Compact Vacuum Ejector Series ZA

V V V V ZA1 B M 1 J1 ZA1 FB M 1 Q1 N2 ZA1 1 Q2 N2 ZA1 FP M 1 K1 M P Circuit diagram Dimensions of the vacuum (V) and air pressure supply (P) port fittings after installation Dimensions after the fittings are installed on the vacuum (V) port, air pressure supply (P) port of a single unit, and the common air pressure supply (P) port of a manifold are shown below.

Fieldbus system CC-Link compatible SI unit

(Range) (Lwr_Lmt) (Upr_Lmt) -10..10 V -10.50 to +10.45 V -10.45 to +10.50 V -5..5 V 5.25 to + 5.22 V 5.22 to +5.25 V -20..20 mA -21.00 to +20.90 mA -20.90 to +21.00 mA 0..10 V 0.00 to +10.45 V +0.05 to +10.50 V 0..5 V 0.00 to +5.22 V +0.03 to +5.25 V 1..5 V +0.75 to +5.22 V +0.78 to +5.25 V 0..20 mA 0.00 to +20.90 mA +0.10 to +21.00 mA 4..20 mA +3.00 to +20.90 mA +3.10 to +21.00 mA -52No.EX-OMN0034

Fieldbus system PROFIBUS DP compatible SI unit

(Range) (Lwr_Lmt) (Upr_Lmt) -10..10 V -10.50 to +10.45 V -10.45 to +10.50 V -5..5 V 5.25 to + 5.22 V 5.22 to +5.25 V -20..20 mA -21.00 to +20.90 mA -20.90 to +21.00 mA 0..10 V 0.00 to +10.45 V +0.05 to +10.50 V 0..5 V 0.00 to +5.22 V +0.03 to +5.25 V 1..5 V +0.75 to +5.22 V +0.78 to +5.25 V 0..20 mA 0.00 to +20.90 mA +0.10 to +21.00 mA 4..20 mA +3.00 to +20.90 mA +3.10 to +21.00 mA -50No.EX-OMN0028

CE

indication (2-color indication) 5 V, 12 V IC circuit 3-wire (PNP) Grommet 12 V 2-wire Water resistant (2-color indication) Diagnostic indication (2-color indication) 4-wire(NPN) 5 V, 12 V IC circuit Lead wire length symbols: 0.5 mNil (Example) F73C 3 m L (Example) F73CL 5 m Z (Example) F73CZ None N (Example) A73CN Solid state switches marked with are produced upon receipt of order.

EXxx-OMY0004

/ sensors) 24 V (valves / loads) 0 V (valves / loads) FE 24 V (logic / sensors) 0 V (logic / sensors) 24 V (valves / loads) 0 V (valves / loads) FE BUS BUS Fig. 11-3 Block diagram of the EX245-DX1 74 No.EX##-OMY0004 12.

CL

Do not indicate suffix N for no lead wire on D-A3A/A44A/G39A/K39A models. 3-wire (NPN) IC circuit Diagnostic indication (2-color indication) 5 V, 12 V 3-wire (PNP) Grommet 2-wire 12 V Water resistant (2-color indication) With diagnostic output (2-color indication) 5 V, 12 V 3-wire (NPN) IC circuit Lead wire length symbols: 0.5 mNil (Example) C73C 1 m L (Example) C73CL 5 m Z (Example

High Vacuum Angle Valve, XL Series

-43S(V) P DIN terminal M L Model G 59 60 63 H 48 58.5 64 64 63 J 47 48 51 51 (Unit: inch) 1/4 1/4 1/4 3/8 8 10 10 10 3 5 5 5 XSA12S(V) XSA22S(V) XSA3-32S(V) XSA3-43S(V) 34 High Vacuum Angle Valve Series XL 1 With pilot pressure at 0.5MPa (72psi) XLA Normally closed XLC Double acting (dual operation) Valve type Model 1200 1200 1000 1000 800 800 T msec T msec 600 600 Bellows seal 400 400 200

SY

regulator 141 15 68.5 [75] 65.6 68 32.5 24.5 With plug (12.5) (37) 41 L type plug connector (L): SY3240(R)-L-01 M type plug connector (M): SY3240(R)-M-01 Grommet .

Plate Cylinder

(Non-polar) 5 V, 12 V IC circuit Reed auto switch Solid state auto switch 12 V IC circuit 5 V, 12 V Diagnostic indication (2-color indication) Relay, PLC Grommet Yes 24 V 12 V IC circuit 5 V, 12 V Water resistant (2-color indication) M9PAV M9PA M9BAV M9BA 12 V Magnetic field resistant (2-color indication) P3DW Note 2) 3-wire (NPN equivalent) A96V A96 5 V 12 V IC circuit Yes Relay

45

ADDRESS 4632 4632 4632 1 1 1 9 9 9 PW LRUN ON POWER ALARM COMM Name of terminal block, LED Note Cable wiring 2 2 2 1 ON 8 8 8 O N 3 3 3 7 7 7 4632 4 4 4 6 6 6 SD RD LERR. 5 5 5 POWER SEND x 10 x 1 1 2 3 4 5 6 7 8 OFF DG 24 V 0 V D G D G 0 V 24 V 24 V 0 V A B SG FG 0 V 24 V 24 V 0 V +24V 24G DA DB FG Description LED ON for SI unit power supply input Description LED Description LED POWER COMM

