CE

9 #0 w #1 #0 t q @9 e #1 @1 !9t@5 @6 #0@1q!1w#1#0@2@9#1@1 40 to 63 @4@0@8oiu@3!1#1#2@8@4!2@7!3#3r!4@6!6e #7 #6 !5 !9t@5 @6 y#0@1w#0#5!7#4q@9@2!8#1#2!7#5#4@1 Parts list Parts list Description Material Note No. No.

High-precision Digital Pressure Switch ( compatible)

(Page 63) 2001 0x07D1 0 R Process data Conversion formula Intercept b F32 N 2002 0x07D2 0 R Peak value U16 0 N Refer to process data on page 61 to 63. 2003 0x07D3 0 R Bottom value U16 0 N information Diagnostic Number of pressurizing errors U16 0 N 0 ~ 1000 2004 0X07D4 0 R 1: "R" means Read and "W" means Write. 2: Refer to the table below for the symbol.

VK300

side of A port Nil 1 8 01 Rc VFN Nil Rc G NPT NPTF C4 4 cassette P port: Rc 1/8 R port: Rc 1/8 A port: Rc 1/8 F N T Same side of A port S C6 6 cassette Valve stations Type S42 (Solenoids on the same side of A port) 01 1 station 20 20 stations P port: Rc 1/8 R port: Rc 1/8 A port: Rc 1/8 Common SUP/Individual EXH How to Order Type 21: Body ported (A port top ported) Applicable solenoid valve

High-precision Digital Pressure Switch ( compatible)

(Page 64) 2001 0x07D1 0 R Process data Conversion formula Intercept b F32 N 2002 0x07D2 0 R Peak value U16 0 N 2003 0x07D3 0 R Bottom value U16 0 N information Diagnostic Number of pressurizing errors U16 0 N 0 ~ 1000 2004 0X07D4 0 R 1: "R" means Read and "W" means Write. 2: Refer to the table below for the symbol.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

R P 3.5 to 7 3 1 < >: AC 93.5 86 M plug connector (M) R P (Lead wire length) 3 1 87 300 83.5 98.5 Indicator light Cross section 0.23 mm2 Cover diameter 1.5 69.5 <74.5> R P 3 1 < >: AC Formula L1 = 20n + 8 L2 = 20n + 26 n: Stations (Maximum 20 stations) Dimensions L n 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 48 66 87.5 98 68 86 112.5 123 88 106 137.5 148 108 126 150 160.5 128 146 175

ø 40, ø 50, ø 63, ø 80, ø 100 Series CBA2 Standard type CA2 Standard type CA2W Standard/Non-rotating rod CA2K Standard/Non-rotating rod CA2KW Low friction CA2
Q End Lock Cylinder

3 @9 #0 #1 #2 #3 #4 #5 #6 !4 !5 w !2 @0 @8 o !0 !1 i Manual release non-lock type: Suffix N @4 @5@6@7 Manual release lock type: Suffix L Parts List No.

ISA2

8 SUP port Rc, NPT, G 1/8 Throttle needle 25 40 10 42 With regulator + 2 port solenoid valve With 2 port solenoid valve 16-8-15 16 Series ISA2 Bracket Mounting Position With 2 stations, the bracket is mounted on the second sensor from the left. 1 2 1 2 Left Right 1 2 MPa MPa MPa MPa MPa MPa With n stations, the bracket is mounted on the first and n th sensor from the left. 1 2 n Courtesy

VK3000

Make sure not to plug the exhaust port R. 1 8 VK3140 Base mounted 1 8 130 (with sub-plate) VK3140Y (For low wattage 2 W DC) 0.50 0.12 0.11 0.48 0.19 0.12 Plug position B port N. C. A port N. O.

AWG

tubing Symbol Nil 1 2 6 8 C J N W Z Applicable model AWG20 to 40 AWG20 to 40 AWG20 to 40 AWG30, 40 AWG20 AWG20 to 40 AWG20 to 40 AWG30, 40 AWG20 to 40 Symbol Port size 1/8 3/8 1/2 (4) 20 30 40 Thread type (5) Type Rc NPT G Symbol Nil N F (1) (2) (6) Name plate, caution plate for bowl, and pressure gauge in imperial units (PSI, F) (3) When more than one specification is required, indicate

SMC Pneumatic Clean Series

M6.5 1 10 100 1000 10 10 The number of particles larger than 0.1 m in an air volume of 1m3 is expressed in 10 N.

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

Refer to the basic type for the female rod end. 732 1011Series CG1R-Z 20, 25, 32, 40, 50, 63 Direct Mount Cylinder How to Order 10 C D G 1 R N 25 100 Z M9BW N Type Number of auto switches Nil S n 2 pcs. 1 pc. n pcs.

