Compact Cylinder with Air Cushion Series RQ ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 How to Order RQ B 32 50 50 32 RDQ B M9BW With auto switch With auto switch Made to Order (Built-in magnet) For details, refer to page 775. Mounting bracket Number of auto

, 100 30, 40, 50, 75, 100 40, 50, 75, 100 Made to Order (For details, refer to pages 1420 and 1470.)

IDX-OM-M050

NIL IDF 100 F 30 NIL C 1 K 2 Size P 3 Air compressor size Note) 100kW 125kW 150kW Note) The value is referential. Confirm the capability of the compressor used.

IDX-OM-U021

MADE IN G IDF100150F i-2 i-6 IDX-OM-U021 i i-3 HFC IDF100150F i-3 i-7 IDX-OM-U021 i i-4 / 1 1.5 () IDF100150F i-4 / i-8 IDX-OM-U021 1 1 1-1 i.2.9 1 2 IDF100F-30 C.RV IDF100F-30-CRV1 IDF 100 F 30 C 1 2 G 3 K 100 125 150 ) 100kW 125kW P 150kW ) R V 30 AC200V(50Hz) AC200/220V(60Hz) 1 C 1 G 2 K 3 P R V 1-1 IDF100150F 1 1 IDX-OM-U021 1 1-2 1-2-1 (C) 1-2-2 G 1-2-3 K

IDX-OM-M051

NIL IDF 100 F 30 4 W C 5 G Size K Size Air compressor size Note) 100kW 125kW 150kW 100 125 150 P R Note) The value is referential. Confirm the capability of the compressor used.

IDX-OM-Z004

G MADE IN IDF100150F-W i.2 i-6 IDX-OM-Z004 i i.3 HFC IDF100150F-W i.3 i-7 IDX-OM-Z004 i i.4 / 1 1.5 () IDF100150F-W i.4 / i-8 IDX-OM-Z004 1 1 1.1 i.2.9 1 2 IDF100F-30-W C,RV IDF100F-30-CRVW4 IDF 100 F 30 W 4 C 5 G ) K 100kW 100 P 125kW 125 150kW 150 R ) V AC200V(50Hz) AC200/220V(60Hz) 30 1 4 5 C G K P R V 1.1 IDF100150F-W 1 1 IDX-OM-Z004 1 1.2 1.2.1 (C) 1.2.2 G 1.2.3

IDX-OM-U022

[IDFA125F-38/40] () (10 2m) (100.7m) 20 4x R2 1/2 R2 1/2 1130 78 9351 267 1120 655 75 64 (17 ) 40 1276 1375 R ) (14~18) () P.1-5 P.1-5 P.1-5 7122 20 350 700 752 IDFA100F150F 6 4 6.3 IDX-OM-U022 6.

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

Auto switches are not mounted, but rather packaged together with the cylinder for shipment. 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 12, 16 20 25 5, 10, 15, 20, 25, 30 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 32, 40 Manufacturing intermediate strokes Intermediate strokes can be manufactured in 1mm increments by installing spacers in a standard stroke cylinder.

End Lock Cylinder Series CBJ2

Information End Lock Cylinder Series CBJ2 / 16 Cylinder stroke (mm) 16 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 Intermediate strokes are available in 1 mm increments without stroke adjustment with a spacer. For types with auto switch, refer to Minimum Strokes for Auto Switch Mounting on page 2.

48

How to Order Needle Valve/Flow Rate Characteristics 0 2 F A 1 AS 1 M3 X790 06 AS1201F-M350 45 40 35 30 25 20 15 10 5 0 0.5 0 1 1.5 2 2.5 3 3.5 4 4.5 5 6 7 8 Inlet pressure: 0.5 MPa Port size Push-lock type Body size Flow rate [L/min (ANR)] 1 M3 x 0.5 M3 M3 x 0.5 Applicable tubing O.D.

Compact manifold regulator ARM5 Series

Accessories Centralized supply block mounting position Pressure gauge Note) Yes None L side R side B side (Left) (Right) (Both) Centralized supply block Centralized supply block Centralized supply block ARJ Symbol AR425 to 935 ARX AMR A B C D E F ARM ARM ARP IR-A Note) Pressure gauges are not compatible with copper-free and fluorine-free specifications. IR 7. Unit Representation 6.

