3la 43 ZHl8DL 1 . 8 3la "/e 55 rl 95 Specif ications Ejector Symbol __-IR + I Max.

Basic type / Direct mount type Series CY3B/CY3R

x 15 C 3.2 4.2 5.2 5.2 6.5 6.5 8.2 8.2 G 4 5 6 6 7 7 8.5 8.5 K 9 14 11 15 13 15 25 24 B 6.5 8 9.5 9.5 11 11 14 14 F 6.5 8 9 8.5 10.5 13 17 18 HP 11 14.5 20 25 32 35 HR 24 30 36 41 51 62 80 90 HS 5 8.5 7.5 6.5 7 8 9 9.5 HT 28 33.5 41 50 56 63.5 L 38 53 62 70 76 90 110 118 Model CY3RG10 CY3RG15 CY3RG20 CY3RG25 CY3RG32 CY3RG40 CY3RG50 CY3RG63 CYP QW 14 18 17 20 26 34 48 60 PW 26 32 38 43

Air Cylinder

Order P.88 Specifications P.89 Construction P.90 Dimensions P.91 Air Cylinder: Non-rotating Rod Type Single Acting, Spring Return/Extend CJ2K Series How to Order P.95 Specifications P.96 Construction P.98 Dimensions P.99 Air Cylinder: Built-in Speed Controller Type Double Acting, Single Rod CJ2Z Series How to Order P.107 Specifications P.108 Construction P.109 Dimensions P.110 43