Vacuum Saving Valve

18 23 23 7 7 19 24 20 Note) When mounting and removing the product, apply a wrench or torque wrench to the place shown in Figure.

NCQ8

CD-P11 OUT Brown Surge absorber Choke coil to OUT Blue Choke coil CD-P12 OUT (+) Brown Switch operating position (ON) Zener diode OUT () Blue Note) Reed switch: 0.08" (2mm) or less Solid state switch: 0.04" (1mm) or less Hysteresis Dimensions 0.35(9) 9 0.17 (4.4) Switch operating position (OFF) 0.13 (3.4) 0.71(18) 0.13 1.5(38) 061(15.5) Note) Hysteresis may fluctuate due to the operating

Rotary Table Vane Style Series MSU Size: 1, 3, 7, 20 1

18 Rotary Table: Basic Type Vane Style Series MSUB Construction/Component Parts CRB2 t r For 180 For 90 Single vane Double vane Figure in the middle position CRBU2 Figure with pressure to A port Figure in the middle position for 180 Figure with pressure to A port Single vane: Size 1 Single vane: Size 3, 7, 20 CRB1 Component Parts MSU No. q w Description Body (A) Body (B) Note Light gray

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

port f)] WB WA TA TA WA R TB Plug TB R W [P (port d)] Inner cover Note 3) holding screw (mm) K 21 20 JK 10 12 J M6 x 1 M10 x 1.5 HT 19.5 39 HS 27 49.5 HP 44 73.5 HL 38.6 64.9 HI 23 39 HG 8.5 19 HB 8.5 19 HA 19.5 39 H 45 75 G 6.5 8.5 F 12.5 25 EK 4 6 ED 9.5 13 E 4H9 6H9 B 9.5 14 A 8 12 C 5.4 8.6 Model +0.030 0 +0.030 0 CYP15 CYP32 L 67 90 Z 118 155 Y 2.5 3.5 WB 17 27 WA 32 46 W 69 115 TB 18

MXF

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 21 31 20.5 13 18 58 3H9 depth 3 +0.025 0 15 9.5 4-3.2 4-6.5 4.5 4.7 2-M3 x 0.5 thread depth 6 A G H 8 4-M4 x 0.7 Operating port 2-M3 x 0.5 Section AA M 8 N 2 ( 1): The number of pitches 0.3 15 (Table length) 16 4.5 J 8 Z 2.4 Max. 9 ZZ H G 3H9 depth

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Seal Kit List (12, 13, 18 and 20 are not included in the seal kit. Order them as required with by individual part numbers.) Description Qty.

Enclosure: W (IP67), SI Unit: QA (DeviceNetâ„¢ - 32 Outputs - Connector M12), SI Unit Output Polarity: N (-COM), Stations: 16 Stations, P, E Port Entry: B (Both Sides 2~16 Stations), SUP/EXH Block Assembly: Internal Pilot, A, B Port: N7 (1/4" One-touch Fitting), Mounting: D (DIN Rail Mounting), DIN Rail Option: 18 (for 18 Stations; Longer Rail than Total Length of Specified Valve Stations

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

Slider Type LEKFS Series With a 4-row circular arc on each side for high rigidity and high precision (zero clearance) MImproved moment resistance Improved Dynamic Allowable Moment 4-row circular arc Steel ball rotation center Work load [kg] (Overhang: 300 mm) Size Moment direction High rigidity guide LEKFS LEFS Rail guide (Rolling contact surface) 7.5 (10% increase) 6.8 25 Pitching (Mep) 32 18

240

Entry on the right side) Motor cable mounting direction: Nil (Top entry) Rod operating range Note 1) 2 x M5 x 0.8 thread depth 9 [1] 1 20 Motor cable length 300 2 x 5 Origin Note 2) Stroke end [Origin] Note 3) 20 [Stroke end] M5 x 0.8 thread depth 9 Manual override screw 21 42 28 12 Note 5) 28 Motor cable mounting direction: L (Entry on the left side) A 7 12 Stroke L2 L1 Mounting surface 18

Electromagnetic Digital Flow Switch

Use caution so that the electrical entry for the lead wire and M12 connector does not rotate and is limited to only one direction. 18 LFE Series Specific Product Precautions 2 Be sure to read this before handling the products. Refer to the back cover for safety instructions.

