VXA21/22

OUT Standard specification Option Note) Water (Standard, up to 40C) Air (Standard, Dry) Turbine oil Vacuum (up to 1.3 x102 Pa) Carbon dioxide (CO2), Nitrogen gas (N2) Vacuum (up to 1.3 x101 Pa) (V, M) Non-leak (106 Pa m3/s or less) (V, M) IN N.O.

SY3000V-OMY0001

-2SY3000-OMY0001 / 1 1.5 *3) 3)1 1 () -3SY3000-OMY0001 SY Series 5 / / () ( ) () 1 DC DC N.O.( 33 AB , 3 , , () 3 EXH 0.1 2 () () C-R ( ) C-R 3 3 1) 2 , 4 No.SY3000V-OMY0001 SY Series 5 / / 2) ,1V & -10 ,1 1 3 1) M5 () 1/61/4 11.5Nm ) 2)Rc N m Rc 1/8 35 Rc 1/4 812 Rc 3/8 1416 5 No.SY3000V-OMY0001 SY Series 5 / DC () m [] ()ISO VG32 (MSDS) IP65 IP67(IEC60529

Slit Valve

O-ring: Kalrez 6.5 x 10 9 6.5 x 10 8 Internal leak Note 2) (Pam3/s) at reversed pressure [Reversed pressure: 0.1 MPa (abs) or less] O-ring: FKM O-ring: Kalrez 6.5 x 10 7 6.5 x 10 11 External leak Note 2) (Pam3/s) Gate part 5 to 150 Operation temperature Note 3) (C) Actuator part 5 to 60 Inert gas Fluid 0.6 to 1 Operating time Note 4) (s) FKM, Kalrez 4079 (Option) Seal material Bellows AM350

CRB2-OM00001

Doc.No.CRB2-OM01-B Model name ROTARY ACTUATOR Part number / Series Vane Type C R B2BW 40 Thoroughly read and understand this operation manual to install and operate this product. Pay particular attention to the safety statements. Retain this operation manual to read whenever needed. INDEX Precautions for Safety Front matter 1.

Series: 25A-ISE20, Rated Pressure Range: B (-0.1 TO 1 Mpa), Output Specification: R (NPN Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: M (SI Unit Only), Piping Specification: M5 (Female Thread), Lead Wire: w/o Lead Wire, Bracket: B (Panel Mount Adapter)

Series: 25A-ISE20, Rated Pressure Range: -0.1 TO 1 Mpa, Output Specification: NPN Open Collector 2 Outputs + Analog Voltage Output, Unit Specification: SI Unit Only, Piping Specification: Female Thread, Lead Wire: w/o Lead Wire, Bracket: Panel Mount Adapter

Body Size: 1 (M5 X 0.8, 10-32UNF), Type: 2 (Elbow), Control Type: 0 (Meter-out), Thread Type: R, Port Size: M5 (M5 X 0.8), Dimension, Across Flat [H]: Body Size 1: 9mm; Body Size 2, 3, 4 None, Applicable Tubing O.D.: Ø4, Seal Method: S (with Sealant)

Body Size: 1 (M5 X 0.8, 10-32UNF), Type: 2 (Elbow), Control Type: 0 (Meter-out), Thread Type: R, Port Size: M5 (M5 X 0.8), Dimension, Across Flat [H]: E (8mm), Applicable Tubing O.D.: Ø4, Seal Method: S (with Sealant)

Body Size: 1 (M5 X 0.8, 10-32UNF), Type: 2 (Elbow), Control Type: 1 (Meter-in), Thread Type: R, Port Size: M5 (M5 X 0.8), Dimension, Across Flat [H]: Body Size 1: 9mm; Body Size 2, 3, 4 None, Applicable Tubing O.D.: Ø6, Seal Method: S (with Sealant)

Body Size: 1 (M5 X 0.8, 10-32UNF), Type: 2 (Elbow), Control Type: 0 (Meter-out), Thread Type: R, Port Size: M5 (M5 X 0.8), Dimension, Across Flat [H]: Body Size 1: 9mm; Body Size 2, 3, 4 None, Applicable Tubing O.D.: Ø6, Seal Method: S (with Sealant)

