Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

C E C E J G J G B B WN: M12 connector D F K C J G E B [mm] Size Port size A B C D E F G 20 1/8, 1/4 42 40 77.6 36 17.5 18 15.5 30 1/4, 3/8 53 53 94.5 42 21.5 21 18 40 1/4, 3/8, 1/2 71 70 102.5 42 25.5 21 22.5 Size Port size DIN terminal DIN terminal without connector M12 connector J K L J K J K 20 1/8, 1/4 56.7 55.3 67 56.7 31.3 55.5 41.1 30 1/4, 3/8 65.6 58.3 70 65.6 34.3 64.4 44.1 40 1

SYJ3000/5000/7000

For 1/8 For C6/N7 1-5-45 46 Series SYJ5000 C4 N3 Type 43: Side Ported/SS5YJ3-43Stations [ ]: AC Grommet (G) Approx. 300 (Lead wire length) L1 L2 4.5 Manual override 2-5.5 (For mounting) 12 1/8 (P, R port) 62.7 [64.9] 62.1 [64.3] 40.6 (DIN 41.8) 40 (DIN: 41.2) 87.2 [91.6] 103.2 [107.6] R P P R B B B B B 17.5 11.4 36.9 20.3 A A A A A 3 (DIN: 4.2) 1 (4.4) Courtesy of Steven Engineering, Inc

CLQ

Bore size (mm) B A A B 90.5 29.5 39.5 80.5 90.5 10 to 50 75, 100 39.5 40 Rod end nut 38.5 Rear flange type: CLQG40 54 40 4-5.5 A + Stroke 8 7 B + Stroke 34 72 62 Rear flange type (mm) Stroke range Without auto switch With auto switch Bore size (mm) A B A B Rod end nut 28.5 88.5 29.5 39.5 78.5 88.5 10 to 50 75, 100 39.5 40 Double clevis type: CLQD40 4-M5 x 0.8 Cap bolt 10 hole H10 Shaft d9

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

D-Z80 D-Y59l D-Y69l D-Y7P D-Y7PV D-Y7lW D-Y7lWV D-Y7BA D-G5l D-K59 D-G5NT D-G5lW D-K59W D-G5BA D-G59F D-F5l D-J59 D-F59F D-F5lW D-J59W D-F5BA D-M9l D-M9lV D-M9lW D-M9lWV D-M9lA D-M9lAV D-B5l D-B64 D-A9l D-A9lV D-A59W D-F5NT D-P3DWA D-P4DW Bore size A B A B A B A B A B A B A B A B A B A B A B 40 10 8 6 4 4 1 5.5 3.5 3.5 0.5 0.5 0 1 0 7 4 2.5 0 4.5 1.5 12 9 50 10 8 6 4 3.5 1.5 5.5 3.5 3 1

CXS

Bore sizes 10, 20, 30, 40, 50 10, 20, 30, 40, 50 10, 20, 30, 40, 50, 75, 100 Standard strokes (mm) 6 10, 15 20, 25, 32 Applicable auto switches: Refer to pages 40 through 49 for detailed auto switch specifications.

Tie-rod Type Hydraulic Cylinder

Hs Auto switch 12 D-B5/B6 15 22.5 A B 33 410 Auto Switch Mounting CHA Series Auto Switch Proper Mounting Positions (mm) D-G5/K59 D-G5W/K59W D-G59F/G5BA D-G5NT D-M9/M9V D-M9W/M9WV D-M9A/M9AV D-F5/J59 D-F5W/J59W D-F59F/F5BA D-F5NT D-G39/K39D-A9/A9V D-A5/A6 D-A59W D-B5/B64 D-B59W D-A3/A44 Bore size (mm) CHQ A B A B A B A B A B A B A B A B A B A B A B CHK 40 20.5 21.5 17 18 22 23 12.5 13.5 10.5

CG5-S

Chemical (Concentration weight %, Temperature C) Symbol FKM (40 to 150C) PVC (10 to 60C) NBR (10 to 60C) PBT (10 to 60C) AI SUS304 Hydrochloric acid (20%, Room temperature) D D B A A B 1 Chromic acid (25%, 70C) B D D A A B 2 Boric acid Inorganic salt B D A A B A 3 Sulphuric acid (30%, Room temperature) D D A A B A 4 Phosphoric acid (50%, Room temperature) D A A B B A 5 Ammonium hydroxide

