Thermo-con

Circulating FluidTypical Physical PropertyValues Fluorinated Fluids Density [kg/m 3] Physical property value Temperature 10C 20C 50C 80C Specific heat C [J/(kg K)] 1.87 x 10 3 0.87 x 10 3 1.80 x 10 3 0.96 x 10 3 1.74 x 10 3 1.05 x 10 3 1.67 x 10 3 1.14 x 10 3 Water Density : 1 x 10 3 [kg/m 3] Specific heat C: 4.2 x 10 3 [J/(kg K)] 133 Peltier-Type Chiller Thermo-con (Air-cooled) Series HEC-A

EXxx-OMZ0016

Registration of Remote 10 (Wireless channel 10) Remote Registration of Remote registration 11 (Wireless channel 11) information Wireless Registration of Remote 12 channels (Wireless channel 12) 8-15 Registration of Remote 13 (Wireless channel 13) Registration of Remote 14 (Wireless channel 14) Registration of Remote 15 (Wireless channel 15) *1: The LED indicator W-MS indicates the system

Wedge Cam Operation Slide Guide Series MHK2 Air Gripper/2-Finger Type ø12, ø16, ø20, ø25

75 Double acting Single acting MHK2-16D 16 6 14.6 20.6 113 MHK2-20D 20 10 16 26 235 MHZ MHK2-25D 25 14 19 33 440 MHK2-12S 120 12 9 4 9 13 76 Normally open Normally closed L1 MHF MHK2-16S 16 23 6 14.6 20.6 114 L2 L1 MHK2-20S 20 34 10 16 26 237 MHL L2 Series MHK2 MHK2-25S 25 58 14 19 33 443 Series MHKL2 MHK2-12C 12 12 4 9 13 76 MHR MHK2-16C 16 25 6 14.6 20.6 115 MHK MHK2-20C 20 44 10 16 26

3 Port Solenoid Valve Series VQ100

White Black Black Red Red Red Black Black White 1 station SOL. 2 stations 2 SOL. 3 3 stations SOL. 4 stations 4 SOL. 5 5 stations SOL. 6 stations 6 SOL. 7 7 stations SOL. 8 stations 8 (a) SOL. 9 9 stations (2) SOL. 10 stations 10 SOL. 11 11 stations (b) (1) Black White SOL. 12 stations 12 SOL. 13 13 stations SOL. 14 stations 14 SOL. 15 15 stations SOL. 16 stations 16 How to Calculate the

LEF-OM002xx

10 to 300 701800 Note2) Stroke 30 to 930 20 to 620 10 to 300 801900 Speed range [mm/s] 30 to 780 20 to 520 10 to 250 9011000 30 to 660 20 to 440 10 to 220 10011100 Actuator specification 30 to 570 20 to 380 10 to 190 11011200 20 to 500 30 to 500 10 to 250 1000 Driver type LECPA Note2) Stroke 30 to 500 20 to 440 10 to 220 Speed 10011100 range [mm/s] 30 to 500 20 to 380 10 to 190 11011200

VP4

Series 50-VFE Series 50-VPE 3-6-13

OMR0032

Safety Instructions . 6 2 Product Overview . 8 2.1 Features . 8 2.2 How to order . 11 2.3 Structure of the product . 12 2.4 Start up procedure . 13 (1) Check the contents of the package . 13 (2) Setup of pulse train input signal switch . 13 (3)Mounting the controller . 13 (4) Wiring and connection . 13 (5) Power supply ON and alarm check . 14 (6) Basic parameter setup and Step Data setup

MHY2/MHW2

Work weight: 0.05kg Example 25 Pressure 0.6MPa 20 0.5 0.4 Holding force (N) 15 13 0.3 10 0.2 5 0.1 Ex.)

Series MXP Precision Air Slide Table

10 4 3 5 12 "O" ring NBR 13 Piston seal NBR Replaceable parts list (Seal kit) Bore size (mm) Part no.

LEKF-OMZ0035

Product Outline . 13 3.1 System construction . 13 4.Elictric actuators / Common precautions . 13 4.1 Wiring/Cables . 13 4.2 Design/Selection . 14 4.3 Mounting . 15 4.4 Handling . 17 4.5 Operating Environment . 18 4.6 Maintenance . 19 4.7 Actuator with Lock . 19 4.8 Design/Selection . 20 4.9 Handling . 21 4.10 Mounting . 22 4.11 Power Supply . 22 4.12 Grounding . 22 4.13 Wiring . 22 4.14 Maintenance

Precision Cylinder Series MTS ø8, ø12, ø16, ø20, ø25, ø32, ø40 Cylinder with ball spline MXH MXU MXS MXQ MXF MXW MXJ MXP MXY MTS

to 20 stroke Graph (12) Stroke: Up to 20 stroke 0.1 0.1 0.05 0.05 Mass W (kg) Mass W (kg) 0.04 0.04 0.03 0.03 0.02 0.02 8 8 0.01 0.01 0 5 10 15 20 25 30 5 0 10 15 20 25 30 Overhang L (mm) Overhang L (mm) Graph (10) Stroke: Up to 30 stroke Graph (13) Stroke: Up to 30 stroke 0.1 0.1 0.05 0.05 Mass W (kg) Mass W (kg) 0.04 0.04 0.03 0.03 0.02 0.02 8 8 0.01 0.01 0 5 10 15 25 20 30 0 5 10 15 20

