Vacuum Pad with Ejector ZHP Series Pad Diameter: ø63, ø80 ZK2 ZQ Ejector and pad are integrated. ZR Space saving and reduced piping labor! Bellows type with groove ZB ZA Two-stage ejector ZX More efficient ejector 30% reduced 50% increased ZM Air Suction

ZR Bellows type with groove ZB ZA Two-stage ejector ZX More efficient ejector 30% reduced 1 50% increased 1 ZM Air Suction flow rate consumption ZL 1) Compared with SMC single stage ejector Two-stage ejector ZH Flat type with groove First ejector Second ejector ZH ZH -X267 Q1 + Q2 = Suction flow rate ZHP ZHP With One-touch fitting ZU Metric: 4, 6 Inch: 5/32", 1/4" VQD-V SUP EXH Strainer

3-Screen Display High-Precision Digital Pressure Switch Air 1.0 MPa/1.6 MPa ISE70 ISE71

Process Data Diagnosis items Bit offset Item Note Internal product malfunction Outside of zero-clear range Outside of rated pressure range Upper temperature limit exceeded inside the product 0 OUT1 output 0: OFF 1: ON 1 OUT2 output 0: OFF 1: ON 2 Diagnosis 0: Normal 1: Abnormal 3 to 15 Measured pressure value Unsigned 13 bit Bit offset 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Item Measured

TABLE OF CONTENTS

/4 NPT 9 6 3 3/8 NPT 1 10 1/2 NPT 33 12 11 1 NPT 23 13 1 1/2 NPT 24 14 3/4 NPT 29 19 2 NPT 26 16 2 1/2 NPT 27 17 3 NPT 28 18 B Mounting Bracket In an AC appl. give full details 2 Series 20 3 Series 30 4 Series 40 5 Series 50 7 Series 70 8 Series 80 1 2WNO 2 2WNC 3 3WNC 4 3WNO 5 3WDC 6 3WMP 18 Direct Lift 2WNO 27 Direct Lift 2WNC 28 Pilot Lift 2WNC G 1/32 H 3/64 J 1/16 K 3/32 L 7/64 N 1/8

Vacuum Unit Ejector / Vacuum Pump System

Size Ejector System Vacuum Pump System Port Metric Inch Metric Inch PV 6 1/4 6 1/4 V 6, 8 1/4, 5/16 6, 8 1/4, 5/16 EXH (Port exhaust) 8 5/16 PE EXH Common Port open to atmosphere Note 1) PS 4 5/32 PD Note 2) M3 M3 : Not applicable Note 1) Piping for PE port is available as an option (M3). Refer to page 11. Note 2) A model with PD port (M3) is available as an option. Refer to page 11.

Vacuum Unit Ejector / Vacuum Pump System

Size Ejector System Vacuum Pump System Port Metric Inch Metric Inch PV 6 1/4 6 1/4 V 6, 8 1/4, 5/16 6, 8 1/4, 5/16 EXH (Port exhaust) 8 5/16 PE EXH Common Port open to atmosphere Note 1) PS 4 5/32 PD Note 2) M3 M3 : Not applicable Note 1) Piping for PE port is available as an option (M3). Refer to page 12. Note 2) A model with PD port (M3) is available as an potion. Refer to page 12.

Compact Cylinder with Air Cushion Series RQ

H I J K L M N Bore size (mm) 32 40 50 Stroke range (mm) 20 to 100 44 37 13 16 45 18.5 M8 x 1.25 60 4.5 14 7 34 5.5 20 to 100 51 44 13 16 52 20 M8 x 1.25 69 5 14 7 40 5.5 30 to 100 57.5 49.5 15 20 64 28.5 M10 x 1.5 86 7 17 8 50 6.6 mm OB P Q RB S U Z Bore size (mm) 32 40 50 9 Rc 1/8 23 7 58.5 31.5 14 9 Rc 1/8 28 7 66 35 14 11 Rc 1/4 31.5 8 80 41 19 Refer to page 9 for details on rod end

IDX-OM-W019

2 3 6 Precautions for long-term non-operation . 3 2 Chapter 4 Maintenance 4 1 Daily inspection . 4 1 4 2 Periodical maintenance . 4 1 Chapter 5 Troubleshooting . 5 1 Chapter 6 References 6 1 Specifications . 6 1 6 2 Specifications . 6 1 6 3 Dimensions . 6 2 6 4 Electric wining diagram . 6 4 IDFB Series Table of Contents 1 IDX-OM-W019 Air dryer Table of Contents 6 5 Compressed Air and Refrigerant

IDX-OM-W010

References 6 1 Specifications . 6 1 6 2 Refrigerant with GWP reference . 6 1 6 3 Dimensions . 6 3 6 4 Electrical Circuit . 6 5 6 5 Compressed Air and Refrigerant Circuit / Operation Principles . 6 7 Chapter 7 Specification for Option A 7 1 Safety instructions . 7 1 7 2 Specifications . 7 1 7 3 Air piping . 7 1 7 4 Air flow capacity . 7 1 7 5 Compressed Air and Refrigerant Circuit / Operation

Applicable Tubing: ø 2 Connection Thread: M3, M5 Made to Order (Refer to page 193 for details.) Miniature Fittings M Series

4/2.5 x R 4/2.5 x M5 For soft nylon and polyurethane tubing M-01AU-4 M-5HL-4 For nylon, soft nylon and polyurethane tubing Body rotates at 360 around the stud axis For reducing R 1/8 female to M5. 1 8 KKA 1 8 R R x M5 female M-5B 1 8 6/4 x R 6/4 x M5 M-01AU-6 P.196 M-5HL-6 P.198 KP 1 8 P.199 Plug Hose nipple Use to plug unused M5 port.