LMU100/200 Series Mist Spray Unit

1 Filler seal 6 81021-8 1 Level gauge 7 Hard glass 81021-9 1 Type C retaining ring for hole 8 Stainless steel FG00193 1 O-ring 9 FKM KA00622 2 Pressure gauge 10 G46-10-01 1 Pressure gauge 11 G46-4-01-L 1 Pilot valve 12 81022P 1 O-ring 13 NBR KA00078 1 O-ring 14 FKM KA00099 2 Regulator 15 INA-13-717 1 VO307KG1-X328 1 2 5 1 2 5 VO315-00 G Solenoid valve 16 1 Solenoid valve 17 1 O-ring 18

Fluoropolymer Piping Equipment

Body Needle V seal Lock nut Adjustment handle Insert bushing Nut Collar A 1 2 3 4 5 6 7 8 PFA PCTFE PTFE PVDF PVDF PFA PFA PFA Body class 2 y u y u B Dimensions A (B) (max.S) D H Port A 2 x G SMC (J) SMC C E F K Port B E A B C D E F G H J K S Model 48 60 72 LVN20 LVN30 LVN40 24 30 36 12 18 22 88 110 124 34.5 43 52 6 9 11 4 5 6 14 25 25 20 26 33 18 24 30 2.4 7.5 8.0 940 LQ1/LQ3/LVN/LQHB Series

Centering Unit

M5 7 MACM6 X114 118 125 125 97 113 33.8 53 28 33.3 30 43 X115 59 6 98 60 X116 57 4 60 MACM10 X114 185 197 198 11 152 182 18 53.8 77 31 24 13 0 53.3 50 70 X115 83 6 108 X116 81 4 5 Centering Unit MACM Series Dimensions P: Port side photo sensor mounted type B: Port back side photo sensor mounted type Mounted example of EE-SX671 made by OMRON P: Port side photo sensor mounted type 4 19

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6 17 Rod seal A MGZ25-PS Rod seal B 17, 18, 19 and 20 are non-replaceable parts, so they are not included in the seal kit. MGZ32-PS Piston seal 18 MGZ40-PS Set of left nos. !6, @1 NBR Piston gasket 19 MGZ50-PS MGZ63-PS MGZ80-PS Tube rod gasket 20 @1 Cylinder tube gasket Seal kits consist of items !

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When re-tightening, tighten approximately 2 degrees more than the original position. 16, 18 and 22 are non-replaceable parts, so they are not included in the seal kit. 174

08-cg1-e

Refer to page 18. 3. Please note that disassembly by the spring reaction force, because it may cover will pop up. When disassembling cylinders, grip the double flat part of either the head cover or the rod cover with a vise and loosen the other side with a wrench or a monkey wrench, etc., and then remove the cover.

Booster Relay Series IL100

Preparation Equipment Industrial Filters Piping Materials Dimensions IL201 14.5 Panel fitting dimension Panel 35 58 45 Max. 4 2 x 6.6 2 10 62 21 5 105 2 52 OUT SIG IN OUT SIG 3 x Rc1/4 60 IL211 14.5 Panel fitting dimension 58 45 Panel 35 Max. 4 2 x 6.6 2 52 10 137 62 31 21 5 SIG OUT IN1 OUT1 SIG 2 IN2 OUT2 OUT 5 x Rc1/4 60 IL220 14.5 Panel fitting dimension 2 x 6.6 45 58 Panel 35 Max. 4 2 18

Lock-Up Valve IL201/211/220 Series

211/220 Series Dimensions IL201 14.5 Panel fitting dimension Panel 35 58 45 Max. 4 2 x 6.6 2 10 62 21 5 105 2 52 OUT SIG IN OUT SIG 3 x Rc1/4 60 IL211 Panel fitting dimension 14.5 IP 58 45 Panel 35 Max. 4 IW 2 x 6.6 2 52 10 1301 AW 137 62 31 21 5 IL1 SIG OUT IN1 OUT1 SIG 2 IL2 IL2 IN2 OUT2 IT OUT 5 x Rc1/4 CP 60 IS IL220 VFN 14.5 INT Panel fitting dimension 2 x 6.6 45 58 Panel 35 Max. 4 2 18

0.01

x 8 Detection port 19 Rc, NPT, G 1/8 Terminal block box wiring diagram For the bracket mounting position, refer to page 877. (21) Seal conduit entry With DIN rail L1 60 3 38 L2 38 5 Terminal block box LED level meter End plate L EXH port End plate R 3 0 3 0 3 0 P P P T T T U U U E E E L L L S S S L L L 20.5 81 6 9 6 9 6 9 0.3 0.2 0.1 0.3 0.2 0.1 0.3 0.2 0.1 0 MPa 0.4 0 MPa 0.4 0 MPa 0.4 18

Nozzle Type Ionizer

2 x Hexagon socket head cap screw M3 x 16 (Accessory) 13.7 59 18 IZN10E Series Dimensions DIN rail mounting bracket IZN10-B3 17 (Mounting angle adjustable range) 40 50 Internal mounting 20.5 2 x 3.4 33 30 30 44 61 55 26 17 11 8 x 3.4 9 2 x Hexagon socket head cap screw M3 x 6 (Accessory) 12 26 (7.5) 40 5 22.7 Internal mounting Pivot mounting 21 33 30 (Mounting angle adjustable range) (92