C92

14 18 18 22 26 27 36 5 7 8 8 10 10 13 16 23 27 30 31 37 40 45 55 11 11 14 14 19 19 42 52 74 84 90 98 116 126 160 180 17 19 24 24 30 30 41 55 136 153,5 173 184,5 215 231 287 340 36 40,5 45 48,5 52 57 65 80 6 6 10 10 16 20 15 15 7 10 11 11 11 12 20 25 10 10 10 10 14 14 26 31 32 40 50 63 80 100 125 160 C92S B-Stroke W Bore (mm) AM D EE G H J KK K KW M N S SW VD WH ZZ B 22 24 32 32 40 40 54

25

-580 IZS4-640 IZS4-820 IZS4-1120 IZS4-1300 IZS4-1600 IZS4-1900 IZS4-2320 IZS4-2500 Part no. n 5 6 7 9 10 13 18 21 26 31 38 41 Applicable tube O.D.

CXT

10 7.5 0 0 3.5 5.5 5 7.5 3.5 3 6.5 8.5 8 10.5 1.5 2 6 7 8 12 1.5 (4) 4.5 5 9 10 11 15 2 (4.5) Bore size (mm) 1.5 (1) 3.5 (1) 3 (0.5) 5.5 (3) Long Stroke 12 16 20 25 32 40 1 0.5 6 8 10.5 16.5 11 10.5 16 18 20.5 26.5 9 9.5 13 14 12.5 16 5 5.5 9 10 8.5 12 7 6 11.5 13.5 16.5 22.5 5 (2.5) 8 8.5 12 13 11.5 15 10 9.5 15 17 19.5 25.5 8 8.5 3.5 1 1.5 7.5 4.5 (2) Bore size (mm) 10 (7.5) 12 (9.5) 14.5

Rotary Table/Vane Style Series MSU

Refer to pages 796 and 797 for detailed solid state auto switches with pre-wired connectors. 150 Series MSUA Rotary Table: High Precision Type Vane Style Specifications MSUA1 MSUA3 MSUA7 MSUA20 Model 2 Single vane Vane type Rotating angle 1 90 10 180 10 90 10 180 10 90 10 180 10 90 10 180 10 Fluid Air (Non-lube) Proof pressure (MPa) 1.05 1.5 5 to 60C Ambient and fluid temperature

Manually Operated Integral Fitting Type/Threaded Type Series LVH

LVD LVQ How to Order Manifold Base LQ1 LLH 2 A 05 11 S LVN Body class TL/TIL Tubing size for port P and L side connection Tubing size for port P and R side connection Body class 2 3 4 Symbol 2 3 4 Body class 2 to 4 Symbol 00 06 07 08 10 11 10 11 12 13 12 13 19 Tubing size Plug Symbol 00 06 07 08 10 11 10 11 12 13 12 13 19 Body class 2 to 4 Tubing size Plug LQ3 6 1/4" 6 1/4" Base type 2 8

IDX-OM-W028

Specification for Option R 10 1 Safety instructions . 10 1 10 2 Specifications of the GFCI . 10 1 10 3 How to connect the power supply . 10 1 10 4 Cautions for handling the GFCI . 10 3 10 5 Electric circuit . 10 3 Chapter 11 Specification for Option T 11 1 Safety instructions . 11 1 11 2 Specifications . 11 1 11 3 Remote operation . 11 1 11 4 How to connect the power supply and signal cable

SI unit ( device)

Value 7 6 5 4 3 2 1 0 Value 7 6 5 4 3 2 1 0 Output No. 7 6 5 4 3 2 1 0 7 6 5 4 3 2 1 0 1 0-7 All clear output Setting value 00 0 0 0 0 0 0 0 0 00 0 0 0 0 0 0 0 0 Output No. 15 14 13 12 11 10 9 8 15 14 13 12 11 10 9 8 2 8-15 All hold last state Setting value FF 1 1 1 1 1 1 1 1 00 0 0 0 0 0 0 0 0 Output No. 23 22 21 20 19 18 17 16 23 22 21 20 19 18 17 16 3 16-23 All force output Setting value

Lateral Load Resisting Low Friction Cylinder Series MQM ø6, ø10, ø16, ø20, ø25

size (mm) MM A NN D F G1 G2 S ZZ I H J N1 N2 NA TN TF 10 15 M12 x 1 4 M5 x 0.8 8 15 6 M4 x 0.7 65 101 18.5 28 16 11 20 16 16 15 M14 x 1 5 M5 x 0.8 10 15 6 M5 x 0.8 74 114 22 30 22 12 21 19.5 20 18 M20 x 1.5 8 Rc1/8 13 NPT1/8 25 G1/8 8.5 M8 x 1.25 97.5 151 31.5 40.5 28.5 20.5 33 29 25 M10 x 1.25 18 M26 x 1.5 10 Rc1/8 13 NPT1/8 30 G1/8 8.5 102.5 160 34.5 44.5 32 20.5 38 32 Refer to page

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

L 60.5 3 48 2 85.5 5 73 4 110.5 7 98 6 135.5 9 123 8 160.5 11 148 10 185.5 13 173 12 210.5 15 198 14 235.5 17 223 16 19 248 18 20 VS 260.5 40 285.5 21 273 No.