Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

Nm Moment Nm Moment Nm 4 4 4 CX CY1F15 3 3 3 DCY1F10 2 2 2 -X CY1F15 CY1F15 20CY1F10 CY1F10 1 1 1 Data 0.5 0.5 0.5 500 100 300 50 500 100 300 50 500 100 300 50 Piston speed mm/s Piston speed mm/s Piston speed mm/s (4) CY1F/m1 (5) CY1F/m2 (6) CY1F/m3 (7) CY1F/m4 30 30 30 30 20 20 20 20 CY1F25 CY1F25 CY1F25 CY1F25 10 10 10 10 CY1F15 CY1F15 CY1F15 5 5 5 5 Load mass kg Load mass kg Load mass

Single Axis Electric Actuator Series LJ1

Without motor brake 100 9 30 10 0.03 Ball screw 80 High rigidity direct acting guide 200 1 200 2 0.05 Slide screw 100 With motor brake 100 4 30 5 0.03 Ball screw 80 Short Stroke Type Electric Actuator Series LX (AC Servomotor) Positioning repeatability mm Low particulate generation Work load kg Maximum speed mm/s Brake Lead screw Series Guide type Without motor brake Without

Sine Rodless Cylinder Series REA

200 300 300 200 Usable range 100 100 Usable range 20 30 40 50 50 40 30 20 10 0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 10 0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 Distance from cylinder shaft center: L0 (cm) Distance from cylinder shaft center: L0 (cm) Note: 1N = 0.2248lbf 1kg = 2.2046lb 1in = 25.4mm 1in = 2.54cm 100 80 REA63 REA50 50 40 30 REA40 REA32

VXP21/22/23

40 (67) TI/ TIL Conduit terminal: T PA 92 2 PAX PB (2.3) 98 104 (7.5) (5.5) 25 52 55 (33) 36 G 1/2 (27) 30 (27) 30 11 14 IN OUT Bracket 50 (52) (67) 24 26 (28) 2-Rc 1/4, 3/8, 1/2 22 28 40 59 2 : Port size Rc 1/2 17-3-49 8 The VX series will be revised shortly.

1.63

pc. 5 Note 1) 5 D-M9 10 2 pcs. 5 Note 2) 1 pc.

SYJ300-OMU0003

No.SYJ300-OMU0003 -2- / *3) 1 1.5 *3)1 1 () No.SYJ300-OMU0003 -3- SYJ Series 3 / 1 DC () () () () EXH () () 4 No.SYJ300-OMU0003 SYJ Series 3 / ( ) 1 ( ),COMCOM 2 C-R () C-R Sol.1: DC 3% AC 8% Sol.2: (SSR)AC 1) (C-R) OFF 2) () 1.NPN 3) AC,, , SSR SSR 1) Sol.1: Sol.2: 2) ,1V + 2.NPN 5 No.SYJ300-OMU0003 SYJ Series 3 / 1 -10 1)M5 M3 1/4 0.4~0.5Nm M5 1/6~1/4 1~1.5Nm ()

Stainless Steel Heat

x 3 x 60 = 2736g/h. 6 7 8 3 1 2 3 4 5 Dew point conversion chart 60 50 40 30 Pressure dew point C 20 10 1.5MPa 1.3MPa 1.1MPa 0.9MPa 0.7MPa 0.5MPa 0.3MPa 0.1MPa Atmospheric pressure 0 -40 -30 -20 -10 -60 -50 -60 -50 -40 -30 -20 -10 0 10 20 30 Atmospheric pressure dew point C 8 Series IDUS/IDFS Safety Instructions These safety instructions are intended to prevent a hazardous situation and/

CXT

For detailed specifications, refer to page 8-30-1.

NARM Series

8 1 8 .13 (57) NARM1000 (79 X n) + 25 Individual IN 1 8 1 8 Common IN (188 X n) + 43 1 4 1 8 .3 (136) NARM2000 Individual IN (187 X n) + 45 1 8 1 8 Space Saving How to Order Option NARM 1000 A1 5 01 G 1 1 Set at 0.2MPa Note1) Pressure gauge for 1MPa is used.

Series 10-, 21- AF-A Air Filter

45 47.5 9.8 14 18 20 24 24 91.4 121.9 153.9 155.9 226.9 240.9 40 53 70 75 90 95 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 1070 A

04-mis-e

-30 MI-A2503-30 MI-A2501-50 MI-A2502-50 MI-A2503-50 MIS25-PS MIS-A2504 MIS-A2504 MIS25-PS MI-A3201-30 MI-A3202-30 MI-A3203-30 MI-A3201-50 MI-A3202-50 MI-A3203-50 MIS32-PS MIS-A3204 MIS-A3204 MIS32-PS Main parts No. e (1 pc.) !

