Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad Diameter: ø10, ø13, ø16, ø20, ø25, ø32, ø40, ø50 1

32.5 M5 x 0.8 5 9 ZCU ZPT32F-B8 16 13 32 35 M8 x 1.25 8 12 36.5 ZPT32F-B01 Rc 1/8 6.2 14 AMJ Hexagon width across flats P N Misc.

Prevents Micro-Bubbles

S) (mm) Dimensions (mm) Dimensions W W Model LVA20 LVA30 LVA40 LVA50 LVA60 S Model LVA2 LVA3 LVA4 LVA5 LVA6 66.5 11.5 89.5 24 110 29 A B A B 140.5 34.5 148 36 Dimensions (mm) A B Q R P C E F G H K L N Model LVA1 20 33 49.5 10 M5 x 0.8 27.5 11 13 27.5 4.2 Rc 1/8, 1/4 NPT 1/8, 1/4 M5 x 0.8 LVA2 30 33 57 10 M5 x 0.8 31 13 22 22 26 M3 x 0.5 Rc 1/4, 3/8 NPT 1/4, 3/8 LVA3 36 47 13 M6 x 1.0 42.5

High Purity Chemical Valve

S) (mm) Dimensions (mm) Dimensions W W Model LVA20 LVA30 LVA40 LVA50 LVA60 S Model LVA2m LVA3m LVA4m LVA5m LVA6m 66.5 12.5 89.5 24 110 29 A B A B 140.5 34.5 148 36 (mm) Dimensions A B Q R P C E F G H K L N Model LVA1m 20 33 49.5 10 M5 x 0.8 27.5 11 13 27.5 4.2 Rc 1/8, 1/4 NPT 1/8, 1/4 M5 x 0.8 LVA2m 30 33 57 10 M5 x 0.8 31 13 22 22 26 M3 x 0.5 Rc 1/4, 3/8 NPT 1/4, 3/8 LVA3m 36 47 78.5 13

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

N Without magnet and rail Type N (Without magnet and rail) Auto switch can not be mounted on. Applicable Auto Switch/Refer to page 8-30-1 for further information on auto switches.

4 Port Solenoid Valve Common Specifications Series SJ2000/3000

M5 x 0.8 3 position 4 position 65 Note) Please contact SMC for the weight of elbow fittings.

5 Port Air Operated Valve

A, B port size Port size M5 x 0.8 1/8 1/4 3/8 Symbol M5 01 02 03 VFA1000 VFA3000 VFA5000 VFA1000 Double type only Thread type (Including pilot port) Nil F N T Rc G NPT NPTF M5 is available with Nil only.

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Nil S n 2 pcs. 1 pc. n pcs.

Bernoulli Gripper

Selection example W = M x g x t x 1 n W : Required lifting force [N] M : Workpiece mass [kg] g : Gravitational acceleration [= 9.8 m/s2] t : Safety factor (Recommended value: 2 or more) n : Number of Bernoulli grippers [pcs.] Workpiece mass: M = 0.7 kg Safety factor: t = 2 Number of Bernoulli grippers: n = 2 pcs.

Fieldbus System

C3: 3.2 (SMC) C4: 4 (SMC) C6: 6 (SMC) N1: 1/8" (SMC) N3: 5/32" (SMC) N7: 1/4" (SMC) M5: M5 thread n: Stations (Maximum 24 stations) n L L1 L2 L3 L4 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 55.5 66 76.5 87 97.5 108 118.5 129 139.5 150 160.5 171 181.5 192 202.5 213 223.5 234 244.5 255 265.5 276 286.5 297 104.2 114.7 125.2 135.7 146.2 156.7 167.2 177.7 188.2 198.7 209.2

Battery-less

Load [N] Load [N] LESYH16 LESYH16 Lr = 120 mm LESYH16 0.50 0.3 0.08 Table displacement [mm] Table displacement [mm] Table displacement [mm] LESYH16 -100 LESYH16 -100 LESYH16 -100 0.40 0.06 0.2 0.30 LESYH16 -50 0.04 LESYH16 -50 0.20 LESYH16 -50 0.1 0.02 0.10 0.000 100 200 300 400 0.000 50 100 150 200 0.00 50 100 150 200 Load [N] Load [N] Load [N] LESYH25 LESYH25 Lr = 200 mm LESYH25 0.80 0.4

e

= m N a 1 ME = N FE N L1 (NNm) 3 The graph value is for calculating the guide load factors.

VEX1

plug L plug connector (L) M plug connector (M) Sub-plate M5 x 0.8 (P2) Silencer (P2) AN120-M5 (Option: N) (Except VEX3420) Plug (1/8) Refer to Table (1).

Electric Actuator with Integrated Guide

bolt 2 5.5 or M5 2 X n-Mounting hole Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Pitch = 100 Mounting hole quantity n Quantity Stroke 100 2 4 200 3 6 300 4 8 A = (n-1) X pitch 400 5 10 30 500 6 12 600 7 14 LTF8 M6 bolt 3.5 6.6 or M6 2 X n-Mounting hole Pitch

1

Number of auto switches [mm] Number of auto switches 1 2 n Auto switch model Different surfaces Same surface Different surfaces Same surface D-M9m 25 25 40 20 + 35 (n 2) 2 (n = 2, 4, 6)*1 55 + 35 (n 2) (n = 2, 3, 4, 5) D-M9mW 25 25 40 20 + 35 (n 2) 2 (n = 2, 4, 6)*1 55 + 35 (n 2) (n = 2, 3, 4, 5) D-M9mA 25 25 40 25 + 35 (n 2) 2 (n = 2, 4, 6)*1 60 + 35 (n 2) (n = 2, 3, 4, 5) D-M9mV

Electric Slide Tables

Load [N] Load [N] LES16 LES16 LES16 Lr = 60 mm 0.10 0.40 0.012 LES16-100 LES16-30 LES16-100 0.08 0.30 LES16-75 0.008 LES16-50 0.06 LES16-75 0.20 LES16-50 0.04 LES16-50 0.004 LES16-30 0.10 LES16-75/100 0.02 LES16-30 0.00 0 10 20 30 40 0.00 0 10 20 30 40 0.000 0 10 20 30 40 Load [N] Load [N] Load [N] LES25 LES25 LES25 Lr = 100 mm 0.12 0.030 0.60 LES25-150 LES25-150 LES25-30 LES25-125 LES25

Stainless Steel 316 Fittings

alcohol Propylene glycol Bromochloroethane n-Hexane n-Hexyl alcohol Note 1) [ ] denotes the concentration.

Air Slide Table Series MXP

Nil 6 5, 10 S 1 pc. 8 10, 20 n n pcs. In the case of MXP6-5, with 2 auto switches are available for DM9 type and D-M9V type only.

ITV

x 0.8 SRF M5 x 0.8 Air introduction port Air introduction port VCHR 19 34 19 34 ITV ITV VAC.

•

M6 MB M5 M6 M8 M5 M6 M8 M4 Ms M6 ~.

SZ3000

L n 2 5 6 7 8 9 10 4 3 Internal Pilot Manifold L Dimension n: Stations L n 2 5 6 7 8 9 10 4 3 External Pilot Manifold L Dimension n: Stations L1 L2 L3 L4 L1 L2 L3 L4 98 87.5 70 14 110.5 100 80.5 15 123 112.5 91 16 135.5 125 101.5 17 135.5 125 112 12 148 137.5 122.5 13 160.5 150 133 14 173 162.5 143.5 15 185.5 175 154 16 110.5 100 80.5 15 123 112.5 91 16 135.5 125 101.5 17 135.5 125 112 12