Series 12-CY3B ø6, ø10, ø15, ø20, ø25, ø32, ø40 ø50, ø63 Magnetically Coupled Rodless Cylinder

55 67 85 97 D 7.6 12 16.6 21.6 26.4 33.6 41.6 52.4 65.4 Model 12-CY3R6 12-CY3R10 12-CY3R15 12-CY3R20 12-CY3R25 12-CY3R32 12-CY3R40 12-CY3R50 12-CY3R63 L 34 38 53 62 70 76 90 110 118 W 20 20 25 40 40 50 60 60 70 X 10 15 18 22 28 35 40 50 60 LD 3.5 3.5 4.3 5.4 5.4 7 7 8.6 8.6 WP 9.5 13 16 19 21.5 27 32 41 47 Y 35.5 39.5 54.5 64 72 79 93 113 121 Z 66 76 94 107 117 130 148 176 188 M 3.5 4 5 5

High Vacuum L Type Valve

Valve specifications Model XLC-16-2 XLC-25-2 XLC-40-2 XLC-50-2 XLC-63-2 XLC-80-2 Flange (valve) size 16 25 40 50 63 80 Actuating type Double acting (Dual operation), Pressurize to open/close Fluid Vacuum of inert gas Operating temperature oC 5 to 60 (5 to 150 for high temperature type) Operating pressure Pa(abs) Atmospheric pressure to 1 x 10-6 Conductance l/s Note 1) 5 14 45 80 160 200 Internal

Digital Flow Switch (Remote type sensor unit)

Model S T U V W WX Y Z PF3W504 24 22 32 40 50 4.5 5 1.5 PF3W520 28 22 32 40 50 4.5 5 1.5 PF3W540 34 30 42 48 58 4.5 5 1.5 PF3W511 44 36 48 58 70 5.5 7 2 -41No.PF-OMN0010-J PF3W521 Basic type Symbol Piping port size A AA B DD E F G H J K L N P Model 11/4, 11/2 104 74 31 52 39.5 PF3W521 25 27.5 3.5 depth 14 G 11/4 108 76 33 54 41.5 56 76.6 71.6 28.5 54 G 11/2 112 78 35 56 43.5 -42No.PF-OMN0010

Fieldbus system Analog unit

) 24 VDC Class2, 2 A Max. sensor supply current 0.5 A/Channel Input specifications Protective function Short circuit protection 12 bit Resolution 0 to 10 V, 1 to 5 V, 0 to 5 V 0 to 20 mA, 4 to 20 mA Input signal range 16 bit Resolution -10 to 10 V, -5 to 5 V -20 to 20 mA Max. rated input signal 15 V 40 mA Input impedance 100 k 50 Linearity (25 oC) 0.05%F.S or less Repeatability (25 oC) 0.15%

A-HEC-OM-J004

and Display Panel .5-4 5.4.2 Setting of Data .5-5 5.4.3 Selection of Operation Mode .5-6 5.4.4 Details of Operation Mode .5-7 5.4.5 Selection of Setting Mode .5-9 5.4.6 Selection of Initial Setting Mode . 5-10 5.4.7 Details of Initial Setting Mode . 5-10 5.4.8 Selection of Control Setting Mode . 5-12 5.4.9 Details of Control Setting Mode . 5-12 5.4.10 Selection of EV Output Setting Mode

CC

CCVS02-*G-* SCCS, #4 CCVS11/12/13-*G-* SCCS, #5 CCVS21/22/23-*G-* SCCS, #5 CCVS31/32/33-*G-* SCCS, #5 CCVS10-* SCCS, #6 CCVS20-* SCCS, #6 CCVS30-* SCCS, #6 CCVL02-*G-* SCC, #3 CCVL11/12/13-*G-* SCC, #4 CCVL21/22/23-*G-* SCC, #4 CCVL10-* SCC, #5 CCVL20-* SCC, #5 4.12-11 Series CC Cylinder Max.

Air Pilot Operated

tt DIMENSIONS VALVE SIZE A A1 B c D F G H J K M N NVSA 3135 4.41 (112) (e8) 2.8 (65) 2.01 (51) /l at 0.35 1.38 (3s) 't.77 (45) 2.ffi (65) 2.52 (64) 1.97 (50) 0.gB (25) 't.97 (50) 0.98 (251 NVSA 314s (146) 5 (124 3.46 (88) 2.W c/1) 1,38 (35) o.47 (12\ 2.09 2.8 (65) 3.19 (81) 3.23 (82) 2.05 (s2) 1.O2 (26) 2.@ (66) 1.30 (33) Millimeters in Parntheses PARTS LIST NVSA 31i|5 I xTo1gr5 axTo2l-14

Air Pilot Operated Series NVSA

tt DIMENSIONS VALVE SIZE A A1 B c D F G H J K M N NVSA 3135 4.41 (112) (e8) 2.8 (65) 2.01 (51) /l at 0.35 1.38 (3s) 't.77 (45) 2.ffi (65) 2.52 (64) 1.97 (50) 0.gB (25) 't.97 (50) 0.98 (251 NVSA 314s (146) 5 (124 3.46 (88) 2.W c/1) 1,38 (35) o.47 (12\ 2.09 2.8 (65) 3.19 (81) 3.23 (82) 2.05 (s2) 1.O2 (26) 2.@ (66) 1.30 (33) Millimeters in Parntheses PARTS LIST NVSA 31i|5 I xTo1gr5 axTo2l-14