Table of Contents

1-2-7 Precautions 1 Be sure to read before handling.

EXxx-OMY0006CN

SI No. 1 COM M OUT 1 COM 0V 2 3 P OUT 1 Zone 1 4 SOL 0 0 Zone 1 ON Zone 1 11 SOL 7 7 Zone 1 ON 12 P OUT 2 Zone 2 13 SOL 8 8 Zone 2 ON Zone 2 20 SOL 15 15 Zone 2 ON 21 P OUT 3 Zone 3 22 SOL 16 16 Zone 3 ON Zone 3 29 SOL 23 23 Zone 3 ON 30 N. C. N.

JXCx-OMT0001CN

4.1. . 26 4.2 EtherNet/IP . 27 4.3. . 28 4.4. . 30 -1No.JXC-OMT0001CN-C 1 . 30 2DIN . 30 4.5 . 31 (1) . 31 (2) . 32 (3) . 33 5. . 34 5.1 (IP ) . 34 5.2 PLC () . 35 TM . 36 TMEtherNet/IP 5.3 RSLogix5000 6. . 38 6.1 . 38 (1):C PWR . 38 (2):M PWR . 38 (3) : CI . 39 6.2 . 40 (1) . 40 (2) . 41 7.

Series VQ Metal Seal/Rubber Seal Body Ported

SX VK L C3 (3.2) C4 (4) C6 (6) M5 (M5 thread) VZ C6 (6) kit VF VFR N1 (1/8) N3 (5/32) N7 (1/4) N7 (1/4) VP7 Built-in silencer P.1.10-16 P.1.10-18 VP4 C C3 (3.2) C4 (4) M5 (M5 thread) C6 (6) kit VQ N1 (1/8) N3 (5/32) N7 (1/4) VQ4 VQZ Built-in silencer P.1.10-48 P.1.10-52 VQD C C3 (3.2) C4 (4) C6 (6) M5 (M5 thread) VZS kit C6 (6) VFS N1 (1/8) N3 (5/32) N7 (1/4) VS N7 (1/4)

S Couplers

-03F-1 Rc 3/8 49.9 43.1 19 D KKA4S-02F-1 Rc 1/4 46.1 92.2 22 -03F-1 1/4 Rc 3/8 24.2 8.1 41.2 46.9 86.2 -04F-1 Rc 1/2 52.3 99.4 24 H KKA6S-03F-1 Rc 3/8 178.8 50.5 L -04F-1 1/2 Rc 1/2 30.7 11.4 81.6 56.2 191.2 30 -06F-1 Rc 3/4 169.8 57.9 348

Digital Flow Switches

Tightening torque Nm 28 to 30 36 to 38 48 to 50 48 to 50 Tightening torque Nm 7 to 9 12 to 14 22 to 24 28 to 30 Thread Rc 3/4 Rc 1 Rc 1 1/2 Rc 2 Thread Rc 1/8 Rc 1/4 Rc 3/8 Rc 1/2 2. Apply wrench only to the metal part of the pipings when installing the flow switch onto the system piping. Do not apply wrench to anything other than the piping attachment as this may damage the switch. 3.

Speed Controller: Standard Type Elbow Type (Metal Body) Series AS

L1 L2 L3 L4 L5 L6 L7 (1) L8 D Model Bore size VCHC AS2000-01 AS2000-02 AS3000-02, 03 1 8 Rc Rc Rc , 40 5 17 54.5 16 15.5 50 30 10 4.5 ASS 1 4 1 4 2 x M4 x 0.7 11.5 17 56 51.5 40 5 23 20 30 4.5 Effective thread depth 6 Reference dimensions 8 3 45.5 5.25 20.6 61 13.2 68 56 25 26 5.5 ASR ASQ Note 1) L7: Reference dimensions Dimensions: AS5000 2 x 1/4 to 1/2 2-1/4 to 1/2 74.9 (Max. 82.9) 2

Title not found

,oox'o''"n' ar3oro 60 Nole 2) Drain guide is G1i 4 (app cable 10 AF30lo 60) Nore 1) Wlhoul a valve name plate and caulion A F 1 0 1 0 6 0 Port size Symbol Port 1 0 20 30 40 50 60 Symbol Descrlption Applicable M5 a 1 B O AF20 to 60 1t4 a a a 3a a a 1t2 a g4 a a 1 a a auto dlain (N C.)

RZQ

Caution 5 150 100 200 300 1.