SMC Corporation of America
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(No protrusion from the rod end) P . 43 Low speed: Series CUX 2 Series CU Precautions on Free Mount 1.

(A)(B) (A)(B) Rc 1/8 4 2 4 2 (kg) 0.83 5 1 3 5 1 3 (mm2) PA 44 38 32 (EA)(P)(EB) (EA)(P)(EB) (A)(B) (A)(B) P1=0.7MPa,P2=0.5MPaS PB 38 40 31 4 2 4 2 (mm2) AEA 90 5 1 3 5 1 3 P2=0.5MPaS BEB 77 (EA)(P)(EB) (EA)(P)(EB) ()( ) 2.8N m 7 VFR3000-OMY0001 VFRA3000,4000 3 VFRA3000 VFRA4000 3 1(P) 8 VFR3000-OMY0001 R , 9 VFR3000-OMY0001 No. 1ISO VG 32 R (1) (2) (3) (4) (5) (6) 10 VFR3000

_~M~a~jo~r~D~im~e~n~s~io~n~s~_ ___ (mm) Clamp Cylinder: Series CK1 SpCpd controller Cushion valve N s-t-Strok.e ___ _ -, ...!t ,r' M -1 6X 1. 5 \ ~~-.~. . I~r ~ 1~ -~ -~t l -,? ~ . ~ I 'S " .. ! /'Vvf..>---'---r-'-~ /i . -l ,~ -0 I .. .i ~ l d1h across flatsl]" 4M6 Screw depth 1 3 ~J:"!-~/ _ H _ O _ '"_ ' _ ' 2 -.< ",, ' +"."

a ] [ M P a ] PF3W540 PF3W511() [ M P a ] [ M P a ] PF3W521() [ M P a ] -33No.PF-OMN0009CN-F PF3W511(PVC ) PF3W521(PVC ) [ M P a ] [ M P a ] -34No.PF-OMN0009CN-F PF3W504/520/540 PF3W504S/520S/540S [MPa] [MPa] [ M P a ] [ M P a ] a] [MP a] [MP PF3W511() PF3W521() PF3W511/521(PVC ) [MPa] [ M P a ] [ M P a ] a] [MP [MPa] a] [MP -35No.PF-OMN0009CN-F IN 3F.S.8 cm (100 L/min 11 cm

Flow Adjustment Valve: None, Port Size: G1/4, Piping Entry Direction: Bottom, Output Specifications: PNP, PNP, Option 1: -, Unit Specifications: -, Option 2: -, Calibration Certificate: -

Flow Adjustment Valve: With Valve, Port Size: G1/4, Piping Entry Direction: Bottom, Output Specifications: PNP, PNP, Option 1: -, Unit Specifications: -, Option 2: -, Calibration Certificate: -

Flow Rate Range: 11 [2 to 100 (50 for CO2) ℓ/min], Flow Adjustment Valve: Yes, Port Size: G1/4, Piping Entry Direction: Bottom Side, Output Specification: E [1 PNP Outputs + Analog (1 to 5 V)], Unit Specification: -, Instruction Manual: -, Calibration Certificate: -, Connector: -, Option: -

Flow Rate Range: 11 [2 to 100 (50 for CO2) ℓ/min], Flow Adjustment Valve: None, Port Size: G1/4, Piping Entry Direction: Bottom Side, Output Specification: E [1 PNP Outputs + Analog (1 to 5 V)], Unit Specification: -, Instruction Manual: -, Calibration Certificate: -, Connector: -, Option: -

Flow Rate Range: 11 [2 to 100 (50 for CO2) ℓ/min], Flow Adjustment Valve: None, Port Size: G1/4, Piping Entry Direction: Bottom Side, Output Specification: F [1 PNP Outputs + Analog (4 to 20 mA)], Unit Specification: -, Instruction Manual: -, Calibration Certificate: -, Connector: -, Option: -

Flow Rate Range: 11 [2 to 100 (50 for CO2) ℓ/min], Flow Adjustment Valve: Yes, Port Size: G1/4, Piping Entry Direction: Bottom Side, Output Specification: 2 PNP Outputs, Unit Specification: -, Instruction Manual: -, Calibration Certificate: -, Connector: -, Option: -

Flow Rate Range: 11 [2 to 100 (50 for CO2) ℓ/min], Flow Adjustment Valve: Yes, Port Size: G1/4, Piping Entry Direction: Bottom Side, Output Specification: F [1 PNP Outputs + Analog (4 to 20 mA)], Unit Specification: -, Instruction Manual: -, Calibration Certificate: -, Connector: -, Option: -

Rated Vacuum Range: -101 to 0 kPa, Output Specification: PNP Open Collector 2 Outputs + Analog Voltage Output, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: F02 [G1/4, (M5, Female Threaded)], Piping Direction: Bottom Ported, Lead Wire: -, Bracket: -, Operation Manual: -

Rated Vacuum Range: -100 to 100 kPa, Output Specification: PNP Open Collector 2 Outputs + Analog Current Output, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: F02 [G1/4, (M5, Female Threaded)], Piping Direction: Bottom Ported, Lead Wire: -, Bracket: -, Operation Manual: -

Rated Vacuum Range: -101 to 0 kPa, Output Specification: T (PNP Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: F02 [G1/4, (M5, Female Threaded)], Piping Direction: L (Bottom Ported)

Rated Vacuum Range: F (-100 to 100 kPa), Output Specification: V (PNP Open Collector 2 Outputs + Analog Current Output), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: F02 [G1/4, (M5, Female Threaded)], Piping Direction: L (Bottom Ported)

ZSE20C: ZSE20C, Rated Vaccum Range: F (-100 to 100 kPa), Output Specification: IO-Link/Switch: 1 Output (PNP or NPN), Switching Type for Switch Output, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: F02 [G1/4, (M5, Female Threaded)], Piping Direction: L (Bottom Ported)

Grease pack part number: GR-S010 (10 g), GR-S-020 (20 g) 59 Series C96 Dimensions Bore size Stroke Basic: C96S(D)B SW PL 2 x EE PL KK WA B D B R E WB Cushion valve 8 x RT VD L9 BG L2 L12 A WH G H G L8 + Stroke VA ZZ + Stroke R E With rod boot e d f l h h + L8 + VA + Stroke Stroke range (mm) A B d11 D EE PL RT L12 KK SW G BG L8 VD VA WA WB WH ZZ E R Bore size (mm) Without rod boot With rod

Acceleration/de celeration time 0 to 50 ms Set the time until the servo motor reaches/stops to the rated speed (3000 r/min) Move distance 0 to 9 pulse Sets movement distance. -24- 5.3.2 Motor speed configuration Motor speed (r/min) configuration. * r/min (rpm): Indicated motor rotation speed (motor rotations/min) Rotation speed must be between 0 and the allowable

Acceleration/ deceleration time 0 ~ 50 ms Set the time until the servo motor reaches/stops to the rated speed (3000 r/min) Move distance 0 ~ 2147483647 pulse Sets movement distance. -35- 6.6.2 Motor speed Configuration Motorspeed (r/min) configuration. * r/min (rpm): Indicated motor rotation speed (motor rotations/min) Rotation speed must be between 0 and the

IDX-OM-U010-H PRODUCT NAME Refrigerated Air Dryer MODEL / Series IDFC60-23-C,L,R,T,V IDFC70-23-C,L,R,T,V IDFC80-23-C,L,R,T,V IDFC90-23-C,L,R,T,V This manual is intended to explain the installation and operation of the product.