Rotary Actuator

CRQ2 +4 0 R o t a MSQ ti o 0 9 n y r a a w n y g e e k f of o MSZ k e e g y n R w a ot r a at n CRQ2X MSQX y o io 9 ti n 0 a ra t +4 0 n o g R e MRQ of k e y w a y 9 +4 0 0 Note) If it is pressurized from the port indicated with the arrow, the shaft rotates in the clockwise direction.

33

HED Polypropylene skid HEA Model Weight [kg] Dimensions [mm] HRSE012-A-10 35 Height 745 x Width 465 x Depth 575 HRSE018-A-10 HRSE012-A-10-T 42 Height 745 x Width 465 x Depth 620 HRSE018-A-10-T HRSE012-A-20 38 Height 745 x Width 465 x Depth 575 HRSE018-A-20 HRSE024-A-20 HRSE012-A-20-T 45 Height 745 x Width 465 x Depth 620 HRSE018-A-20-T HRSE024-A-20-T HRSE012-A-23 41 Height 790 x Width 470

MY1

MY1 HT MY1 W MY1 W MY1CW (Cam follower guide type) 16, 20 25, 32, 40, 50, 63 MY2C MY2 H/HT MY3A MY3B MY3M B A B A Proper Auto Switch Mounting Position (mm) D-Z7/Z80 D-Y59/Y7P D-Y7W D-Y7BA D-M9V D-M9WV D-M9AV D-A9 D-Y69/Y7PV D-Y7WV D-M9 D-M9W D-M9A Bore size (mm) A B A B A B A B A B 16 20 25 32 40 50 63 74 86 70 90 94 106 90 110 102 118 102 118 97 123 97 123 132 148 132 148 127 153

MXS

MXS16-30 MXS16-40 MXS16-50 MXS16-75 MXS16-100 MXS16-125 SMXS16A, #5(#1+#5) SMXS16A, #6(#2+#6) SMXS16A, #7(#3+#7) SMXS16A, #8(#4+#8+#9) SMXS16B, #4(#1+#4) SMXS16B, #5(#2+#5) SMXS16B, #6(#3+#6+#7) 125 173 223 3.11-18 Air Slide Table Series MXS With shock absorber(16) MXS16-llBS, BT, B 19 A 10 37.5 37.5 CL 18 18 55 MLGC CNA (mm) Stroke adjustment range Retracting 5 10 20 20 15 20 20 20 A dimension

LEC-OM02704CN

(1) 055() 0+40() -20+65() -15+70() 90RH() 80RH() 90RH() () 1000m LECS-S5 LECS-S7 LECS-S8 () 5.9m/s2 XY49m/s2 A 5 (2) (FR-BIF-(H) ) (UVW) (UVW)(UVW) U U U U V V M V M V W W W W DC (EMG) DC24V DC24V DOCOM DOCOM DICOM DICOM RA RA A 6 (3) (4) () (5) (EMG) EMG ON(Ryn0)OFF ALM MBR (RYn0)OFF(ALM) (MBR) (EMG) EMG RA DC24V A 7 (6) 10 (7) () 1.(:) (1) (2) 2.(:) (1) 1 (2) (3)

0.4

(B) (A)4 r r (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) e q w e w q VQC1201 VQC1200 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) r r e q w e q w VQC1300 VQC1400 VQC1301 VQC1401 2(B) (A)4 2(B) (A)4 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) VQC1500 VQC1501 r r 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) e q w VQC1A01 VQC1B01

Modular F.R.L. Unit

A O OUT 2 I N 1 SMC A J A IN OUT H G M Parts list Material Note Description No.

RSQ

w/ Onetouch fittings are 20 to 50.

CG5-S

Mineral oil A C A A A A 18 Sodium hypochlorite (2%, Room temperature) A C A D D B 19 Sodium chloride A A A A B 20 Carbon dioxide A A A A A A 21 Natural gas A A A A A A 22 Boric acid A B A D A B 23 Unless noted otherwise, the solution concentration is in a saturated state.

