Process Pump Series PA3000/5000/PAX1000 Series PB1000

KT-PA3-37 Switching valve parts kit Pilot valve kit Switching valve assembly kit KT-PA5-38 KT-PAX1-39 KT-PA5-38 Pilot valve kit Pulsation attenuator control valve kit Pilot valve kit PA5000/Air operated type PA3000/Air operated type PB1000 KT-PA3-31 KT-PA5-31 Diaphragm kit (PTFE) Diaphragm kit (PTFE) KT-PB1-2 Diaphragm kit KT-PA3-36 KT-PA5-36 Check valve kit Check valve kit KT-PB1-1 Check

Process Pump Series PA3000/5000/PAX1000 Series PB1000

Switching valve parts kit Pilot valve kit Switching valve assembly kit KT-PA5-38 KT-PA5-38 KT-PAX1-39 Pilot valve kit Pulsation attenuator control valve kit Pilot valve kit PA5000/Air operated type PA3000/Air operated type PB1000 KT-PA3-31 KT-PA5-31 Diaphragm kit (PTFE) Diaphragm kit (PTFE) KT-PB1-2 Diaphragm kit KT-PA3-36 KT-PA5-36 Check valve kit Check valve kit KT-PB1-1 Check valve kit

Stopper Cylinder Adjustable Mounting Height Type Series RSG

QV A 4-9 through 38 + Stroke 105 + 2 Strokes 67 + Stroke Approx. B Integrated One-touch fitting type QB Piping tube O.D. QA Stroke mm Note 1) Body dimensions when not equipped with auto switches are the same as in the drawings above. Note 2) In the case of single action, a One-touch fitting is on the rod side only.

3 Position Cylinder Series RZQ

32.5 38.5 35 38 34 27 29 26.5 40 35 36 42 38.5 44 41.5 37.5 30.5 32.5 30 50 41 42 48 44.5 47.5 50 43.5 36.5 38.5 36 63 47.5 48.5 54.5 51 54 50 56.5 40 42 39.5 12 Series RZQ Auto Switch Mounting Follow the procedures below to mount auto switches.

Antistatic One-touch Fittings Series KA

13.4 13.4 18 40 26 Uni thread 1 8 1 4 KAU08-U01 KAU08-U02 50.5 52 46.5 46 27 25 15.2 8 15.2 KAU08-U03 17 18.5 17.7 17.7 3 8 51.5 45.5 28 1 4 3 8 KAU10-U02 KAU10-U03 38 51.5 19 18.5 57.5 10 18.5 36 21 28.4 28.4 1 2 KAU10-U04 59 51 51 22 1 4 3 8 KAU12-U02 KAU12-U03 53 52 55 61 12 20.9 20.9 22 22 45.4 45.4 1 2 KAU12-U04 62.5 54.5 52 Reference dimensions after Uni thread installation.

Guide Table Series MGF

78 66.5 38 Dimensions not listed above are the same as the standard model.

DOC1020530

Network setting . 34 7.1 EtherCAT Communication . 34 7.1.1 EtherCAT Network card (LEC-S-NE) . 34 7.1.2 EtherCAT Communication setting . 35 7.2 EtherNet/IP . 36 7.2.1 EtherNet/IP Network card (LEC-S-N9) . 36 7.2.2 EtherNet/IP Communication setting . 37 7.3 PROFINET . 38 7.3.1 PROFINET Network card (LEC-S-NP) . 38 7.3.2 PROFINET Communication setting . 39 8.

ZQ-OM01601

ZQ-OM01601 // ZQ-ZSV 2 9 10 11 14 14 15 16 16 19 19 19 F0 21 F1 OUT1 22 F2 OUT2 24 F3 26 F4 27 F6 29 F11 30 F80 31 F81 32 F90 33 F96 35 F98 36 F99 38 39 42 43 44 50 51 51 1 - *1) *2) (ISO/IEC)(JIS) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems. ISO 4413: Hydraulic fluid power -General rules relating to systems.

Air preparation filter

170 160 80 23 40 AFF,AM,AMD 90D 1 1/2 2 470 458 460.5 38 170 160 80 23 40 Model Bracket related dimensions H I J K L M N O P AFF,AM,AMD 70D 124 82 48.4 90 18 9 16 10 2.6 AFF,AM,AMD 80D 148 93.5 58.5 110 22 11 20 12 3.2 AFF,AM,AMD 90D 148 93.5 58.5 110 22 11 20 12 3.2 -22- Doc. no.

ZISE30A.eng

Bracket A (Model: ZS-38-A1) Bracket B (Model: ZS-38-A2) Bracket C (Model: ZS-38-A3) CAUTION indicates a hazard with a low level of risk which, if not avoided, could result in minor or moderate injury.