IDX-OM-W020

. 3-2 3-4 . 3-2 3-5 . 3-2 3-6 . 3-2 4 4-1 . 4-1 4-2 . 4-1 5 . 5-1 IDFB Series 1 6 6-1 . 6-1 6-2 GWP . 6-2 6-3 . 6-3 6-4 . 6-5 6-5 . 6-7 7 A 7-1 . 7-1 7-2 . 7-1 7-3 . 7-1 7-4 . 7-1 8 K 8-1 . 8-1 8-2 . 8-1 9 R 9-1 . 9-1 9-2 . 9-1 9-3 . 9-1 10 S 10-1 . 10-1 10-2 . 10-1 11 T 11-1 . 11-1 11-2 . 11-1 11-3 . 11-1 11-4 . 11-2 11-5 . 11-3 12 V 12-1 . 12

4 Port Solenoid Valve Series VQD1000

"# ## $%# 72 +1 ! ' !' @; 9 ( ( & & & & & +&+ 2 * ( ? $ %&' () $* $ %&' () $* # " 7( ! ! ! " >9 47 ! ! ! ! + ',! 34 %() +(# ' 5 & $%#6 / (7 ( , ./$ 0 1 0 1 VV061 ! ''()% ,)# % # ## ., & /, '# & , . '0 23/ 414 e u q t r y !0 V100 S070 i VQD o 23/ 4#40 56"4!4 ! VKF w /, 1 !() '!2 VK VT VS & "# # & # ''()% * 8 7 23/ 9 : : 7 23/ : 7 9;9 8 : (; !

ZR

Piping specifications 06 B Both sides 6 Symbol PV port PS port Common Common Symbol 1 2 PD port Viewed from the front side of valve unit, confirm the port location on the right and/or left side. PV PS PD PV PS/PD Individual 1 1 station only 1 1 station only 6 6 stations only 6 6 stations only All stations A All stations A If more than one spacer is required, specify all spacers.

Rotary Actuated Air Gripper MHR2, MDHR2/MHR3, MDHR3

4 q o !3 @1 @0 !1 !0 !2 r w u e !5 y !9 u t MDHR3 !4 !3 q !1 @0 @1 w o e i !5 r !7 !6 t !8 !0 !2 i !9 y u MHZ Component Parts MHF Description Material Description Material Note Note No. No.

Series 10-SQ1000 5 Port Solenoid Valve Plug-in Unit

35 580 C4 (For 4) C6 (For 6) C8 (For 8) Note 2) Top 1 to 12 stations L.

MXH

In Graph (10), find the intersection of a 30 mm overhang and load weight of 0.1 kg, which results in a determination of 16. 8-2-13 12 Series MXH Construction MXH6 (6) MXH10 (10) y @1 !7 w q!9 t !8 i !0 @0 @0 y @1 !6 w q !9 t !8 !

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

1 !1 !2 !2 !3 !3 !4 !4 !5 !5 M5 port M5 port y y u u !7 !7 q w e r t q w e r t o o !0 !0 !1 !1 i i !4 !4 !2 !2 !3 !3 !6 !6 Component Parts Description Material Description Material No.

IDX-OM-W016

6 References 6 1 Specifications . 6 1 6 2 Refrigerant with GWP reference . 6 1 6 3 Dimensions . 6 2 6 4 Electrical Circuit . 6 3 6 5 Compressed Air and Refrigerant Circuit / Operation Principles . 6 4 Chapter 7 Specification for Option A 7 1 Safety instructions . 7 1 7 2 Specification. 7 1 7 3 Air piping . 7 1 7 4 Dryer specifications . 7 1 Chapter 8 Specification for Option C 8 1 Precautions

Residual Pressure Release Valve

temperature Nylon, Soft nylon, Polyurethane, FEP, PFA Air 0 to 1 MPa 5 to 60C (No freezing) 5 1 3 1 2 2 1 4 2 3 2 1 AS 2 1 3 1 2 Nylon Polyurethane AS-FE 13.1 mm2 26.1 mm2 18.0 mm2 41.5 mm2 29.5 mm2 58.3 mm2 13.1 mm2 Effective area AB 46.1 mm2 12 Residual pressure release effective area 1.8 mm2 KE KE Easy operation with a push button.

High Power Cylinder Series RHC

-B 2-B 1-A 1-B 1-C 2-A 2-B 2-B 2-B 2-B 2-B 2-B 6 1/8, 1/4 500 1.5 0 1,000 2,000 3,000 6 1/4, 3/8 Maximum speed Vmax (mm/s) 1000 3 AS3000,AS3500 (12.3) AS4001F (16) 25 10 1/4, 3/8 20 1500 4.5 AS3000,AS3500 (12.3) AS4001F (16) 10 1/4, 3/8 20 Composed effective area So (mm2) Composed effective area So (mm2) Composed effective area So (mm2) 2000 6 AS3000,AS3500 (12.3) AS4001F (16) 10 1/4, 3/8

Pressure Switch/Reed Switch Type

Description Material Body 1 ZDC 0.1 0.3 i w Switch assembly 2 0.2 0.4 Shield plate 3 Steel sheet o Cover 4 Steel sheet MPa 52 !0 Adjusting screw 5 Brass Hexagon nut 6 Brass !1 Indicator 7 PBT Spring 8 Stainless steel !2 q Magnet 9 Piston 10 POM Seal piston 11 NBR 1/8 15 23 Scale plate 12 PC Wiring Warning Mounting Warning Pressure Source Warning 1. 1. 1.