Refrigerated Air Dryers Series IDF/IDU

, 460 V (50 Hz) 440 to 460, 460 to 500 V (60 Hz) A 4 x 11 220 200 V (50 Hz) 200, 220 V (60 Hz) IDF-TR4000-7 355 299 320 42 kg (mm) IDF-TR 8 C E G Specifications/Dimensions B A B C D E F G Mass Inlet voltage Outlet voltage IDF-TR7000-8 IDF-TR9000-8 IDF-TR14000-8 IDF-TR18000-8 Transformer Applicable dryer IDF120D IDF150D Capacity Type 360 400 400 400 11 13 13 13 30 40 40 40 7 kVA 9 kVA 14 kVA

MB1

Stroke S + Stroke H A F N N C B Cylinder tube sectional view B-B' Width across flats Stroke range Bore size (mm) Effective thread length C B G F E A H ZZ W V S P N MM J MB 32 40 50 63 80 100 32.5 38 46.5 56.5 72 89 13 14 15.5 16.5 19 19 13 13 14 14 20 20 30 35 40 45 45 55 46 52 65 75 95 114 22 30 35 35 40 40 47 51 58 58 72 72 135 139 156 156 190 190 6.5 9 10.5 12 14 15 4 4 5 9 11.5 17 84

MXQ

-10 MXQ8-20 MXQ8-30 0.03 Table displacement amount (mm) Table displacement amount (mm) Table displacement amount (mm) 0.06 MXQ8-50 MXQ8-40 MXQ8-50 MXQ8-50 MXQ8-40 MXQ8-40 MXQ8-20 MXQ8-20 MXQ8-20 0.010 MXQ8-30 MXQ8-30 MXQ8-40 MXQ8-40 MXQ8-30 MXQ8-40 MXQ8-75 MXQ8-75 MXQ8-75 0.02 MXQ8-75 MXQ8-75 MXQ8-75 0.04 MXQ8-20 MXQ8-40 MXQ8-20 MXQ8-20 MXQ8-40 MXQ8-40 MXQ8-10 MXQ8-10 MXQ8-10 MXQ8-30 0.005

CQS

Model C D 25 30 35 40 45 50 25 30 35 40 45 50 25 30 35 40 45 50 55 60 65 70 30 35 40 45 50 55 60 65 70 75 C' D' 30 35 40 45 50 55 30 35 40 45 50 55 30 35 40 45 50 55 60 65 70 75 35 40 45 50 55 60 65 70 75 80 Mounting bolt Mounting bolt CQSKB12-5D -10D -15D -20D -25D -30D CQSKB16-5D -10D -15D -20D -25D -30D CQSKB20-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D CQSKB25-5D -10D -15D -20D -

5-Port Solenoid Valve

Valve with Restrictor 81.6 74.1 30.2 20 49.4 43.8 40.2 40 35 B 2 B 2 B 2 B 2 B 2 2 x M2.6 2 x 4-40 UNC [For NPT(F) thread] 1/8 [4(A), 2(B) port] 12.3 4 x 4.5 (For mounting) One-touch fitting [4(A), 2(B) port] 18 L1 L2 (L5) 5 8 28 Applicable tubing O.D.: 4, 5/32" 34 Metal Base Made to Order : 6, 1/4" : 8, 5/16" 1/4 [1(P), 5(EA), 3(EB) port] M5 x 0.8 (External pilot) X: External pilot port

Free Mount Cylinder

(mm) 02 04 06 08 10 13 16 20 25 32 40 50 2 4 6 8 10 13 16 20 25 32 40 50 Pad type 02 04 06 08 10 13 16 20 25 32 40 50 2 4 6 8 10 13 16 20 25 32 40 50 Pressure gauge position Thread dia.

