SMC Corporation of America
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Type of valve actuation Air Fluid 0.2 to 0.5MPa Operating pressure range Internal pilot type 5 to 50C Ambient and fluid temperature 25ms or less Response time (for 0.5MPa) Note 1) 5Hz Maximum operating frequency Non-locking push type, Slotted locking type Manual operation With vacuum pressure gauge Pilot valve individual exhaust type, Main valve/Pilot valve common exhaust Pilot exhaust type

OUT1: Orange Digital filter*4 0, 10, 50, 100, 500, 1000, 5000 ms Enclosure IP40 Withstand voltage 1000 VAC for 1 minute between terminals and housing Insulation resistance 50 M or more (500 VDC measured via megohmmeter) between terminals and housing Environment Operating temperature range Operating: 5 to 50C, Stored: 10 to 60C (No condensation or freezing) Operating humidity range Operating

Note 2) 5 to 50C when the digital pressure switch will be used.

(Refer to page 33.) 17 A Vacuum Unit ZK2mA Series Specifications General Specifications Valve Common Specifications Model4 ZK2-VAmK ZK2-VAmR ZK2-VAmJ 5 to 50C Without pressure sensor/switch With pressure sensor 0 to 50C With pressure sensor 5 to 50C Pressure switch with energy saving function Fluid Air Operating temperature range (No condensation) Type of actuation5 Supply valve: N.C.

N.O. 101.2 kPa to 0.2 VPA344 544 744 Pilot pressure (MPa) Ambient and fluid temperature (C) Lubrication Mounting orientation Impact/Vibration resistance (m/s2) Note) Same as operating pressure (Min. 0.2 MPa) 10 to 50C (No freezing. Refer to page 5-11-4.) Not required (Use turbine oil Class 1 lSO VG32, if lubricated.)

Specifications Valve construction Metal seal Rubber seal Fluid Air/Inert gas Maximum operating pressure 0.7 MPa (High pressure type (3): 1.0 MPa) Valve specifications Single 0.1MPa 0.15MPa Min. operating pressure Double (Double solenoid) 0.1MPa 0.1MPa 3 position 0.1MPa 0.2MPa 4 position 0.15MPa Ambient and fluid temp. 10 to 50C (1) Lubrication Not required Pilot valve manual override Push

Ambient and fluid temperature operation is as follows: Digital pressure switches: 0 to 50C Other pressure switches: 0 to 60C Take measures to prevent freezing moisture in circuits when below 5C, since this may cause damage to the O-ring and lead to a malfunction. The installation of an air dryer is recommended for eliminating condensate and moisture.

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 0 to 1 MPa 0 to 101 kPa 100 to 100 kPa 0 to 500 kPa 0 to 1 MPa 0 to 101 kPa 0 to 101 kPa 101 to 101 kPa 0 to 101 kPa 100 to 100 kPa Set pressure range 12 to 24 VDC (Ripple p-p 10% or less) Voltage 2% F.S. or less (0 to 50C: based on 25C) 3% F.S. or less

) Hysteresis mode Window comparator mode Hysteresis Note 4) ZSP Response time Output short circuit protection Display Display accuracy Indicator light Analog output Auto shift input ISA2 IS Note 2) Output voltage: 1 to 5 V 5% F .S. or less Output voltage: 1 to 5 V 2.5% F .S. or less ZSM Note 3) No-voltage input (Solid state switch or reed switch), input 5 ms or more IP65 Operating: 0 to 50C

nozzle design S u c t i o n f l o w r a t e 4 0 % h i g h e r than traditional designs Silencer and suction filter Optional air supply and vacuum release valve Optional diaphragm or solid state vacuum switch Manifold mountable version T E C H N I C A L SPECIFICATIONS S Y M B O L S Fluid Air Max Operating Pressure 7 Bar / 100PSI Supply Exhaust Operating Pressure 2 ~ 5.5 Bar / 30~80PSI 5 ~ 50C

) 2% F.S. or less (Total) (0 to 50C) 3% F.S. or less (0 to 50C) Total of controller and sensor Total of controller and sensor 0.5% F.S. or less (Total) Hysteresis mode: Variable Window comparator mode: Fixed (3 digits: ISE5B/6B) (2 digits: ZSE5B/6B) Digit is min. calibration unit.

