PFA/PFW

Note 2) Window comparator mode Since hysteresis is 3 digits, separate P1 and P2 by 7 digits or more. 1 digit is the minimum setting unit (refer to the table above). 4 Digital Flow Switch for Air Series PFA How to Order How to Order Display Unit Sensor Unit PFA 30 PFA5 10 02 0 A 0 Mounting Flow rate range Panel mount DIN rail, wall mount A B 1 to 10l/min 5 to 50l/min 10 50 Wiring specifications

ZP3

B C D E Y q Pad dia.

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

JIS Symbol Not required Lubrication 2 position single Push type/Locking type (Tool required) Pilot valve manual override (A) 4 (B) 2 (2) 30/150 m/s2 Vibration/Impact resistance Dust tight Protection structure 1 (P) 5 (R1) 3 (R2) 12 VDC, 24 VDC Coil rated voltage 10% of rated voltage Allowable voltage fluctuation 2 position double (Latching) (A) 4 (B) 2 (A) 4 (B) 2 Equivalent to class B Coil

JXCx-OMT0005CN

1 2 L A A-1 1 B B-2 6 B A-2 5 COM-A/COM B-3 3 COM-B/ A-3 4 3 Shield Vcc B-4 12 GND A-4 13 A B-5 7 A A-5 6 B B-6 9 B A-6 8 3 (14.2) 2 (2) 1 8 1 B1 A1 (14) 17.7 5 6 (3) 1 2 (18) A6 B6 15 16 (11) 30.7 L 15.2 [820m] 1 2 LE CP 2 A B-1 L 1 A A-1 6 B B-2 8 8m * 5 B A-2 3 COM-A/COM B-3 A 10m * 4 COM-B/ A-3 B 15m * 3 Shield C 20m * 12 Vcc B-4 13 GND A-4 * 7 A B-5 6 A A-

Series CJ2Y ø 10, ø 16 Smooth Cylinder Double Acting, Single Rod

): Dimension of the D-A96 D-A9V D-M9V D-M9WV D-M9AV Auto switch Auto switch Hs Hs A B A B 21.5 (23.5) 23.5 14.5 14.5 12.5 12.5 ( ): Dimension of the D-M9AV D-A7/A80 D-A73C/A80C D-A79W D-F7/J79 D-F7W/J79W D-F79F/F7BA Auto switch Auto switch Hs Hs Hs Hs A B A B D-A7H/A80H D-F7V/F7WV D-F7BAV D-J79C Auto switch Auto switch B A A B 10 Auto Switch Mounting Series CJ2Y Auto Switch Proper Mounting

Tamper Proof and Flat Head Screw

(Refer to CAT.E501-B "Air Fittings and Tubing" pages 143 and 144 for details.)

Stainless Steel Cylinder Series CJ5-S/Series CG5-S

H B H Material: SUS304 Material: SUS304 Material: SUS304 Part no.

Title not found

Bore size(mfn) Standard stroke(mm) MGOftl Slide bearing MGor12, rc 10, 20, 30, 40, 50 MGOr2o,2s 20, 30, 40, 50, 75, 100 25, 50, 75, 100 MGOL Ball bush bearing MGOr32,40, 50, 63, 80,1OO . intermediate stroke As to intermediate stroke (5, 10, 15, 20, 30, 35 )' spacer of 5, 10' 15,20mm width will be used (Example) MGOM50-10 is produced by installing 1smm spacel in MGQM50'25 Consult factory when

VQC

2 (A) 4 (B) 2 Note) Not applicable to S kit. 1 A Note) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) Coil voltage B: Locking type (Slotted) N.C N.C 12 VDC 5 6 4 position dual 3 port valve (B) 2 position double (metal) 24 VDC Note) (A) 4 (B) 2 (A) 4 (B) 2 B Note) S kit is only available for 24 VDC.

ITV

25 22 R3.5 15 25 m36 7 (10) 30 L-bracket INI-398-0-6 (optional) 2-Rc(PT) 1/4, 3/8, 1/2 (7) 36 SUP port, OUT port 1.12-8 Series ITV2000/3000 Made to Order Specifications Contact SMC regarding detailed dimensions, specifications and delivery times.

