3

, N2, Ar, CO2 Air, N2 Dry air, N2 Digital Digital Digital Digital Digital 0.2 to 10 L/min 0.5 to 25 L/min 1 to 50 L/min 2 to 100 L/min 1 to 10 L/min 50 to 500 L/min 5 to 500 L/min 10 to 1000 L/min 20 to 2000 L/min 0 to 0.5 L/min 0 to 1 L/min 0 to 3 L/min 0.5 to 0.5 L/min 1 to 1 L/min 3 to 3 L/min 5 to 500 L/min 2 to 200 L/min 5 to 50 L/min 150 to 3000 L/min 10 to 1000 L/min 10 to 100 L/min

3

K C37 1 25 L Stainless steel G 24 VDC DIN terminal With surge voltage suppressor Note) H 100 VAC J 110 VAC K 200 VAC L 230 VAC N 100 VAC Conduit terminal With surge voltage suppressor P 110 VAC Q 200 VAC R 230 VAC T 100 VAC Conduit With surge voltage suppressor U 110 VAC V 200 VAC W 230 VAC Z Other voltages Note) For the class H type DIN terminal, use it in combination with the connector

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I W h s i r l Black o-Y69A.Y6gB.O-Y7PV D-Y598.Y698/2 wire system l " ' . . r 6 7 7.5 I 8.5 1--&9p9!9q E!

NAAMS Standards Compliant

M N O J K L 8F7 through +0.028 +0.013 +0.028 +0.013 8F7 through M 11 through N O 12.5 300.05 250.03 300.025 300.025 300.025 300.025 300.025 300.025 300.025 300.025 300.025 300.025 300.025 300.025 250.03 12.5 11 through P P Q M8 x 1.25 R28 Q 150.03 180.03 M8 x 1.25 8.5 R50 4 33 12.5 8.5 20 550.05 3 22 22 12.5 R7 R27 20 22 22 R7 [mm] [mm] Model NAAMS code A B C D E F G H I Model NAAMS code

CEx-OMG0106

Autoswitch Determination of Model 17 4-2 Selection Information W (N) : Load We (N) : Impact Loading (during locking or knocking of stopper) V (m/s) : Impact Speed (during locking or knocking of stopper) Va (m/s) : Average Speed L (m) : Distance from C.G. of Load M (Nm) : Maximum Momentum E (J) : Loads Kinetic Energy g (m/s) : Gravity Acceleration (9.8m/s2) Load (N) W1 Momentum

AC Servo Motor Driver (MECHATROLINK-II type)

Example: Set 20 W (100 W 20%) for the 100-W external Regenerative resistor with natural convection cooling method: Pn600 = 2 (unit: 10 W) Note 1. If Pn600 is not set to the optimum value, alarm A.320 will occur. 2.

AC Servo Motor Driver (MECHATROLINK-III type)

Example: Set 20 W (100 W 20%) for the 100-W external Regenerative resistor with natural convection cooling method: Pn600 = 2 (unit: 10 W) Note 1. If Pn600 is not set to the optimum value, alarm A.320 will occur . 2.

Series LQ3 High Purity Fluororesin Fitting

Thread Size RNPT A E H L M W LQ3H1A-M LQ3H2A-M LQ3H2B-M LQ3H3A-M LQ3H3B-M LQ3H3C-M LQ3H4A-M LQ3H4B-M LQ3H4C-M LQ3H5A-M LQ3H5B-M LQ3H5C-M LQ3H6A-M LQ3H6B-M LQ3H6C-M 29.5 10 11 33.5 14 10 1/8" 1/8" 1/4" 1/8" 1/4" 3/8" 1/4" 3/8" 1/2" 3/8" 1/2" 3/4" 1/2" 3/4" 1" 1/8" L 37.5 17 16 43.5 20 14 1/4" H (A) W 48.5 21 55 25 18 22.5 3/8" M 1/2" 56 24 64 29 22 24.5 1/4 (E) Thread Size R(NPT) 66.5 32 76

NCRAI seies

E* A73L D-A73L Parls M 3 X 0 . 5 X 3 M 3 X 0 . 5 X 5 M 3 X 0 . 5 X 5 M 3 X 0 . 5 X 5 tvl3x0.5x5 @ Rotary Actuator Series:NCRAl l n ck and pinion rype ||m 30(17Ie) 50121,63(2 %),80(3 %),1 0o{4) Fluid Air Air o o o o 90' 180' 100" 190" Rotatio 1 ) o r)o Basic o o Shaft Singleend Doubleend o o o Body option With ctshion a Wlthalctqruitph -oand to 200. lrom 180" model.