Metal seal Rubber seal Single 0.15MPa 0.1MPa 2 position double (double solenoid) Valve specifications Solenoid specifications Double (latching) 0.18MPa 0.18MPa (A) 4 (B) 2 (A) 4 (B) 2 Minimum operating pressure Double (double solenoid) 0.1MPa 0.1MPa 3 position 0.2MPa 0.1MPa 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) Metal seal Rubber seal 4 position 0.15MPa 3 position closed center 10 to 50C

style and/or special voltage, consult SMC. 1.12-34 VQZ1000/2000/3000 Base Mounted Standard Specifications Metal seal Seal Rubber seal Air, lnert gas Fluid Air, lnert gas 0.7MPa (High pressure type: 1.0MPa) Max. operationg pressure 0.15MPa Single Double 2 position Min. operating pressure 0.1MPa only for VQZ3000, 3 position 0.15MPa Valve specifications 0.1MPa 3 position 0.2MPa (1) (1) 10 to 50C

(No freezing, heat cycle not applied) 0 to 50C (No freezing, heat cycle not applied) 1 to 10 Hz FLUID IN Air operated 0.2 Note 3) 0.18 kg 0.11 kg FLUID OUT port upside General environment 100 mPas 24 VDC 0.35 W Each of the values above are for normal temperatures and clear water.

Water (1 to 50C), Air, Heated water (80C) Note 3), Low vacuum (133 Paabs) Quick fastener type Fluid Air, Water (1 to 40C) Note 5), Low vacuum (133 Paabs) One-touch fitting type Note 4) Withstand pressure 1.0 MPa Valve specifications Coil specifications 10 to 50C Ambient temperature 1 to 50C (No freezing) Fluid temperature Ambient humidity RH85% Environment Location without corrosive or explosive

Max. load current Protection Built-in short circuit protection Current consumption 50 mA or less (inside a unit) Enclosure IP10 10 to 50C Operating temperature range Environmental resistance Operating humidity range 35 to 85%RH (with no condensation) EX Withstand voltage 500 VAC for 1 min. between external terminals and FG 10 M or more (500 VDC) between external terminals and FG Insulation

Flow characteristics: C Max. operating frequency 0.8 MPa 0.15 MPa 5 to 50C 0.60 dm3/(sbar) 180 c.p.m SUP side pressure (P1) VVQ1000-FPG-02 1 set VQ1000-FPG-C6M5-D 2 pcs.

Fluid temperature 0 (0.1 Pa.abs) 0 to +50C Ambient temperature Note 1) Flow rate (l/min) (at max. operating pressure differential) AP100 0 to 100 0 to 75 Action N.C.

min 0.35 to 4.5 L/min 1.7 to 17.0 L/min 7 to 110 L/min 3.5 to 45 L/min 0.35 to 4.5 L/min 2 to 16 L/min 10 to 100 L/min 5 to 40 L/min 0.5 to 4 L/min 0.1 L/min 1 L/min 0.5 L/min 0.05 L/min 0.1 L/pulse 1 L/pulse 0.5 L/pulse 0.05 L/pulse Accumulated pulse flow rate exchange value (Pulse width: 50 ms) Operating fluid temperature Accuracy Repeatability Temperature characteristics Note 1) 0 to 50C

Operating temperature range 41 to 122F (5 to 50C) Operating humidity range [%RH] 90 or less (No condensation) Weight [g] 350 (Except cable) Note) CE-compliance The EMC compliance of the teaching box was tested with the LECP6 series step motor controller (servo/24 VDC) and an applicable actuator.