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

With (1) Without (1) Coil voltage 100V AC (50/60Hz) 200V AC (50/60Hz) 110V AC (50/60Hz) 220V AC (50/60Hz) 24V DC 12V DC Others (1) With With (Without light) 1 (1) 2 Note 1) DIN is applicable to VQZ 200 and 300.

Compact Cylinder

Rod JCQ Series 12, 16, 20, 25, 32, 40, 50, 63, 80, 100 How to Order 30 12 JCQ Without auto switch 30 12 M9BW JCDQ With auto switch Number of auto switches With magnet for auto switch Nil 2 S 1 n n Mounting Nil Through-hole (Standard) A Both ends tapped Auto switch Nil Without auto switch For applicable auto switches, refer to the table below.

Ionizer

Bar length (mm) IZS31-E3 IZS31-E3 IZS31-E4 IZS31-E5 1 300 30 1 380 1 1 620 80 1 1 780 L 1 3 1100 3 1 1260 2 2 1500 Part no L 5 1 1900 IZS31-E3 IZS31-E4 IZS31-E5 200 4 2 2300 280 360 The model number requires the suffix -X14 to indicate that the body is to be shipped fitted with a security cover. IZS31 Standard part no.

CEx-OMP0016

Please execute calibration of the device on customers own responsibility. 22 Chapter 7: How to Order 7-1 Cylinder (Hyrodless Monosashi-kun) Mounting No. of autoswitch B Standard None 2 Bore size s 1 25 25mm n n 32 32mm 40 40mm Type of autoswitch (See catalog) Control method None With brake and scale No. of adjustment unit S With scale only None 2 B With brake only S 1 Stroke adjustment unit

3 Port Solenoid Valve Series VQ100 1

16 173 167 17 183 177 18 193 187 19 203 197 20 213 207 1 23 17 103 97 VQ VKF Plug Lead Unit, Type U (Large Flow Type) Mounted Manifold (VV3Q12U) L1 L2 7 VQZ Round head combination screw M1.7 x 14 7 Manual override VZ 7 14 P E P E 37.4 16 VS 29 32 43.8 VFN 4-PT 1/8 P , E port 2-3.5 Mounting hole 300 300 15.5 P = 10 1 2 3 4 5 n U side D side 40.2 15.5 46.2 19.4 A A 9.5 16.7 P = 10 n-M5 x 0.8

3 Port Solenoid Valve Series VQ100 1

screw M1.7 x 14 7 Manual override VZ 7 14 P E P E 37.4 16 VS 29 32 43.8 VFN 4-PT 1/8 P , E port 2-3.5 Mounting hole 300 300 15.5 P = 10 1 2 3 4 5 n U side D side 40.2 15.5 46.2 19.4 A A 9.5 16.7 P = 10 n-M5 x 0.8 A port Dimensions Formula: L1 = 10n + 21, L2 = 10n + 7, n: Station (Max. 20 stations) n L L1 L2 2 41 27 3 51 37 4 61 47 5 71 57 6 81 67 7 91 77 8 9 10 121 107 11 131 117 12 141

Electric Actuator with Integrated Guide Series LTF Series LTF Lead screw lead mm Mounting Series Guide type Motor type Model Page orientation Ground ball screw Rolled ball screw 6 10 6 10 LTF6 Page 60 to Horizontal 10 20 10 20 LTF8 Page 68 to Frame-type

alloy Mild steel Chromate Aluminum alloy Aluminum alloy Connector cable for sensor Carbon steel 92 Series LTF Mounting Top Mount LTF6 M5 bolt 2 5.5 or M5 2 x n x Mounting hole Pitch = 100 Mounting hole quantity n Quantity Stroke 100 2 4 200 3 6 300 4 8 A = (n 1) x pitch 400 5 10 30 500 6 12 600 7 14 LTF8 M6 bolt 3.5 2 x n x Mounting hole 6.6 or M6 Pitch = 100 Mounting hole quantity n n

3 Port Solenoid Valve Series VQ100

screw M1.7 x 14 7 Manual override VZ 7 14 P E P E 37.4 16 VS 29 32 43.8 VFN 4-PT 1/8 P , E port 2-3.5 Mounting hole 300 300 15.5 P = 10 1 2 3 4 5 n U side D side 40.2 15.5 46.2 19.4 A A 9.5 16.7 P = 10 n-M5 x 0.8 A port Dimensions Formula: L1 = 10n + 21, L2 = 10n + 7, n: Station (Max. 20 stations) n L L1 L2 2 41 27 3 51 37 4 61 47 5 71 57 6 81 67 7 91 77 8 9 10 121 107 11 131 117 12 141

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

Confirm the total of x, y, and z is 1 or less. x + y + z 1 When 1 is exceeded, please consider a reduction of acceleration and work load, or a change of the work load center position and series. Acceleration [mm/s2]: a Work load [kg]: m Work load center position [mm]: Xc/Yc/Zc z y 1. Horizontal 3. Wall x y x z x 2. Bottom 4. Vertical z y x y z Example 1.