Air Cylinder RSQ Series Stopper Cylinder

l Parts t-iir Parts List Non-rotaling qude ($ -rteragon socker sel screw ;l H"*q"" """k; Pads w h a I maft are ued onLy fol tlre doubl adinq model w th spnng.

Series CE1

Lead wire (m) Applicable load Direct mounting Load voltage Rail mounting 12 to 63 32, 40 only Indicator Style Special function Wiring (output) Electrical entry 0.5 () 3 (L) 5 (Z) (N) DC AC Perpendicular In-line Perpendicular In-line 3 wire (NPN Equiv.)

0.4

-B 40 W 50 L/min 1000 Hz 0.55 0.4 High speed response required for both ON and OFF -E 80 W 100 L/min 650 Hz 0.55 0.55 -F 40 W 100 L/min 550 Hz 0.7 0.55 -J 80 W 150 L/min 600 Hz 0.6 0.75 -K 40 W 150 L/min 500 Hz 0.8 0.75 * Current needs to be limited.

HRX-OM-W032

less 200 or less Calcium hardness [mg/L] 50 or less 150 or less Ionic silica [mg/L] 30 or less 50 or less Iron [mg/L] 0.3 or less 1.0 or less Copper [mg/L] 0.1 or less 0.3 or less Sulfide ion [mg/L] Should not be Should not be Referential detected any detected any item Ammonium ion [mg/L] 0.1 or less 1.0 or less Residual chlorine [mg/L] 0.3 or less 0.3 or less Free carbon dioxide [mg/L]

asilltr

D-F7NWV l-ffis". l 1 1 I l R d t l a / f l lEljJl l,." i w,,te I I i. +-| I T f I i L t > . O L4J==L=!1" Black D-F79F D-F7LF D-F7NTL oiagnoslic ouipui OUT 2 o o Series NCDQT Auta-Switch / Operating Range D-A72.

C95Series

Applicable ba", size l ~ C95S-W Non-lube Speci Icatlons 1MPa~ 10.2k:gf/crn2 Bore size %32 J . 0'40 .1 .0'50 .L %63 ,.I . .0'80 1 %1 00 Action .-.

25

Made to Order How to Order Transition wiring cable length IZS41 CF X13 For IZS40 Cable full length 1 m 3 m Symbol 01 03 Model with Made-to-order transition wiring cable Available in 1 m increments from 1 m to 20 m. Note 1) 11 m or longer power cables are not CE Marking-compliant. Note 2) Use standard power supply cables for 2 m, 5 m and 8 m lengths.

11- Series MXP/MXPJ6 Air slide table 22- ø6, ø10, ø12, ø16

rail 2-M2 x 0.4 depth 3 8 5.7 3.5 L 6-M4 x 0.7 depth 4.5 20 20 2-M3 x 0.5 depth 3.5 (mm) G H J K L M Q QL S V W Z Model 10 40 68 22 24 29 40 18 15 59 55 76 11-/22-MXP12-15 30 60 98 40 42 49 60 23 25 89 75 106 11-/22-MXP12-25 103 Precision air slide table MXP/MXPJ6 11221122Dimensions: MXP16 3 Z V K Metal stopper C 6.5 C Max. 4 25 5 Without stroke adjuster G M 11 Max. 4 C 2-M5 x 0.8 depth 8

Vacuum Equipment

If the leakage volume is 30 /min (ANR), the vacuum pressure of the S type is 20 kPa q w e, and for the L type it is 33 kPa q' w' e'. If the leakage volume is 5 /min (ANR), the vacuum pressure of the S type is 80 kPa r t y, and for the L type it is 47 kPa r' t' y'.

Profile Design ISO/VDMA Air Cylinder Series CP95

G Rear flange F Front flange L Foot C Male rear clevis D Female rear clevis 1.8-29

VQC

kit (25P) with 5.0 m cable T L Kit (Lead wire kit) M Kit (Terminal block box kit) Kit (Multiple connector kit) 26 pins 20 pins IP40 compliant 25 core cable Note) For a 20P flat ribbon cable, the cable assembly must be ordered separately.