PFxx-OMA1007

(page 141) -142No.PF-OMA1007-B Air Management Hub Base type EXA1-20/30/40-PN/EN/EC-# Model A B C D E F EXA1-20 236.2 35 42 19.1 65.1 30.5 EXA1-30 236.2 43 53 13.6 65.1 30.5 EXA1-40 240.4 51 64.4 4.6 71 35.5 -143No.PF-OMA1007-B EXA1-60-PN/EN/EC-# -144No.PF-OMA1007-B Remote type EXA1-20/30/40-SA-# Model A B C D E F G EXA1-20 236.2 35 42 19.1 65.1 30.5 74.7 EXA1-30 236.2 43 53 13.6 65.1 30.5

CHKD/CHKG

D-M9/M9V D-M9W/M9WV D-M9A/M9AV Bore size (mm) D-A9/A9V D-Z7/Z80 A 12 13 15 17 18 21.5 23.5 31.5 B 19 20 21.5 23.5 27.5 31 40 49.5 B 16.5 18.5 22.5 26 35 44.5 B 15 16 17.5 19.5 27 36 45.5 B 16.5 18.5 22.5 26 35 44.5 A 10 12 13 16.5 18.5 26.5 A 8 9 11 13 17.5 19.5 27.5 A 10 12 13 16.5 18.5 26.5 20 25 32 40 50 63 80 100 Note 1) D-A9/A9V models cannot be mounted on 50.

Guide Cylinder Series MGG

B B A A A A A Hs Hs Hs Hs 20 20 30.5 45.5 29.5 44.5 28.5 43.5 24.5 27 27.5 24 29 44 33 48 38.5 41.5 40 23.5 26.5 25 27.5 25 25 30.5 45.5 29.5 44.5 28.5 43.5 27 29.5 30 26.5 29 44 33 48 38.5 41.5 40 23.5 26.5 25 30 32 32 31.5 46.5 30.5 45.5 29.5 44.5 30.5 33 33.5 30 30 45 34 49 39.5 42.5 41 24.5 27.5 26 33.5 40 40 36.5 55.5 35.5 54.5 34.5 53.5 35 37.5 38 34.5 35 54 39 58 48.5 51.5 50 29.5

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

Type S3: Side ported (Lead wire length) 91.7[96.1] Approx. 300 10-SS5YJ3-S31Stations -M3 L1 3.5 L2 2-3.5 (For mounting) Manual override M5 x 0.8 (P, R port) 5.2 29.2 7.5 17.3 30 52.2[54.4] 51.4[53.6] 3 91.7[96.1] 78.8[83.2] 78.8[83.2] A A A A A 13.5 B B B B B P R P R P R 29.2 P R 30 17.3 25 7.5 12 25 51.4[53.6] 52.2[54.4] 13.5 B B B B B A A A A A 3 5.2 2-3.5 (For mounting) Manual override

RSQ

Bore size (mm) A B A B A B U U 40 22.0 26.0 21.0 25.0 19.5 23.5 35.0 38.0 37.5 50 30.0 18 29.0 17.0 27.5 15.5 40.5 43.5 43.0 Operating Range Bore size (mm) 40 Other than the models listed in How to Order, the following auto switches are applicable.

XL

Valve side exhaust 18 High Vacuum Angle Valve Series XLG, XLGV Dimensions Dimensions (mm) 1in=25.4mm (b) XLG/Air operated type C D E C E E Fn (KF flange) Fd (K flange) (a) (c) G H J B Heater (optional) A A (mm) (mm) H 40 G 17 26 41 52 70 83 Fd Fn 30 40 55 75 87 114 D 1 1 2 2 3 3 C 38 48 66 79 100 117 B 110 120 171 183 209 250 A 40 50 65 70 88 90 A B C D Fn Fd G H 40 Note 1) E J E Note 1)

C95

A B A B A B A B A B A B MB1 32 0 10.5 1.5 14 9.5 22 4.5 17 2 14.5 0 10.5 1 13.5 40 0 21.5 1.5 25 9.5 33 4.5 28 2 25.5 0 21.5 1 24.5 CA2 50 0 23 2 26.5 10 34.5 5 29.5 2.5 27 0 23 1.5 26 63 0 28 2 31.5 10 39.5 5 34.5 2.5 32 0 28 1.5 31 CS1 80 2.5 28 6 21.5 14 29.5 9 24.5 6.5 22 2.5 28 5.5 31 100 2.5 28 6 31.5 14 39.5 9 34.5 6.5 32 2.2 28 5.5 31 C76 C85 Auto Switch Mounting Height C95 D-F5,