to 150 psig (0.034 to 1.0 MPa) 5 to 200 psig (0.034 to 1.4 MPa) 5 to 300 psig (0.034 to 2.1 MPa) 10 to 500 psig (0.07 to 3.4 MPa) Bonnet option 01 02 06 10 15 20 30 50 0.5 to 10 psig (0.0034 to 0.07 MPa) 1 to 30 psig (0.007 to 0.2 MPa) 2 to 60 psig (0.014 to 0.4 MPa) 2 to 100 psig (0.014 to 0.7 MPa) Code Bonnet Standard Panel installation 6) Code Connections NPT 1/4 inch 1/4 inch compression
5 33 15 20 Accessory option: Hexagon socket head screw (special screws) 2-2.5H9 +0.025 0 depth 2.5 Groove for auto switch mounting 18 4.5 18 4.5 1.7 4 2-M4 x 0.7 thread depth 5 Mounting thread 3.3 3 15 Groove for auto switch mounting 90 14 Series MHF2 Dimensions MHF2-16D Scale: 50% 4H9 +0.030 0 depth 3 38 4H9 +0.030 0 depth 3 2-M5 x 0.8 thread depth 12 Mounting thread 6 57.5 5 M5 x 0.8 Finger
5 V, 12 V IC circuit A96 5 V Yes A93 A90 A54 A59W A33 A34 A44 12 V 100 V Relay, PLC No IC circuit 5 V, 12 V 100 V or less 100 V, 200 V PLC Terminal conduit 2-wire 24 V 12 V Yes Relay, PLC 100 V, 200 V DIN terminal Grommet Diagnostic indication (2-color indication) Solid state auto switches marked with are produced upon receipt of order.
/60 Hz) 4.2 A 10 A 180/200 W 50/60 Hz 220 W 0.01 m (99.9% filtration efficiency) Particles of 0.3 m or more: 3.5 particles/L [ANR] or less Heater operation, PID control Singlephase 200 VAC (50/60 Hz) 2.1 A 5 A Singlephase 230 VAC (50/60 Hz) 2.1 A 5 A Singlephase 100 VAC (50/60 Hz) 9.4 A 15 A Singlephase 200 VAC (50/60 Hz) 4.8 A 10 A Singlephase 230 VAC (50/60 Hz) 4.8 A 10 A Power supply Note
NPTF 4 poris Lead wire length Stations(n 2 4 5 7 10 11 '13 14 15 1e 18 'i9 L1 1.47 (47 5) 2.24 2.70 3.11 (68.5) (7s) 3.52 (89.5) 3.94 (100) 4.35 4.76 (110.5) (1a) 5.14 (131.5) 5.59 \142) 6.00 (152.5) 6.42 (163) 6.83 (173.s) 7.24 (184) 7.66 0s4.5) 8.O7 (2051 8.44 (215.5) 8.90 \226) 9.31 (236.s L2 1.56 (39.5) 1.97 (50) 2.34 (60.5t 2.@ \71) (&.5) \92) 4.O4 (102.5) 4.45 (113) 4.46 (n.5) \ta)
NPTF 4 poris Lead wire length Stations(n 2 4 5 7 10 11 '13 14 15 1e 18 'i9 L1 1.47 (47 5) 2.24 2.70 3.11 (68.5) (7s) 3.52 (89.5) 3.94 (100) 4.35 4.76 (110.5) (1a) 5.14 (131.5) 5.59 \142) 6.00 (152.5) 6.42 (163) 6.83 (173.s) 7.24 (184) 7.66 0s4.5) 8.O7 (2051 8.44 (215.5) 8.90 \226) 9.31 (236.s L2 1.56 (39.5) 1.97 (50) 2.34 (60.5t 2.@ \71) (&.5) \92) 4.O4 (102.5) 4.45 (113) 4.46 (n.5) \ta)
NPTF 4 poris Lead wire length Stations(n 2 4 5 7 10 11 '13 14 15 1e 18 'i9 L1 1.47 (47 5) 2.24 2.70 3.11 (68.5) (7s) 3.52 (89.5) 3.94 (100) 4.35 4.76 (110.5) (1a) 5.14 (131.5) 5.59 \142) 6.00 (152.5) 6.42 (163) 6.83 (173.s) 7.24 (184) 7.66 0s4.5) 8.O7 (2051 8.44 (215.5) 8.90 \226) 9.31 (236.s L2 1.56 (39.5) 1.97 (50) 2.34 (60.5t 2.@ \71) (&.5) \92) 4.O4 (102.5) 4.45 (113) 4.46 (n.5) \ta)
-025X11 50 EJ302S-050X11 75 EJ302S-075X11 1 EJ402S-001X11 3 EJ402S-003X11 5 EJ402S-005X11 10 EJ402S-010X11 65 x 500 25 EJ402S-025X11 50 EJ402S-050X11 75 EJ402S-075X11 Note) Seals are not necessary.
Valve specifications Model XLG-16-2 XLG-25-2 XLG-40-2 XLG-50-2 XLG-63-2 XLG-80-2 Flange (valve) size 16 25 40 50 63 80 Actuating type Double acting (Dual operation), Pressurize to open/close Fluid Vacuum of inert gas Operating temperature oC 5 to 60 (5 to 150 for high temperature type) Operating pressure Pa(abs) Atmospheric pressure to 1 x 10-5 Conductance l/s Note 1) 5 14 45 80 160 200 Internal
Adjusting angle per rotation of angle adjustment screw Adjustment bolt a, b (End position adjustment) Adjustment bolt c, d (Center position adjustment) size 5.1 10.2 10 20 30 50 D9.0 3.6 8.2 3.3 4.1 8.2 A piping, speed control, and angle adjustment manual is attached to the product. 295 MSZ Series Construction @8 !5 !3 @0 !7 @5 !1 #0 t u r w @3 !