Body Size: 1 (M5 x 0.8, 10-32UNF), Type: 2 (Elbow), Control Type: 0 (Meter-out), Indicator Direction: None (0°), Thread: R, Port Size: M5 (M5 x 0.8), Width Across Flats: 9mm, Tubing: 04 (ø4), Seal: S (w/Sealant)

Body Size: 1 (M5 x 0.8, 10-32UNF), Type: 2 (Elbow), Control Type: 0 (Meter-out), Indicator Direction: None (0°), Thread: R, Port Size: M5 (M5 x 0.8), Width Across Flats: 9mm, Tubing: 06 (ø6), Seal: S (w/Sealant)

Body Size: 1 (M5 x 0.8, 10-32UNF), Type: 2 (Elbow), Control Type: 0 (Meter-out), Control Range: FM (1 to 50 mm/s), Indicator Window Direction: 0° , or None for FC, FM, Thread: R, Port Size: M5 (M5 x 0.8), Width Across Flats [H]: 9mm or None for Body Size 2, Tube Size: 06 (ø6), Sealant: without Sealant, Push lock: A (Push-lock)

Body Size: 1 (M5 x 0.8, 10-32UNF), Type: 2 (Elbow), Control Type: 0 (Meter-out), Control Range: FSM (1 to 50 mm/s), Indicator Window Direction: 0° , or None for FC, FM, Thread: R, Port Size: M5 (M5 x 0.8), Width Across Flats [H]: 9mm or None for Body Size 2, Tube Size: 04 (ø4)

Body Size: 1 (M5 x 0.8, 10-32UNF), Type: 2 (Elbow), Control Type: 0 (Meter-out), Control Range: FSC (50 to 150 mm/s), Indicator Window Direction: 0° , or None for FC, FM, Thread: R, Port Size: M5 (M5 x 0.8), Width Across Flats [H]: 9mm or None for Body Size 2, Tube Size: 04 (ø4)

Body Size: 1 (M5 x 0.8, 10-32UNF), Type: 2 (Elbow), Control Type: 0 (Meter-out), Control Range: FSM (1 to 50 mm/s), Indicator Window Direction: 0° , or None for FC, FM, Thread: R, Port Size: M5 (M5 x 0.8), Width Across Flats [H]: E (8mm), Tube Size: 02 (ø2)

Body Size: 1 (M5 x 0.8, 10-32UNF), Type: 2 (Elbow), Control Type: 0 (Meter-out), Control Range: FSM (1 to 50 mm/s), Indicator Window Direction: 0° , or None for FC, FM, Thread: R, Port Size: M5 (M5 x 0.8), Width Across Flats [H]: 9mm or None for Body Size 2, Tube Size: 06 (ø6)

Body Size: 1 (M5 x 0.8, 10-32UNF), Type: 2 (Elbow), Control Type: 0 (Meter-out), Control Range: FM (1 to 50 mm/s), Indicator Window Direction: 0° , or None for FC, FM, Thread: R, Port Size: M5 (M5 x 0.8), Width Across Flats [H]: 9mm or None for Body Size 2, Tube Size: 04 (ø4), Sealant: without Sealant, Push lock: A (Push-lock)

Body Size: 1 (M5 x 0.8, 10-32UNF), Type: 2 (Elbow), Control Type: 1 (Meter-in), Control Range: FC (50 to 150 mm/s), Indicator Window Direction: 0° , or None for FC, FM, Thread: R, Port Size: M5 (M5 x 0.8), Width Across Flats [H]: E (8mm), Tube Size: 06 (ø6), Sealant: without Sealant, Push lock: A (Push-lock)

Body Size: 1 (M5 x 0.8, 10-32UNF), Type: 2 (Elbow), Control Type: 1 (Meter-in), Control Range: FM (1 to 50 mm/s), Indicator Window Direction: 0° , or None for FC, FM, Thread: R, Port Size: M5 (M5 x 0.8), Width Across Flats [H]: E (8mm), Tube Size: 06 (ø6), Sealant: without Sealant, Push lock: A (Push-lock)