Air Suction Filter With One-touch Fittings ZFB Series

IN side, OUT side 4 10 20 30 50 75 75 Weight (g) 22 22 30 30 39 39 Model Tubing size ZFB100-04 ZFB100-06 ZFB200-06 ZFB200-08 ZFB300-08 ZFB300-10 7 7 12 12 16 16 Unrestricted 360 piping tube mounting on the IN side 6 6 8 8 10 Metric size Easily replaced filter element Easy installation and removal with One-touch fittings ZFB101-05 ZFB101-07 ZFB201-07 ZFB301-11 ZFB401-13 22 22 30 40 62 20 20

SJ3A6

DXT170-75-1) 1(P) port Core wire Crimping area Core wire crimping area Lead wire Socket 3/5(E) port Insulation Hook 0.2 to 0.33 mm2 4(A) port 2(B) port Max. cover diameter: 1.7 mm Hold down part of the release bush with your finger or a similar tool, as shown in the diagram, and pull out in the direction indicated by the arrow. 3.

Air Preparation Equipment Degrees of quality Max. particle diameter ( µ m) Min. pressure dew point ( ° C) Max. oil density (mg/m 3 ) International Standard ISO 8573-1: 1991 Degrees of Quality Japanese Industrial Standard JIS B 8392-1: 2000 Degrees of Qual

Trace the arrow mark, starting with F for cooling temperature 25C (pressure dew point 25C) to find the intersection G on the pressure characteristic line for 0.7 MPa. 8. From the intersection G, trace the arrow mark to obtain the intersection H on the vertical axis. 9. The intersection H is the amount of water included in the compressed air 1 m3 at 0.7 MPa, pressure dew point of 25C.

HRX-OM-W069

(C or F). Read the circulating fluid discharge temperature which is displayed on the touch panel.

HRX-OM-Z015

A 0x00,0xFA Checksum ASCII:LRC RTU:CRC F,F 0x39,0x73 Trailer CR/LF None Total quantity of byte 15 7 Response message at a circurating fluid return temperature of 25.0 HRLE Series 3.13 Register Map 3-23 HRX-OM-Z015 Chapter 4 Communication alarm function Chapter 4 Communication alarm function Monitors whether the serial communication is sent/received properly between the product and the customers

ASR

AS 0 0.1 0.15 0.2 0.25 0.3 Return stroke pressure (MPa) ASP ASN v v w w a a o o l l v v l l F F e e AQ ASV u u r r e e s s v v s s a a e e l l v v r r P P e e AK ASS ASR ASF Working stroke Working stroke Return stroke Return stroke Pressure valve Flow valve 15-16-1 Cuts air consumption by operating the return stroke at a reduced pressure.

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type AS-FG Series

Made to Order (Refer to page 681 for details.) 680 AS-FG Series Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type How to Order AS 2 1 0 3 F G 01 06 Body size Lock nut option Nil J Hexagon lock nut Round lock nut 1 2 3 4 M5 standard 1/8, 1/4 standard 3/8 standard 1/2 standard Control type AS-F 0 1 Meter-out Meter-in Made to Order (Refer to the below for

240

Compact Slide MXH Series 6, 10, 16, 20 RoHS MXH MXH Allowable moment Improved by up to 240% MXS MXQ MXQ MXF MXW MXJ MXP MXY With new high rigidity linear guide Allowable moment improvement illustrated below MTS Allowable moment (Nm) 0 0.5 1 1.5 F 1.7 times greater MXH Pitch moment Mp Current model 2.1 times greater My F MXH Yaw moment Current model F Mr 2.4 times greater MXH Roll moment Current

CYV

= F x L M3 = F x L M1 = F x L Note) Deflection: Displacement of point A when force acts on point F Point A: Indicates a measurement point CYV15 (M1) CYV15 (M2) CYV15 (M3) 0.05 0.05 0.05 0.04 0.04 0.04 Deflection (mm) Deflection (mm) Deflection (mm) 0.03 0.03 0.03 0.02 0.02 0.02 0.01 0.01 0.01 0.1 0.2 0.3 0 0.1 0.2 0.3 0 0.1 0.2 0.3 0 Moment (Nm) Moment (Nm) Moment (Nm) CYV32 (M1) CYV32 (M2

3 Port Air Operated Valve Series SYJA300 1

(Value in the initial state) VA Body ported SA Series SYJA500 VA With Bracket VM Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VR Air operated valve type SYJA5 2-M5-F, SYJA7 2-01-F 1 2 1 2 Note) Bracket is not mounted.