Model Max. rated flow Model Max. rated flow [L/min] [L/min] PFM510--1 10 (5) PFM510--2 10 (5) PFM525--1 25 (12.5) PFM525--2 25 (12.5) PFM550--1 50 (25) PFM550--2 50 (25) PFM511--1 100 (50) PFM511--2 100 (50) : ( ): Fluid: CO2 : ( ): Fluid: CO2 -55No.PF-OMJ0018-F Dimensions PFM3 Panel cut-out dimensions Panel thickness: 0.5 to 6.0 mm Individual Two or more in a row (n: The number of products
For more information, please refer to Auto Shift Function on page 5.
Length per roll Color Translucent Translucent Symbol N N R BU B N N N N N KM 10 m Red (Translucent) KF 20 m Blue (Translucent) Black (Opaque) Translucent Translucent Translucent Translucent Translucent Roll M 50 m 100 m 16 m ( 50 ft) H/DL L/LL 33 m (100 ft) 2 m Straight KC Metric O.D. size 3.2 O.D. 5/32" is available in 4 metric tubing, and O.D. 5/16" is available in 8 metric tubing.
Auto Switch Proper Mounting Position (Detection at Stroke End) Electrical entry direction: Inward Electrical entry direction: Outward D B A C B D-Z7Z8, D-Y7W D-Y5, D-Y7 D-Y6, D-Y7V D-Y7WV D-Y7BA Bore size (mm) A C 16.5 (15) 23.5 (22) 34 (32.5) 46 (44.5) 46 (44.5) 56 (54.5) D 0.5 (1) 3.5 (2) 0.5 (1) 3 (1.5) 5 (3.5) 5 (3.5) C 18 25 35.5 48 48 58 D 2 5 2 4.5 6.5 6.5 C 10.5 17.5 28 40 40 50 D
0 (A) 4 (B) 2 5 (EA) 1 (P) 3 (EB) 4(A) 2(B) 5(EA) 1(P) 3(EB) i JIS symbol 2 position double 2 position double (A) 4 (B) 2 w e q r t y u o !0 5 (EA) 1 (P) 3 (EB) 4(A) JIS symbol 3 position closed center (A) 4 (B) 2 2(B) 5 (EA) 1 (P) 3 (EB) 5(EA) 1(P) 3(EB) i 3 position exhaust center (A) 4 (B) 2 3 position closed center/exhaust center/pressure center 5 (EA) 1 (P) 3 (EB) w e q r t y u o !
Without lead wire: (with connector and 2 of sockets only) SY100-30-A Rated voltage Lead wire length 5 6 V S R 1 2 Electrical entry 24 VDC 12 VDC 6 VDC 5 VDC 3 VDC 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz [115 VAC 50/60 Hz] 300 mm 600 mm 1000 mm 1500 mm 2000 mm 2500 mm 3000 mm 5000 mm Nil 6 10 15 20 25 30 50 G H L LN LO M MN MO W0 Grommet, 300 mm lead wire Grommet, 600 mm lead wire
(C) 55 50 60 70 80 IDU3D to 6D 45 50 55 65 75 IDU8D to 15C 45 50 55 65 70 IDU22C1, 37C1 40 45 50 55 60 IDU55C, 75C Ambient temperature (C) Outlet air pressure dew point (C) 15 10 5 15 10 5 15 10 5 15 5 10 5 15 10 1.35 1.35 0.60 1.35 1.35 0.60 1.35 1.35 0.60 1.35 0.60 1.35 0.60 1.35 1.35 25 1.35 1.05 0.50 1.35 1.05 0.50 1.35 1.10 0.50 1.35 0.60 1.20 0.55 1.35 1.25 30 1.25 0.95 0.45 1.25 0.95
MOD mm/s mm mm mm mm/s 2 mm/s 2 % % mm/s % mm 0 1 Absolute 100 100.00 1000 1000 50 40 10 100 0 0 5 2 Absolute 50 50.00 1000 1000 0 0 0 100 0 0 0.1 (1) Select/input Step No.1 (Turn on IN0) Controller (2) Turn on DRIVE input Parallel I/O signal Start moving to the position of Step No. 1 Signal Category Step No. output (OUT0 to 5) turns off (2)(5)(10)(13) DRIVE (3) INP output turns off (
weight m (kg) Load weight m (kg) 30 30 MGF63 10 20 20 MGF63 5 10 10 MGF40 5 4 3 5 4 3 MGF40 MGF40 5 MGF40 2 2 3 5 2 1 1 10 20 30 40 50 100 200 300 400 10 20 30 40 50 100 200 300 400 10 50 100 5 10 50 100 Eccentric distance l (mm) Eccentric distance l (mm) Stroke (mm) Stroke (mm) How to read the graph 1) When the load weight is 70kg, eccentric distance is 60mm, and the maximum speed is 150mm
Note 6) The flow rate unit is based on 0C and 101.3kPa. 2 For Air Digital Flow Switch Series PFA How to Order PFA5 Remote Type Sensor Unit 10 01 Wiring specification Flow rate range 3m lead wire with connector Without lead wire Nil N 1 to 10l/min 5 to 50l/min 10 to 100l/min 20 to 200l/min 50 to 500l/min Nil N F 10 50 11 21 51 Port size Thread type Size Applicable model Flow rate (l/min)