LEF-OM002xx

500 600 V(mm/s) V (mm/s) V(mm/s) LEFS16 LEFS25 LEFS32 Vertical Transfer 12 50 B B B 20 A 10 A A 40 H W(kg) W(kg) H 8 W(kg) 15 30 6 10 20 4 5 2 10 0 0 0 0 200 400 600 800 1000 1200 0 100 200 300 400 500 600 0 200 400 600 800 1000 1200 V (mm/s) V (mm/s) V(mm/s) LEFS16 LEFS25 LEFS32 50 12 B B 20 B A 10 A 40 H H A W(kg) W(kg) W(kg) 15 8 30 6 10 20 4 5 10 2 0 0 0 0 100 200 300 400 500 600 0 100

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

(Terminal no.) (16.6) (23.7) Cable length (L) [m] Connector A (7.0) 1 3 2 4 (12.7) (5.6) 1 1.5 3 3 5 5 8 8 3 2 1 (13.5) 1 4 A 1 2 (6.7) B A 10 (18) B 15 (14.7) 15 16 (30.7) (1 1) L Connector B C 20 (10) Connector D Produced upon receipt of order Connector A terminal no. 1 2 3 Connector C terminal no. 1 2 3 Signal Cable color Red White Black U V W Weight Product no.

MXQ

A5 K = 1 L2 A3 End plate mounting MX Mp Mr W My W W MTS W L3 A6 W L1 A2 L2 A4 MY K = 0.6 W Mey Mep CY L2 A4 MG Note) No need to consider this load factor in the case of using perpendicularly in a vertical position.

10

The seal kit includes a grease pack (10 g for 32 to 50, 20 g for 63 and 80, 30 g for 100 and 125). Order with the following part number when only the grease pack is needed. Grease pack part number: GR-S-010 (10 g), GR-S-020 (20 g) D-X Technical Data 405 MBW Series Standard Basic: (B) Cushion valve Port W V When the stroke is 1001 mm or longer, a tie-rod reinforcement ring is attached.

MGG

1 i w !8 #4 !6 A @0 @1 !9 #2 !0 #1 A' For ball bushing #5 @5 #0 @8 !7 @6 !3 #8 !2 @1 !0 @9 For slide bearing y For long stroke For 100 @7 For 80, 100 View A-A' Parts list Parts list No. Description No.

ZP3

w w e q q ZP3-T-A-B ZP3-T-A-(02/04) w t r q Component Parts No.

C95

9 i *1 *1 C95K32 A A-A A !2 !

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

A Rear flange: CBM2G Bore size Stroke -H -R -W N L A -H -R -W N L Front flange: CBM2F Bore size Stroke A Double clevis: CBM2D CBM2D Bore size Stroke -H -R -W N L -H -R -W N L Single clevis: CBM2C Bore size Stroke A A Front trunnion: CBM2U Bore size Stroke A Rear trunnion: CBM2T Bore size Stroke -H -R -W N L -H -R -W N L A (mm) Axial foot Rear flange Bore size (mm) Z LS ZZ Double lock 152

Stability of suction position,

Formula examples with beams (Reference) L a b L a b L L L/2 L/2 L/2 L/2 Load/Shape conditions P P P P A C RA RB B A C RA RB B C A E D B RA RB RC RA=Pb/L RB=Pa/L W=P Formula (Reactive force: R, Total load: W) RA=RC=5Pb/16 RB=11P/8 RA=RB=P/2 W=P Mounting Position The basic mounting method is a horizontal lift.

53

W: 13 [kW] HRZD W Efficiency Power supply output VI: 8.8 [kVA] Q = P = Q = P = V x I x Power factor HRW In this example, using an efficiency of 0.7: In this example, using a power factor of 0.85: 5.1 0.7 HECR = = 7.3 [kW] = 8.8 [kVA] x 0.85 = 7.5 [kW] Cooling capacity = Considering a safety factor of 20%, HEC Cooling capacity = Considering a safety factor of 20%, 7.3 [kW] x 1.2 = 8.8 [kW]

C95

GKM (ISO 8140) Steel, zinc chromate plated Bore (mm) e b d f L1 c a M10 X 1.25 M12 X 1.25 M16 X 1.5 M20 X 1.5 10 12 16 20 40 48 64 80 10 12 16 20 52 62 83 105 20 24 32 40 20 24 32 40 32 40 50/63 80/100 Piston rod ball joint KJ (ISO 8139) Steel, zinc chromate plated Bore (mm) d3 d1 h d6 b3 b1 d7 L3 SW L M10 X 1.25 M12 X 1.25 M16 X 1.5 M20 X 1.5 10 12 16 20 43 50 64 77 28 32 42 50 10.5 12