PSxx-OMT0001CN

210.5 4 ISA-5-5 248.0 5 ISA-5-6 285.5 6 ISA-12ISA-15 Rc1/8 ISA-12-A CF G1/8 ISA-12-C -11No.PS-OMT0001CN-E 2 ISA-21ISA-20 2 ISA-21-2 3 ISA-21-3 4 ISA-21-4 5 ISA-21-5 6 ISA-21-6 AR20-02-1-B 0.4MPaMPa 0.2MPaMPa 60PSI0.4MPa PSI 2 30PSI0.2MPa PSI 2 0.4MPa 0.2MPa 0.4MPa 0.2MPa MPa MPa/PSI 2 11/8 2SI -12No.PS-OMT0001CN-E 2 2 VX210X276 X276 DIN 2 AC100V AC110V Z (1/8) 1 () ((38

EXxx-OMZ0016

Parameter settings of a Remote (optional) 38 Remote setting 38 Parameter settings of the Base 40 CC-Link setting 40 System setting 42 Frequency channel select function (F.C.S.) 45 Event 47 Wireless 49 Pairing and Unpairing Procedures 51 Pairing Procedure 51 Unpairing Procedure 56 Mounting and Installation of Units 58 EXW1-BMJ*, EXW1-RD* 58 Troubleshooting 61 Technical Information

Cooling capacities: 9.5 kW, 14.5 kW, 20.5 kW, 38 kW; Temperature range setting: 5 to 35°C; Temperature stability: ±0.1°C (10, 15, 38 kW); ±0.1°C (20 kW); Power supply requirement: 3ph 380~415 VAC 50/60Hz, 3ph 460~480 VAC 60Hz; Waterproof specification: IPX4; Refrigerant: R410A (HFC); Circulating fluid: Tap or deionized water, or 15% ethylene glycol solution

Cooling capacities: 9.5 kW, 14.5 kW, 20.5 kW, 38 kW; Temperature range setting: 5 to 35°C; Temperature stability: ±0.1°C (10, 15, 38 kW); ±0.1°C (20 kW); Power supply requirement: 3ph 380~415 VAC 50/60Hz, 3ph 460~480 VAC 60Hz; Waterproof specification: IPX4; Refrigerant: R410A (HFC); Circulating fluid: Tap or deionized water, or 15% ethylene glycol solution

Rotary Table/

Load 38 Series MSQ Auto Switch Precautions 2 Be sure to read before handling. Wiring Mounting and Adjustment Warning Warning 5.Do not allow short circuit of loads. If the power is turned ON with a load in a short circuit condition, the switch will be instantly damaged because of excess current flow into the switch.

Thermo-chiller

2 (Symbol F: G1/2, Symbol N: NPT1/2) Overow port Rc1 (Symbol F: G1, Symbol N: NPT1) Fluid contact material Stainless steel, Copper (Heat exchanger brazing), Brass, Bronze, PTFE, PU, EPDM, PVC, NBR, PE, NR, PBT, PP , POM, Carbon, Ceramic Temperature range 41 to 104F (5 to 40C) Pressure range 44 to 73 psi (0.3 to 0.5 MPa) Required ow 50/60 Hz 8.7/9.0 gal/min (33/34 L/min) 10/10.5 gal/min (38

F

Pressure 0.1MPa / 14.5PSI Minimum Operating Pressure 5 ~ 60C / 40~140F Ambient and Fluid Temperature 8 Turns Number of Needle Rotations H O W T O O R D E R (N)AS1000-4000 D I M E N S I O N S (N)AS1200, 2200, 3200, 4200 NAS 200 O P T I O N N North America A R E A C O D E Nil T Tamper-Resistant D Tamper-Resistant Flat Head Screw Driver Adjustment Type B O D Y S I Z E 1 M3, M5 2 18, 14 3 38

PA3000/5000/PAX1000

Switching valve parts kit Pilot valve kit Switching valve assembly kit KT-PA5-38 KT-PA5-38 KT-PAX1-39 Pilot valve kit Pulsation attenuator control valve kit Pilot valve kit PA5000/Air operated type PA3000/Air operated type PB1000 KT-PA3-31 KT-PA5-31 Diaphragm kit (PTFE) Diaphragm kit (PTFE) KT-PB1-2 Diaphragm kit KT-PA3-36 KT-PA5-36 Check valve kit Check valve kit KT-PB1-1 Check valve kit

Prevents Micro-Bubbles

Minimum position Seal Standard size Insert bushing End face Tubing Body Reducer type 17-5-38 36 Series LV High Purity Chemical Valve Fitting Assembly Procedure Assemble fittings following the procedure shown below.

VXD21/22/23

Flow characteristics Min. operating pressure differential (MPa) Orifice size (mm) Model Air Water Thread Oil AC DC AC DC AC DC 0.7 0.7 1.0 0.7 1.0 1.0 Max. system pressure (MPa) 1 4 1.9 2.4 4.5 2.4 5.5 9.5 VXD2130-02 VXD2130-03 VXD2140-03 VXD2130-04 VXD2140-04 VXD2150-06 10 10 15 10 15 20 0.02 0.02 0.02 0.02 0.02 0.02 2.0 2.4 5.0 2.4 5.5 9.5 0.35 0.35 0.35 0.35 0.35 0.30 8.5 9.2 18 9.2 20 38