EXxx-OMY0006CN

DO (n+1) 0 V DO (n) FE / Shield Output interface Output interface Short circuit Short circuit protection protection Output circuit / Output circuit / Bus interface Bus interface 24 V (logic / sensors) 0 V (logic / sensors) 24 V (valves / loads) 0 V (valves / loads) FE 24 V (logic / sensors) 0 V (logic / sensors) 24 V (valves / loads) 0 V (valves / loads) FE BUS BUS Fig. 12-3 EX245-DY1 79

SYJ300/500/700

circuit 0.35 (With indicator light: 0.4) Power consumption (W) DC 0.1 (With indicator light only) External pilot 1.4 (With indicator light: 1.5) 100 V 110 V [115 V] 200 V SYJ31 R 2 4 SYJ32 R 2 4 1.6 (With indicator light: 1.7) (A) 2 (A) 2 Apparent power (VA) AC [1.7 (With indicator light: 1.8)] X X 2.3 (With indicator light: 2.4) 220 V [230 V] 2.5 (With indicator light: 2.6) 1 (P) 3 (R)

ISO Cylinder ISO Standard (15552) CP96 Series ø32, ø40, ø50, ø63, ø80, ø100 C85 15% Weight reduced C85W Up Lightweight C85-S/T to C85K * Compared with the previous CP96 series (ø40, 100 mm stroke) C85K-S/T By adopting a new cushion method (Air cushion

Lead wire length [m] Pre-wired connector Applicable load DC AC 0.5 (Nil) 1 (M) 3 (L) 5 (Z) Load voltage Auto switch model Indicator light Type Special function Electrical entry Wiring (Output) M9N V V V v v IC circuit 3-wire (NPN) Solid state auto switch 5 V, 12 V 3-wire (PNP) M9P V V V v v 2-wire 12 V M9B V V V v v Diagnostic indication (2-color indicator) Grommet Grommet 3-wire (NPN)

Table of Contents

OFF SUP 1MC 5Ry SGDE servomotor Motor 1MC 1 R U V SGDE servo pack 2 1MC M T 3 W 1CN 4 150 PULS PULS SIGN SIGN CLR CLR 1 2 3 4 5 6 Be sure to ground.

EXxx-OMZ0016

EXW1 EXW1 Up to 100 m V.1.0/V.2.0 Available*1 EXW1 EXW1+EX600 *2 V.1.0 NA EXW1 EX600 Up to 10 m V.1.0 NA EX600 EXW1 Up to 10 m V.1.0 NA Available*3 EX600 EXW1+EX600 Up to 10 m V.1.0 NA Available*3 EX600 EX600 Up to 10 m V.1.0 NA Available *1: Available in protocol V.2.0. *2: Up to 100 m between an EXW1 series Base and Remote, and up to 10 m between an EXW1 series Base and an EX600-W series

Environment

Note 2) Refer to Best Pneumatics No. 2-1 for lead wire lengths. 25AD-M9PA(V) D-M9BA(V) 7 13 38 63 D-M9NA(V) 8 14 41 68 Auto switch model 0.5 m (Nil) 1 m (M) 3 m (L) 5 m (Z) LEC Lead wire length LEC S LEC SS-T Dimensions (mm) LEC Y D-M9A Indicator light Slotted set screw (flat point) Mounting screw M2.5 x 4 L Stainless steel 2 Motorless 24 LAT 2.8 500(1000)(3000)(5000) 0.2 3 LZ 4 6 Most sensitive

CNS

PLC 100 V, 200 V Yes Yes 12 V PLC Terminal conduit 24 V 2-wire 100 V, 200 V DIN terminal Grommet Relay, PLC Diagnostic indication (2-color indication) 3-wire (NPN) IC circuit 24 V 5 V, 12 V 3-wire (PNP) Grommet 100 V, 200 V 12 V 5 V, 12 V 12 V 2-wire 3-wire (NPN) IC circuit Terminal conduit Relay, PLC 2-wire 3-wire (NPN) 3-wire (PNP) IC circuit 24 V Diagnostic indication (2-color

HRL

ion (SO42) [mg/L] 50 or less v Acid consumption amount (at pH4.8) [mg/L] 50 or less v Total hardness [mg/L] 70 or less v Calcium hardness (CaCO3) [mg/L] 50 or less v Ionic state silica (SiO2) [mg/L] 30 or less v Standard item dV dt = Voltage increase ratio dV Iron (Fe) [mg/L] 0.3 or less v v Copper (Cu) [mg/L] 0.1 or less v Sulfide ion (S2) [mg/L] Should not be detected. v Ammonium ion (

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

24 V 2-wire Grommet Water resistant (2-color indication) 12 V H7BA G5BA 5 V, 12 V With diagnostic output (2-color indication) G59F H7NF IC circuit 4-wire (NPN) Lead wire length symbols: 0.5 m Nil (Example) C73C 3 m L (Example) C73CL 5 m Z (Example) C73CZ None N (Example) C73CN Since there are other applicable auto switches than listed, refer to page 8-21-37 for details.

Pressure Switch/Reed Switch Type

Example) IS10M-6LP 0.1 0.3 0.2 0.4 MPa C q V B Symbol Description Body size 30 40 20 50 60 Nil Set pressure 0.1 to 0.4 MPa 0.1 to 0.6 MPa V V V V V V V V V V a 6 Note 1) range Semi-standard + Lubricator Nil 0.5 m V V V V V V V V V V V V V V V Lead wire w V L Z b 3 m 5 m A D Regulator Air filter length + Applicable model A 11 13 15 17 22 B 74 85 93 97 91 C 61 67 72 75 64 D 28 30 36 44 53 Nil