IDX-OM-W023

T 100 2 () 100 IDU Series 4-1 4 1 IDX-OM-W023 4 4-2-3 0 OFF 50 1015 ( 1 INOUT IDU Series 4-2 4 2 IDX-OM-W023 4 30 (2) 30 () O IDU Series 4-2 4 3 IDX-OM-W023 4 AD48-A 1 IDU8E/11E/15E1 ) 20193 20192SERIAL No.XPAD48 SMC WEB IDF-S0002 1 IDU8E/11E/15E1 C42FP-260S 1 IDU8E/11E/15E1 IDF-S1933 1 IDU8E/11E/15E1 2 IDU Series 4-2 4 4 IDX-OM-W023 5 5 5-1 3 ON OFF () 3 2

Table of Contents - Tubing

lines in clean room environments TPH 06 04 B 20 Tube O.D.

EXxx-OMZ0016

Brazil EXW1-BMJAAE E EXW1-BMJAAN N EXW1-BMJABE E EXW1-BMJABN N A Base MJ B A B EXW1-RDXNE4AE E EXW1-RDXNE4AN N EXW1-RDXNE4BE E EXW1-RDXNE4BN N EXW1-RDYNE4AE E EXW1-RDYNE4AN N EXW1-RDYNE4BE E EXW1-RDYNE4BN N EXW1-RDMPE3AE E EXW1-RDMPE3AN N EXW1-RDMPE3BE E EXW1-RDMPE3BN N EXW1-RDMNE3AE E EXW1-RDMNE3AN N EXW1-RDMNE3BE E EXW1-RDMNE3BN N A DX N B E4 A EXW1 DY N B Remote R A P B DM E3 A N B -17No.EX-OMZ0016

Process Valve

Applicable cable O.D. 6 to 8 (D, DZ) P Pg9 J (DIN terminal: D, DZ) I (Grommet: G) F (Air operated) Pilot port 12 (P1) 2 x (Back side 10 (P2)) 4 x M 8 1 Manual override (Non-locking push type) P1 D S Q E 15 B A H (DIN terminal: D, DZ) G (Grommet: G) A R B C Main port 1 (A) (Back side 2 (B)) Port side: refer to table below Model Main port 1(A), 2(B) A B C D E F G H I J K L M N P Q R S VNB2V

Wireless System

A 14 A B A B A 14 A B A 14 A B 3 2 A 14 U side D side D side U side 0 1 5 4 2 3 B 12 B 12 B 12 B 12 B 12 7 8 1 2 3 4 5 Valve stations EX600-ED4 1 set EX600-WEN1 1 set EX600-EU1 1 set SS5Y3-10S6WE72-05B-C6 (Type 10 5-station manifold base, Wireless EtherNet/IP) Negative common, M12 connector IN/OUT pin arrangement 1, I/O unit: 2 stations * SY3100-5U1 3 sets (2-position single part no.) *

80

A B C D E F G H J 1.6 M5 2.3 3.2 For other special options, refer to page 462.

CEx-OMI0064

b. c. 4. a. b. c. 1 - 1. 1. 1. (), 2. ,, 3. F.G.

VNB

C.O. 1 2 1 4.1 4.2 Normally closed Normally open Double acting VNB0 VNB02 VNB03 VN 1 4 7.7 7.8 40 12 (P1) 12 (P1) 10 (P2) LVC 6.3 6.4 2 Air operated LVA 2 (B) 1 (A) 2 (B) 1 (A) 2 (B) 1 (A) 11.4 11.5 50 10 (P2) Note) The flange should be JIS B 2210 10K (ordinary style) or its equivalent.

[Option] 3 Port Solenoid Valve Direct Operated Poppet Type VT317 Series Rubber Seal

Cv C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv VT325 VT325V (Vacuum spec. type) VT325 VT325V (Vacuum spec. type) 0.55 kg (For AC) 0.60 kg (For DC) Note) Values for a single valve unit.

AFF

01 B 06 B 1 8 3 4 1B Accessory 02 03 10 14 B 1 4 B 3 8 04 B 1 2 1 4 1 B 1 2 20 2B Option IN-OUT reversal direction -T Element service indicator AFF75A to AFF220A AFF 75A 20 D Accessory (Option) Basic size (Applicable compressor rating) D Auto-drain G Pressure gauge F Companion flange L Anchor bolt 75A 75 kW 125A 110 to 125 kW 150A 150 kW 220A 180 to 220 kW Port size 20 2BJIS 10k flange 30