Title not found

10 5D a32, 64015 lo lOO o50 to 01 0C/1 0 to 1 00 Double rcd o12, a16/5 b 30 o2O, a25/5 b 50 o32,a4ol51o IOC) o50 to 61 00/1 0 to 1 0O Singleacting Spring return/extend s 1 2 1 0 6 4 U 5 , 1 0 o50h0.20 Ion.rotating rod Double acting Singl rod o12, @16/5 lD 30 o20, @295to 50 o32, o4ol510 1OO o50, 0631 0 to 1 00 Double rod s12, s1615 lo 30 o20 lo o40l5 to 50 o50, a6310lo 50 @Actuation Doude

VNB

VAC 50/60 Hz 220 VAC 50/60 Hz 24 VDC 12 VDC 240 VAC 50/60 Hz Other 1 2 3 4 5 6 7 9 Coil rated voltage 1 2 3 4 5 6 7 9 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz 220 VAC 50/60 Hz 24 VDC 12 VDC 240 VAC 50/60 Hz Other Electrical entry G C TNote) D DL Option Electrical entry/With indicator light/ surge voltage suppressor Grommet Conduit Conduit terminal DIN terminal DIN terminal with

CEx-OMQ0011

100 100 50 50 0 0 0 5 m/s m/s 19 4-3.

MONOSASHI-KUN WITH BRAKE CONTROLLER

External Dimension Drawing 5-1 Monosashi-kun with Brake 18 19 5-2 Controller 20 5-3 Extension Cable 21 6.

180

time (s/90) MHY2-20D MHW2-32D MHT 6 50 Moment of inertia (x 10-4 kgm2) Moment of inertia (x 10-4 kgm2) 5 MHY MHY 40 4 30 MHW MHW 3 20 -X 2 10 1 MRHQ 0 0 0.2 0.4 0.6 0.8 0.2 0.4 0.5 0.3 0.6 MA Operating time (s/90) Operating time (s/90) MHY2-25D MHW2-40D D20 200 Moment of inertia (x 10-4 kgm2) Moment of inertia (x 10-4 kgm2) 15 150 10 100 5 50 0 0 0.2 0.4 0.6 0.8 1.0 0.2 0.4 0.6 0.8 1.0 Operating

VXD21/22/23

VN Solenoid valve option Nil Standard Rated voltage 1 2 3 4 5 6 7 8 9 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz 220 VAC 50/60 Hz 24 VDC 12 VDC 240 VAC 50/60 Hz 48 VAC 50/60 Hz Other (Please contact SMC separately.) LVC Select an option mark in page 17-3-9 by Applicable Fluids Check List for special fluids outside of the standard.

Compact Vacuum Ejector Series ZA

Symbol Rated pressure range and accuracy Part no. 1 2 3 4 5 6 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC With pressure sensor (0 to 101 kPa, accuracy 2% F.S.) With pressure sensor (0 to 101 kPa, accuracy 1% F.S.) With pressure sensor (100 to 100 kPa, accuracy 2% F.S.) With pressure sensor (100 to 100 kPa, accuracy 1% F.S.)

Multi-channel Digital Sensor Monitor ( compatible)

F.S. to UHi +5%F.S.

ZQ-OM01401

to 50 -10 to 60 [%RH] ,35 to 85 [ACV] 1000 1 [M] 50 (DC500V ) 2 (%) F.S. (-5 to 50 25) 2 (AWG26) 5 3.5 2m 0.15mm 1.0mm CE / UKCA (EMC RoHS ) 1 34 - No.ZQ-OM01401-B 10.

VP3145/3165/3185

/60 Hz 200 VAC, 50/60 Hz 110 VAC, 50/60 Hz 220 VAC, 50/60 Hz JIS Symbol Internal pilot (50A) 2 VFN 4 5 6 24 VDC 12 VDC 7 240 VAC, 50/60 Hz 9 Other Option How to Order Pilot Valve Assembly External pilot 00 VT3113 G 1 Coil rated voltage Electrical entry 1 2 3 100 VAC, 50/60 Hz 200 VAC, 50/60 Hz 110 VAC, 50/60 Hz 220 VAC, 50/60 Hz G Grommet Conduit terminal DIN terminal TL D T Note

Air-hydro Unit

CCVS10-U1 Solenoid valve rated voltage 0 2 1 2 3 4 5 6 7 100 VAC, 50/60 Hz 200 VAC, 50/60 Hz 110 VAC, 50/60 Hz 220 VAC, 50/60 Hz 24 VDC 12 VDC 240 VAC, 50/60 Hz L 1 0, 1, 2, 3 2 0, 1, 2, 3 Semi-standard Specifications Combined valve Control valve Stop valve, Skip valve Specifications Throttle valve Flow control valve Small flow Large flow Small flow Large flow Timid flow Small

Speed Controller for Low Speed Operation Series AS-M Standard Type (Metal Body)

AK ASS ASR Flow Rate and Effective Area ASF Model AS121FM AS131FM AS221FM-01 AS231FM-01 AS221FM-02 AS231FM-02 3.2, 4, 6 6, 8 3.2, 4 8, 10 4 6 Metric size Tubing O.D. 1/8", 5/32", 3/16" 1/4" 3/16", 1/4" 5/16" 1/4", 5/16" 3/8" 1/8", 5/32" 5/32" 3/16" Inch size Air flow (l/min(ANR)) 7 12 38 Controlled flow JIS Symbol 0.1 Effective area (mm2) 0.2 0.6 Flow rate (l/min(ANR)) 230 180 460 260 390